EP0592472A1 - Module pour la construction du plafond de salles blanches. - Google Patents

Module pour la construction du plafond de salles blanches.

Info

Publication number
EP0592472A1
EP0592472A1 EP92912382A EP92912382A EP0592472A1 EP 0592472 A1 EP0592472 A1 EP 0592472A1 EP 92912382 A EP92912382 A EP 92912382A EP 92912382 A EP92912382 A EP 92912382A EP 0592472 A1 EP0592472 A1 EP 0592472A1
Authority
EP
European Patent Office
Prior art keywords
chamber
opening
module according
height
intermediate floor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP92912382A
Other languages
German (de)
English (en)
Other versions
EP0592472B1 (fr
Inventor
Udo Jung
Herbert Eidam
Wilhelm Gerk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Grenzebach GmbH and Co KG
Original Assignee
Babcock BSH AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Babcock BSH AG filed Critical Babcock BSH AG
Publication of EP0592472A1 publication Critical patent/EP0592472A1/fr
Application granted granted Critical
Publication of EP0592472B1 publication Critical patent/EP0592472B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/24—Means for preventing or suppressing noise
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S454/00—Ventilation
    • Y10S454/906—Noise inhibiting means

Definitions

  • the invention relates to a module for building a clean room ceiling according to the preamble of claim 1.
  • a clean room system is known from EP-A-0 196 333, which has an intermediate ceiling with a support system and ceiling modules which are designed as filter-fan modules, as return air modules and as blind modules. Zones of different purity levels are set by different arrangement of the different ceiling modules.
  • a prerequisite for the laminar flow in the clean room is an even speed distribution behind the high-performance suspended matter filters, which is to be generated by a uniform application of the filters.
  • the high-performance particulate filters have very high air resistances, which significantly reduce the flow velocities. Therefore, essentially only the static pressure component of an air flow upstream of the high-performance suspended matter filters is effective.
  • Laminar flow technology therefore requires an air flow with as little turbulence as possible and with the highest possible static pressure in the chamber in front of the high-performance particulate filters.
  • a low-turbulence flow is promoted by a one-sided air supply to this chamber in front of the high-performance suspended matter filters.
  • the static pressure component of a flow can be increased by converting dynamic pressure into static pressure.
  • Such conversion is achieved by passing the air through a multi-chamber system, thereby reducing the flow rate.
  • Such a chamber system has so-called tunnel modules known from DE-U 88 05 774, which are strung together to form clean rooms using laminar flow technology with the highest levels of purity.
  • a tunnel module consists of an upper part and two side walls.
  • the upper part has a chamber system with a return air inlet, a fan and superimposed chambers, the lower chamber being delimited by high-performance particulate filters arranged in tiles. The air is led through the chamber system and through the filters to the clean room.
  • the object of the invention is therefore to develop a module according to the preamble of claim 1, which is suitable for constructing the ceiling of a clean room completely described in laminar flow technology.
  • a clean room ceiling can be constructed using laminar flow technology.
  • the modules can be assembled into a clean room ceiling of any size, with the exchange of individual modules e.g. for maintenance is easily possible.
  • the return air is drawn in from the plenum between the clean room ceiling and the housing ceiling through the return air opening in the ceiling of the modules and is conducted to the fan through the upper chamber provided with devices for sound reduction.
  • the size of the return air opening is dimensioned such that on the one hand the flow velocity is not too high, which would be the case if the opening were too small, and on the other hand the distance in the upper chamber is sufficiently long for sound reduction.
  • Soundproofing devices compared to the corresponding sizes of the tunnel module.
  • the height of the upper chamber, the height of the sound-absorbing baffles in the middle chamber, and thus the height of the middle chamber and the weight of all soundproofing devices can be reduced.
  • claims 3 to 9 influence the air flowing through the middle chamber into the lower chamber in such a way that an air flow with as little turbulence as possible and with as high a static pressure component as possible arises in the chamber in front of the high-performance particulate filters.
  • Claim 3 prevents, just like the rounded top in the corner between the upper intermediate floor and the side wall, the noise caused by turbulence in the deflection of the flowing air from the middle chamber through the opening in the lower chamber.
  • the main advantage of a fan consisting of two parts, the motor of which is fastened in the module via vibration dampers, is that hardly any vibrations occur by the fans in a clean room with a clean room ceiling constructed from the modules.
  • this fan eliminates flow obstacles caused by, for example, stud bolts that connect the motor plate to the inlet nozzle.
  • the rectifying plate according to claim 11 leads to an equalization of the air flow in the upper chamber above the fan.
  • Modules according to claim 12 are particularly suitable for building a ceiling for clean rooms in which conditioned air is required.
  • Figure 1 shows a vertical section through a module of the first example.
  • FIG. 2 shows an enlarged section of FIG. 1 in the area around the opening connecting the middle and the lower chamber.
  • FIG. 3 shows the section corresponding to FIG. 2 for a module of the second example.
  • a module for the construction of a clean room ceiling has an approximately cuboid housing with a rectangular plan, whereby its ceiling 1, its side walls 2, 3 and the front and rear walls, which are not visible in the drawing and which are parallel to the plane of the drawing, consist of bent metal sheets.
  • the module is subdivided by two intermediate floors 4, 5 into three flat chambers 6, 7, 8 one above the other, which extend over the entire width (perpendicular to the plane of the drawing in FIG. 1).
  • the chamber heights of the three chambers 6, 7, 8 are approximately the same size.
  • the chambers 6, 7, 8 are connected to one another by mutually arranged openings 9, 10 in the intermediate floors 4, 5.
  • the upper chamber has in the ceiling 1 a return air opening 11 covered with a grille or a control flap, which, starting from the side wall 3, extends over a fifth to a quarter of the length of the module and over its entire width.
  • the opening 9 of the upper intermediate floor 4 is located in the vicinity of the side wall 2 opposite the return air opening 11.
