EP0473488A3 - High transmission stigmatic mass spectrometer - Google Patents

High transmission stigmatic mass spectrometer Download PDF

Info

Publication number
EP0473488A3
EP0473488A3 EP19910402222 EP91402222A EP0473488A3 EP 0473488 A3 EP0473488 A3 EP 0473488A3 EP 19910402222 EP19910402222 EP 19910402222 EP 91402222 A EP91402222 A EP 91402222A EP 0473488 A3 EP0473488 A3 EP 0473488A3
Authority
EP
European Patent Office
Prior art keywords
stigmatic
mass spectrometer
high transmission
transmission
spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19910402222
Other languages
English (en)
French (fr)
Other versions
EP0473488A2 (de
Inventor
Emmanuel Chambost De
Bernard Rasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cameca SAS
Original Assignee
Cameca SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cameca SAS filed Critical Cameca SAS
Publication of EP0473488A2 publication Critical patent/EP0473488A2/de
Publication of EP0473488A3 publication Critical patent/EP0473488A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/32—Static spectrometers using double focusing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
EP19910402222 1990-08-24 1991-08-09 High transmission stigmatic mass spectrometer Withdrawn EP0473488A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9010632A FR2666171B1 (fr) 1990-08-24 1990-08-24 Spectrometre de masse stigmatique a haute transmission.
FR9010632 1990-08-24

Publications (2)

Publication Number Publication Date
EP0473488A2 EP0473488A2 (de) 1992-03-04
EP0473488A3 true EP0473488A3 (en) 1992-07-08

Family

ID=9399836

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910402222 Withdrawn EP0473488A3 (en) 1990-08-24 1991-08-09 High transmission stigmatic mass spectrometer

Country Status (5)

Country Link
US (1) US5189304A (de)
EP (1) EP0473488A3 (de)
JP (1) JPH04289653A (de)
AU (1) AU8269791A (de)
FR (1) FR2666171B1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5534699A (en) * 1995-07-26 1996-07-09 National Electrostatics Corp. Device for separating and recombining charged particle beams
FR2806527B1 (fr) * 2000-03-20 2002-10-25 Schlumberger Technologies Inc Colonne a focalisation simultanee d'un faisceau de particules et d'un faisceau optique
FR2837931B1 (fr) * 2002-03-29 2004-12-10 Cameca Dispositif de mesure de l'emission de rayons x produite par un objet soumis a un faisceau d'electrons
GB0624677D0 (en) * 2006-12-11 2007-01-17 Shimadzu Corp A co-axial time-of-flight mass spectrometer
FR2942072B1 (fr) 2009-02-06 2011-11-25 Cameca Spectrometre de masse magnetique achromatique a double focalisation.
LU100773B1 (en) * 2018-04-24 2019-10-24 Luxembourg Inst Science & Tech List Multiple beam secondary ion mass spectometry device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2324119A1 (fr) * 1975-09-12 1977-04-08 Shimadzu Corp Nouveau spectrometre de masse
EP0013003A1 (de) * 1978-12-27 1980-07-09 Forschungszentrum Jülich Gmbh Verfahren zur Elektronenstrahl-Untersuchung und Elektronenstossspektrometer zur Durchführung des Verfahrens
JPS60138833A (ja) * 1983-12-26 1985-07-23 Jeol Ltd 質量分析装置
EP0151078A2 (de) * 1984-01-27 1985-08-07 Office National D'etudes Et De Recherches Aerospatiales(O.N.E.R.A.) Lichtstarker Massenspektrometer mit Mehrfach- und Simultanauslesung
EP0225717A1 (de) * 1985-11-01 1987-06-16 Varian Associates, Inc. Massenspektrometer für hohen Strahlstrom unter Verwendung einer Raumladungslinse

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5240393A (en) * 1975-09-26 1977-03-29 Hitachi Ltd Mass spectrometer
JPS5364090A (en) * 1976-11-19 1978-06-08 Hitachi Ltd Mass analyzer
US4329618A (en) * 1980-05-29 1982-05-11 Rca Corporation Horizontal deflection enhancement for kinescopes
JPS5829577B2 (ja) * 1980-06-13 1983-06-23 日本電子株式会社 二重収束質量分析装置
FR2544914B1 (fr) * 1983-04-19 1986-02-21 Cameca Perfectionnements apportes aux spectrometres de masse
JPS59215650A (ja) * 1983-05-24 1984-12-05 Jeol Ltd 質量分析装置
JPS6188445A (ja) * 1984-10-05 1986-05-06 Hitachi Ltd 質量分析装置
DE3522340A1 (de) * 1985-06-22 1987-01-02 Finnigan Mat Gmbh Linsenanordnung zur fokussierung von elektrisch geladenen teilchen und massenspektrometer mit einer derartigen linsenanordnung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2324119A1 (fr) * 1975-09-12 1977-04-08 Shimadzu Corp Nouveau spectrometre de masse
EP0013003A1 (de) * 1978-12-27 1980-07-09 Forschungszentrum Jülich Gmbh Verfahren zur Elektronenstrahl-Untersuchung und Elektronenstossspektrometer zur Durchführung des Verfahrens
JPS60138833A (ja) * 1983-12-26 1985-07-23 Jeol Ltd 質量分析装置
EP0151078A2 (de) * 1984-01-27 1985-08-07 Office National D'etudes Et De Recherches Aerospatiales(O.N.E.R.A.) Lichtstarker Massenspektrometer mit Mehrfach- und Simultanauslesung
EP0225717A1 (de) * 1985-11-01 1987-06-16 Varian Associates, Inc. Massenspektrometer für hohen Strahlstrom unter Verwendung einer Raumladungslinse

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 9, no. 298 (E-361)(2021) 26 Novembre 1985 & JP-60 138 833 ( NIPPON DENSHI K K ) 23 Juillet 1985 *
REVUE TECHNIQUE THOMSON-CSF vol. 12, no. 1, Mars 1980, pages 225 - 265; LEPAREUR M: 'LE MICRO-ANALYSEUR IONIQUE DE SECONDE GENERATION CAMECA MODELE 3 F' *

Also Published As

Publication number Publication date
AU8269791A (en) 1992-02-27
JPH04289653A (ja) 1992-10-14
US5189304A (en) 1993-02-23
FR2666171B1 (fr) 1992-10-16
EP0473488A2 (de) 1992-03-04
FR2666171A1 (fr) 1992-02-28

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