EP0480192B1 - Double-diaphragm pump - Google Patents

Double-diaphragm pump Download PDF

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Publication number
EP0480192B1
EP0480192B1 EP19910115450 EP91115450A EP0480192B1 EP 0480192 B1 EP0480192 B1 EP 0480192B1 EP 19910115450 EP19910115450 EP 19910115450 EP 91115450 A EP91115450 A EP 91115450A EP 0480192 B1 EP0480192 B1 EP 0480192B1
Authority
EP
European Patent Office
Prior art keywords
actuating rod
magnets
control spool
diaphragm pump
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP19910115450
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German (de)
French (fr)
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EP0480192A1 (en
Inventor
Dirk Budde
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PSG Germany GmbH
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Almatec Technische Innovationen GmbH
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Publication of EP0480192A1 publication Critical patent/EP0480192A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F04B43/0736—Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L25/00—Drive, or adjustment during the operation, or distribution or expansion valves by non-mechanical means
    • F01L25/08—Drive, or adjustment during the operation, or distribution or expansion valves by non-mechanical means by electric or magnetic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86574—Supply and exhaust
    • Y10T137/86622—Motor-operated

Definitions

  • the invention relates to a double diaphragm pump with diaphragms connected by a coupling rod and dividing two diaphragm chambers, a control slide which can be displaced as a function of the diaphragms and an actuating element which is dependent on the diaphragm movement.
  • the actuating element consists of an axially displaceable actuating rod, which projects out of the control slide housing and is arranged coaxially in the control slide.
  • This actuating rod acts in both directions via a compression spring on the control slide, which is held in its end positions by spring-loaded detent balls until the force of the spring arranged coaxially on the actuating rod exceeds the detent force.
  • the control slide driven by spring force, swings into the opposite control position and reverses the diaphragm movement. In this way, the control spool is moved back and forth between two stable end positions.
  • This design has the disadvantage that a large number of sealing surfaces with corresponding friction and leakage losses are required, and that there is also a risk of a non-functioning central position, which can lead to a standstill.
  • a minimum pressure of the propellant is also required to switch the control spool, so that operation is particularly easy with small double diaphragm pumps is not possible with pressures below 2 bar.
  • it is necessary to make a compromise between low pressure medium losses but the associated stiffness or, conversely, ease of movement and the associated pressure medium losses.
  • This double diaphragm pump also places high demands on manufacturing accuracy, requires a large amount of assembly work due to the large number of individual parts, and has to be predominantly made of metal.
  • a changeover valve with an actuating element which is magnetically coupled to a control slide and is intended for a piston pump is known from US Pat. No. 4,509,402.
  • the invention has for its object to provide a double diaphragm pump, which is simply constructed from a few parts, does not result in significant internal frictional forces, acts reliably, can be operated easily from low performance to maximum performance and causes the lowest possible pressure medium losses.
  • the solution to this problem is that in a double diaphragm pump of the type mentioned in the invention, the actuating rod or the diaphragms or diaphragm plates are magnetically coupled to the control slide. This coupling can be made contactless, so that there is no friction in this area and no sealing surfaces are required, except where the actuating rod is guided into the area of the membranes.
  • the actuating rod can be coupled to the control slide by mutually repelling single-pole magnets. Likewise, the actuating rod can also be coupled to the control slide by means of oppositely polarized magnets or a magnet and a ferromagnetic part, which attract each other.
  • one magnet or ferromagnetic part can be arranged on each membrane and at least one magnet or ferromagnetic part can be arranged in the control slide.
  • the actuating rod can consist of a rod arranged coaxially in the control slide.
  • This rod can be the coupling rod itself or can consist of an axially displaceable and sealingly protruding from the control slide extending parallel to the coupling rod actuating rod.
  • At least one magnet is arranged on the actuating rod and one on the control slide so that in the opposite end positions the same poles face each other and repel each other.
  • two magnets can be arranged at a distance from each other on the actuating rod and in the control slide with mutually facing poles of the same name if the facing poles of the same name on the actuating rod and in the control slide are polarized differently.
  • This tandem arrangement of the magnet pairs results in a precise, load-independent switching point with double switching force and stable end positions of the control slide, based on an axial magnetization direction.
  • This version is particularly suitable for relatively small reversing valves. However, if there is more space for larger magnets and radial magnetization is possible, this is more advantageous since the actuating forces are greater in this case.
  • the outer surfaces of the magnets on the actuating rod have the same polarity as the inner surfaces of the magnets in the control spool.
  • the double diaphragm pump according to the invention can be produced particularly easily if the distances between the magnets on the actuating rod and in the control slide are the same and are dimensioned with respect to their distances from housing stops such that the actuating rod and the control slide strike against opposite housing stops and when the actuating rod is actuated according to a predetermined value Reverse the actuation path in the opposite position.
  • the switching forces at the closest approximation can be significantly increased if three magnets are arranged at a distance from each other on the actuating rod and in the control slide with poles of the same name facing each other and the poles facing each other in the end positions on the actuating rod and in the control slide are each of the same name.
  • the distances between the magnets on the actuating rod and in the control slide can be the same.
  • the magnets can be arranged in such a way that the actuating rod and the control slide abut opposite housing stops, with two pairs of magnets each lying in a plane perpendicular to the axis of the actuating rod, so that when the actuating rod is actuated in accordance with a predetermined actuation path the opposite Bypass the end position in opposite directions.
  • This arrangement there is a better distribution of force over the entire switching path of the control slide and a power reserve even when the drive air is contaminated.
  • the attractive interaction of the middle magnets on the actuating rod and in the control slide with external magnets in the end positions results in a very stable, vibration-proof end position of the control slide and the actuating rod.
  • Three radially magnetized magnets can also be arranged at a distance from one another on the actuating rod and in the control slide.
  • the outer magnets are polarized in the same way and face each other with the same poles, while the middle magnets are polarized in opposite directions, but also face each other with the same poles.
  • adjacent magnets on the actuating rod and in the control slide are polarized in opposite directions and attract each other, while the magnets on the actuating rod and in the control slide, which are not opposite each other, repel each other.
  • poles of the same name face each other with each magnet pair, so that in this position the actuating rod and the control slide suddenly change over to the opposite end position.
  • the annular permanent magnets arranged on the actuating rod moved by the diaphragms pass underneath the permanent annular magnets arranged in the concentric control slide and repel them after exceeding the point of greatest proximity in the opposite direction, so that the control slide suddenly moves to its opposite working position.
  • the spool and the actuating rod each require only two moving sealing surfaces and only one closely tolerated counter surface for the control slide. Friction only occurs on these four sealing surfaces.
  • the magnets can advantageously be designed as ring magnets.
  • Permanent magnets are preferably used which are strong enough to exert the actuating forces and which do not require any connection to the outside.
  • a pressure down to 0.3 bar is sufficient to operate the double diaphragm pump if the pressure medium consists of compressed air.
  • the double diaphragm pump starts up very easily and has a significantly higher efficiency than pilot valve controlled double diaphragm pumps, especially in the important part-load range.
  • the double diaphragm pump according to the invention is also less susceptible to contamination, can work without lubrication and fatigue and accordingly has reduced wear.
  • control slide and the actuating rod can be produced in a particularly simple manner if they consist of plastic and the magnets and other metal parts are encapsulated with plastic. This manufacturing method requires practically no post-processing.
  • the control spool housing can also be manufactured as a plastic injection molded part. so that the double diaphragm pump according to the invention consists in its essential, in particular the moving parts, of plastic and is metal-free in this respect, which is particularly important for use in the semiconductor industry.
  • a control slide housing 1 with control channels 2, 3, 4, 5, 6 is shown in FIG. 1 by a double diaphragm pump. These control channels lead into a reversing block 9.
  • the control channel 2 is connected to a pressure source, the control channel 3 with a propellant chamber, not shown, the control channel 5 with the other propellant chamber, not shown, the control channel 4 with a propellant outlet and the control channel 6 also with a propellant outlet . Compressed air is usually used as the blowing agent.
  • the control channels 2, 3, 4, 5, 6 are sealed to one another and to the outside by means of O-ring seals and fixed in the reversing block 9 by means of snap rings 8. Furthermore, there are 1 further O-rings in the lid areas of the control slide housing, which acts as a damping element for the reciprocating control slide 12.
  • the O-rings 10 and the end faces 21 each form stop faces.
  • a control slide 12 is arranged axially displaceably in the housing 1. Radially projecting closure members 13 with sliding seals 14 are arranged in the end regions of the control slide 12.
  • control slide 12 In the position shown in FIG. 1, there is a connection to the pressure medium supply via the channels 5, 2 for one propellant chamber and a connection to a pressure medium relief via the channels 3, 4 for the other propellant chamber. If the control slide 12 moves to the left, the propellant chambers reversely acted upon or relieved.
  • the control slide 12 is made of plastic and has ring-shaped permanent magnets 15 which are encapsulated with plastic. The ring magnets 15 are spaced from each other so that their poles of the same name are adjacent, for example north poles on the left and south poles on the right.
  • an actuating rod 16 with end pins 17 of smaller diameter is also axially displaceable and guided in a sealed manner by means of sliding seals 11.
  • the actuating rod 16 consists of a plastic injection molded part, in which ring magnets 18 are also embedded. These ring magnets 18 are arranged at the same distance as the ring magnets 15 and also face one another with poles of the same name, in the same way as the ring magnets 15, i.e. North Pole on the left and South Pole on the right.
  • the axial residual force in the end positions can be influenced by changing the axial distance between the two pairs of ring magnets while maintaining the paths for the control slide and the actuating rod. If the distance is reduced, there is an attractive resulting force between the control slide and the actuating rod, and if the distance is enlarged, a repulsive force results. These can either be for backup of the end positions (repulsive) or as braking force for reversing (attracting).
  • the spool housing 1 with the spool 12 are constructed in the same manner as in Fig. 1, so that the same reference numerals apply.
  • the coupling rod 22 serves here as an actuating rod. Accordingly, the spool housing 1 and the spool 12 are arranged coaxially to the coupling rod 22.
  • the coupling rod 22 is also made of plastic. Ring magnets 18 are accordingly encapsulated with plastic as in FIG. 1.
  • Overmolded sleeves 28 are arranged in the end regions of the coupling rod 22 and are used to fasten one membrane 25 each by means of an embedded membrane core 24.
  • the outer surfaces 26 of the control slide housing 1 form stop surfaces for inner surfaces 27 of the diaphragms 25; they therefore serve as a stroke limitation. If the left diaphragm 25 moves with the coupling rod 22 to the right, the control slide 12 remains in the position shown until the ring magnets 18 are in the area of the ring magnets 15 arrive. At this moment, the repulsive effect of the ring magnets 15 and 18 causes the control slide 12 to jump suddenly to the left. As already described, a reversal of movement is hereby initiated. The process is thus repeated at the end of the path of the coupling rod 22.
  • an opposite movement of the control slide 12 and the actuating rod 16 or the coupling rod 22 can be achieved by the arrangement of a ring magnet in the control slide 12 and a ferromagnetic part in the actuating rod 16 or the coupling rod 22 reach.
  • a further ring magnet can be arranged in the actuating rod 16 or the coupling rod 22 if its polarity is opposite to that of the ring magnet in the control slide 12.
  • FIG. 3 corresponds to the embodiment of FIG. 1, but with radially magnetized inner and outer magnets.
  • This version is particularly suitable for larger control valves because, based on the same magnetic mass, the actuating force is higher here than with axial magnetization.
  • the reversing of the control slide can also take place according to FIG. 4 by correspondingly strong axially acting end magnets 30 at the ends of the control slide 12, which interact directly with a ferromagnetic membrane core or membrane plate 25 and trigger the reversal when tightening a membrane.
  • the actuating rod is then also omitted.
  • the side wall of the spool housing is then as thin as possible.
  • the coupling rod 22 is also provided on both sides of the control channel 2 with two seals 29.
  • the course of the control channel 2 allows cooling of the coupling rod, which is preferably guided in a plastic block 9.
  • the distances between the magnets 15, 31 in the control slide 12 and the magnets 18, 32 on the actuating rod 16, 17 are each the same.
  • the magnets 15, 31 are arranged with respect to their distances from the housing stops 10 so that the actuating rod 16, 17 and the control slide 12 rest against opposite housing stops 10, two pairs of magnets 15, 32; 31, 18 lie in a plane perpendicular to the axis of the actuating rod 16, 17 and, when the actuating rod 16, 17 is actuated, jump in opposite directions into the opposite end position after a predetermined actuation path.
  • the magnets 15, 31; 18, 32 can also be radially magnetized, as shown in FIG. 3.
  • the middle magnets 31, 32 are polarized in opposite directions to the outer magnets 15, 18, so that in the end positions, magnets 15, 32 and 31, 18 with opposite polarity lie opposite each other and thereby define a stable end position, while switching over in the middle Position the magnets 15, 18, 31, 32 and again 15, 18 opposite each other, poles of the same name are facing each other and cause an immediate change in the opposite end position.

