EP0494338A1 - Elément de capteur de pression - Google Patents

Elément de capteur de pression Download PDF

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Publication number
EP0494338A1
EP0494338A1 EP91113076A EP91113076A EP0494338A1 EP 0494338 A1 EP0494338 A1 EP 0494338A1 EP 91113076 A EP91113076 A EP 91113076A EP 91113076 A EP91113076 A EP 91113076A EP 0494338 A1 EP0494338 A1 EP 0494338A1
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EP
European Patent Office
Prior art keywords
sensing element
liquid crystal
crystal polymer
diaphragm
pressure vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP91113076A
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German (de)
English (en)
Inventor
Richard Alan Papai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Johnson Service Co
Original Assignee
Johnson Service Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Johnson Service Co filed Critical Johnson Service Co
Publication of EP0494338A1 publication Critical patent/EP0494338A1/fr
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0046—Fluidic connecting means using isolation membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/08—Means for indicating or recording, e.g. for remote indication
    • G01L19/12—Alarms or signals

Definitions

  • the present invention relates generally to the art of pressure sensing elements, and more specifically to the use of modern engineering plastics for certain components of such devices. Still more specifically, the present invention relates to such devices where seals are hermetically formed between the several liquid crystal polymer components and between certain liquid crystal polymer components and certain metal components and/or certain polyimide film components, the end product being useful in a wide variety of environments and for sensing a wide variety of pressures, e.g. from 20 inches of vacuum to more than 500 psig. In its most specific form, the present invention also employs a polyimide, single convolution diaphragm.
  • Pressure controls for a variety of applications have been made for a number of years by the assignee of the present invention.
  • the types of controls with which the present invention is concerned have been sold under the PENN trademark and include pressure controls for refrigeration and air conditioning equipment.
  • a tube is connected to the environment to be measured and to a control housing through a fitting known to the trade as a controller "cup".
  • a diaphragm Within the cup, a diaphragm is spring biased and mounted in such a way that a bushing moves in response to the pressure of the fluid or gas contained within the environment. Such movement can be simply read or used by the controller to carry out certain control functions, which in and of themselves are known and form no part of the invention.
  • the controllers may be variously configured in single pole or double pole arrangements, and they are designed for use with different fluids (e.g. known refrigerants such as R-12, R-22, R-500, R-502 and R-134A) and for a variety of pressure levels (e.g. from 20 inches of vacuum to more than 475 psig).
  • fluids e.g. known refrigerants such as R-12, R-22, R-500, R-502 and R-134A
  • pressure levels e.g. from 20 inches of vacuum to more than 475 psig.
  • These controls are designed for use as operating controls where a small pressure differential may be detected, e.g. 5 psi, typically direct controlled to AC motors with numerous setting choices, either CLOSE High - OPEN Low or OPEN High - CLOSE Low.
  • Brazed joints are expensive per piece unless large furnaces are available. The latter obviously increases operating costs.
  • Laser welding also provides a good joint, but expensive equipment is necessary and the process is slow and requires extremely clean parts.
  • Soldering uses expensive material and is considered to be quite slow.
  • Tig welding is cheaper, but is more typically used for securing than sealing.
  • Lap welding automation has been slow to develop and suffers from generally slow through-put and unacceptably high joint temperatures. These joint costs are normally justified because of the high reliability required. Joint integrity is especially important in the refrigeration industry, where inoperability and CFC leakage are both substantial concerns.
  • heretofore brazing, welding and soldering have been viewed as the only techniques which are durable enough to survive both the harsh chemical environment and the abusive vibration conditions which exist in refrigeration equipment. Testing by agencies, such as Underwriter's Laboratory, also has dictated the use of mechanical type joints in most past systems.
  • LCP liquid crystal polymers
  • These resins will be discussed in greater detail below in connection with a description of the preferred embodiment, but generally they are known as highly resistant materials which exhibit toughness, dimensional stability, flame resistance and ease of processing. They are inert to such chemicals as acids, bases, aromatic and halogenated hydrocarbons, etc. They also resist stress cracking in the presence of most chemicals at elevated temperatures and pressures.
