EP0151078A2 - Lichtstarker Massenspektrometer mit Mehrfach- und Simultanauslesung - Google Patents

Lichtstarker Massenspektrometer mit Mehrfach- und Simultanauslesung Download PDF

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Publication number
EP0151078A2
EP0151078A2 EP85400127A EP85400127A EP0151078A2 EP 0151078 A2 EP0151078 A2 EP 0151078A2 EP 85400127 A EP85400127 A EP 85400127A EP 85400127 A EP85400127 A EP 85400127A EP 0151078 A2 EP0151078 A2 EP 0151078A2
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EP
European Patent Office
Prior art keywords
sector
entry
electrostatic
lens
radial plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85400127A
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English (en)
French (fr)
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EP0151078B1 (de
EP0151078A3 (en
Inventor
Georges Slodzian
François Costa de Beauregard
Bernard Daigne
François Girard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Universite Paris Sud Paris 11
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Universite Paris Sud Paris 11
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Publication of EP0151078A2 publication Critical patent/EP0151078A2/de
Publication of EP0151078A3 publication Critical patent/EP0151078A3/fr
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Publication of EP0151078B1 publication Critical patent/EP0151078B1/de
Expired legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/32—Static spectrometers using double focusing
    • H01J49/326—Static spectrometers using double focusing with magnetic and electrostatic sectors of 90 degrees
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/32—Static spectrometers using double focusing
    • H01J49/322—Static spectrometers using double focusing with a magnetic sector of 90 degrees, e.g. Mattauch-Herzog type