  • the opening 10 of the lower intermediate floor 5 is a gap between the edge of the lower intermediate floor 5, which does not quite reach the side wall 3, and the side wall 3 remains free.
  • the lower chamber 8 is delimited at the bottom by three high-performance suspended matter filters 12 placed next to one another, the high-performance suspended matter filters 12 resting on bends of the side walls 2, 3, the front and the rear wall.
  • the high-performance particulate filters 12 are installed with seals and sealing compound.
  • a fan 13 which is designed as a housing-free radial fan with an external rotor motor 15 and has blades 16 curved backwards. Seen from above on the inlet nozzle 14, its direction of rotation is clockwise.
  • the fan 13 is divided into two, its inlet nozzle 14 being seated in the opening 9 of the upper intermediate floor 4 and being fastened to the upper intermediate floor 4, and its external rotor motor 15 being fastened to the lower intermediate floor 5.
  • the distance between the fan axis 17 and the side wall 5 lying next to it corresponds approximately to 0.8 times the diameter of the fan 13. Its distance from the front wall is approximately 40% of the width of the module.
  • the external rotor motor 15 of the fan 13 is mounted on a plate 20 fastened to a rectangular frame 19 by means of four rubber oscillating elements 18.
  • the frame 19 is screwed onto the intermediate floor 5 at four points near the side wall 2, the front and the rear wall via small 5 mm thick plates (not shown in the drawing).
  • the ceiling 1, the upper intermediate floor 4 and the side walls 2, 3 are provided with a sound insulation lining 23, e.g. Soundproofing panels, which are made of foamed plastic and have a pyramid or honeycomb surface, covered.
  • a sound insulation lining 23 e.g. Soundproofing panels, which are made of foamed plastic and have a pyramid or honeycomb surface, covered.
  • the sound insulation lining 23 extends on the ceiling 1 from the return air opening 11 to the side wall 2, with the opening 21 being excluded, and on the upper intermediate floor 4 from the side wall 3 to close to the inlet nozzle 14.
  • the thickness the sound insulation lining 23 is approximately a quarter of the height of the upper chamber 6, so that a gap remains between them, the height of which is approximately half the chamber height.
  • the middle chamber 7 are on the two intermediate floors 4, 5, which delimit the middle chamber 8.
  • Schalldämpfku ⁇ lissen 25, 26 attached, which extend from the fan 13 in the direction of the side wall 3.
  • the upper silencing backdrop 25 extends to the side wall 3, fills the corner between the upper intermediate floor 4 and the sidewall 3 and covers the sidewall 3 up to the level of the lower intermediate floor 5.
  • the lower silencing backdrop 26 extends to the opening 10 Height Hi of the silencing backdrops 25, 26 on the intermediate floors 4, 5 and the height H2 of the gap remaining between them each amount to approximately one third of the chamber height, the height H2 of the gap being somewhat larger, for example by a factor of 1.2 than that of the silencing backdrops 25, 26.
  • the width of the upper silencing backdrop 25 on the side wall 3 is only about a quarter of its height on the upper intermediate floor 4.
  • the lower soundproofing backdrop 26 is rounded at its end facing the side wall 3, the cross section of the end forming a semicircle around a center point M-j_ lying halfway up the height Hi.
  • the soundproofing backdrops 25, 26 have a smooth, abrasion-resistant glass fleece as a cover and are filled with mineral wool on the inside.
  • baffles 27, 28 arranged side by side and extending from the front to the rear wall is.
  • the circular arc of the guide plate 27 arranged in front of the end of the lower silencing backdrop 26 begins vertically above the center points Mi, 2 in the gap between the silencing backdrops 25, 26 and extends through the opening 10 into the lower chamber 8. It forms a complete semicircle, i.e.
  • the angle et1 shown in FIG. 2 between a horizontal line passing through the center point 2 and the end of the circular arc is 90 ° C.
  • the circular arc of the second guide plate 28 begins perpendicularly above the beginning of the circular arc of the first guide plate 27 and likewise extends through the opening 10 into the lower chamber 8. However, it only forms an approximately 120 ° circular arc, i.e. the angle 062 is 40 ° C. and ends somewhat higher than the circular arc of the first guide plate 27 in the lower chamber 8.
  • the height H3 of the gap between the lower silencing link 26 and the beginning of the guide plate 27 is approximately 20 to 30%, for example 25%, and the height H4 of the gap between the lower silencing link 26 and the beginning of the guide plate 28 is approximately 50 to 66%, eg 58%, the total height H2 of the gap.
  • the difference between the radius R2 of the guide plate 28 and the radius R] _ of the guide plate 27 corresponds to the difference between height H4 and height H3.
  • the lower intermediate floor 5 is covered in the lower chamber 8 with a sound absorption plate 29.
  • the sound absorption plate 29 extends from the side wall 2 to the vicinity of the opening 10, which it does not reach, but in the direction of which it is chamfered.
  • the sound absorption plate 29 consists of several layers, for example a layer made of plastic foam and a bitumen layer.
  • the direction of flow of the air is symbolized by arrows.
  • the free interiors of the upper chamber 6 and the middle chamber 7 form a hairpin-shaped air duct.
  • the air duct in the middle chamber 7 is branched into three ducts by the two guide plates 27, 28. The branching continues in the
  • the modules are tiled in a grid-like frame construction over the entire surface of the clean room ceiling.
  • a module of example 2 differs from that of example 1 in that it has not three, but two high-performance suspended matter filters 12. Its layout is accordingly square and the chamber lengths are only two thirds of the chamber lengths of the module of Example 1. The width and height of the module and the heights of the chambers 6, 7, 8 correspond to those of the module of Example 1.
  • the height H2 of the gap between the lower and upper silencing backdrops 26, 25 is smaller than the height H] _ of the silencing backdrops 25, 26.
  • the height H2 in this example is two thirds of the height Hl-
  • the module of example 2 differs from that of example 1 in that the guide plates 27, 28 do not protrude as far into the lower chamber 8 as in the latter, the angles ⁇ ⁇ L and 02 having values of, for example, 40 ° C. and 20 Assume ° C.
  • the height H3 is also 25% and the height H4 is 50% of the total height H2.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Building Environments (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Vehicle Interior And Exterior Ornaments, Soundproofing, And Insulation (AREA)
  • Floor Finish (AREA)
  • Buildings Adapted To Withstand Abnormal External Influences (AREA)