  • LCP Low density polyethylene
  • VECTRA® trademark One manufacturer of LCP is Hoechst Celanese Corporation which markets a number of such resins under the VECTRA® trademark. That company describes its LCP resins as wholly aromatic polyesters useful for injection molding and extrusion opportunities, especially when reinforced with fibers, fillers and the like. Principal physical characteristics are said to be V-O ratings down to 1/64", high strength and modulus, chemical resistance (even under stress), controllable, very low co-efficient of linear thermal expansion, high dielectric strength and high heat deflection temperature. Molding advantages are said to be fast cycle times, low shrinkage, low melt viscosity, resistance to warpage, etc. Usage temperatures are rated between -325oF to +460oF.
  • VECTRA® polymers are recommended by their manufacturer for electronic applications, relays, housings, switches, fiber optic strength members, automotive components, motor components, shafts, housings, microwave equipment, watch components, etc.
  • Four technical brochures from Hoechst Celanese Corporation are supplied herewith (TVC 7B/5M-88, VC-7 and VC-3 and VC-4).
  • LCP type resins have also been disclosed in the patent literature. See, for example, U.S. Patent No. 4,825,166 issued April 25, 1989 to MacGugan for "Bobbin For A Magnetic Sensor".
  • the plastic frame for carrying a magnetic core is made from poly-ether-ether-ketones, an LCP class material.
  • Another use is shown in United States Patent No. 4,880,591 issued November 14, 1989 to Baba for "Method For Manufacturing Speaker Vibration Member".
  • at least ten percent (10%) of a thermoplastic LCP with 3-40% fiber or flake fill is used as the main structural material for a sound speaker.
  • An LCP is used as a molded thermoplastic substrate in a "Pressure Transducer With Conductive Polymer Bridge" which is the subject of United States Patent No. 4,852,581 issued August 1, 1989 to Frank. Conductive polymers provide the resistive elements of a Wheatstone bridge in this device.
  • the winding tube of this device may be made from LCP class resins, and sub-assemblies thereof may be permanently joined by ultrasonic welding.
  • a Hoechst Celanese Corporation patent describes a bonding processing using Ph adjustment (United States Patent No. 4,863,787 issued September 5, 1989 to Gerg, et al.), and a "High Temperature Fluid Sensor" is shown in United States Patent No. 4,881,055 issued to Capp, et al. on November 14, 1989.
  • an LCP is used as a housing material for electrical conductors which project from opposite ends of the body and which are shrouded with and electrically connected by fusible material that has been molded in place. Nowhere are LCP's suggested for use as a pressure vessel, either in existing literature or patents.
  • an LCP resin is used to fabricate certain parts of a pressure vessel, e.g. the cup and other components of a pressure control device of the type described above.
  • the hermetic seal formed previously by mechanical operations or third materials is formed in the preferred embodiment of the invention by molding operations and/or by ultrasonic welding techniques.
  • a feature of the present invention is providing hermetic seals at a high success rate employing labor saving operations.
  • the diaphragm of a pressure control is made from a polyimide material in the form of a single convolution diaphragm and is attached to the LCP enclosure component by a suitable attachment technique, e.g. by an adhesive.
  • a suitable attachment technique e.g. by an adhesive.
  • an LCP disc plate is welded ultrasonically to the enclosure to serve as a boundary for the diaphragm, and a bushing is positioned on one side of the diaphragm to transfer the governed movement as its position changes relative to the pressure exerted on the other side of the diaphragm.
  • the LCP material is molded around the pressure control capillary tube to provide a hermetic seal therebetween.
  • the fitting resulting from the molding operation may be used as a connector to a high or low pressure transducer, using ultrasonic welding as the attachment technique if the fitting and the cup to which the fitting is attached are both made from the LCP.
  • the molding method most preferably includes the step of heating the capillary to the temperature of the molten LCP, e.g. by direct current heating. Pre-cleaning by plasma etching is also disclosed as a method step in the sealing process to optimize the opportunity for achieving a hermetic seal.
  • the resulting pressure vessel with hermetic seal is ideally suited for use in harsh environments, e.g. in refrigeration applications, automotive applications and the like.
  • harsh environments e.g. in refrigeration applications, automotive applications and the like.
  • Other features of the present invention will appear to those skilled in the art after reading the present specification or will be described in the remaining parts hereof, all of which are deemed to fall within the scope of the application if they fall within the scope of the claims which follow.
