EP0480192B1 - Doppel-Membranpumpe - Google Patents

Doppel-Membranpumpe Download PDF

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Publication number
EP0480192B1
EP0480192B1 EP19910115450 EP91115450A EP0480192B1 EP 0480192 B1 EP0480192 B1 EP 0480192B1 EP 19910115450 EP19910115450 EP 19910115450 EP 91115450 A EP91115450 A EP 91115450A EP 0480192 B1 EP0480192 B1 EP 0480192B1
Authority
EP
European Patent Office
Prior art keywords
actuating rod
magnets
control spool
diaphragm pump
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP19910115450
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0480192A1 (de
Inventor
Dirk Budde
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PSG Germany GmbH
Original Assignee
Almatec Technische Innovationen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Almatec Technische Innovationen GmbH filed Critical Almatec Technische Innovationen GmbH
Publication of EP0480192A1 publication Critical patent/EP0480192A1/de
Application granted granted Critical
Publication of EP0480192B1 publication Critical patent/EP0480192B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F04B43/0736—Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L25/00—Drive, or adjustment during the operation, or distribution or expansion valves by non-mechanical means
    • F01L25/08—Drive, or adjustment during the operation, or distribution or expansion valves by non-mechanical means by electric or magnetic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86574—Supply and exhaust
    • Y10T137/86622—Motor-operated

Definitions

  • the invention relates to a double diaphragm pump with diaphragms connected by a coupling rod and dividing two diaphragm chambers, a control slide which can be displaced as a function of the diaphragms and an actuating element which is dependent on the diaphragm movement.
  • the actuating element consists of an axially displaceable actuating rod, which projects out of the control slide housing and is arranged coaxially in the control slide.
  • This actuating rod acts in both directions via a compression spring on the control slide, which is held in its end positions by spring-loaded detent balls until the force of the spring arranged coaxially on the actuating rod exceeds the detent force.
  • the control slide driven by spring force, swings into the opposite control position and reverses the diaphragm movement. In this way, the control spool is moved back and forth between two stable end positions.
  • This design has the disadvantage that a large number of sealing surfaces with corresponding friction and leakage losses are required, and that there is also a risk of a non-functioning central position, which can lead to a standstill.
  • a minimum pressure of the propellant is also required to switch the control spool, so that operation is particularly easy with small double diaphragm pumps is not possible with pressures below 2 bar.
  • it is necessary to make a compromise between low pressure medium losses but the associated stiffness or, conversely, ease of movement and the associated pressure medium losses.
  • This double diaphragm pump also places high demands on manufacturing accuracy, requires a large amount of assembly work due to the large number of individual parts, and has to be predominantly made of metal.
  • a changeover valve with an actuating element which is magnetically coupled to a control slide and is intended for a piston pump is known from US Pat. No. 4,509,402.
  • the invention has for its object to provide a double diaphragm pump, which is simply constructed from a few parts, does not result in significant internal frictional forces, acts reliably, can be operated easily from low performance to maximum performance and causes the lowest possible pressure medium losses.
  • the solution to this problem is that in a double diaphragm pump of the type mentioned in the invention, the actuating rod or the diaphragms or diaphragm plates are magnetically coupled to the control slide. This coupling can be made contactless, so that there is no friction in this area and no sealing surfaces are required, except where the actuating rod is guided into the area of the membranes.
  • the actuating rod can be coupled to the control slide by mutually repelling single-pole magnets. Likewise, the actuating rod can also be coupled to the control slide by means of oppositely polarized magnets or a magnet and a ferromagnetic part, which attract each other.
  • one magnet or ferromagnetic part can be arranged on each membrane and at least one magnet or ferromagnetic part can be arranged in the control slide.
  • the actuating rod can consist of a rod arranged coaxially in the control slide.
  • This rod can be the coupling rod itself or can consist of an axially displaceable and sealingly protruding from the control slide extending parallel to the coupling rod actuating rod.
  • At least one magnet is arranged on the actuating rod and one on the control slide so that in the opposite end positions the same poles face each other and repel each other.
  • two magnets can be arranged at a distance from each other on the actuating rod and in the control slide with mutually facing poles of the same name if the facing poles of the same name on the actuating rod and in the control slide are polarized differently.
  • This tandem arrangement of the magnet pairs results in a precise, load-independent switching point with double switching force and stable end positions of the control slide, based on an axial magnetization direction.
  • This version is particularly suitable for relatively small reversing valves. However, if there is more space for larger magnets and radial magnetization is possible, this is more advantageous since the actuating forces are greater in this case.
  • the outer surfaces of the magnets on the actuating rod have the same polarity as the inner surfaces of the magnets in the control spool.
  • the double diaphragm pump according to the invention can be produced particularly easily if the distances between the magnets on the actuating rod and in the control slide are the same and are dimensioned with respect to their distances from housing stops such that the actuating rod and the control slide strike against opposite housing stops and when the actuating rod is actuated according to a predetermined value Reverse the actuation path in the opposite position.
  • the switching forces at the closest approximation can be significantly increased if three magnets are arranged at a distance from each other on the actuating rod and in the control slide with poles of the same name facing each other and the poles facing each other in the end positions on the actuating rod and in the control slide are each of the same name.
  • the distances between the magnets on the actuating rod and in the control slide can be the same.
  • the magnets can be arranged in such a way that the actuating rod and the control slide abut opposite housing stops, with two pairs of magnets each lying in a plane perpendicular to the axis of the actuating rod, so that when the actuating rod is actuated in accordance with a predetermined actuation path the opposite Bypass the end position in opposite directions.
  • This arrangement there is a better distribution of force over the entire switching path of the control slide and a power reserve even when the drive air is contaminated.
  • the attractive interaction of the middle magnets on the actuating rod and in the control slide with external magnets in the end positions results in a very stable, vibration-proof end position of the control slide and the actuating rod.
  • Three radially magnetized magnets can also be arranged at a distance from one another on the actuating rod and in the control slide.
  • the outer magnets are polarized in the same way and face each other with the same poles, while the middle magnets are polarized in opposite directions, but also face each other with the same poles.
  • adjacent magnets on the actuating rod and in the control slide are polarized in opposite directions and attract each other, while the magnets on the actuating rod and in the control slide, which are not opposite each other, repel each other.
  • poles of the same name face each other with each magnet pair, so that in this position the actuating rod and the control slide suddenly change over to the opposite end position.
  • the annular permanent magnets arranged on the actuating rod moved by the diaphragms pass underneath the permanent annular magnets arranged in the concentric control slide and repel them after exceeding the point of greatest proximity in the opposite direction, so that the control slide suddenly moves to its opposite working position.
  • the spool and the actuating rod each require only two moving sealing surfaces and only one closely tolerated counter surface for the control slide. Friction only occurs on these four sealing surfaces.
  • the magnets can advantageously be designed as ring magnets.
  • Permanent magnets are preferably used which are strong enough to exert the actuating forces and which do not require any connection to the outside.
  • a pressure down to 0.3 bar is sufficient to operate the double diaphragm pump if the pressure medium consists of compressed air.