Abstract

Un module pour la construction du plafond d'une salle blanche selon une technique à écoulement laminaire comprend trois chambres superposées (6, 7, 8) subdivisées par deux faux fonds (4, 5). Les chambres (6, 7, 8) sont mutuellement reliées par des ouvertures (9, 10) disposées alternativement dans les faux fonds (4, 5). La chambre supérieure (6) comprend une ouverture de retour d'air (11) ménagée du côté du module opposé à l'ouverture (9) du faux fond supérieur (4). Un ventilateur (13) est situé dans la chambre centrale (7), sous l'ouverture du faux fond supérieur (4). La chambre inférieure (8) est délimitée vers le bas par un filtre (12) de haute puissance. Des dispositifs (23) d'insonorisation sont situés dans les deux chambres supérieures (6, 7). L'ouverture de retour d'air (11) est ménagée dans le plafond (1) du module et fait saillie sur la paroi latérale (3) sur 20 à 30 % de sa longueur et sur toute sa largeur.
EP92912382A 1991-07-08 1992-06-10 Module pour la construction du plafond de salles blanches Expired - Lifetime EP0592472B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4122582 1991-07-08
DE4122582A DE4122582C2 (de) 1991-07-08 1991-07-08 Modul zum Aufbau einer Reinraumdecke
PCT/EP1992/001297 WO1993001454A1 (fr) 1991-07-08 1992-06-10 Module pour la construction du plafond de salles blanches