  • FIGURE 1 Before proceeding to a description of the preferred embodiment of the present invention, it will be helpful to generally describe the components of a prior art pressure control device 10 which is illustrated in general form in FIGURE 1 and which is of the type previously sold by the assignee of the present invention under the PENN trademark (see the aforementioned technical literature which is expressly incorporated herein by this reference).
  • Control device 10 includes a coil of tubing 12, e.g. copper tubing, the free end 14 of which is suitably coupled into an environment, the pressure of which is to be sensed. In a typical application, end 14 would be coupled into the refrigerant system of an air-conditioning system (not shown).
  • the second end 16 of tubing 12 is hermetically sealed to an inverted cup 18 of the control device. Cup 18 in turn is attached to the base 20 of a control housing 22, the face of which might have pressure indicating means shown thereon as is illustrated in the aforementioned product brochures.
  • control housing 22 a stacked bellows, spring biased diaphragm 21 is located in control housing 22 and that a bushing is located adjacent thereto for movement upwardly and downwardly (when the controller is configured as in FIGURE 1) in response to the pressure existing on the opposite side of the diaphragm, as admitted to control housing 22 through tubing 12.
  • the control housing, bushings and other elements have typically been made from steel (most typically a stainless steel) and the various components have been attached using certain of the more costly joining and sealing techniques described above in connection with the background of the invention.
  • Single, convolution diaphragms made from stainless steel or beryllium copper have been employed for these types of devices, but suffer from numerous drawbacks as will be discussed further below.
  • Tubing 12 is typically brazed to the stainless steel control housing 22, but even using a high level of manufacturing care, a hermetic seal may not result. During testing at the time of manufacture, those parts which are not properly sealed must be discarded or repaired, resulting in lost time and added material expense.
  • FIGURE 2 shows only a portion of the tubing 12 and which does not show the control housing 22.
  • the latter would be similar to the housing 22 shown in FIGURE 1.
  • Tubing 12 is still made from copper (in the preferred embodiment) and the free end thereof (not shown) would be suitable coupled in use to the system whose pressure is to be sensed.
  • Its second end 16 in this FIGURE is shown attached to a pressure vessel 32 of the control device 35 according to the preferred form of the invention.
  • the particular material used for the pressure vessel 32 is an engineering plastic of the type generally known as an LCP resin.
  • the present inventor has found two Vectra® resins to be especially suitable for low and high pressure cups (20 inch vacuum to 150 psig and 100 to 475 psig respectively). These materials and certain properties the manufacturer has listed for them are shown below in Table 1.
  • the preferred low pressure material is Vectra® A130 and the preferred high or low pressure connector is Vectra® B130.
  • Pressure vessel 32 is actually made from two components, a first receiver cap 38 and a second main cup 40.
  • Receiver cap 38 is made in a molding process soon to be described and includes a first tubular portion 42 having a central bore 43 for receiving end 16 of tubing 12, a radially directed web 44 extending outwardly from tubular portion 42 and an annular, cylindrical attachment ring 45 having an inner wall 47 and terminating in a circular end 48.
  • tubing 16 includes a pair of spaced apart, annular, radially extending ribs 49 near its end 50, and end 50 is flared slightly.
  • the present inventor has determined that a high percentage of hermetic seals for the cap 38 and embedded tubing 12 can be achieved if the tubing is heated to about the same temperature as that of the LCP casting resin, in the range of about 575oF. Heating may be accomplished by using direct current amperage from a 12 volt current source. It is also helpful in achieving a hermetic seal to preclean the metallic tubing 12, such as by plasma etching to assure a high throughput. Using these two processing techniques, success rates of 98% are achievable, as compared to the 75% (or less) success rate that might be achieved without tube preheating and without plasma etching.
  • the main cup 40 is also made from the selected LCP plastic by a molding technique.
  • Cup 40 includes a first cylindrical plug portion 52 having a central bore 53 therethrough. The diameter of portion 52 is selected to be received by wall 47 of attachment ring 45.
  • a web 56 extends radially from portion 52 and terminates in another annular cylindrical portion 58.
  • Portion 52 is preferably sized so that its inner end 53 is spaced slightly from the flared end 50 of tube 12 and the bore 53 of portion 52 is preferably axially aligned with that of tubing 12.
