AU2001275116A1 - Dual diaphragm pump - Google Patents

Dual diaphragm pump

Info

Publication number
AU2001275116A1
AU2001275116A1 AU2001275116A AU7511601A AU2001275116A1 AU 2001275116 A1 AU2001275116 A1 AU 2001275116A1 AU 2001275116 A AU2001275116 A AU 2001275116A AU 7511601 A AU7511601 A AU 7511601A AU 2001275116 A1 AU2001275116 A1 AU 2001275116A1
Authority
AU
Australia
Prior art keywords
diaphragm pump
dual diaphragm
dual
pump
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001275116A
Inventor
Frederick P. Layman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2001275116A1 publication Critical patent/AU2001275116A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F04B43/0736—Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
AU2001275116A 2000-06-02 2001-05-31 Dual diaphragm pump Abandoned AU2001275116A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US20882300P 2000-06-02 2000-06-02
US60208823 2000-06-02
PCT/US2001/017766 WO2001094782A2 (en) 2000-06-02 2001-05-31 Dual diaphragm pump

Publications (1)

Publication Number Publication Date
AU2001275116A1 true AU2001275116A1 (en) 2001-12-17

Family

ID=22776189

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001275116A Abandoned AU2001275116A1 (en) 2000-06-02 2001-05-31 Dual diaphragm pump

Country Status (4)

Country Link
US (1) US6561774B2 (en)
AU (1) AU2001275116A1 (en)
TW (1) TW499548B (en)
WO (1) WO2001094782A2 (en)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
US20050022850A1 (en) * 2003-07-29 2005-02-03 Supercritical Systems, Inc. Regulation of flow of processing chemistry only into a processing chamber
IL157160A (en) * 2003-07-29 2012-02-29 Oridion Medical 1987 Ltd Diaphragm pump
US7658598B2 (en) * 2005-10-24 2010-02-09 Proportionair, Incorporated Method and control system for a pump
US7517199B2 (en) * 2004-11-17 2009-04-14 Proportion Air Incorporated Control system for an air operated diaphragm pump
WO2006055626A2 (en) * 2004-11-17 2006-05-26 Proportionair, Inc. Control system for an air operated diaphragm pump
US7527483B1 (en) * 2004-11-18 2009-05-05 Carl J Glauber Expansible chamber pneumatic system
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
EP2865451B1 (en) 2008-10-22 2019-09-04 Graco Minnesota Inc. Portable airless sprayer
WO2010129943A1 (en) * 2009-05-08 2010-11-11 Idex Aodd, Inc. Air operated diaphragm pump with electric generator
CN202707394U (en) * 2012-04-27 2013-01-30 陈绍丽 Single connecting rod linkage double-cavity metering pump
GB2506400B (en) 2012-09-28 2019-11-20 Managed Pressure Operations Drilling method for drilling a subterranean borehole
US9845794B2 (en) 2013-10-08 2017-12-19 Ingersoll-Rand Company Hydraulically actuated diaphragm pumps
CN108050050B (en) 2014-02-07 2019-10-11 固瑞克明尼苏达有限公司 Drive system for pulse free positive-dispacement pump
US11148155B2 (en) * 2014-12-22 2021-10-19 San-Ching Chen Spray device
GB201503166D0 (en) * 2015-02-25 2015-04-08 Managed Pressure Operations Riser assembly
US11007545B2 (en) 2017-01-15 2021-05-18 Graco Minnesota Inc. Handheld airless paint sprayer repair
WO2018231729A1 (en) 2017-06-12 2018-12-20 Ameriforge Group Inc. Dual gradient drilling system and method
US11022106B2 (en) 2018-01-09 2021-06-01 Graco Minnesota Inc. High-pressure positive displacement plunger pump
CN112368082B (en) 2018-04-10 2022-11-08 固瑞克明尼苏达有限公司 Handheld airless sprayer for paints and other coatings
US11471660B2 (en) * 2018-10-25 2022-10-18 Covidien Lp Vacuum driven suction and irrigation system
US20220234062A1 (en) 2019-05-31 2022-07-28 Graco Minnesota Inc. Handheld fluid sprayer
KR20220156622A (en) 2020-03-31 2022-11-25 그라코 미네소타 인크. Electrically Operated Displacement Pump
US10968903B1 (en) 2020-06-04 2021-04-06 Graco Minnesota Inc. Handheld sanitary fluid sprayer having resilient polymer pump cylinder
US10926275B1 (en) 2020-06-25 2021-02-23 Graco Minnesota Inc. Electrostatic handheld sprayer