Publications (2)

Publication Number Publication Date
EP0592472A1 true EP0592472A1 (fr) 1994-04-20
EP0592472B1 EP0592472B1 (fr) 1994-12-21

Family

ID=6435690

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92912382A Expired - Lifetime EP0592472B1 (fr) 1991-07-08 1992-06-10 Module pour la construction du plafond de salles blanches

Country Status (11)

Country Link
US (1) US5462484A (fr)
EP (1) EP0592472B1 (fr)
JP (1) JPH06508913A (fr)
AT (1) ATE116053T1 (fr)
CA (1) CA2110694A1 (fr)
DE (3) DE9116423U1 (fr)
DK (1) DK0592472T3 (fr)
ES (1) ES2066621T3 (fr)
GR (1) GR3015448T3 (fr)
RU (1) RU2074293C1 (fr)
WO (1) WO1993001454A1 (fr)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2700203A1 (fr) * 1993-01-04 1994-07-08 Cherrier Gerard Unité autonome de diffusion d'air propre à flux laminaire destinée aux chambres dites "stériles" et aux volumes propres.
DE4320162C2 (de) * 1993-06-18 1995-11-16 Krantz Tkt Gmbh Modul für eine Reinraumdecke
DE19511158C2 (de) * 1995-03-27 2000-01-27 Meissner & Wurst Ventilatoreinheit für Reinräume
DE19538040C2 (de) * 1995-10-13 1998-08-13 Jenoptik Jena Gmbh Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume
JP3505066B2 (ja) * 1997-06-20 2004-03-08 株式会社日立産機システム 空気清浄装置
SE513093C2 (sv) 1997-06-27 2000-07-03 Flaekt Ab Fläktmodul för renrumstillämpningar
WO1999011984A1 (fr) * 1997-09-03 1999-03-11 Kyodo-Allied Industries Ltd. Procede et appareil pour minimiser le bruit provenant d'une unite de filtrage a soufflerie
US6050774A (en) * 1997-10-14 2000-04-18 Huntair Inc. Modular filter fan unit
AU5899899A (en) * 1998-08-24 2000-03-14 Hepa Corporation High filtering efficiency, low energy consumption, and low noise fan filter unit
US6132309A (en) * 1999-03-10 2000-10-17 Panelli; Paul Giulo Modular clean room plenum
DE29916321U1 (de) * 1999-09-16 1999-12-23 M + W Zander Facility Engineering GmbH + Co. KG, 70499 Stuttgart Reinstlufteinrichtung für den Pharmazie-, Lebensmittel- und biotechnischen Bereich
US6290597B1 (en) 2000-01-18 2001-09-18 Air System Components L.P. Air diffuser with adjustable pattern controller blades
US6220958B1 (en) 2000-01-18 2001-04-24 Air System Components Lp Support bridges for air diffusers including spring loading for air flow control blades
US6383241B1 (en) 2000-02-16 2002-05-07 Battelle Memorial Institute Protective filtration system for enclosures within buildings
DE10019543C2 (de) * 2000-04-20 2002-03-07 Fraunhofer Ges Forschung Zuluftelement
US6471582B1 (en) * 2001-08-14 2002-10-29 Applied Optoelectronics, Inc. Adapter for coupling air duct to fan-driven vent
US11255332B2 (en) 2003-03-20 2022-02-22 Nortek Air Solutions, Llc Modular fan housing with multiple modular units having sound attenuation for a fan array for an air-handling system
US7137775B2 (en) 2003-03-20 2006-11-21 Huntair Inc. Fan array fan section in air-handling systems
US7597534B2 (en) 2003-03-20 2009-10-06 Huntair, Inc. Fan array fan section in air-handling systems
US20120195749A1 (en) 2004-03-15 2012-08-02 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US8540557B1 (en) 2004-08-02 2013-09-24 Bard Manufacturing Company Wall curb for air treatment system
JP4963976B2 (ja) * 2007-01-26 2012-06-27 ヤマハ発動機株式会社 樹脂ブロックベルトを有するベルト式無段変速機を備えた鞍乗型車両
US9151295B2 (en) 2008-05-30 2015-10-06 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
WO2010114702A1 (fr) 2009-03-30 2010-10-07 Airius Ip Holdings, Llc Dispositifs, systèmes et procédé de ventilation en colonne
US8087492B2 (en) * 2010-03-08 2012-01-03 Huntair, Inc. Methods and systems for integrating sound attenuation into a filter bank
CA2838934C (fr) 2011-06-15 2016-08-16 Airius Ip Holdings, Llc Dispositifs, systemes et procedes de deplacement d'air en colonne
DE102011106512A1 (de) * 2011-06-15 2013-01-03 Steinbeis GmbH & Co. für Technologietransfer vertreten durch STZ EURO Steinbeis-Transferzentrum Energie- Umwelt-Reinraumtechnik Filtervorrichtung
AU2012271641B2 (en) 2011-06-15 2015-10-01 Airius Ip Holdings, Llc Columnar air moving devices and systems
USD698916S1 (en) 2012-05-15 2014-02-04 Airius Ip Holdings, Llc Air moving device
CA2875347C (fr) 2013-12-19 2022-04-19 Airius Ip Holdings, Llc Dispositifs, systemes et procedes de deplacement d'air en colonne
US10024531B2 (en) 2013-12-19 2018-07-17 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
CN103752103A (zh) * 2014-01-26 2014-04-30 苏州新区枫桥净化设备厂 一种净化层流罩
CA2953226C (fr) 2014-06-06 2022-11-15 Airius Ip Holdings, Llc Dispositifs, systemes et procedes de deplacement d'air en colonne
CN106152373B (zh) * 2015-03-25 2019-12-03 大金工业株式会社 空调室内机的控制方法及空调室内机
US20190056122A1 (en) * 2015-04-20 2019-02-21 Synexis Llc Clean Rooms Having Dilute Hydrogen Peroxide (DHP) Gas and Methods of Use Thereof
USD805176S1 (en) 2016-05-06 2017-12-12 Airius Ip Holdings, Llc Air moving device
USD820967S1 (en) 2016-05-06 2018-06-19 Airius Ip Holdings Llc Air moving device
US10487852B2 (en) 2016-06-24 2019-11-26 Airius Ip Holdings, Llc Air moving device
USD886275S1 (en) 2017-01-26 2020-06-02 Airius Ip Holdings, Llc Air moving device
USD885550S1 (en) 2017-07-31 2020-05-26 Airius Ip Holdings, Llc Air moving device
FR3078144B1 (fr) * 2018-02-19 2020-09-25 Energie Et Transfert Thermique Dispositif de traitement d'air neuf et installation qui en est equipee
USD887541S1 (en) 2019-03-21 2020-06-16 Airius Ip Holdings, Llc Air moving device
GB2617743B (en) 2019-04-17 2024-04-03 Airius Ip Holdings Llc Air moving device with bypass intake