Abstract

Double-diaphragm pump with diaphragms dividing two diaphragm chambers and connected to one another by a connecting rod (22), a control slide valve (12) with sealing elements (13), displaceable as a function of the position of the diaphragms (24), for alternately opening and covering control ducts (2, 3, 4, 5, 6) arranged in a control slide valve housing (1) for alternately admitting propellant to a propellant chamber and relieving it of this, and an actuating element (16, 17; 22, 28) coupled to the diaphragm movement and magnetically to the control slide valve. <IMAGE>

Description

Die Erfindung betrifft eine Doppel-Membranpumpe mit durch eine Koppelstange miteinander verbundenen, zwei Membrankammern teilenden Membranen, einem in Abhängigkeit von den Membranen verschiebbaren Steuerschieber sowie einem von der Membranbewegung abhängigen Betätigungselement.The invention relates to a double diaphragm pump with diaphragms connected by a coupling rod and dividing two diaphragm chambers, a control slide which can be displaced as a function of the diaphragms and an actuating element which is dependent on the diaphragm movement.

Eine derartige Doppelmembranpumpe ist in der deutschen Offenlegungsschrift 33 10 131 beschrieben. Bei dieser Doppelmembranpumpe besteht das Betätigungselement aus einer axial verschiebbaren, aus dem Steuerschiebegehäuse heraustragenden, koaxial im Steuerschieber angeordneten Betätigungsstange. Diese Betätigungsstange wirkt in beiden Richtungen über eine Druckfeder auf den Steuerschieber, der durch federbeaufschlagte Rastkugeln in seinen Endstellungen so lange festgehalten wird, bis die Kraft der koaxial auf der Betätigungsstange angeordneten Feder die Rastkraft übersteigt. Danach schnellt der Steuerschieber, durch Federkraft getrieben in die entgegengesetzte Steuerstellung und bewirkt das Umsteuern der Membranbewegung. Auf diese Weise wird der Steuerschieber zwischen zwei stabilen Endstellungen hin- und herbewegt.Such a double diaphragm pump is described in German Offenlegungsschrift 33 10 131. In this double diaphragm pump, the actuating element consists of an axially displaceable actuating rod, which projects out of the control slide housing and is arranged coaxially in the control slide. This actuating rod acts in both directions via a compression spring on the control slide, which is held in its end positions by spring-loaded detent balls until the force of the spring arranged coaxially on the actuating rod exceeds the detent force. Then the control slide, driven by spring force, swings into the opposite control position and reverses the diaphragm movement. In this way, the control spool is moved back and forth between two stable end positions.

