EP0578953B1 - Hochleistungsstrahler - Google Patents
Hochleistungsstrahler Download PDFInfo
- Publication number
- EP0578953B1 EP0578953B1 EP93108758A EP93108758A EP0578953B1 EP 0578953 B1 EP0578953 B1 EP 0578953B1 EP 93108758 A EP93108758 A EP 93108758A EP 93108758 A EP93108758 A EP 93108758A EP 0578953 B1 EP0578953 B1 EP 0578953B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- dielectric
- discharge
- discharge chamber
- electrodes
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
Definitions
- the invention relates to a high-power radiator, in particular for ultraviolet light, with a discharge space filled with filling gas emitting radiation under discharge conditions, the walls of which are formed by an outer and an inner dielectric, the outer surfaces of the outer dielectric being provided with first electrodes, with second electrodes Electrodes on the surface of the second dielectric facing away from the discharge space, and with an alternating current source connected to the first and second electrodes for supplying the discharge.
- the invention relates to a state of the art, such as that which results from EP-A 0 254 111, US-A-5 013 959 or EP-A-0 385 205.
- UV sources The industrial use of photochemical processes depends heavily on the availability of suitable UV sources.
- the classic UV lamps deliver low to medium UV intensities at some discrete wavelengths, such as the low-pressure mercury lamps at 185 nm and especially at 254 nm.
- Really high UV powers can only be obtained from high-pressure lamps (Xe, Hg), which then distribute their radiation over a larger wavelength range.
- the new excimer lasers have provided some new wavelengths for basic photochemical experiments. for cost reasons for an industrial process probably only suitable in exceptional cases.
- Excimer UV lamps based on the principle of silent electrical discharges require a significantly higher voltage than the voltage required for normal operation when they are first ignited or after longer breaks. This is due to the fact that surface charges form on the dielectrics during operation, which in each case ensure easier ignition in the subsequent voltage half-wave. These surface charges are missing the first time you ignite and after long breaks.
- the object of the invention is to create a high-performance radiator, in particular for UV or VUV radiation, which ignites reliably without complex measures.
- the discharge space is locally narrowed by attaching additional material made of dielectric material on the wall of the dielectric tubes facing the discharge space, or that one or more interfering bodies made of dielectric material are in the discharge space are provided, which touch one or the other or both dielectrics.
- the invention is based on the knowledge of forcing an initial ignition at one point by local field distortion or field elevation.
- the resulting UV radiation and the charge carriers of this local discharge then force the reliable ignition of the entire discharge volume.
- This field distortion can be realized in a simple manner by means of a quartz ball or a ball made of aluminum or titanium oxide in the discharge gap.
- the invention makes it possible for the first time to create excimer UV lamps that ignite safely.
- the measures to be taken are simple and economical. They can also be carried out retrospectively in existing units when using an interference body, which is considered the most preferred means for field distortion.
- FIGS. 1 and 2 there is an outer quartz tube 1 with a wall thickness of approximately 0.5 to 1.5 mm and an outer diameter
- An inner quartz tube 2 of approximately 20 to 30 mm is arranged coaxially.
- a helical inner electrode 3 bears against the inner surface of the inner quartz tube 2.
- An outer electrode 4 in the form of a wire mesh or an applied electrode structure extends over the entire outer circumference of the outer quartz tube 1.
- a wire 3 is inserted into the inner quartz tube 2. This forms the inner electrode of the radiator, the wire mesh 4 the outer electrode of the radiator.
- the quartz tubes 1 and 2 are closed or melted at both ends by a cover 5 and 6, respectively.
- the space between the two tubes 1 and 2, the discharge space 7, is filled with a gas / gas mixture which emits radiation under discharge conditions.
- the coolant is supplied or removed via the connections 9 and 10.
- the cooling liquid also serves for the electrical coupling of the inner electrode 3 to the inner quartz tube 2, so that it is not necessary for the helical electrode 3 to rest against the inner wall everywhere.
- the two electrodes 3, 4 are connected to the two poles of an alternating current source 11.
- the alternating current source supplies an adjustable alternating voltage in the order of magnitude of several 100 volts to 20,000 volts at frequencies in the range of technical alternating current up to a few 1000 kHz - depending on the electrode geometry, pressure in the discharge space and composition of the filling gas.
- the filling gas is, for example, mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally under Use of an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
- a substance / substance mixture according to the following table can be used: Filling gas radiation helium 60-100 nm neon 80 - 90 nm argon 107 - 165 nm Argon + fluorine 180-200 nm Argon + chlorine 165-190 nm Argon + krypton + chlorine 165-190, 200-240 nm xenon 160-190 nm nitrogen 337 - 415 nm krypton 124, 140-160 nm Krypton + fluorine 240 - 255 nm Krypton + chlorine 200-240 nm mercury 185, 254,320-370,390-420nm selenium 196, 204, 206 nm deuterium 150-250 nm Xenon + fluorine 340 - 360 nm, 400 - 550 nm Xenon + chlorine 300-320 nm
- the electron energy distribution can be optimally adjusted by the thickness of the dielectrics and their properties as well as pressure and / or temperature in the discharge space.
- FIG. 1 A first variant is shown in Fig. 1, right upper half (Fig. 2 in dashed lines).
- the outer dielectric tube 1 is provided with an indentation or dent 12. This extends approximately up to half the gap width to the inner dielectric tube 2.
- a second variant shows Fig. 1, lower right half (Fig. 2 also dashed).
- the inner dielectric tube 2 is provided with a dent or bump 12a, which reaches the outer dielectric tube 1 approximately up to half the gap width.
- FIG. 1, left half, and FIG. 2 can also be used retrospectively in the case of emitters.
- a ball 13 made of dielectric material, e.g. Quartz, preferably made of aluminum or titanium oxide, with an outer sphere diameter equal to or slightly smaller than the gap width of the discharge space 7.
- This sphere can, but need not, be attached to one or both dielectric walls.
- the exact spherical geometry is not important. Two or more of these balls can also be provided, in particular in the case of elongated radiators. The combination of ball (s) and dents or humps is also possible.
- Another measure that can also be taken subsequently with radiators is to melt quartz drops 12b or 12c on the inner surface of the outer dielectric tube 1 or on the outer surface of the inner dielectric tube 2 in order to achieve the desired field distortion.
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Lasers (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Radiation-Therapy Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4222130 | 1992-07-06 | ||
DE4222130A DE4222130C2 (de) | 1992-07-06 | 1992-07-06 | Hochleistungsstrahler |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0578953A1 EP0578953A1 (de) | 1994-01-19 |
EP0578953B1 true EP0578953B1 (de) | 1997-09-17 |
Family
ID=6462570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP93108758A Expired - Lifetime EP0578953B1 (de) | 1992-07-06 | 1993-06-01 | Hochleistungsstrahler |
Country Status (5)
Country | Link |
---|---|
US (1) | US5432398A (ja) |
EP (1) | EP0578953B1 (ja) |
JP (1) | JP2771428B2 (ja) |
CA (1) | CA2099073C (ja) |
DE (1) | DE4222130C2 (ja) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3025414B2 (ja) * | 1994-09-20 | 2000-03-27 | ウシオ電機株式会社 | 誘電体バリア放電ランプ装置 |
GB9519283D0 (en) * | 1995-09-21 | 1995-11-22 | Smiths Industries Plc | Gas discharge lamps and systems |
DE19543342A1 (de) * | 1995-11-22 | 1997-05-28 | Heraeus Noblelight Gmbh | Verfahren und Strahlungsanordnung zur Erzeugung von UV-Strahlen zur Körperbestrahlung sowie Verwendung |
DE19613502C2 (de) * | 1996-04-04 | 1998-07-09 | Heraeus Noblelight Gmbh | Langlebiger Excimerstrahler und Verfahren zu seiner Herstellung |
DE19636965B4 (de) * | 1996-09-11 | 2004-07-01 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Elektrische Strahlungsquelle und Bestrahlungssystem mit dieser Strahlungsquelle |
US6888041B1 (en) * | 1997-02-12 | 2005-05-03 | Quark Systems Co., Ltd. | Decomposition apparatus of organic compound, decomposition method thereof, excimer UV lamp and excimer emission apparatus |
DE19708149A1 (de) * | 1997-02-28 | 1998-09-03 | Umex Ges Fuer Umweltberatung U | Vorrichtung zur UV-Bestrahlung von Flüssigkeiten und Gasen |
DE19744940A1 (de) * | 1997-02-28 | 1998-09-03 | Umex Ges Fuer Umweltberatung U | Vorrichtung zur Durchführung fotochemischer Reaktionen, vorzugsweise von Aufschlüssen im Labor |
JPH10289693A (ja) * | 1997-04-11 | 1998-10-27 | Nec Home Electron Ltd | 希ガス放電灯 |
US6015759A (en) * | 1997-12-08 | 2000-01-18 | Quester Technology, Inc. | Surface modification of semiconductors using electromagnetic radiation |
US6049086A (en) * | 1998-02-12 | 2000-04-11 | Quester Technology, Inc. | Large area silent discharge excitation radiator |
EP0948030A3 (en) * | 1998-03-30 | 1999-12-29 | Toshiba Lighting & Technology Corporation | Rare gaseous discharge lamp, lighting circuit, and lighting device |
DE19844720A1 (de) * | 1998-09-29 | 2000-04-06 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Dimmbare Entladungslampe für dielektrisch behinderte Entladungen |
JP3439679B2 (ja) * | 1999-02-01 | 2003-08-25 | 株式会社オーク製作所 | 高輝度光照射装置 |
JP3604606B2 (ja) * | 2000-01-07 | 2004-12-22 | コニカミノルタビジネステクノロジーズ株式会社 | 発光制御装置とこの発光制御装置を使用した画像形成装置 |
DE10026781C1 (de) * | 2000-05-31 | 2002-01-24 | Heraeus Noblelight Gmbh | Entladungslampe für dielektrisch behinderte Entladung |
DE10044655A1 (de) * | 2000-09-09 | 2002-04-04 | Gsf Forschungszentrum Umwelt | Ionenquelle bei der UV-VUV-Licht zur Ionisation verwendet wird |
DE10133326A1 (de) | 2001-07-10 | 2003-01-23 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Dielektrische Barrieren-Entladungslampe mit Zündhilfe |
EP1328007A1 (en) | 2001-12-14 | 2003-07-16 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Dielectric barrier discharge lamp with starting aid. |
US20050035711A1 (en) * | 2003-05-27 | 2005-02-17 | Abq Ultraviolet Pollution Solutions, Inc. | Method and apparatus for a high efficiency ultraviolet radiation source |
US20050199484A1 (en) * | 2004-02-10 | 2005-09-15 | Franek Olstowski | Ozone generator with dual dielectric barrier discharge and methods for using same |
ATE459978T1 (de) * | 2004-07-09 | 2010-03-15 | Koninkl Philips Electronics Nv | Entladungslampe mit dielektrischer barriere mit integrierten multifunktionsmitteln |
DE102005062638A1 (de) * | 2005-12-23 | 2007-07-05 | Heraeus Noblelight Gmbh | Zündhilfe |
JP5260631B2 (ja) * | 2007-04-18 | 2013-08-14 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 誘電体バリア放電ランプ |
DE102010003352A1 (de) * | 2010-03-26 | 2011-09-29 | Osram Gesellschaft mit beschränkter Haftung | Dielektrische Barriere-Entladungslampe mit Haltescheibe |
US9722550B2 (en) | 2014-04-22 | 2017-08-01 | Hoon Ahn | Power amplifying radiator (PAR) |
US9741553B2 (en) | 2014-05-15 | 2017-08-22 | Excelitas Technologies Corp. | Elliptical and dual parabolic laser driven sealed beam lamps |
EP3457429B1 (en) | 2014-05-15 | 2023-11-08 | Excelitas Technologies Corp. | Laser driven sealed beam lamp with adjustable pressure |
US10186416B2 (en) | 2014-05-15 | 2019-01-22 | Excelitas Technologies Corp. | Apparatus and a method for operating a variable pressure sealed beam lamp |
CN104701132B (zh) * | 2015-03-17 | 2016-10-12 | 中国工程物理研究院激光聚变研究中心 | 一种大口径面状单向闪光氙灯 |
US9576785B2 (en) * | 2015-05-14 | 2017-02-21 | Excelitas Technologies Corp. | Electrodeless single CW laser driven xenon lamp |
US10008378B2 (en) | 2015-05-14 | 2018-06-26 | Excelitas Technologies Corp. | Laser driven sealed beam lamp with improved stability |
US10057973B2 (en) | 2015-05-14 | 2018-08-21 | Excelitas Technologies Corp. | Electrodeless single low power CW laser driven plasma lamp |
US10109473B1 (en) | 2018-01-26 | 2018-10-23 | Excelitas Technologies Corp. | Mechanically sealed tube for laser sustained plasma lamp and production method for same |
JP6948606B1 (ja) | 2020-08-28 | 2021-10-13 | ウシオ電機株式会社 | エキシマランプ及び光照射装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE633760C (de) * | 1930-09-26 | 1936-08-05 | Siemens Ag | Entladungslampe, bei der die Entladung durch einen verengten Querschnitt hindurchgeht |
DE618261C (de) * | 1933-04-04 | 1935-09-04 | Philips Nv | Elektrische, U-foermig gebogene Metalldampfentladungsroehre mit festen Elektroden und Dampf schwerfluechtigen Metalls, insbesondere zum Aussenden von Lichtstrahlen |
DE761839C (de) * | 1941-08-09 | 1954-10-11 | Patra Patent Treuhand | Elektrische Gleichrichterroehre, insbesondere fuer hohe Spannungen |
JPS56131983A (en) * | 1980-03-19 | 1981-10-15 | Mitsubishi Electric Corp | Gas laser device |
JPS56131985A (en) * | 1980-03-19 | 1981-10-15 | Mitsubishi Electric Corp | Amplifying device for laser beam |
US4392105A (en) * | 1980-12-17 | 1983-07-05 | International Business Machines Corp. | Test circuit for delay measurements on a LSI chip |
JPS5815286A (ja) * | 1981-07-21 | 1983-01-28 | Mitsubishi Electric Corp | 無声放電レ−ザ用電極 |
JPS617676A (ja) * | 1984-06-22 | 1986-01-14 | Hitachi Ltd | ガスレ−ザ発振装置用電極 |
CA1246658A (en) * | 1984-12-06 | 1988-12-13 | Robert Y. Pai | Compact fluorescent lamp assembly |
US4845408A (en) * | 1984-12-06 | 1989-07-04 | Gte Products Corporation | Compact fluorescent lamp assembly |
CH670171A5 (ja) * | 1986-07-22 | 1989-05-12 | Bbc Brown Boveri & Cie | |
IL81439A (en) * | 1987-01-30 | 1991-08-16 | Alumor Lasers Ltd | Ultra compact,rf excited gaseous lasers |
JPH01264137A (ja) * | 1988-04-14 | 1989-10-20 | Dainippon Toryo Co Ltd | プラズマディスプレイ装置 |
CH677292A5 (ja) * | 1989-02-27 | 1991-04-30 | Asea Brown Boveri | |
DE4010809A1 (de) * | 1989-04-11 | 1990-10-18 | Asea Brown Boveri | Hochleistungsstrahler |
DE4010190A1 (de) * | 1990-03-30 | 1991-10-02 | Asea Brown Boveri | Bestrahlungseinrichtung |
JP3180364B2 (ja) * | 1990-09-25 | 2001-06-25 | 東芝ライテック株式会社 | 高圧放電灯及びその点灯方法 |
DE4140497C2 (de) * | 1991-12-09 | 1996-05-02 | Heraeus Noblelight Gmbh | Hochleistungsstrahler |
-
1992
- 1992-07-06 DE DE4222130A patent/DE4222130C2/de not_active Expired - Fee Related
-
1993
- 1993-06-01 EP EP93108758A patent/EP0578953B1/de not_active Expired - Lifetime
- 1993-06-23 CA CA002099073A patent/CA2099073C/en not_active Expired - Fee Related
- 1993-06-30 US US08/083,531 patent/US5432398A/en not_active Expired - Fee Related
- 1993-07-06 JP JP5166756A patent/JP2771428B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0578953A1 (de) | 1994-01-19 |
DE4222130C2 (de) | 1995-12-14 |
JP2771428B2 (ja) | 1998-07-02 |
DE4222130A1 (de) | 1994-01-13 |
JPH06209131A (ja) | 1994-07-26 |
CA2099073C (en) | 1999-03-02 |
US5432398A (en) | 1995-07-11 |
CA2099073A1 (en) | 1994-01-07 |
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