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1879107A (en) * 1930-11-07 1932-09-27 David H Couch Air or gas washer
FR1105213A (fr) * 1954-04-28 1955-11-29 Dispositif de captation de gouttelettes
JPS6071830A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd 組替式局所環境制御室
US4560395A (en) * 1984-04-17 1985-12-24 Environmental Air Control, Inc. Compact blower and filter assemblies for use in clean air environments
JPS6172947A (ja) * 1984-09-18 1986-04-15 Takasago Thermal Eng Co Ltd クリ−ンル−ムの形成法およびこの方法に使用する空気調和設備ユニツト
AU584421B2 (en) * 1985-05-14 1989-05-25 Flanders Filters Inc. Laminar flow clean room having improved filter bank
US4810269A (en) * 1988-04-27 1989-03-07 Stackhouse Associates, Inc. Point one micron filtering system
DE8805774U1 (de) * 1988-04-30 1988-06-23 Babcock-BSH AG vormals Büttner-Schilde-Haas AG, 4150 Krefeld Tunnelmodul zum Aufbau eines Reinraumes in Laminar-Flow-Technik
DE3836147C2 (de) * 1988-10-23 1996-03-21 Ltg Lufttechnische Gmbh Reinraumdecke
SU1641401A1 (ru) * 1988-12-27 1991-04-15 Украинский научно-исследовательский институт природных газов Устройство дл удалени жидкости из потока газа