Definitions

  • the invention relates to a charged clarity particle separator or mass spectrometer for the identification and simultaneous measurement of several elements.
  • M M 1 , M 2 ' M 3 , etc.
  • V eV
  • a mass spectrometer generally has an entrance slit, after which the beam passes into an electrostatic sector, then into a magnetic sector.
  • the purpose of this arrangement is to deflect the particles, in a selective manner as to their mass and as much as possible independently of their energy. The deviation occurs in a so-called radial plane which is the plane of symmetry of the instrument and which is perpendicular to the large dimension of the entry slit.
  • the particle beam therefore has a radial component, and a perpendicular component, in what is called the vertical section.
  • the quality of a mass spectrometer is defined by its separating power M / ⁇ M, where ⁇ M is the smallest difference in mass that can be distinguished with the instrument.
  • this separating power would only depend on the dimensions of the entrance slit.
  • the images of the entry slit, or lines are distorted by the optical defects of the device, called aberrations. These aberrations depend mainly on the energy dispersion AV of the ions, and on the beam opening which is limited by the opening slit which is inserted most of the time before the magnetic sector.
  • the best spectrometer is the most sensitive, that is to say the one that accepts the beam with the greatest geometric extent. This ability is called “clarity" of the spectrometer.
  • clarity can only be increased by reducing the harmful effect of aberrations.
  • the problem is therefore to produce a mass spectrometer with high clarity, capable of simultaneous multiple detection and which has a high separating power.
  • a first object of the present invention is to correct the proper aberrations of the spectrometer, in particular of its magnetic sector, and also of its electrostatic sector.
  • a second object of the present invention is, using a transfer optic placed upstream of the mass spectrometer itself, to improve the adaptation and the transfer of the ion beam on the input of the spectrometer.
  • the device proposed here comprises an entry slot, followed by an electrostatic sector, then a magnetic sector.
  • An opening slot can be inserted between the electrostatic and magnetic sectors or, in a conventional manner, at the entrance to the electrostatic sector.
  • This assembly makes it possible to deflect a beam of particles in the radial plane perpendicular to the large dimension of the entry slit.
  • the magnetic sector has a planar entry face, inclined on the axis of the particle beam, and an exit face also planar, the plane of which passes through the intersection of the entry face with the axis of the particle beam. This is the arrangement of the actual magnetic faces which differ from the material faces due to the leakage fields.
  • the means recommended by this prior French patent consists in placing a first electric lens (18) between the entry slit (10) and the energy diaphragm (20) and a second electric lens (22) between the energy diaphragm (20) and the magnetic sector (24).
  • the Patent specifies the role of these lenses, in relation to the aperture diaphragm and the adjustable energy diaphragm.
  • the entry face of the magnetic sector (24) is inclined by an angle ⁇ which happens to be equal to 26.6 °.
  • This use of an inclined entry face makes it possible to define a focal point which is at a distance of twice the radius in the direction perpendicular to the plane of symmetry of the device.
  • the focusing plane (26) is offset behind the magnetic field, by an angle W which is here equal to 8.1 °.
  • the spectrometer comprises means such as a quadrupole for supplying to the magnetic sector a beam of particles which is parallel at least in the radial plane, and which also presents, for each energy of the ⁇ AV band, the appropriate inclination so that the magnetic sector has an achromatic functioning at the level of all the lines of the mass spectrum.
  • ⁇ noting the angle of the entry face with the normal to the beam axis which is located on the deflection side thereof, and 8 noting the beam deflection angle in the magnetic sector satisfy the relation:
  • a second characteristic of the invention involves the transfer optic, which is arranged in cooperation with the spectrometer itself, so that in its vertical section, the particle beam has a narrowing between the entry slit and the electrostatic sector; there is then provided, at this necking, a first hexapole, arranged to compensate for the second order opening aberrations created by the electrostatic sector for the trajectories located in the radial plane, aberrations in a 2 , and for the radial component of the other trajectories.
  • the location chosen for the hexapole means that the latter does not introduce ab 2 aberrations from the opening in the vertical section.
  • Second order opening aberrations related to the electrostatic sector can be determined, this sector being for example of the spherical type.
  • the transfer optic is arranged to apply a particle beam which is substantially parallel in vertical section to the entry slit.
  • a converging lens is provided between the entry slit and the first hexapole (this converging lens being capable of providing post-acceleration).
  • the hexapole is centered on the conjugate point of the entry slit by said converging lens, in the vertical section of the beam.
  • the transfer optic comprises two electrostatic lenses, cooperating to produce a constriction of the beam at the level of the entry slot in the radial plane. Between these two electrostatic lenses is provided a slotted lens arranged so that the beam is parallel in vertical section at the level of the entry slit. It is then the converging (post-acceleration) lens, which ensures the convergence of the beam at the abovementioned point of necking, in vertical section.
  • the above concerns the correction of the opening aberrations for the trajectories located in the radial plane, at the level of the magnetic sector then of the electrostatic sector.
  • the transfer optic is arranged so that the angles seen b by the spectrometer are always very small, so that the corresponding aberrations in b 2 are negligible.
  • Yet another aspect of the invention concerns the correction of chromatic aberrations, that is to say in energy dispersion.
  • the electrostatic sector and the magnetic sector having respective virtual chromatic centers of rotation the quadrupole is placed so as to combine with an appropriate magnification these two centers of chromatic rotation.
  • the quadrupole combines the center of chromatic rotation of the electrostatic sector with the center of chromatic rotation of the magnetic sector corresponding to a given radius, that is to say, to a given mass.
  • the quadrupole is also arranged so that each energy arrives on the magnetic sector with the appropriate inclination; it follows that the chromatic dispersion is completely canceled for the mass considered after leaving the magnetic sector while for the other masses the chromatic dispersion is canceled at their line. This correction occurs within the limit of the energy band ⁇ AV defined by the means disposed upstream of the transfer optic or by a filtering slot placed in P3.
  • the quadrupole is arranged so that its focal point coincides with the real image that the electrostatic sector of the entry slit gives in the radial plane, this quadrupole being followed by means of compensating for its divergence in the vertical section, so that the particle beam is then parallel in its two transverse dimensions.
  • the means for compensating for the divergence of the quadrupole in vertical section are advantageously a lens with slits.
  • the device comprises a second hexapole, disposed after the electrostatic sector and substantially centered on the real image that the electrostatic sector of the entry slot gives in the radial plane.
  • This arrangement allows the reduction of mixed aberrations, for the trajectories located in the radial plane, with exact compensation for a chosen mass. For the other masses, the aberration is considerably reduced.
  • the chromatic, that is to say energy, filtering of the particle beam takes place here upstream of the transfer optic. In a variant, it takes place at the level of this second hexapole. This then comprises two hexapoles framing an energy filtering slot.
  • the present invention relates to a charged particle separator, or mass spectrometer, with multiple simultaneous detection and with great clarity.
  • mass spectrometers In contrast to mass spectrographs, which use a photographic plate as their final detector, mass spectrometers do not necessarily need their detection zone, the focal exit surface of the magnetic sector, to be a plane.
  • the spectrometer has a transfer optic at its input 1. The nature of this can depend on the characteristics of the particle beam applied to the input or "point-source" S.
  • the transfer optic 1 ends at level d an FE 20 entry slot, which constitutes the entrance to the mass spectrometer itself.
  • the spectrometer comprises, behind the entry slit FE 20, an electrostatic sector SE 23, then a magnetic sector SM 30, upstream of which is provided a FO 29 opening slot.
  • the function of this set of means is to deflect the particle beam in a radial plane perpendicular to the large dimension of the FE 20 input slot.
  • the radial plane is that of FIGS. 1 and 2A.
  • the main organ of a mass spectrometer is its magnetic sector, whose dispersive action depends on both the mass and the energy of each particle; this dispersive action manifests itself by trajectories in an arc, the radius of which is more or less large depending on mass and energy. It is known to associate with such a magnetic sector an electrostatic sector which precedes it, and which in turn has a dispersive action but only as a function of the energy of the particles. The two sectors are combined so that the dispersive action of the electrostatic sector compensates for the energy-dispersive action of the magnetic sector. It then remains in principle, at the exit from the magnetic sector, only the dis- action. persists according to mass.
  • the magnetic sector SM 30 has a plane entry face 31, inclined on the axis of the particle beam, and an exit face 32 also plane, the plane of which passes through the intersection 33 of the entry face 31 with the axis of the particle beam.
  • This arrangement has the advantage of providing the same deflection angle regardless of the mass.
  • the deflection angle is equal to twice the angle of the exit face 32 with the axis of the particle beam at the entrance to the magnetic sector SM 30. It also follows that, for a beam With the skin parallel to the entry, the particles at the exit from the magnetic sector are focused in a plane PF 35 which also passes through point 33.
  • a first aberration is known as a second order aperture aberration of the magnetic sector.
  • this type of aberration lies in the fact that two symmetrical trajectories with respect to the central trajectory at the entrance to the magnetic sector will intersect after the sector at a point situated outside this central trajectory; the offset between the point of intersection and the central trajectory is proportional to the square of the angular inclination a of each of the intersecting trajectories relative to the central trajectory (hence the second order in a 2 ).
  • a first aspect of the invention consists in correcting this type of second order opening aberration, at the level of the magnetic sector itself.
  • 34 the normal to the axis of the particle beam which is located on the side of the concavity which will be impressed on the beam by the magnetic sector SM 30.
  • e the angle formed by the entry face 31 of the SM 30 magnetic sector with this normal 34.
  • 8 the beam deflection angle in the SM 30 magnetic sector.
  • the present invention relates to a mass spectrometer with very high clarity, that is to say an apparatus accepting beams whose geometrical extent is the largest, and with simultaneous detection, which makes the correction of aberrations very delicate.
  • the invention recommends an appropriate inclination of the input face of the magnetic sector, so that it has an operation devoid of second order opening aberrations for all masses - all the beam trajectories located in the radial plane - provided of course that the aberrations in the opening of the electrostatic sector (SH) - (HP1) have been corrected beforehand.
  • the inclination ⁇ of the input face is, as a function of the angle of deviation 8 of the magnetic sector, given by the above-mentioned relation:
  • the particle beam available at the outlet of the electrostatic sector SE 23 has a necking at a point P3 (FIG. 2A).
  • means are provided downstream of this point P3 to ensure that the magnetic sector SM 30 receives a particle beam which is parallel in the radial plane.
  • One way of doing this is to arrange the single quadrupole QP 26 so that its focus -object coincides with the point of necking P3.
  • the position of the quadrupole QP 26 is determined so that the inclination of each of the parallel beams corresponding to the various energies is appropriate to give an achromatic operation at the level of the lines located in the plane PF 35 and this simultaneously for all the masses.
  • FIG. 1 shows that two parallel beams corresponding to the energies V + ⁇ V, focus at the same point on the plane PF 35; the ordinate is dilated to make the figure legible.
  • FIG. 2A shows in the radial plane a parallel beam leaving the quadrupole QP 26.
  • FIG. 2C shows that the QP quadrupole 26, on the contrary, has a diverging action in vertical section. This divergent action is in turn compensated by an electro lens static with slots LF 27. At the outlet of this latter, there is therefore also a parallel beam, which crosses exactly the small dimension of the opening slot FO 29.
  • the particle beam is parallel in its two transverse dimensions, downstream of the slit lens LF 27, until it is applied to the input face 31 of the magnetic sector SM 30.
  • the electrostatic sector SE 23 and the magnetic sector SM 30 each have a respective virtual chromatic rotation center.
  • chromatic is used here in relation to the energy dispersion.
  • the particles following the central trajectory before entering the electrostatic sector and having an energy slightly different from the nominal energy of the beam will leave the electrostatic sector SE 23 with inclined trajectories. When the energy varies, these inclined trajectories seem to rotate around a point which is called the center of chromatic rotation.
  • the magnetic sector SM 30 has a center of chromatic rotation, towards which must converge with the appropriate angle of the particles having similar energies and the same mass so that they end up after deviation, at the same point of the focal plane PF 35 and with the same angle (paths combined) whatever the energy in the band - AV.
  • means are provided for combining the two respective chromatic centers of rotation of the electrostatic sector SE 23 and the magnetic sector SM 30.
  • the quadrupole QP 26 can do this in a very simple manner with magnification appropriate. This allows a complete correction of the chromatic or energetic dispersion of the particle beam for a mass, the quadrupole being moreover arranged to provide for the other masses, trajectories of different energies with the appropriate inclination.
  • the beam of charged particles applied to the input of the transfer optic 1 is presented with a necking at point S.
  • This beam of ions is composed of particles of different masses, which are animated by slightly different kinetic energies.
  • V their average kinetic energy, which is expressed in electron volts, and ⁇ AV the energy dispersion.
  • the beam has in principle a symmetry of revolution at the point S.
  • Such a beam can consist of secondary ions emitted by a sample subjected to a primary ion beam concentrated on its surface.
  • a first LE 11 unipotential electrostatic lens gives an image of the source point S at a point S1.
  • PC plates 12 allowing the possible refocusing of the beam on the optical axis.
  • FIGS. 2A and 3A show that this lens with slots has no effect on the paths of ions located in the radial plane.
  • the slotted lens LF 13 makes these trajectories converge at a point of necking S2.
  • a second LE 14 electrostatic lens is placed after the LF 13 slit lens.
  • the lens LE 14 gives points S and S1 an image P situated at the level of the entry slit FE 20 and centered on the axis of the latter.
  • the lens LE 14 is placed so that its focus is substantially at point S2, this lens therefore providing substantially parallel rays or paths extending along the FE 20 entry slot, according to its large dimension (FIG. 3B).
  • magnification at the level of the entry slit FE 20 in the radial plane is obtained by playing on the excitation potential of the electrostatic lenses LE 11 and LE 14.
  • a converging electrostatic lens denoted PA 21, which allows a controlled post-acceleration, and then a first HP hexapole 22.
  • the PA lens 21 acts, in the vertical section of the particle beam, to produce a necking thereof at a point located upstream of the electrostatic sector SE 23.
  • the first hexapole HP 22 is centered at this necking.
  • This HP hexapole 22 is arranged to compensate for the second order opening aberrations created by the electrostatic sector SE 23 for the trajectories located in the radial plane. At first order, it has no action, and therefore does not modify the trajectories located in vertical section. Furthermore, as already indicated, the hexapole does not introduce b 2 type aberrations on the trajectories in the vertical section thanks to the fact that the necking of the beam in this section is located in the center of the hexapole .
  • the PA 21 post-acceleration lens plays another role. This role consists in modifying the opening angle for the spectrometer 2 proper. Correlatively, seen for the rest of the spectrometer, the necking produced by the transfer optic in P at the level of the entry slit in the radial plane, is transferred to P1 by the post-acceleration lens PA 21. This makes it possible to increase the clarity of the spectrometer after deletion or correction of the most important aberrations. Post-acceleration brings ions from V energy to Vp energy.
  • the main-object plane of the post-acceleration lens PA 21 is located in the plane of the entry slot FE 20, so that the spectrometer sees an entry slot located in P1, in the plane main image of the PA 21 lens.
  • the size of the Gaussian image has not changed. For a given separating power, only the opening angle available at the entrance increases.
  • the spectrometer is arranged so that the image focal point of the post-acceleration lens PA 21 is located in the center of the HP hexapole 22, at point P2.
  • Post-acceleration also makes it possible to reduce the relative energy dispersion from V / V to V / Vp, which leads to a decrease in mixed aberrations and aberrations in ( ⁇ V / VP) 2 .
  • V / Vp ratio of the order of a quarter which implies, for negative ions of incident energy of ⁇ 5 kV, to put all the conductors constituting the spectrometer and located downstream of the PA 21 post-acceleration lens at a voltage of + 15 kV.
  • the spectrometer comprises a second hexapole (HP 25), arranged after the electrostatic sector (SE 23), and centered on the real image which the electrostatic sector (SE 23) of the slot (FE 20) gives in the radial plane. .
  • HP 25 is centered on P3 allows correction of mixed aberrations to be carried out without having to touch up the setting of the hexapole HP 22 which corrects opening aberrations (independence of the settings).
  • the energy filtering is carried out upstream of the transfer optic.
  • the second HP 25 hexapole In a variant, it is carried out at the level of the second HP 25 hexapole. The latter then comprises two hexapoles framing an energy filtering slot (not shown).
  • Figures 1, 2A, 2C, 2D show certain details of the structure of the magnetic sector.
  • This comprises a magnet, not shown, which cooperates with two pole pieces 32A and 32B, the shape of which is given by the views illustrated in the radial plane.
  • the invention makes it possible to considerably facilitate these corrections, by effecting them by adjustments which do not require displacement of the components of the spectrometer, and which are made as independent as possible from each other. .
  • the particle separator of the invention would make it possible, like a spectrograph, to use a photographic plate for the collection of particles deviated, and having undergone mass analysis.
  • a series of separate collecting devices such as electronic multipliers whose input surface will be sensitive to the impact of charged particles from the magnetic sector SM 30 .
  • Entrance beam Negative ions of average energy 5 kV, forming a beam of revolution which has a necking at the point S.
  • the half-angle at the top is of the order of 10 -2 radians for a separating power M / ⁇ M of the order of 4,000.
  • the magnetic circuit is at ground potential, but
  • non-magnetic electrodes placed inside the air gap are brought to a potential of + 15 kV in operation in post-accelerated mode. Finally, a magnetic shunt limits the leakage of the field on the entry face of the magnetic sector.
  • a multicollector assembly made up of ion-electron converters followed by electron multipliers.
  • the optical elements (except the magnet) are placed in a structural piece of stainless steel which ensures the mechanical positions of the various devices and serves as a vacuum enclosure.
  • a cryogenic pumping unit makes it possible to obtain the desired ultra-vacuum.
  • the magnet is connected to the previous device by an elastic and sealed system, which includes means for mechanical alignment of the optical axes.
  • FIGS. 5A and 5B, and 6A and 6B for a better illustration of the operations with and without post-acceleration, respectively.
  • FIG. 5A shows that, in the radial plane, the trajectories pass without alteration through the slit lens LF 13, to join the second electrostatic lens LE 14, and focus in principle at point P.
  • the post-acceleration lens PA 21 raised to 10 kV, produces a point of apparent focus at point P1, downstream of the spectrometer. It is therefore from this point P1 that the trajectories applied to the HP hexapole 22 will start.
  • the distance between points P1 and P, or more exactly between the planes PHi and PHO is 11 mm.
  • the trajectories have been modified by the lens with slits LF 13. They are therefore parallel to the plane PHi, after which they converge slightly to cross the opening slit FE 20 in the plane PHO, and then take their final orientation towards the point of necking P2 on which the HP 22 hexapole is centered.
  • the settings of the transfer optics are modified so that the trajectories begin to converge as soon as they exit the second electrostatic lens LE 14. They pass through the entry slit FE 20, to converge still a little more at the level of the lens PA 21, and lead fially to the same point of necking P2 as previously.
  • the mode without post-acceleration provides a magnification of 1.32 between the image located in P1 and the image located in P.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP85400127A 1984-01-27 1985-01-25 Lichtstarker Massenspektrometer mit Mehrfach- und Simultanauslesung Expired EP0151078B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8401332 1984-01-27
FR8401332A FR2558988B1 (fr) 1984-01-27 1984-01-27 Spectrometre de masse, a grande clarte, et capable de detection multiple simultanee

