FR2324119A1 - Nouveau spectrometre de masse - Google Patents
Nouveau spectrometre de masseInfo
- Publication number
- FR2324119A1 FR2324119A1 FR7627259A FR7627259A FR2324119A1 FR 2324119 A1 FR2324119 A1 FR 2324119A1 FR 7627259 A FR7627259 A FR 7627259A FR 7627259 A FR7627259 A FR 7627259A FR 2324119 A1 FR2324119 A1 FR 2324119A1
- Authority
- FR
- France
- Prior art keywords
- mass spectrometer
- new mass
- new
- spectrometer
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/061—Ion deflecting means, e.g. ion gates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50111075A JPS5836464B2 (ja) | 1975-09-12 | 1975-09-12 | シツリヨウブンセキソウチ |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2324119A1 true FR2324119A1 (fr) | 1977-04-08 |
FR2324119B1 FR2324119B1 (fr) | 1982-06-04 |
Family
ID=14551738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7627259A Granted FR2324119A1 (fr) | 1975-09-12 | 1976-09-10 | Nouveau spectrometre de masse |
Country Status (4)
Country | Link |
---|---|
US (1) | US4066895A (fr) |
JP (1) | JPS5836464B2 (fr) |
FR (1) | FR2324119A1 (fr) |
GB (1) | GB1564526A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2666171A1 (fr) * | 1990-08-24 | 1992-02-28 | Cameca | Spectrometre de masse stigmatique a haute transmission. |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4174479A (en) * | 1977-09-30 | 1979-11-13 | Boerboom Anne J H | Mass spectrometer |
SE440600B (sv) * | 1979-05-17 | 1985-08-12 | Scanditronix Instr | Anordning for bestralning av en materievolym med en strale av laddade partiklar |
US4276477A (en) * | 1979-09-17 | 1981-06-30 | Varian Associates, Inc. | Focusing apparatus for uniform application of charged particle beam |
GB2133924B (en) * | 1983-01-17 | 1986-08-06 | Jeol Ltd | Mass spectrometry |
DE3522340A1 (de) * | 1985-06-22 | 1987-01-02 | Finnigan Mat Gmbh | Linsenanordnung zur fokussierung von elektrisch geladenen teilchen und massenspektrometer mit einer derartigen linsenanordnung |
US4922106A (en) * | 1986-04-09 | 1990-05-01 | Varian Associates, Inc. | Ion beam scanning method and apparatus |
US4980562A (en) * | 1986-04-09 | 1990-12-25 | Varian Associates, Inc. | Method and apparatus for high efficiency scanning in an ion implanter |
JP2699170B2 (ja) * | 1986-04-09 | 1998-01-19 | イクリプス・イオン・テクノロジー・インコーポレイテッド | イオンビーム走査方法および装置 |
US4745281A (en) * | 1986-08-25 | 1988-05-17 | Eclipse Ion Technology, Inc. | Ion beam fast parallel scanning having dipole magnetic lens with nonuniform field |
DE3813641A1 (de) * | 1988-01-26 | 1989-08-03 | Finnigan Mat Gmbh | Doppelfokussierendes massenspektrometer und ms/ms-anordnung |
GB9019560D0 (en) * | 1990-09-07 | 1990-10-24 | Vg Instr Group | Method and apparatus for mass spectrometry |
JP3367717B2 (ja) * | 1993-08-03 | 2003-01-20 | 株式会社リケン | 直流モータ制御回路及び直流モータ |
GB9510052D0 (en) * | 1995-05-18 | 1995-07-12 | Fisons Plc | Mass spectrometer |
EP0982757A1 (fr) * | 1998-08-25 | 2000-03-01 | The Perkin-Elmer Corporation | Séparateur du gaz porteur pour la spectrométrie en masse |
US6677599B2 (en) * | 2000-03-27 | 2004-01-13 | Applied Materials, Inc. | System and method for uniformly implanting a wafer with an ion beam |
US6661016B2 (en) | 2000-06-22 | 2003-12-09 | Proteros, Llc | Ion implantation uniformity correction using beam current control |
CN111146070B (zh) * | 2019-12-25 | 2023-06-16 | 兰州空间技术物理研究所 | 一种小型高性能空间探测质谱计 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB780999A (en) * | 1953-12-12 | 1957-08-14 | Tno | Improvements in or relating to mass spectrometers |
GB957084A (en) * | 1961-10-19 | 1964-05-06 | Ass Elect Ind | Improvements relating to mass spectrometers |
GB1255962A (en) * | 1968-07-05 | 1971-12-08 | Atomic Energy Authority Uk | Improvements in or relating to gas chromatography-mass spectrometry |
JPS517290Y2 (fr) * | 1971-03-09 | 1976-02-27 | ||
JPS5246514B2 (fr) * | 1972-01-28 | 1977-11-25 |
-
1975
- 1975-09-12 JP JP50111075A patent/JPS5836464B2/ja not_active Expired
-
1976
- 1976-09-07 GB GB36999/76A patent/GB1564526A/en not_active Expired
- 1976-09-08 US US05/721,438 patent/US4066895A/en not_active Expired - Lifetime
- 1976-09-10 FR FR7627259A patent/FR2324119A1/fr active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2666171A1 (fr) * | 1990-08-24 | 1992-02-28 | Cameca | Spectrometre de masse stigmatique a haute transmission. |
EP0473488A2 (fr) * | 1990-08-24 | 1992-03-04 | Cameca | Spectromètre de masse stigmatique à haute transmission |
EP0473488A3 (en) * | 1990-08-24 | 1992-07-08 | Cameca | High transmission stigmatic mass spectrometer |
US5189304A (en) * | 1990-08-24 | 1993-02-23 | Cameca | High transmission mass spectrometer with improved optical coupling |
Also Published As
Publication number | Publication date |
---|---|
US4066895A (en) | 1978-01-03 |
JPS5234785A (en) | 1977-03-16 |
FR2324119B1 (fr) | 1982-06-04 |
JPS5836464B2 (ja) | 1983-08-09 |
GB1564526A (en) | 1980-04-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |