EP0505422A1 - Position sensor - Google Patents

Position sensor

Info

Publication number
EP0505422A1
EP0505422A1 EP91900865A EP91900865A EP0505422A1 EP 0505422 A1 EP0505422 A1 EP 0505422A1 EP 91900865 A EP91900865 A EP 91900865A EP 91900865 A EP91900865 A EP 91900865A EP 0505422 A1 EP0505422 A1 EP 0505422A1
Authority
EP
European Patent Office
Prior art keywords
position sensor
sensor according
coils
coil
actuating rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP91900865A
Other languages
German (de)
English (en)
French (fr)
Inventor
Neil Stuart Craigie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
British Technology Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Technology Group Ltd filed Critical British Technology Group Ltd
Publication of EP0505422A1 publication Critical patent/EP0505422A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/70Position sensors comprising a moving target with particular shapes, e.g. of soft magnetic targets
    • G01D2205/77Specific profiles
    • G01D2205/775Tapered profiles

Definitions

  • the invention relates to a position sensor for two relatively movable parts of which one part is connected to at least one coil and the other part is connected to at least one element arranged close to the coll so as to influence the magnetic field of the coll 1n dependence on the position of the element.
  • Known position sensors of this kind consist, for example, of a coll into which a core dips to a greater or lesser degree in dependence on the movement of the two parts. In this way the inductance of the coll arrangement Is changed and an inductive signal dependent upon the position of the core is received.
  • a disadvantage of a position sensor of this kind lies in the fact that such an arrangement can be integrated into an operating cylinder only at considerable expense In terms of apparatus.
  • a position sensor connected to one of two relatively movable parts, of at least two coils, of which one is formed as a primary or drive coll and the other as a secondary or sensor coil, the two coils being magnetically coupled together at least in part by an element connected for movement with the other of the two parts and exhibiting a graduated permeability and/or electrical conductivity in the direction of movement.
  • This position sensor is easily installed in a drive mechanism, for example a hydraulic or pneumatic actuating cylinder, by arranging the two coils as rings around the actuating rod of the cylinder and providing that the actuating rod exhibits a permeability which is graduated in the direction of movement.
  • a drive mechanism for example a hydraulic or pneumatic actuating cylinder
  • the arrangement of the sensor coils as rings around the actuating rod is only one of the possible ways of achieving the desired result.
  • the graduated-permeabillty element co-operating with the sensor colls may, for example, be a separate rod-shaped element extending through the colls and being mounted on the control rod parallel therewith and for movement therewith in their common axial direction.
  • connection of the drive coil and the sensor coil are linked to control and evaluation circuitry which supplies the drive coil with an alternating current voltage and evaluates the signal induced in the sensory coll.
  • the evaluation circuitry may be linked to programmable control means which in turn controls valves which actuate the cylinder.
  • programmable control means which in turn controls valves which actuate the cylinder.
  • the compact design of the position sensor also enables it to be installed in very small adjustable drive mechanisms and hydraulic cylinders.
  • the corresponding profile can be applied by a computer-controlled machine tool to an actuating rod made for example from V2A steel, and the nickel layer, to be given a shape complementary to the generally conical profile of the steel rod, may be applied by means of a computer-controlled immersion during a subsequent electrolytic deposition process.
  • Production may also be carried out by application to the cylindrical actuating rod of a special surface treatment which results 1n the basically conical external graduation of the permeability, for example by hardening with varying depth of penetration, possibly by means of an appropriately controlled laser hardening process.
  • the eddy current skin depth ⁇ may be defined as follows:
  • V s 2 . f. M 12 .i ⁇
  • 2 mutual inductance between driving and sensor coils.
  • V s is measured by evaluation circuitry with high input impedance, providing a relatively temperature-independent measurement signal. If the thickness of the outer metal layer is less than 507. of the eddy current skin depth of that layer and the inner layer of the actuating rod has a greater eddy current skin depth, the result is a stronger dependence of the mutual inductance M 12 and on the thickness of the outer layer. By having only a small gap between the coils and a small gap between the coils and the actuating rod, not only can the size of the sensor be kept very small but in addition a stronger measurement signal can be obtained.
  • a further reduction in the size of the sensor can be achieved if the two-coil arrangement takes the form of a multi-strand winding on a ferrlte ring core.
  • the sensor coll is then one strand of this multi-strand winding.
  • the measurement signal obtained is further improved if a ferrite ring core with a focussing effect is used.
  • An adjustable drive mechanism or hydraulic actuating cylinder controlled by a position sensor and evaluation circuitry is especially suited to the operation of valves, by reason of its high level of precision.
  • polyvinyl fluoride as the outer layer of the actuating rod is particularly advantageous, since this material has excellent elasticity and can thus undertake sealing operations and furthermore allows, by reason of its favourable electro-magnetic qualities, a very small gap between coil and actuating rod.
  • the graduation of the permeability of the element can be achieved by means of suitable surface treatment which, for example, causes a structural change. This likewise does not alter the circular cross-section of the cylindrical control rod.
  • Figure 1 shows a partly cut away longitudinal section of an actuating cylinder with an integrated position sensor according to the invention
  • Figure 2 shows a partly cut away longitudinal section of another actuating cylinder with a mechanically connected position sensor according to the invention
  • Figure 3 shows an evaluation circuit for the position sensor controlling an actuating cylinder as shown in Figure 1 or 2;
  • Figure 4 shows a cross-sectional Illustration of a ferrite ring core for the driving and sensor coils of such position sensor.
  • a piston 12 is axially slidably mounted in a cylinder casing 14.
  • axial actuating rods 16, 18 are secured for actuating position setting members.
  • the actuating rod 18 extends at the longitudinal end of the cylinder casing 14 through a guideway 20, so that the actuating rod 18 can move axially with only a very narrow radial play.
  • the guideway 20 1s also provided with a seal (not illustrated), in order to seal the pressure fluid tightly inside the pressure chamber 22 between the piston 12, the cylinder casing 14 and the guideway 20.
  • the supply of the pressure fluid to and from the pressure chamber 22 is regulated by means of an electrically actuable valve 24, which 1s arranged in a pressure-fluid line 26 connecting the pressure chamber 22 with a source of pressure fluid.
  • an electrically actuable valve 24 which 1s arranged in a pressure-fluid line 26 connecting the pressure chamber 22 with a source of pressure fluid.
  • a ring with a circular coil arrangement 28 which surrounds the actuating rod 18.
  • the coil arrangement 28 consists of a ferrite ring core 30, e.g. with a preferably T-shaped profile, and two coils 32, 34. These coils are laid out as a driving coil 32 and a receiving coil 34 and are arranged coaxially in relation to the actuating rod 18.
  • the coils 32, 34 are fitted over the actuating rod 18 with an interposed plastics layer 36, in order to avoid damage to the coils as the actuating rod slides through.
  • the gap between the coils 32, 34 and the actuating rod 18 is between 0.1 and lmm. Preferably the gap between the coils is also small, less than lmm.
  • the actuating rod 18 consists of a conically tapering, solid inner part 38 extending from the piston 12 outwards and made from V2A steel for example, together with a surrounding hollow cylindrical outer part 40 of which the inner surface fits the cone-shaped inner part 38 exactly. By means of these two complementarily conically shaped parts 38, 40 the actuating rod 18 retains the external shape of a circular cylinder.
  • the outer part 40 may, for example, be of nickel, the eddy current skin depth of which differs greatly from that of V2A steel.
  • the eddy current penetration depth of the nickel 1s substantially less than that of the V2A steel.
  • the thickness of the outer part 40 is approximately 1 ⁇ at the piston and approximately 50 ⁇ m at the opposite end from the piston.
  • the induced voltage in the sensor coil 34 varies by, for example 50% in dependence on the position of the piston 12 and thus of the actuating rod 18.
  • this may be the case if the rod has a diameter of 20 mm and the coils have a clearance of approximately 0.5 mm, the gap between the coils being approximately 0.3 mm.
  • An appropriately dimensioned coll system can thus provide a position indication for the actuating rod which is accurate to within about 1% for a piston stroke of between 20 mm and 500 mm.
  • the measurement signal received can 1n turn be applied by means of evaluation and control circuitry as described below, for the purposes of the precise control of the hydraulic cylinder 10.
  • FIG 2 shows a hydraulic cylinder 42 similar to the hydraulic cylinder 10 in Figure 1, with essentially identical parts which, accordingly, are indicated by the same reference numerals.
  • the difference from the arrangement shown in Figure 1 results from the fact that the actuating rod does not itself act as the coil core with a graduated eddy current skin depth, but that, instead, a position sensor 43 is connected to an actuating rod 44 of the hydraulic cylinder 42 by a linking element 46.
  • This position sensor 43 is again identical in its constituent parts to the arrangement shown in Figure 1, being made up of a fixedly located coil arrangement 28 and, carried by the linking element 46 so as to move with the actuating rod 44, a core rod 48, which, like the actuating rod 18 of Figure 1, is axially movable through the coil arrangement 28 and consists of two complementarily cone-shaped coaxial parts.
  • the position sensor is not integrated within the hydraulic cylinder 10 as in the case in Figure 1, but may easily be removed from the hydraulic cylinder and exchanged, or installed 1n other apparatus, should that be necessary.
  • Figure 3 illustrates schematically a signal evaluation circuit and control system 50 for the position sensors shown in Figures 1 and 2.
  • the evaluation circuit and control system 50 is based on a single chip computer 52, for example, an 8-bit computer, provided with an output 54 which applies an excitation signal causing the circuit 56 to deliver an output signal, at predetermined amplitude and frequency, to the driving coil 32 of the position sensor 28.
  • the V s signal Induced 1n the sensor coil 34, with an amplitude dependent on the position of the actuating rod 18 or 48, is amplified in a receiver circuit 57 and applied via an input 58 to an analog-digital converter section of the microprocessor 52.
  • the microprocessor 52 has, in addition, inputs and outputs for an interface or bus connection 60, through which the processor can engage in an exchange of data with a programmable control system.
  • the signal at the Input 58 to the microprocessor 52 may then be checked by way of a theoretical/actual comparison in relation to the control of the hydraulic cylinder, for which purpose the microprocessor 52 has two outputs 62, 64 for drive circuits, by which the electrically operated valves or magnetic valves 24 can be actuated.
  • the drive circuit 56 may be equipped with a section ensuring a constant current.
  • the microprocessor timing frequency ensures a constant frequency of the signal at the output 54. If the evaluation circuit is to be used to take very precise measurements over a broad temperature range, a corrective algorithm can be programmed into the microprocessor to compensate for any temperature variations in the circuit 56 and 57 and the coils 32, 34.
  • the entire circuit 50 can be accommodated by using surface mount device (SMD) technology, for example, in a container having dimensions of, say, 50 mm x 50 mm x 15 mm and may be connected directly to the sensor coil system or housed in a suitable part of the structure of the hydraulic or pneumatic cylinder.
  • SMD surface mount device
  • Figure 4 shows the cross-section of a ferrite ring core 70 which enables the magnetic field to be focussed in the axial direction of the colls.
  • the ferrite core 70 is seen 1n its axial cross-section to have a truncated conical shape, and preferably the sensor coil 34 is mounted surrounding the small-diameter of the ferrite core, with the driving coil 32 surrounding the large-diameter end.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
EP91900865A 1989-12-11 1990-12-11 Position sensor Withdrawn EP0505422A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3940894 1989-12-11
DE3940894A DE3940894A1 (de) 1989-12-11 1989-12-11 Positionssensor

Publications (1)

Publication Number Publication Date
EP0505422A1 true EP0505422A1 (en) 1992-09-30

Family

ID=6395250

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91900865A Withdrawn EP0505422A1 (en) 1989-12-11 1990-12-11 Position sensor

Country Status (4)

Country Link
EP (1) EP0505422A1 (ja)
JP (1) JPH05506091A (ja)
DE (1) DE3940894A1 (ja)
WO (1) WO1991009277A2 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2688282B1 (fr) * 1992-03-06 1994-05-27 Wabco Westinghouse Equip Auto Dispositif d'entrainement lineaire.
GB2279148A (en) * 1993-06-17 1994-12-21 Univ Cardiff Magnetic position transducer
DE19919424A1 (de) * 1999-04-28 2000-11-30 Tyco Electronics Logistics Ag Magnetischer Positionssensor, seine Verwendung und seine Herstellung
DE102006010780A1 (de) * 2006-03-08 2007-09-13 Liebherr-France Sas Positionsmeßsystem für Hydraulikzylinder
DE102012013429B4 (de) * 2012-06-27 2019-05-16 Paragon Ag Messvorrichtung zur Erfassung der Position eines Stellglieds eines Linearaktors
JP6171782B2 (ja) * 2013-09-20 2017-08-02 スミダコーポレーション株式会社 電磁発電機およびこれを搭載した直動アクチュエータ装置
DE102016202491A1 (de) * 2016-02-18 2017-08-24 Festo Ag & Co. Kg Fluidtechnisches Antriebssystem mit Positionssensor
WO2019142780A1 (ja) * 2018-01-16 2019-07-25 三木 篤子 位置検出装置
DE102020105795A1 (de) * 2020-03-04 2021-09-09 Schaeffler Technologies AG & Co. KG Linearaktuator für Hinterachslenkung eines Kraftfahrzeuges

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Publication number Priority date Publication date Assignee Title
DE2653943C3 (de) * 1976-11-27 1979-05-10 Dieter Hans 8200 Rosenheim Viebach Induktiver Meßwertwandler für Längen- oder WinkelmeBwerte
AU516623B2 (en) * 1977-08-17 1981-06-11 Edward Hayter John Thrower of transported materials
JPS5525251U (ja) * 1978-08-05 1980-02-19
DE2915212C2 (de) * 1979-04-14 1986-06-19 H. Kuhnke Gmbh Kg, 2427 Malente Einrichtung zum berührungslosen Erfassen und Auswerten von insbesondere Zwischenpositionen eines in einem Arbeitszylinder verstellbaren Kolbens
DE2919359A1 (de) * 1979-05-14 1980-11-27 Orszagos Koolaj Gazipari Induktionsfuehlereinrichtung zur bestimmung der axialen lage und/oder lageaenderung eines bauteils
JPS56153202A (en) * 1980-04-30 1981-11-27 Japanese National Railways<Jnr> Displacement detecting device
US4445923A (en) * 1982-12-30 1984-05-01 Owens-Illinois, Inc. Position sensing device
DE3347052A1 (de) * 1983-12-24 1985-07-04 Robert Bosch Gmbh, 7000 Stuttgart Verfahren und vorrichtung zur messempfindlichkeitserhoehung von beruehrungsfrei arbeitenden wegmesssensoren
DE3410534A1 (de) * 1984-03-22 1985-10-03 Feinmechanische Werke Mainz Gmbh, 6500 Mainz Weg- oder geschwindigkeitsaufnehmer fuer hydraulische oder pneumatische zylinder oder ventile
IE55855B1 (en) * 1984-10-19 1991-01-30 Kollmorgen Ireland Ltd Position and speed sensors
JPS61134601A (ja) * 1984-12-06 1986-06-21 Kokusan Denki Co Ltd 磁気形変位センサ
DE3525199A1 (de) * 1985-07-15 1987-01-22 Rexroth Mannesmann Gmbh Induktiver geber
JPS62229002A (ja) * 1986-03-31 1987-10-07 Matsushita Electric Ind Co Ltd 位置検出装置

Non-Patent Citations (1)

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Title
See references of WO9109277A2 *

Also Published As

Publication number Publication date
JPH05506091A (ja) 1993-09-02
WO1991009277A3 (en) 1991-07-25
DE3940894A1 (de) 1991-06-13
DE3940894C2 (ja) 1993-04-22
WO1991009277A2 (en) 1991-06-27

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