  • the double diaphragm pump starts up very easily and has a significantly higher efficiency than pilot valve controlled double diaphragm pumps, especially in the important part-load range.
  • the double diaphragm pump according to the invention is also less susceptible to contamination, can work without lubrication and fatigue and accordingly has reduced wear.
  • control slide and the actuating rod can be produced in a particularly simple manner if they consist of plastic and the magnets and other metal parts are encapsulated with plastic. This manufacturing method requires practically no post-processing.
  • the control spool housing can also be manufactured as a plastic injection molded part. so that the double diaphragm pump according to the invention consists in its essential, in particular the moving parts, of plastic and is metal-free in this respect, which is particularly important for use in the semiconductor industry.
  • a control slide housing 1 with control channels 2, 3, 4, 5, 6 is shown in FIG. 1 by a double diaphragm pump. These control channels lead into a reversing block 9.
  • the control channel 2 is connected to a pressure source, the control channel 3 with a propellant chamber, not shown, the control channel 5 with the other propellant chamber, not shown, the control channel 4 with a propellant outlet and the control channel 6 also with a propellant outlet . Compressed air is usually used as the blowing agent.
  • the control channels 2, 3, 4, 5, 6 are sealed to one another and to the outside by means of O-ring seals and fixed in the reversing block 9 by means of snap rings 8. Furthermore, there are 1 further O-rings in the lid areas of the control slide housing, which acts as a damping element for the reciprocating control slide 12.
  • the O-rings 10 and the end faces 21 each form stop faces.
  • a control slide 12 is arranged axially displaceably in the housing 1. Radially projecting closure members 13 with sliding seals 14 are arranged in the end regions of the control slide 12.
  • control slide 12 In the position shown in FIG. 1, there is a connection to the pressure medium supply via the channels 5, 2 for one propellant chamber and a connection to a pressure medium relief via the channels 3, 4 for the other propellant chamber. If the control slide 12 moves to the left, the propellant chambers reversely acted upon or relieved.
  • the control slide 12 is made of plastic and has ring-shaped permanent magnets 15 which are encapsulated with plastic. The ring magnets 15 are spaced from each other so that their poles of the same name are adjacent, for example north poles on the left and south poles on the right.
  • an actuating rod 16 with end pins 17 of smaller diameter is also axially displaceable and guided in a sealed manner by means of sliding seals 11.
  • the actuating rod 16 consists of a plastic injection molded part, in which ring magnets 18 are also embedded. These ring magnets 18 are arranged at the same distance as the ring magnets 15 and also face one another with poles of the same name, in the same way as the ring magnets 15, i.e. North Pole on the left and South Pole on the right.
  • the axial residual force in the end positions can be influenced by changing the axial distance between the two pairs of ring magnets while maintaining the paths for the control slide and the actuating rod. If the distance is reduced, there is an attractive resulting force between the control slide and the actuating rod, and if the distance is enlarged, a repulsive force results. These can either be for backup of the end positions (repulsive) or as braking force for reversing (attracting).
  • the spool housing 1 with the spool 12 are constructed in the same manner as in Fig. 1, so that the same reference numerals apply.
  • the coupling rod 22 serves here as an actuating rod. Accordingly, the spool housing 1 and the spool 12 are arranged coaxially to the coupling rod 22.
  • the coupling rod 22 is also made of plastic. Ring magnets 18 are accordingly encapsulated with plastic as in FIG. 1.
  • Overmolded sleeves 28 are arranged in the end regions of the coupling rod 22 and are used to fasten one membrane 25 each by means of an embedded membrane core 24.
  • the outer surfaces 26 of the control slide housing 1 form stop surfaces for inner surfaces 27 of the diaphragms 25; they therefore serve as a stroke limitation. If the left diaphragm 25 moves with the coupling rod 22 to the right, the control slide 12 remains in the position shown until the ring magnets 18 are in the area of the ring magnets 15 arrive. At this moment, the repulsive effect of the ring magnets 15 and 18 causes the control slide 12 to jump suddenly to the left. As already described, a reversal of movement is hereby initiated. The process is thus repeated at the end of the path of the coupling rod 22.
  • an opposite movement of the control slide 12 and the actuating rod 16 or the coupling rod 22 can be achieved by the arrangement of a ring magnet in the control slide 12 and a ferromagnetic part in the actuating rod 16 or the coupling rod 22 reach.
  • a further ring magnet can be arranged in the actuating rod 16 or the coupling rod 22 if its polarity is opposite to that of the ring magnet in the control slide 12.
  • FIG. 3 corresponds to the embodiment of FIG. 1, but with radially magnetized inner and outer magnets.
  • This version is particularly suitable for larger control valves because, based on the same magnetic mass, the actuating force is higher here than with axial magnetization.
  • the reversing of the control slide can also take place according to FIG. 4 by correspondingly strong axially acting end magnets 30 at the ends of the control slide 12, which interact directly with a ferromagnetic membrane core or membrane plate 25 and trigger the reversal when tightening a membrane.
  • the actuating rod is then also omitted.
  • the side wall of the spool housing is then as thin as possible.
  • the coupling rod 22 is also provided on both sides of the control channel 2 with two seals 29.
  • the course of the control channel 2 allows cooling of the coupling rod, which is preferably guided in a plastic block 9.
  • the distances between the magnets 15, 31 in the control slide 12 and the magnets 18, 32 on the actuating rod 16, 17 are each the same.
  • the magnets 15, 31 are arranged with respect to their distances from the housing stops 10 so that the actuating rod 16, 17 and the control slide 12 rest against opposite housing stops 10, two pairs of magnets 15, 32; 31, 18 lie in a plane perpendicular to the axis of the actuating rod 16, 17 and, when the actuating rod 16, 17 is actuated, jump in opposite directions into the opposite end position after a predetermined actuation path.
  • the magnets 15, 31; 18, 32 can also be radially magnetized, as shown in FIG. 3.
  • the middle magnets 31, 32 are polarized in opposite directions to the outer magnets 15, 18, so that in the end positions, magnets 15, 32 and 31, 18 with opposite polarity lie opposite each other and thereby define a stable end position, while switching over in the middle Position the magnets 15, 18, 31, 32 and again 15, 18 opposite each other, poles of the same name are facing each other and cause an immediate change in the opposite end position.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP19910115450 1990-10-08 1991-09-12 Doppel-Membranpumpe Expired - Lifetime EP0480192B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE4031872 1990-10-08
DE4031872 1990-10-08
DE19914106180 DE4106180A1 (de) 1990-10-08 1991-02-27 Doppel-membranpumpe
DE4106180 1991-02-27