Publications (3)

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EP0151078A2 true EP0151078A2 (de) 1985-08-07
EP0151078A3 EP0151078A3 (en) 1986-08-20
EP0151078B1 EP0151078B1 (de) 1989-12-27

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EP85400127A Expired EP0151078B1 (de) 1984-01-27 1985-01-25 Lichtstarker Massenspektrometer mit Mehrfach- und Simultanauslesung

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US (1) US4638160A (de)
EP (1) EP0151078B1 (de)
JP (1) JPS6110843A (de)
DE (1) DE3575048D1 (de)
FR (1) FR2558988B1 (de)
SU (1) SU1600645A3 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2620858A1 (fr) * 1987-09-18 1989-03-24 Jeol Ltd Instrument de spectrometrie de masse d'ions secondaires avec formation directe de l'image
GB2178893B (en) * 1985-06-22 1990-04-04 Finnigan Mat Gmbh Double focusing mass spectrometer
EP0473488A2 (de) * 1990-08-24 1992-03-04 Cameca Stigmatisches Massenspektrometer mit hoher Transmission

Families Citing this family (10)

* Cited by examiner, † Cited by third party
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JPH0224950A (ja) * 1988-07-14 1990-01-26 Jeol Ltd 同時検出型質量分析装置
JPH02304854A (ja) * 1989-05-19 1990-12-18 Jeol Ltd 同時検出型質量分析装置
US5019712A (en) * 1989-06-08 1991-05-28 Hughes Aircraft Company Production of focused ion cluster beams
JPH03269943A (ja) * 1990-03-20 1991-12-02 Jeol Ltd 同時検出型質量分析装置
JP3727047B2 (ja) * 1999-07-30 2005-12-14 住友イートンノバ株式会社 イオン注入装置
US6984821B1 (en) * 2004-06-16 2006-01-10 Battelle Energy Alliance, Llc Mass spectrometer and methods of increasing dispersion between ion beams
US20060043285A1 (en) * 2004-08-26 2006-03-02 Battelle Memorial Institute Method and apparatus for enhanced sequencing of complex molecules using surface-induced dissociation in conjunction with mass spectrometric analysis
FR2942072B1 (fr) * 2009-02-06 2011-11-25 Cameca Spectrometre de masse magnetique achromatique a double focalisation.
LU92130B1 (en) * 2013-01-11 2014-07-14 Ct De Rech Public Gabriel Lippmann Mass spectrometer with optimized magnetic shunt
WO2017075470A1 (en) * 2015-10-28 2017-05-04 Duke University Mass spectrometers having segmented electrodes and associated methods

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US3622781A (en) * 1969-07-30 1971-11-23 Inst Plasmaphysik Gmbh Mass spectrograph with double focusing
GB2079039A (en) * 1980-06-13 1982-01-13 Jeol Ltd A double focusing mass spectrometer

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JPS4864989A (de) * 1971-12-10 1973-09-07
US4389571A (en) * 1981-04-01 1983-06-21 The United States Of America As Represented By The United States Department Of Energy Multiple sextupole system for the correction of third and higher order aberration

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US3622781A (en) * 1969-07-30 1971-11-23 Inst Plasmaphysik Gmbh Mass spectrograph with double focusing
GB2079039A (en) * 1980-06-13 1982-01-13 Jeol Ltd A double focusing mass spectrometer

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Title
MASS SPECTROMETRY REVIEWS, vol. 2, no. 2, 1983, pages 289-325, John Wiley & Sons Inc.; H. MATSUDA: "High-resolution high-sensitivity mass spectrometers" *
NUCLEAR INSTRUMENTS & METHODS, vol. 153, no. 2/3, juin 1978, pages 407-414, North-Holland Publishing Co., Amsterdam, NL; S. TAYA et al.: "Second-order image aberration correction of double-focusing mass spectrometers by electrostatic hexpole lens" *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2178893B (en) * 1985-06-22 1990-04-04 Finnigan Mat Gmbh Double focusing mass spectrometer
FR2620858A1 (fr) * 1987-09-18 1989-03-24 Jeol Ltd Instrument de spectrometrie de masse d'ions secondaires avec formation directe de l'image
EP0473488A2 (de) * 1990-08-24 1992-03-04 Cameca Stigmatisches Massenspektrometer mit hoher Transmission
EP0473488A3 (en) * 1990-08-24 1992-07-08 Cameca High transmission stigmatic mass spectrometer

Also Published As

Publication number Publication date
US4638160A (en) 1987-01-20
EP0151078B1 (de) 1989-12-27
DE3575048D1 (de) 1990-02-01
JPS6110843A (ja) 1986-01-18
FR2558988B1 (fr) 1987-08-28
EP0151078A3 (en) 1986-08-20
JPH0359544B2 (de) 1991-09-10
SU1600645A3 (ru) 1990-10-15
FR2558988A1 (fr) 1985-08-02

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