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9301454A1 *

Also Published As

Publication number Publication date
CA2110694A1 (fr) 1993-01-21
DE59201037D1 (de) 1995-02-02
DE4122582C2 (de) 1994-12-15
DK0592472T3 (da) 1995-05-29
DE9116423U1 (de) 1992-09-17
EP0592472B1 (fr) 1994-12-21
ES2066621T3 (es) 1995-03-01
DE4122582A1 (de) 1993-01-14
RU2074293C1 (ru) 1997-02-27
JPH06508913A (ja) 1994-10-06
US5462484A (en) 1995-10-31
WO1993001454A1 (fr) 1993-01-21
GR3015448T3 (en) 1995-06-30
ATE116053T1 (de) 1995-01-15

Similar Documents

Publication Publication Date Title
EP0592472B1 (fr) Module pour la construction du plafond de salles blanches
DE3330536C2 (de) Deckenkonstruktion für Reinräume
DE4328995C2 (de) Reinraumanlage
EP0497296B1 (fr) Installation de filtre-ventilateur pour l'utilisation dans des salles blanches
EP0340433B1 (fr) Module de tunnel pour créer une enceinte propre en technique à flux laminaire
CH702952A2 (de) Schallabsorbierende Lärmschutzwände.
DE1901460A1 (de) Einrichtung zum Belueften eines abgeschlossenen Raums
DE19511158A1 (de) Ventilatoreinheit für Reinräume
DE4115171C2 (de) Ventilator-Filtereinheit für Reinraumdecken
DE9012650U1 (de) Raumabgrenzende Decke
WO1994011679A1 (fr) Unite d'aeration modulaire a ventilateur integre et cadre de filtre raccorde, en particulier pour les salles blanches
DE4210279A1 (de) Quelluftdurchlaß für raumlufttechnische Anlagen
WO2010115616A1 (fr) Installation centrale de climatisation et amortisseur sonore pour une installation centrale de climatisation
WO2009095031A1 (fr) Élément préfabriqué
DE3108730C2 (de) Flächiges Schallschutzelement
DE3812094C2 (fr)
DE102004027829B4 (de) Multifunktionales Raumelement und Verfahren zum Herstellen eines solchen
DE202011003135U1 (de) Klimatisierungselement
DE3327785C2 (fr)
DE3149077C2 (fr)
DE2031876C3 (de) Einsatz zur geräuscharmen Druckreduzierung der vom Verteilungssystem zu einem Austrittstrichter eines Raumes geführten Luft
DE3832915A1 (de) Reinraum
EP0893655A2 (fr) Unité de chauffage pour chauffage à air chaud pour églises
EP2402674B1 (fr) Bouche d'aération
DE29704427U1 (de) Filter-Ventilator-Einheit

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19930911

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU MC NL SE

17Q First examination report despatched

Effective date: 19940531

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU MC NL SE

REF Corresponds to:

Ref document number: 116053

Country of ref document: AT

Date of ref document: 19950115

Kind code of ref document: T

REF Corresponds to:

Ref document number: 59201037

Country of ref document: DE

Date of ref document: 19950202

ITF It: translation for a ep patent filed
GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19950112

ET Fr: translation filed
REG Reference to a national code

Ref country code: ES

Ref legal event code: FG2A

Ref document number: 2066621

Country of ref document: ES

Kind code of ref document: T3

REG Reference to a national code

Ref country code: DK

Ref legal event code: T3

REG Reference to a national code

Ref country code: GR

Ref legal event code: FG4A

Free format text: 3015448

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GR

Payment date: 19960409

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 19960417

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 19960429

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: LU

Payment date: 19960501

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 19960509

Year of fee payment: 5

Ref country code: BE

Payment date: 19960509

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: MC

Payment date: 19960523

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19960603

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: ES

Payment date: 19960606

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19960614

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: SE

Payment date: 19960617

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DK

Payment date: 19960625

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 19960630

Year of fee payment: 5

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19970610

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19970610

Ref country code: DK

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19970610

Ref country code: AT

Effective date: 19970610

REG Reference to a national code

Ref country code: DK

Ref legal event code: EBP

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Effective date: 19970611

Ref country code: ES

Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

Effective date: 19970611

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19970630

Ref country code: GR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19970630

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19970630

Ref country code: BE

Effective date: 19970630

BERE Be: lapsed

Owner name: BABCOCK-BSH A.G.

Effective date: 19970630

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Effective date: 19971231

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Effective date: 19980101

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 19970610

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19980227

EUG Se: european patent has lapsed

Ref document number: 92912382.6

NLV4 Nl: lapsed or anulled due to non-payment of the annual fee

Effective date: 19980101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19980303

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

REG Reference to a national code

Ref country code: ES

Ref legal event code: FD2A

Effective date: 20000301

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20050610