  • the preferred attachment technique is ultrasonic welding. If the latter is employed, undercutting of wall 47, as is shown at 49 and 49', is desirable. Ultrasonic welding is known, and its use in joining LCP components does not, in and of itself, form part of this invention.
  • Web 56 and cylindrical portion 58 include an outer surface 60 and an inner surface comprised of a first generally planar disc 62, a step 64 perpendicularly extending from the outer edge of disc 62, a shoulder ring 66 aligned in a plane generally parallel to disc 62 and another step 68 extending perpendicularly from the outer edge of ring 66.
  • the shape is similar to that employed for the steel sensing elements of the prior art.
  • a stainless spring 70 creating a negative pressure bias a spring button 72 having a central nub 73 received in the central aperture 71 of spring 70 and a bushing 76 disposed on the opposite side of spring button 72 from the inlet bore of the cup 35.
  • Spring button 72 transposes motion caused by the pressure sensed by the system onto the next component to be described, i.e. the diaphragm 80.
  • the diaphragm 80 is of the single convolution type and is made of a DuPont polyimide called KAPTON, but before proceeding to the characteristics of the diaphragm and a description of a preferred method of manufacture, it will be helpful to complete the description of the preferred sensor 35.
  • a sensor bushing 76 Located on the opposite side of the diaphragm 80 from spring button 72 is a sensor bushing 76 having a circular disc 84 and a generally cylindrical and centrally located extension 85. Extension 85 includes a threaded hole 86 for receiving the sensing or measuring device as is known with prior systems.
  • Bushing 76 is retained by a disc plate 88 which extends radially about a central aperture 89 designed to sliding receive extension 85.
  • Disc plate 88 in the preferred embodiment, is also made from an LCP resin and is formed with an annular projection 90 around its periphery configured to sandwich the outer edge 91 of diaphragm 80 between itself and the shoulder 66 of cup 40.
  • the LCP components described above may be made from 100% resin or may be filled with fillers known to the art. We have successfully employed 30% glass fiber filling in prototype systems.
  • the disc plate projection 90 is arranged with shoulder 66 so as to provide a contact of the edge 92 of diaphragm 80 at the radius of its convolution, to prevent point contact and to enhance system accuracy.
  • the diaphragm itself is formed with a single convolution, from a .005" thick KAPTON film in the preferred form for low pressure sensors and .011" thick KAPTON film for the high pressure system.
  • the diaphragm 80 it is desirable to obtain a relatively large stroke for the diaphragm, while maintaining a spring rate equal to or lower than the spring rate of prior steel bellows diaphragm designs.
  • the diaphragm like other components of the system, must be resistant to the chemical environments to which it will be subjected and must, under the conditions employed here, possess the following properties:
  • the film 80 is clamped between die faces 105 and 107 of respective die elements 104 and 106 sufficiently to prevent slippage.
  • a punch 108 which mimics the shape of the desired convolution proceeds to push the diaphragm material into a void area 109 in die 107 and around a die button 110 supported thereby.
  • Oil or another suitable lubricant, is used during the stretch forming operation to distribute the stress loads over the whole surface being stretched. Without a suitable lubricant, 50% or more of the stretching occurs only between the load point of the punch 108 and the maximum stress point. Use of oil avoids overstressing or overthinning where concentrated areas of stress may otherwise occur.
  • Heat is also used during forming to give the stretched material a memory set.
  • the formed or stretched shape produced is only stable to that memory set temperature and varies with applied pressure or forces. I prefer to maintain a minimum of 100°F differential between the stretching temperature and the maximum operating temperature of the device. If the stretching required is close to the ultimate elongation of the material, a larger differential temperature would be permitted.
  • the heat acts as a catalyst to stabilize the internal residual stresses caused during stretching within the elastic range, and the finished product must be stretched and heat stabilized within the material's ultimate elongation limits while having a sufficiently high forming temperature that no external pressures or ambient temperatures caused the diaphragm to change its shape. In our most preferred embodiment the dies are heated to about 250°F.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
EP91113076A 1991-01-10 1991-08-05 Elément de capteur de pression Withdrawn EP0494338A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US639919 1991-01-10
US07/639,919 US5163327A (en) 1991-01-10 1991-01-10 Pressure sensing elements