Da die Bewegung des Steuerschiebers mechanisch von den starr über eine Koppelstange miteinander verbundenen Membranen gesteuert wird und im Wege einer Ausnutzung von potentieller Federenergie eine Schnappvorrichtung den Steuerschieber zwischen seinen beiden Endstellungen hin- und herbewegt, ergibt sich als Nachteil, daß der Steuerschieber bei sehr geringer Pumpenleistung zum Hängenbleiben in einer Zwischenstellung neigt und bei sehr hoher Pumpenleistung infolge Flatterns im Federmechanismus keine genaue Ventilsteuerung möglich ist. Des weiteren sind eine Vielzahl bewegter Einzelteile erforderlich, die aufeinander gleiten und daher eine entsprechende Schmierung erfordern. Die Feder auf der Betätigungsstange ist hoch belastet und muß in der Regel aus Edelstahl bestehen. Dennoch besitzt sie eine begrenzte Standzeit, so daß ein verhältnismäßig hoher Reparaturaufwand gegeben ist. Darüber hinaus ist auch der Montageaufwand verhältnismäßig hoch.Since the movement of the control spool mechanically from the membranes rigidly connected to each other via a coupling rod is controlled and a snap device moves the control slide between its two end positions by utilizing potential spring energy, there is the disadvantage that the control slide tends to get stuck in an intermediate position when the pump output is very low and at very high pump output due to fluttering in the spring mechanism no exact valve control is possible. Furthermore, a large number of moving individual parts are required which slide on one another and therefore require appropriate lubrication. The spring on the operating rod is heavily loaded and usually has to be made of stainless steel. Nevertheless, it has a limited service life, so that there is a relatively high repair effort. In addition, the assembly effort is relatively high.

Diesen Nachteilen soll - gemäß der deutschen Offenlegungsschrift 33 10 131 - dadurch abgeholfen werden, daß die den Steuerschieber über die Feder direkt beaufschlagende Betätigungsstange durch ein Pilotventil ersetzt wird, das durch die Membranbewegung gesteuert, den als Kolben ausgebildeten Steuerschieber mit Druckmittel abwechselnd beaufschlagt, so daß für das Betätigen des Pilotventils nur geringe Kräfte erforderlich sind, während der Steuerschieber selber mittels des Druckmittels verschoben wird.These disadvantages are to be remedied - according to German Offenlegungsschrift 33 10 131 - by replacing the actuating rod which acts directly on the control slide via the spring with a pilot valve which is controlled by the diaphragm movement, alternately pressurizing the control slide designed as a piston with pressure medium, so that only small forces are required to operate the pilot valve, while the control slide itself is moved by means of the pressure medium.

Dieser Ausführung haftet als Nachteil an, daß eine Vielzahl von Dichtflächen mit entsprechender Reibung und Leckverlusten erforderlich sind, und daß auch hier die Gefahr einer funktionslosen Mittelstellung besteht, die zum Stillstand führen kann. Zum Umschalten des Steuerschiebers ist zudem ein Mindestdruck des Treibmittels erforderlich, so daß insbesondere bei kleinen Doppelmembranpumpen ein Betrieb mit Drücken unter 2 bar nicht möglich ist. Bei dieser Ausführung ist es erforderlich, einen Kompromiß zwischen geringen Druckmittelverlusten, aber damit verbundener Schwergängigkeit oder umgekehrt Leichtgängigkeit und damit verbundenen Druckmittelverlusten einzugehen. Diese Doppelmembranpumpe stellt zudem hohe Anforderungen an die Fertigungsgenauigkeit, erfordert aufgrund der Vielzahl von Einzelteilen einen hohen Montageaufwand und muß überwiegend aus Metall bestehen.This design has the disadvantage that a large number of sealing surfaces with corresponding friction and leakage losses are required, and that there is also a risk of a non-functioning central position, which can lead to a standstill. A minimum pressure of the propellant is also required to switch the control spool, so that operation is particularly easy with small double diaphragm pumps is not possible with pressures below 2 bar. In this embodiment, it is necessary to make a compromise between low pressure medium losses but the associated stiffness or, conversely, ease of movement and the associated pressure medium losses. This double diaphragm pump also places high demands on manufacturing accuracy, requires a large amount of assembly work due to the large number of individual parts, and has to be predominantly made of metal.

Ein Umschaltventil mit einem Betätigungselement, das magnetisch mit einem Steuerschieber gekoppelt ist und für eine Kolbenpumpe bestimmt ist, ist aus der US-Patentschrift 4 509 402 bekannt.A changeover valve with an actuating element which is magnetically coupled to a control slide and is intended for a piston pump is known from US Pat. No. 4,509,402.

Der Erfindung liegt die Aufgabe zugrunde, eine Doppelmembranpumpe zu schaffen, die aus wenigen Teilen einfach aufgebaut ist, keine bedeutenden inneren Reibungskräfte ergibt, verläßlich wirkt, sich problemlos von geringer Leistung bis zur Höchstleistung betreiben läßt und möglichst geringe Druckmittelverluste verursacht.The invention has for its object to provide a double diaphragm pump, which is simply constructed from a few parts, does not result in significant internal frictional forces, acts reliably, can be operated easily from low performance to maximum performance and causes the lowest possible pressure medium losses.

Die Lösung dieser Aufgabe besteht darin, daß bei einer Doppelmembranpumpe der eingangs erwähnten Art erfindungsgemäß die Betätigungsstange oder die Membranen bzw. Membranteller magnetisch mit dem Steuerschieber gekoppelt sind. Diese Koppelung läßt sich berührungslos gestalten, so daß in diesem Bereich keine Reibung auftritt und keine Dichtflächen erforderlich sind, außer dort, wo die Betätigungsstange in den Bereich der Membranen geführt ist.The solution to this problem is that in a double diaphragm pump of the type mentioned in the invention, the actuating rod or the diaphragms or diaphragm plates are magnetically coupled to the control slide. This coupling can be made contactless, so that there is no friction in this area and no sealing surfaces are required, except where the actuating rod is guided into the area of the membranes.

Die Betätigungsstange kann mit dem Steuerschieber durch sich gegenseitig abstoßende gleichpolige Magnete gekoppelt sein. Ebenso kann die Betätigungsstange aber auch mit dem Steuerschieber durch entgegengesetzt gepolte Magnete oder einen Magneten und ein ferromagnetisches Teil, die sich gegenseitig anziehen, gekoppelt sein.The actuating rod can be coupled to the control slide by mutually repelling single-pole magnets. Likewise, the actuating rod can also be coupled to the control slide by means of oppositely polarized magnets or a magnet and a ferromagnetic part, which attract each other.

Des weiteren kann je ein Magnet oder ferromagnetisches Teil an je einer Membran und mindestens ein Magnet oder ein ferromagnetisches Teil im Steuerschieber angeordnet sein.Furthermore, one magnet or ferromagnetic part can be arranged on each membrane and at least one magnet or ferromagnetic part can be arranged in the control slide.