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH251213A (en) 1946-02-05 1947-10-15 Hanvag Ges Fuer Tech Vervollko Diaphragm pump.
US2625886A (en) * 1947-08-21 1953-01-20 American Brake Shoe Co Pump
DE2741024A1 (en) * 1977-09-12 1979-03-22 Wilms Gmbh DIAPHRAGM PUMP
US4247264A (en) * 1979-04-13 1981-01-27 Wilden Pump & Engineering Co. Air driven diaphragm pump
US4367140A (en) 1979-11-05 1983-01-04 Sykes Ocean Water Ltd. Reverse osmosis liquid purification apparatus
DE3112434A1 (en) 1981-03-28 1982-10-07 Depa GmbH, 4000 Düsseldorf PNEUMATIC DIAPHRAGM PUMP
US4682937A (en) * 1981-11-12 1987-07-28 The Coca-Cola Company Double-acting diaphragm pump and reversing mechanism therefor
US4478560A (en) * 1982-09-23 1984-10-23 The Warren Rupp Company Fluid-operated reciprocating pump
US4549467A (en) * 1983-08-03 1985-10-29 Wilden Pump & Engineering Co. Actuator valve
US4778356A (en) * 1985-06-11 1988-10-18 Hicks Cecil T Diaphragm pump
US4854832A (en) * 1987-08-17 1989-08-08 The Aro Corporation Mechanical shift, pneumatic assist pilot valve for diaphragm pump
US5169296A (en) 1989-03-10 1992-12-08 Wilden James K Air driven double diaphragm pump
US5213485A (en) * 1989-03-10 1993-05-25 Wilden James K Air driven double diaphragm pump
US5062770A (en) * 1989-08-11 1991-11-05 Systems Chemistry, Inc. Fluid pumping apparatus and system with leak detection and containment
DE4018464A1 (en) * 1990-06-08 1991-12-12 Ott Kg Lewa DIAPHRAGM FOR A HYDRAULICALLY DRIVED DIAPHRAGM PUMP
DE4106180A1 (en) 1990-10-08 1992-04-09 Dirk Dipl Ing Budde DOUBLE DIAPHRAGM PUMP
US5195878A (en) 1991-05-20 1993-03-23 Hytec Flow Systems Air-operated high-temperature corrosive liquid pump
US5240390A (en) * 1992-03-27 1993-08-31 Graco Inc. Air valve actuator for reciprocable machine
US5232352A (en) * 1992-04-06 1993-08-03 Holcomb Corporation Fluid activated double diaphragm pump
DE4443778A1 (en) * 1994-12-08 1996-06-20 Abel Gmbh & Co Double diaphragm pump
JPH08330266A (en) 1995-05-31 1996-12-13 Texas Instr Inc <Ti> Method of cleansing and processing surface of semiconductor device or the like
US6149828A (en) 1997-05-05 2000-11-21 Micron Technology, Inc. Supercritical etching compositions and method of using same
US6242165B1 (en) 1998-08-28 2001-06-05 Micron Technology, Inc. Supercritical compositions for removal of organic material and methods of using same
US6228563B1 (en) 1999-09-17 2001-05-08 Gasonics International Corporation Method and apparatus for removing post-etch residues and other adherent matrices

Also Published As

Publication number Publication date
US20010048882A1 (en) 2001-12-06
US6561774B2 (en) 2003-05-13
TW499548B (en) 2002-08-21
WO2001094782A3 (en) 2002-03-14
WO2001094782A2 (en) 2001-12-13

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