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EP0494338A1 true EP0494338A1 (fr) 1992-07-15

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JP (1) JPH075058A (fr)
CA (1) CA2049192A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104215385A (zh) * 2014-09-30 2014-12-17 成都卓微科技有限公司 一种双膜片结构的水压变化测量的水下压力传感器
CN104215384A (zh) * 2014-09-30 2014-12-17 成都卓微科技有限公司 一种膜片导向式防膜片破损的水下压力传感器
CN104215387A (zh) * 2014-09-30 2014-12-17 成都卓微科技有限公司 一种滚动膜片式压力平衡的水下压力传感器
CN104215386A (zh) * 2014-09-30 2014-12-17 成都卓微科技有限公司 一种限位式膜片导向的水下压力传感器
CN107771275A (zh) * 2015-06-25 2018-03-06 恩德莱斯和豪瑟尔两合公司 压力传感器模块、具有压力传感器模块的测量布置

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5568364A (en) * 1993-08-31 1996-10-22 Wireless Access Inc. Sonically-bonded outer support structure for an integrated circuit card
US5619900A (en) * 1995-06-07 1997-04-15 Itt Automotive Inc. Vacuum booster assembly
US5818002A (en) * 1996-03-01 1998-10-06 Cts Corporation Pressure change warning switch
US6036711A (en) * 1998-02-18 2000-03-14 United States Surgical Corporation Reusable cannula
US6717337B2 (en) 2001-05-23 2004-04-06 The United States Of America As Represented By The Secretary Of The Navy Piezoelectric acoustic actuator
US7229222B2 (en) * 2004-08-05 2007-06-12 E. I. Du Pont De Nemours And Company Package sealing means and photonic device packages so formed
JP6271871B2 (ja) * 2013-06-04 2018-01-31 株式会社フジキン ダイヤフラム弁
CN115446876B (zh) * 2022-09-19 2023-05-02 广东智能无人系统研究院(南沙) 一种深海机械手多维力感知系统及方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3417142A1 (de) * 1983-06-18 1984-12-20 Mitsubishi Denki K.K., Tokio/Tokyo Druckempfindliche vorrichtung mit hysterese zur vermeidung von pendelbewegungen
US4768382A (en) * 1987-04-23 1988-09-06 Honeywell Inc. Method of producing a uniform fluid-tight seal between a thin, flexible member and a support and an apparatus utilizing the same
US4852581A (en) * 1987-12-14 1989-08-01 Medex, Inc. Pressure transducer with conductive polymer bridge