Die Betätigungsstange kann aus einer in koaxial im Steuerschieber angeordneten Stange bestehen. Diese Stange kann die Koppelstange selbst sein oder aber aus einer axial verschiebbaren und abgedichtet aus dem Steuerschieber herausragenden, parallel zur Koppelstange verlaufenden Betätigungsstange bestehen.The actuating rod can consist of a rod arranged coaxially in the control slide. This rod can be the coupling rod itself or can consist of an axially displaceable and sealingly protruding from the control slide extending parallel to the coupling rod actuating rod.

Besonders vorteilhaft ist es, wenn an der Betätigungsstange und am Steuerschieber mindestens je ein Magnet so angeordnet ist, daß sich in den entgegengesetzten Endstellungen gleiche Pole gegenüberliegen und sich abstoßen.It is particularly advantageous if at least one magnet is arranged on the actuating rod and one on the control slide so that in the opposite end positions the same poles face each other and repel each other.

Des weiteren können jeweils zwei Magnete mit Abstand voneinander auf der Betätigungsstange und im Steuerschieber mit einander zugekehrten ungleichnamigen Polen angeordnet sein, wenn die einander zugekehrten ungleichnamigen Pole auf der Betätigungsstange und im Steuerschieber jeweils ungleich gepolt sind. Diese Tandemanordnung der Magnetpaare ergibt einen genauen, lastunabhängigen Schaltpunkt mit doppelter Umschaltkraft und stabilen Endlagen des Steuerschiebers, basierend auf einer axialen Magnetisierungsrichtung.Furthermore, two magnets can be arranged at a distance from each other on the actuating rod and in the control slide with mutually facing poles of the same name if the facing poles of the same name on the actuating rod and in the control slide are polarized differently. This tandem arrangement of the magnet pairs results in a precise, load-independent switching point with double switching force and stable end positions of the control slide, based on an axial magnetization direction.

Diese Ausführung eignet sich insbesondere für relativ kleine Umsteuerventile. Ist jedoch mehr Platz für größere Magnete vorhanden und somit eine radiale Magnetisierung möglich, so ist dies günstiger, da die Betätigungskräfte in diesem Fall größer sind. Die Außenflächen der Magnete auf der Betätigungsstange sind gleich gepolt mit den Innenflächen der Magnete im Steuerschieber.This version is particularly suitable for relatively small reversing valves. However, if there is more space for larger magnets and radial magnetization is possible, this is more advantageous since the actuating forces are greater in this case. The outer surfaces of the magnets on the actuating rod have the same polarity as the inner surfaces of the magnets in the control spool.

Die erfindungsgemäße Doppelmembranpumpe läßt sich besonders einfach herstellen, wenn die Abstände der Magnete auf der Betätigungsstange und im Steuerschieber gleich und bezüglich ihrer Abstände zu Gehäuseanschlägen so bemessen sind, daß die Betätigungsstange und der Steuerschieber an entgegengesetzten Gehäuseanschlägen anschlagen sowie bei einem Betätigen der Betätigungsstange nach einem vorgegebenen Betätigungsweg in die entgegengesetzte Stellung gegenläufig umspringen.The double diaphragm pump according to the invention can be produced particularly easily if the distances between the magnets on the actuating rod and in the control slide are the same and are dimensioned with respect to their distances from housing stops such that the actuating rod and the control slide strike against opposite housing stops and when the actuating rod is actuated according to a predetermined value Reverse the actuation path in the opposite position.

Die Umschaltkräfte im Punkte größter Näherung lassen sich wesentlich erhöben, wenn jeweils drei Magnete mit Abstand voneinander auf der Betätigungsstange und im Steuerschieber mit einander zugekehrten gleichnamigen Polen angeordnet sind und die in den Endstellungen einander zugewandten Pole auf die Betätigungsstange und im Steuerschieber jeweils ungleichnamig sind. Dabei können die Abstände der Magnete auf der Betätigungsstange und im Steuerschieber gleich sein. Bezüglich ihres Abstandes zu Gehäuseanschlägen können die Magnete so angeordnet sein, daß die Betätigungsstange und der Steuerschieber an entgegengesetzten Gehäuseanschlägen anliegen und dabei jeweils zwei Magnetpaare in einer zur Achse der Betätigungsstange senkrechten Ebene liegen, so daß sie bei einem Betätigen der Betätigungsstange nach einem vorgegebenen Betätigungsweg in die entgegengesetzte Endlage gegenläufig umspringen. Mit dieser Anordnung ergibt sich eine bessere Kraftverteilung auf dem gesamten Schaltweg des Steuerschiebers und eine Kraftreserve auch bei verschmutzter Antriebsluft. Durch das anziehende Zusammenwirken der mittleren Magnete auf der Betätigungsstange und im Steuerschieber jeweils mit äußeren Magneten in den Endstellungen ergibt sich eine sehr stabile, erschütterungsfeste Endlage des Steuerschiebers und der Betätigungsstange.The switching forces at the closest approximation can be significantly increased if three magnets are arranged at a distance from each other on the actuating rod and in the control slide with poles of the same name facing each other and the poles facing each other in the end positions on the actuating rod and in the control slide are each of the same name. The distances between the magnets on the actuating rod and in the control slide can be the same. With regard to their distance from the housing stops, the magnets can be arranged in such a way that the actuating rod and the control slide abut opposite housing stops, with two pairs of magnets each lying in a plane perpendicular to the axis of the actuating rod, so that when the actuating rod is actuated in accordance with a predetermined actuation path the opposite Bypass the end position in opposite directions. With this arrangement, there is a better distribution of force over the entire switching path of the control slide and a power reserve even when the drive air is contaminated. The attractive interaction of the middle magnets on the actuating rod and in the control slide with external magnets in the end positions results in a very stable, vibration-proof end position of the control slide and the actuating rod.

Es können auch jeweils drei radial magnetisierte Magnete mit Abstand voneinander auf der Betätigungsstange und im Steuerschieber angeordnet sein. In diesem Fall sind die äußeren Magnete jeweils gleich gepolt und mit gleichen Polen einander zugewandt, während die mittleren Magnete dazu entgegengesetzt gepolt aber auch mit gleichen Polen einander zugewandt sind. In den Endstellungen sind dann benachbarte Magnete auf der Betätigungsstange und im Steuerschieber jeweils entgegengesetzt gepolt und ziehen sich an, während sich die Magnete auf der Betätigungsstange und im Steuerschieber, die keinem entsprechenden Magneten gegenüberliegen, abstoßen. In der Mittelstellung, in der sich alle drei radial magnetisierte Magnetpaare gegenüberstehen, sind bei jedem Magnetpaar gleichnamige Pole einander zugewandt, so daß in dieser Position ein augenblickliches Umspringen der Betätigungsstange und des Steuerschiebers in die jeweils entgegengesetzte Endlage eintritt.Three radially magnetized magnets can also be arranged at a distance from one another on the actuating rod and in the control slide. In this case, the outer magnets are polarized in the same way and face each other with the same poles, while the middle magnets are polarized in opposite directions, but also face each other with the same poles. In the end positions, adjacent magnets on the actuating rod and in the control slide are polarized in opposite directions and attract each other, while the magnets on the actuating rod and in the control slide, which are not opposite each other, repel each other. In the middle position, in which all three radially magnetized magnet pairs face each other, poles of the same name face each other with each magnet pair, so that in this position the actuating rod and the control slide suddenly change over to the opposite end position.

Die auf der von den Membranen bewegten Betätigungsstange angeordneten ringförmigen Dauermagnete unterfahren die im konzentrischen Steuerschieber angeordneten, ebenfalls ringförmigen Dauermagneten und stoßen diese nach Überschreiten des Punktes größter Näherung in die entgegengesetzte Richtung ab, so daß sich der Steuerschieber sprungartig in seine entgegengesetzte Arbeitsstellung bewegt. Der Steuerschieber und die Betätigungsstange benötigen jeweils nur zwei bewegte Dichtflächen und nur eine eng tolerierte Gegenlauffläche für den Steuerschieber. Reibung tritt somit nur noch an diesen vier Dichtflächen auf. Außer dem Steuerschieber und der Betätigungsstange gibt es keine bewegten Teile; außerdem gibt es zwischen der Betätigungsstange und dem Steuerschieber keine Reibung, da diese berührungslos ineinander gleiten. Des weiteren treten keine Druckmittelverluste und kein Druckmittelverlauf wie bei einem durch ein Pilotventil angesteuerten Steuerschieber auf, und die Umschaltkraft besitzt eine konstante, vom Druck des Druckmittels unabhängige Größe.The annular permanent magnets arranged on the actuating rod moved by the diaphragms pass underneath the permanent annular magnets arranged in the concentric control slide and repel them after exceeding the point of greatest proximity in the opposite direction, so that the control slide suddenly moves to its opposite working position. The spool and the actuating rod each require only two moving sealing surfaces and only one closely tolerated counter surface for the control slide. Friction only occurs on these four sealing surfaces. There are no moving parts apart from the control spool and the operating rod; in addition, there is no friction between the actuating rod and the control slide, since these slide into one another without contact. Furthermore, there are no pressure medium losses and no pressure medium profile as in the case of a control spool controlled by a pilot valve, and the changeover force has a constant variable that is independent of the pressure of the pressure medium.

Die Magnete können vorteilhafterweise als Ringmagnete ausgebildet sein.The magnets can advantageously be designed as ring magnets.

Vorzugsweise werden Dauermagnete verwendet, die stark genug sind, um die Betätigungskräfte aufzubringen, und die keinerlei Verbindung nach außen bedürfen.Permanent magnets are preferably used which are strong enough to exert the actuating forces and which do not require any connection to the outside.

Für den Betrieb der Doppelmembranpumpe genügt ein Druck bis herunter zu 0,3 bar, wenn das Druckmittel aus Druckluft besteht. Die Doppelmembranpumpe läuft sehr leicht an und weist einen gegenüber pilotventilgesteuerten Doppelmembranpumpen erheblich höheren Wirkungsgrad, insbesondere im wichtigen Teillastbereich auf.A pressure down to 0.3 bar is sufficient to operate the double diaphragm pump if the pressure medium consists of compressed air. The double diaphragm pump starts up very easily and has a significantly higher efficiency than pilot valve controlled double diaphragm pumps, especially in the important part-load range.

Die erfindungsgemäße Doppelmembranpumpe ist zudem wenig anfällig gegen Verschmutzungen, kann schmierungs- und ermüdungsfrei arbeiten und weist dementsprechend einen verminderten Verschleiß auf.The double diaphragm pump according to the invention is also less susceptible to contamination, can work without lubrication and fatigue and accordingly has reduced wear.

Da den Endstellungen des Steuerschiebers stabile Endstellungen der Magnete entsprechen, ergibt sich beim Umschalten eine magnetische Endlagendämpfung mit einer entsprechenden Verminderung der Umschaltgeräusche.Since the end positions of the control slide correspond to stable end positions of the magnets, magnetic end position damping results with a corresponding reduction in the switching noises.

Die Verwendung von sich gegenseitig abstoßenden Dauermagneten gewährleistet eine absolut sichere Totpunktfreiheit und ein ständiges Selbstzentrieren des Steuerschiebers bei sehr geringen Radialkräften. Der Steuerschieber schwimmt sozusagen auf seinen beiden Dichtungen.The use of mutually repelling permanent magnets ensures absolutely safe freedom from dead spots and constant self-centering of the control spool with very low radial forces. The spool floats on its two seals, so to speak.

Der Steuerschieber und die Betätigungsstange lassen sich in besonders einfacher Weise herstellen, wenn sie aus Kunststoff bestehen und die Magnete sowie andere Metallteile mit Kunststoff umspritzt werden. Diese Herstellungsweise erfordert praktisch keine Nachbearbeitung. Auch das Steuerschiebergehäuse läßt sich als Kunststoff-Spritzgußteil fertigen. so daß die erfindungsgemäße Doppelmembranpumpe in ihren wesentlichen, insbesondere den bewegten Teilen aus Kunststoff besteht und insoweit metallfrei ist, was besonders wichtig für den Einsatz in der Halbleiterindustrie ist.The control slide and the actuating rod can be produced in a particularly simple manner if they consist of plastic and the magnets and other metal parts are encapsulated with plastic. This manufacturing method requires practically no post-processing. The control spool housing can also be manufactured as a plastic injection molded part. so that the double diaphragm pump according to the invention consists in its essential, in particular the moving parts, of plastic and is metal-free in this respect, which is particularly important for use in the semiconductor industry.

Die Erfindung wird nachstehend anhand zweier in der Zeichnung dargestellter Ausführungsbeispiele des näheren erläutert. In der Zeichnung zeigen:

Fig. 1
eine ausschnittsweise, schnittbildliche Darstellung einer Doppelmembranpumpe mit Koppelstange und Betätigungsstange für den Steuerschieber,
Fig. 2
eine entsprechende ausschnittweise, schnittbildliche Darstellung mit einer Koppelstange als Betätigungsstange,
Fig. 3
den Steuerschieber nach Fig. 1, jedoch mit anders magnetisierten Magneten,
Fig. 4
eine Ventilsteuerung mit Stirnmagneten am Steuerschieber,
Fig. 5
eine Doppelmembranpumpe entsprechend Fig. 1, jedoch mit je drei Magneten auf der Betätigungsstange und dem Steuerschieber.
The invention is explained below with reference to two exemplary embodiments shown in the drawing. The drawing shows:
Fig. 1
a partial, sectional representation of a double diaphragm pump with coupling rod and actuating rod for the control slide,
Fig. 2
a corresponding detail, sectional view with a coupling rod as an actuating rod,
Fig. 3
1, but with differently magnetized magnets,
Fig. 4
a valve control with face magnets on the control spool,
Fig. 5
a double diaphragm pump according to Fig. 1, but with three magnets on the actuating rod and the control slide.