Publications (2)

Publication Number Publication Date
EP0480192A1 EP0480192A1 (de) 1992-04-15
EP0480192B1 true EP0480192B1 (de) 1994-07-13

Family

ID=25897542

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910115450 Expired - Lifetime EP0480192B1 (de) 1990-10-08 1991-09-12 Doppel-Membranpumpe

Country Status (7)

Country Link
US (1) US5222876A (enrdf_load_stackoverflow)
EP (1) EP0480192B1 (enrdf_load_stackoverflow)
JP (1) JPH086693B2 (enrdf_load_stackoverflow)
AT (1) ATE108518T1 (enrdf_load_stackoverflow)
DE (1) DE4106180A1 (enrdf_load_stackoverflow)
DK (1) DK0480192T3 (enrdf_load_stackoverflow)
ES (1) ES2056543T3 (enrdf_load_stackoverflow)

Cited By (2)

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US5325762A (en) * 1992-10-29 1994-07-05 Nordson Corporation Fluid pressure operated piston engine assembly
EP0780574A1 (en) 1995-12-21 1997-06-25 Verder Holding B.V. Control valve and pump provided with control valve

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US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US20060135047A1 (en) * 2004-12-22 2006-06-22 Alexei Sheydayi Method and apparatus for clamping a substrate in a high pressure processing system
US7140393B2 (en) 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
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US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7435447B2 (en) 2005-02-15 2008-10-14 Tokyo Electron Limited Method and system for determining flow conditions in a high pressure processing system
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7380984B2 (en) * 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7494107B2 (en) 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
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DE202010004957U1 (de) * 2010-04-12 2011-08-26 Timmer-Pneumatik Gmbh Fluid-Steuerventilsystem für eine Pumpensteuerung
TWI473942B (zh) * 2010-09-09 2015-02-21 Tom M Simmons 含有磁鐵的往復流體泵、含有用於往復流體泵之磁鐵的裝置以及相關的方法
IT201800004121A1 (it) * 2018-03-30 2019-09-30 Miro Capitanio Sistema valvolare antistallo bistabile
EP3921639A4 (en) * 2019-02-06 2022-03-16 Siemens Healthcare Diagnostics, Inc. LIQUID SENSOR ASSEMBLY, APPARATUS, AND METHODS
EP3730786B1 (en) * 2019-04-19 2022-12-28 White Knight Fluid Handling Inc. Reciprocating fluid pumps including magnets, and related assemblies, systems, and methods
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5325762A (en) * 1992-10-29 1994-07-05 Nordson Corporation Fluid pressure operated piston engine assembly
EP0780574A1 (en) 1995-12-21 1997-06-25 Verder Holding B.V. Control valve and pump provided with control valve

Also Published As

Publication number Publication date
DE4106180C2 (enrdf_load_stackoverflow) 1992-09-10
JPH04234582A (ja) 1992-08-24
EP0480192A1 (de) 1992-04-15
DE4106180A1 (de) 1992-04-09
ES2056543T3 (es) 1994-10-01
ATE108518T1 (de) 1994-07-15
DK0480192T3 (da) 1994-08-15
US5222876A (en) 1993-06-29
JPH086693B2 (ja) 1996-01-29

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