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2753230A1 (de) * 1977-11-29 1979-06-07 Bayer Ag Verfahren zur herstellung aromatischer polyester
US4863767A (en) * 1984-04-13 1989-09-05 Hoechst Celanese Corporation Method of adhesive bonding by use of thermotropic liquid crystal polymers
US4599594A (en) * 1985-02-07 1986-07-08 Westinghouse Electric Corp. Electrical inductive apparatus
US4772263A (en) * 1986-02-03 1988-09-20 Regents Of The University Of Minnesota Spring driven infusion pump
US4871817A (en) * 1986-12-31 1989-10-03 General Electric Company Polyetherimide-liquid crystal polymer blends
US4825166A (en) * 1987-01-27 1989-04-25 Sundstrand Data Control, Inc. Bobbin for a magnetic sensor
DE3718396A1 (de) * 1987-06-02 1988-12-22 Bayer Ag Thermotrope polyesterimide mit ausgezeichneter verarbeitbarkeit, verfahren zu ihrer herstellung und ihre verwendung zur herstellung von formkoerpern, filamenten, fasern und folien
US4781535A (en) * 1987-11-13 1988-11-01 Pulsafeeder, Inc. Apparatus and method for sensing diaphragm failures in reciprocating pumps
US4880591A (en) * 1988-04-05 1989-11-14 Mitsubishi Denki Kabushiki Kaisha Method for manufacturing speaker vibration member
US4834678A (en) * 1988-05-31 1989-05-30 Amp Incorporated High voltage contact assembly
JPH0234877U (fr) * 1988-08-30 1990-03-06
US4866989A (en) * 1988-11-07 1989-09-19 Chrysler Motors Corporation Pressure transducer with a sealed sensor
US4881055A (en) * 1988-11-10 1989-11-14 Ingersoll-Rand Company High-temperature-fluid sensor
US4944487A (en) * 1989-05-08 1990-07-31 Lee Company Diaphragm valve
US4958661A (en) * 1989-08-08 1990-09-25 The Lee Company Check valve

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3417142A1 (de) * 1983-06-18 1984-12-20 Mitsubishi Denki K.K., Tokio/Tokyo Druckempfindliche vorrichtung mit hysterese zur vermeidung von pendelbewegungen
US4768382A (en) * 1987-04-23 1988-09-06 Honeywell Inc. Method of producing a uniform fluid-tight seal between a thin, flexible member and a support and an apparatus utilizing the same
US4852581A (en) * 1987-12-14 1989-08-01 Medex, Inc. Pressure transducer with conductive polymer bridge

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104215385A (zh) * 2014-09-30 2014-12-17 成都卓微科技有限公司 一种双膜片结构的水压变化测量的水下压力传感器
CN104215384A (zh) * 2014-09-30 2014-12-17 成都卓微科技有限公司 一种膜片导向式防膜片破损的水下压力传感器
CN104215387A (zh) * 2014-09-30 2014-12-17 成都卓微科技有限公司 一种滚动膜片式压力平衡的水下压力传感器
CN104215386A (zh) * 2014-09-30 2014-12-17 成都卓微科技有限公司 一种限位式膜片导向的水下压力传感器
CN107771275A (zh) * 2015-06-25 2018-03-06 恩德莱斯和豪瑟尔两合公司 压力传感器模块、具有压力传感器模块的测量布置
CN107771275B (zh) * 2015-06-25 2020-04-24 恩德莱斯和豪瑟尔欧洲两合公司 压力传感器模块、具有压力传感器模块的测量布置
US11408789B2 (en) 2015-06-25 2022-08-09 Endress+Hauser Gmbh+Co.Kg Measuring arrangement with a pressure sensor module

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US5163327A (en) 1992-11-17
JPH075058A (ja) 1995-01-10
CA2049192A1 (fr) 1992-07-11

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