Von einer Doppelmembranpumpe ist in Fig. 1 ein Steuerschiebergehäuse 1 mit Steuerkanälen 2, 3, 4, 5, 6 dargestellt. Diese Steuerkanäle führen in einen Umsteuerblock 9. Der Steuerkanal 2 ist mit einer Druckquelle verbunden, der Steuerkanal 3 mit einer nicht dargestellten Treibmittelkammer, der Steuerkanal 5 mit der anderen nicht dargestellten Treibmittelkammer, der Steuerkanal 4 mit einem Treibmittelauslaß und der Steuerkanal 6 ebenfalls mit einem Treibmittelauslaß. Als Treibmittel dient in der Regel Druckluft. Die Steuerkanäle 2, 3, 4, 5, 6 sind untereinander und nach außen mittels O-Ring-Dichtungen abgedichtet und im Umsteuerblock 9 mittels Sprengringen 8 festgelegt. Des weiteren befinden sich in Deckelbereichen des Steuerschiebergehäuses 1 weiterer O-Ring, der als Dämpfungselement für den hin- und hergehenden Steuerschieber 12 wirkt. Die O-Ringe 10 und die Stirnflächen 21 bilden jeweils Anschlagflächen.A control slide housing 1 with control channels 2, 3, 4, 5, 6 is shown in FIG. 1 by a double diaphragm pump. These control channels lead into a reversing block 9. The control channel 2 is connected to a pressure source, the control channel 3 with a propellant chamber, not shown, the control channel 5 with the other propellant chamber, not shown, the control channel 4 with a propellant outlet and the control channel 6 also with a propellant outlet . Compressed air is usually used as the blowing agent. The control channels 2, 3, 4, 5, 6 are sealed to one another and to the outside by means of O-ring seals and fixed in the reversing block 9 by means of snap rings 8. Furthermore, there are 1 further O-rings in the lid areas of the control slide housing, which acts as a damping element for the reciprocating control slide 12. The O-rings 10 and the end faces 21 each form stop faces.

Im Gehäuse 1 ist ein Steuerschieber 12 axial verschiebbar angeordnet. In den Endbereichen des Steuerschiebers 12 sind radial vorstehende Verschlußorgane 13 mit Gleitdichtungen 14 angeordnet.A control slide 12 is arranged axially displaceably in the housing 1. Radially projecting closure members 13 with sliding seals 14 are arranged in the end regions of the control slide 12.

In der in Fig. 1 dargestellten Stellung ergibt sich für die eine Treibmittelkammer eine Verbindung zur Druckmittelzufuhr über die Kanäle 5, 2 sowie für die andere Treibmittelkammer eine Verbindung zu einer Druckmittelentlastung über die Kanäle 3, 4. Bewegt sich der Steuerschieber 12 nach links, werden die Treibmittelkammern umgekehrt beaufschlagt bzw. entlastet. Der Steuerschieber 12 besteht aus Kunststoff und besitzt ringförmige Dauermagnete 15, die mit Kunststoff umspritzt sind. Die Ringmagnete 15 sind mit Abstand voneinander so angeordnet, daß ihre ungleichnamigen Pole benachbart sind, beispielsweise Nordpole links und Südpole rechts.In the position shown in FIG. 1, there is a connection to the pressure medium supply via the channels 5, 2 for one propellant chamber and a connection to a pressure medium relief via the channels 3, 4 for the other propellant chamber. If the control slide 12 moves to the left, the propellant chambers reversely acted upon or relieved. The control slide 12 is made of plastic and has ring-shaped permanent magnets 15 which are encapsulated with plastic. The ring magnets 15 are spaced from each other so that their poles of the same name are adjacent, for example north poles on the left and south poles on the right.

Im Steuerschiebergehäuse 1 ist des weiteren eine Betätigungsstange 16 mit Endzapfen 17 kleineren Durchmessers axial verschiebbar und mittels Gleitdichtungen 11 abgedichtet geführt. Absätze 19 an der Betätigungsstange 16 bilden in Verbindung mit entsprechenden Stirnflächen 20 im Deckelbereich des Steuerschiebergehäuses 1 Anschlagflächen für die Bewegung der Betätigungsstange 16.In the control valve housing 1, an actuating rod 16 with end pins 17 of smaller diameter is also axially displaceable and guided in a sealed manner by means of sliding seals 11. Shoulders 19 on the actuating rod 16, in conjunction with corresponding end faces 20 in the cover area of the control slide housing 1, form stop faces for the movement of the actuating rod 16.

Die Betätigungsstange 16 besteht aus einem Kunststoff-Spritzgußteil, in das ebenfalls Ringmagnete 18 eingebettet sind. Diese Ringmagnete 18 sind im selben Abstand wie die Ringmagnete 15 angeordnet und ebenfalls einander mit ungleichnamigen Polen zugekehrt, und zwar in gleicher Weise wie die Ringmagnete 15, d.h. Nordpole links und Südpole rechts.The actuating rod 16 consists of a plastic injection molded part, in which ring magnets 18 are also embedded. These ring magnets 18 are arranged at the same distance as the ring magnets 15 and also face one another with poles of the same name, in the same way as the ring magnets 15, i.e. North Pole on the left and South Pole on the right.

In der dargestellten Lage ziehen sich alle Magnete gleichstark an. Dies hat zur Folge, daß der Steuerschieber 12 sich in einer stabilen Endlage befindet.In the position shown, all magnets attract each other equally. This has the consequence that the control slide 12 is in a stable end position.

Durch Verändern des axialen Abstands der beiden Ringmagnetpaare unter Beibehaltung der Wege für den Steuerschieber sowie der Betätigungsstange läßt sich die axiale Restkraft in den Endlagen beeinflussen. Bei Verringerung des Abstandes ergibt sich eine anziehende resultierende Kraft zwischen Steuerschieber und Betätigungsstange und bei Vergrößerung eine abstoßende Kraft. Diese können entweder zur Sicherung der Endlagen (abstoßend) oder als Bremskraft für die Umsteuerung (anziehend) genutzt werden.The axial residual force in the end positions can be influenced by changing the axial distance between the two pairs of ring magnets while maintaining the paths for the control slide and the actuating rod. If the distance is reduced, there is an attractive resulting force between the control slide and the actuating rod, and if the distance is enlarged, a repulsive force results. These can either be for backup of the end positions (repulsive) or as braking force for reversing (attracting).

In der stabilen Endlage verbleiben der Steuerschieber 12 und die Betätigungsstange 16 so lange, bis die Betätigungsstange 16 nach rechts verschoben wird und die Ringmagnete 15, 18 zur Deckung kommen. Eine geringfügige Weiterbewegung der Betätigungsstange nach rechts genügt dann, um die gleichgerichteten Pole der Ringmagnete 15, 16 in der Weise zur Wirkung zu bringen, daß der Steuerschieber 12 schlagartig nach links und die Betätigungsstange 16 nach rechts schnellen, um in die entgegengesetzte stabile Endstellung zu gelangen.In the stable end position, the control slide 12 and the actuating rod 16 remain until the actuating rod 16 is shifted to the right and the ring magnets 15, 18 come to coincide. A slight further movement of the actuating rod to the right is then sufficient to bring the rectified poles of the ring magnets 15, 16 into effect in such a way that the control slide 12 suddenly flips to the left and the actuating rod 16 to the right in order to reach the opposite stable end position .

Bei dem in Fig. 2 dargestellten Ausführungsbeispiel, sind das Steuerschiebergehäuse 1 mit dem Steuerschieber 12 in gleicher Weise aufgebaut wie nach Fig. 1, so daß insoweit dieselben Bezugsziffern gelten. Die Koppelstange 22 dient hier jedoch als Betätigungsstange. Dementsprechend sind das Steuerschiebergehäuse 1 und der Steuerschieber 12 koaxial zur Koppelstange 22 angeordnet. Die Koppelstange 22 besteht ebenfalls aus Kunststoff. Ringmagnete 18 sind dementsprechend wie nach Fig. 1 mit Kunststoff umspritzt.In the embodiment shown in Fig. 2, the spool housing 1 with the spool 12 are constructed in the same manner as in Fig. 1, so that the same reference numerals apply. The coupling rod 22 serves here as an actuating rod. Accordingly, the spool housing 1 and the spool 12 are arranged coaxially to the coupling rod 22. The coupling rod 22 is also made of plastic. Ring magnets 18 are accordingly encapsulated with plastic as in FIG. 1.

In den Endbereichen der Koppelstange 22 sind umspritzte Hülsen 28 angeordnet, die zur Befestigung je einer Membrane 25 mittels eines eingelagerten Membrankerns 24 dienen. In diesem Fall bilden die Außenflächen 26 des Steuerschiebergehäuses 1 Anschlagflächen für Innenflächen 27 der Membranen 25; sie dienen somit als Hubbegrenzung. Bewegt sich die linke Membrane 25 mit der Koppelstange 22 nach rechts, so bleibt der Steuerschieber 12 so lange in der dargestellten Lage, bis die Ringmagnete 18 in den Bereich der Ringmagnete 15 gelangen. In diesem Moment bewirkt die abstoßende Wirkung der Ringmagnete 15 und 18, daß der Steuerschieber 12 schlagartig nach links springt. Hierdurch wird, wie bereits beschrieben eine Bewegungsumkehr eingeleitet. Somit wiederholt sich der Vorgang jeweils am Ende des Weges der Koppelstange 22.Overmolded sleeves 28 are arranged in the end regions of the coupling rod 22 and are used to fasten one membrane 25 each by means of an embedded membrane core 24. In this case, the outer surfaces 26 of the control slide housing 1 form stop surfaces for inner surfaces 27 of the diaphragms 25; they therefore serve as a stroke limitation. If the left diaphragm 25 moves with the coupling rod 22 to the right, the control slide 12 remains in the position shown until the ring magnets 18 are in the area of the ring magnets 15 arrive. At this moment, the repulsive effect of the ring magnets 15 and 18 causes the control slide 12 to jump suddenly to the left. As already described, a reversal of movement is hereby initiated. The process is thus repeated at the end of the path of the coupling rod 22.

Reicht ein berührungsloses Mitnehmen des Steuerschiebers 12 durch die Betätigungsstange 16 oder die Koppelstange 22 aus, läßt sich eine gegensinnige Bewegung des Steuerschiebers 12 und der Betätigungsstange 16 bzw. der Koppelstange 22 durch die Anordnung eines Ringmagneten im Steuerschieber 12 und eines ferromagnetischen Teils in der Betätigungsstange 16 bzw. der Koppelstange 22 erreichen. Ebenso kann ein weiterer Ringmagnet in der Betätigungsstange 16 oder der Koppelstange 22 angeordnet sein, wenn dessen Polarität zu der des Ringmagneten im Steuerschieber 12 entgegengesetzt gerichtet ist.If a contact-free driving of the control slide 12 by the actuating rod 16 or the coupling rod 22 is sufficient, an opposite movement of the control slide 12 and the actuating rod 16 or the coupling rod 22 can be achieved by the arrangement of a ring magnet in the control slide 12 and a ferromagnetic part in the actuating rod 16 or the coupling rod 22 reach. Likewise, a further ring magnet can be arranged in the actuating rod 16 or the coupling rod 22 if its polarity is opposite to that of the ring magnet in the control slide 12.

Der Steuerschieber gemäß Fig. 3 entspricht dem Ausführungsbeispiel der Fig. 1, jedoch mit radial magnetisierten inneren und äußeren Magneten. Diese Version eignet sich besonders für größere Steuerventile, da, bezogen auf die gleich Magnetmasse, die Betätigungskraft hier höher als bei axialer Magnetisierung ist.3 corresponds to the embodiment of FIG. 1, but with radially magnetized inner and outer magnets. This version is particularly suitable for larger control valves because, based on the same magnetic mass, the actuating force is higher here than with axial magnetization.

Die Umsteuerung des Steuerschiebers kann entsprechend Fig. 4 auch durch entsprechend starke axial wirkende Stirnmagnete 30 an den Enden des Steuerschiebers 12 geschehen, die mit einem ferromagnetischen Membrankern oder Membranteller 25 direkt zusammenwirken und die Umsteuerung bei Annäherung einer Membrane durch Anziehen auslösen. Hierbei entfällt dann auch noch die Betätigungsstange. Die Seitenwand des Steuerschiebergehäuses ist dann möglichst dünnwandig.The reversing of the control slide can also take place according to FIG. 4 by correspondingly strong axially acting end magnets 30 at the ends of the control slide 12, which interact directly with a ferromagnetic membrane core or membrane plate 25 and trigger the reversal when tightening a membrane. The actuating rod is then also omitted. The side wall of the spool housing is then as thin as possible.

Bei dem Ausführungsbeispiel der Fig. 4 ist zudem die Koppelstange 22 beiderseits des Steuerkanals 2 mit zwei Dichtungen 29 versehen. Der Verlauf des Steuerkanals 2 erlaubt dabei ein Kühlen der vorzugsweise in einem Kunststoffblock 9 geführten Koppelstange.In the embodiment of FIG. 4, the coupling rod 22 is also provided on both sides of the control channel 2 with two seals 29. The course of the control channel 2 allows cooling of the coupling rod, which is preferably guided in a plastic block 9.

Bei dem Ausführungsbeispiel der Fig. 5 sind jeweils drei Magnete 15, 31; 18, 32 mit Abstand voneinander auf der Betätigungsstange 16, 17 und im Steuerschieber 12 angeordnet. Die Magnete 15, 31 im Steuerschieber 12 und die Magnete 18, 32 auf der Betätigungsstange 16, 17 sind so angeordnet, daß gleichnamige Pole einander zugekehrt sind.In the embodiment of FIG. 5, three magnets 15, 31; 18, 32 at a distance from each other on the actuating rod 16, 17 and in the control slide 12. The magnets 15, 31 in the control slide 12 and the magnets 18, 32 on the actuating rod 16, 17 are arranged such that the poles of the same name face each other.

Die Abstände der Magnete 15, 31 im Steuerschieber 12 und der Magnete 18, 32 auf der Betätigungsstange 16, 17 sind jeweils gleich. Die Magnete 15, 31 sind bezüglich ihrer Abstände zu den Gehäuseanschlägen 10 so angeordnet, daß die Betätigungsstange 16, 17 und der Steuerschieber 12 an entgegengesetzten Gehäuseanschlägen 10 anliegen, dabei jeweils zwei Magnetpaare 15, 32; 31, 18 in einer zur Achse der Betätigungsstange 16, 17 senkrechten Ebene liegen und bei einem Betätigen der Betätigungsstange 16, 17 nach einem vorgegebenen Betätigungsweg in die entgegengesetzte Endlage gegenläufig umspringen.The distances between the magnets 15, 31 in the control slide 12 and the magnets 18, 32 on the actuating rod 16, 17 are each the same. The magnets 15, 31 are arranged with respect to their distances from the housing stops 10 so that the actuating rod 16, 17 and the control slide 12 rest against opposite housing stops 10, two pairs of magnets 15, 32; 31, 18 lie in a plane perpendicular to the axis of the actuating rod 16, 17 and, when the actuating rod 16, 17 is actuated, jump in opposite directions into the opposite end position after a predetermined actuation path.

Die Magnete 15, 31; 18, 32 können auch radial magnetisiert sein, wie dies in Fig. 3 dargestellt ist. In diesem Fall sind die mittleren Magnete 31, 32 jeweils entgegengesetzt gepolt zu den äußeren Magneten 15, 18, so daß sich in den Endlagen jeweils entgegengesetzt gepolte Magnete 15, 32 und 31, 18 gegenüberliegen und dadurch eine stabile Endstellung definieren, während sich beim Umschalten in der mittleren Position die Magnete 15, 18, 31, 32 und nochmals 15, 18 gegenüberliegen, gleichnamige Pole einander zugekehrt sind und ein sofortiges Umspringen in die entgegengesetzte Endstellung bewirken.The magnets 15, 31; 18, 32 can also be radially magnetized, as shown in FIG. 3. In this case, the middle magnets 31, 32 are polarized in opposite directions to the outer magnets 15, 18, so that in the end positions, magnets 15, 32 and 31, 18 with opposite polarity lie opposite each other and thereby define a stable end position, while switching over in the middle Position the magnets 15, 18, 31, 32 and again 15, 18 opposite each other, poles of the same name are facing each other and cause an immediate change in the opposite end position.

Claims (18)

  1. A double diaphragm pump having diaphragms (24) connected together by a coupling rod (22) and separating two diaphragm chambers, a control spool (12) displaceable in dependence on the diaphragms (24) and an actuating rod (16, 17; 22, 28) arranged coaxially in the control spool (12), coupled with the control spool (12) and dependent on the diaphragm movement, characterised in that the actuating rod (16, 17; 22, 28) is magnetically coupled with the control spool (12).
  2. A double diaphragm pump according to claim 1, characterised in that the actuating rod (16, 17; 22, 28) is coupled with the control spool (12) by means of mutually repelling, like-polarity magnets (15, 18).
  3. A double diaphragm pump according to claim 1, characterised in that the actuating rod (16, 17; 22, 28) is coupled with the control spool (12) by means of mutually attracting, opposite-polarity magnets (15, 18) or of a magnet and a ferromagnetic member.
  4. A double diaphragm pump according to claim 1, 2 or 3, characterised in that the control spool (12) is parallel to the coupling rod (22) and the actuating rod (16, 17) projects axially displaceably from the control spool housing (1).
  5. A double diaphragm pump according to any one of claims 1 to 4, characterised in that on the actuating rod (16, 17; 22, 28) and in the control spool (12) respectively at least one magnet (15, 18) each is arranged so that like poles thereof lie opposite one another in the opposite end positions.
  6. A double diaphragm pump according to claim 5, characterised in that two magnets (15, 18) each are arranged spaced apart from one another on the actuating rod (16, 17; 22, 28) and in the control spool (12) respectively, in each case with unlike poles facing one another, and that the unlike poles on the actuating rod (16, 17; 22, 28) and in the control spool (12) respectively that face one another are in each case of opposite polarity.
  7. A double diaphragm pump according to claim 6, characterised in that the distances apart of the magnets (15, 18) on the actuating rod (16, 17; 22, 28) and in the control spool (12) are the same and are such, in respect of their distance from stops (10, 20, 26) in the housing, that the actuating rod (16, 17; 22, 28) and the control spool are in contact with opposite housing stops (10, 20, 26) and, on actuation of the actuating rod (16, 17; 22, 28), spring over in opposite directions into the opposite position after a predetermined actuation distance.
  8. A double diaphragm pump according to one or more of claims 1 to 7, characterised in that the control spool (12) and/or the actuating rod (16, 17; 22, 28) is or are of plastics material.
  9. A double diaphragm pump according to claim 5, characterised in that three axially magnetised magnets (15, 31; 18, 32) each are arranged spaced apart on the actuating rod (16, 17; 22, 28) and in the control spool (12), in each case with like poles facing one another and with the poles on the actuating rod and in the control spool respectively that face one another in the end positions being in each case unlike.
  10. A double diaphragm pump according to claim 5, characterised in that three radially magnetised magnets (15, 31; 18, 32) each are arranged spaced apart on the actuating rod (16, 17; 22, 28) and in the control spool (12), in each case the outer magnets (15; 18) being alike and having like poles facing one another while the middle magnets (31; 32) are polarised oppositely to them but also have like poles facing one another and the respective magnets (15, 32 and 31, 18) on the actuating rod and in the control spool that are adjacent in the end positions have opposite polarity.
  11. A double diaphragm pump according to claim 9 or claim 10, characterised in that the distances apart of the magnets (15, 31; 18, 32) on the actuating rod (16, 17) and in the control spool (12) are the same, the magnets being so arranged, in respect of their distance from the housing stops (10), that the actuating rod and the control spool are in contact with opposite housing stops with two pairs of respective magnets (15, 32; 31, 18) each lying in a plane at right angles to the axis of the actuating rod, and, on actuation of the actuating rod, the actuating rod and the control spool jump over in opposite directions to the opposite end positions after a predetermined actuation distance.
  12. A double diaphragm pump according to one or more of claims 1 to 11, characterised in that the coupling rod (12) is arranged coaxially in the control spool (12).
  13. A double diaphragm pump having diaphragms coupled together by a coupling rod and separating two diaphragm chambers and a control spool displaceable in dependence on the diaphragms, characterised in that the control spool (12) is magnetically coupled with the diaphragms (24) or diaphragm discs (25).
  14. A double diaphragm pump according to claim 12, characterised in that a magnet (30) or a ferromagnetic member is arranged on each diaphragm (24) and at least one magnet (30) or ferromagnetic member is arranged on the control spool (12).
  15. A double diaphragm pump according the claim 14, characterised in that the control spool (12) is provided with magnets (30) at its end faces and that the diaphragms (24) are provided with a ferromagnetic core.
  16. A double diaphragm pump according to any one or more of claims 1 to 12 or 13 to 15, characterised by the use of permanent magnets (15, 18).
  17. A double membrane pump according to claim 16, characterised in that the magnets (15, 18) are annular magnets.
  18. A double membrane pump according to one or more of claims 1 to 17, characterised in that plastics material is injection moulded round the magnets (15, 18) and/or the ferromagnetic material.
EP19910115450 1990-10-08 1991-09-12 Double-diaphragm pump Expired - Lifetime EP0480192B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE4031872 1990-10-08
DE4031872 1990-10-08
DE19914106180 DE4106180A1 (en) 1990-10-08 1991-02-27 DOUBLE DIAPHRAGM PUMP
DE4106180 1991-02-27

Publications (2)

Publication Number Publication Date
EP0480192A1 EP0480192A1 (en) 1992-04-15
EP0480192B1 true EP0480192B1 (en) 1994-07-13

Family

ID=25897542

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910115450 Expired - Lifetime EP0480192B1 (en) 1990-10-08 1991-09-12 Double-diaphragm pump

Country Status (7)

Country Link
US (1) US5222876A (en)
EP (1) EP0480192B1 (en)
JP (1) JPH086693B2 (en)
AT (1) ATE108518T1 (en)
DE (1) DE4106180A1 (en)
DK (1) DK0480192T3 (en)
ES (1) ES2056543T3 (en)

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US5325762A (en) * 1992-10-29 1994-07-05 Nordson Corporation Fluid pressure operated piston engine assembly
WO1996008130A2 (en) * 1994-08-08 1996-03-21 Huewel Ralf Hydraulic or pneumatic piston and/or diaphragm pump
EP0780574A1 (en) 1995-12-21 1997-06-25 Verder Holding B.V. Control valve and pump provided with control valve

Also Published As

Publication number Publication date
DE4106180A1 (en) 1992-04-09
ATE108518T1 (en) 1994-07-15
EP0480192A1 (en) 1992-04-15
JPH086693B2 (en) 1996-01-29
DK0480192T3 (en) 1994-08-15
ES2056543T3 (en) 1994-10-01
DE4106180C2 (en) 1992-09-10
US5222876A (en) 1993-06-29
JPH04234582A (en) 1992-08-24

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