EP0457895B1 - Vorrichtung zur kontinuierlichen reinigung der abgase einer vakuumanlage - Google Patents

Vorrichtung zur kontinuierlichen reinigung der abgase einer vakuumanlage Download PDF

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Publication number
EP0457895B1
EP0457895B1 EP91901589A EP91901589A EP0457895B1 EP 0457895 B1 EP0457895 B1 EP 0457895B1 EP 91901589 A EP91901589 A EP 91901589A EP 91901589 A EP91901589 A EP 91901589A EP 0457895 B1 EP0457895 B1 EP 0457895B1
Authority
EP
European Patent Office
Prior art keywords
vacuum
vacuum pump
permeate
membrane module
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP91901589A
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German (de)
English (en)
French (fr)
Other versions
EP0457895A1 (de
Inventor
Gerhard Hauk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sihi GmbH and Co KG
Original Assignee
Sihi GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sihi GmbH and Co KG filed Critical Sihi GmbH and Co KG
Publication of EP0457895A1 publication Critical patent/EP0457895A1/de
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion

Definitions

  • gas permeation membranes for cleaning gases. These are thin foils, the volume resistance of which is lower for the harmful gases to be separated from the exhaust gas than for the process gas (for example air).
  • the gas permeation membrane is arranged in a membrane module in such a way that it separates a flow path for the exhaust gas from a space for receiving the gases penetrating the membrane, which are referred to as permeate.
  • permeate a flow path for the exhaust gas from a space for receiving the gases penetrating the membrane
  • the solution according to the invention accordingly consists in that the exhaust gas stream is pressed through the membrane module by means of the vacuum pump of the vacuum system and the permeate side of the membrane module is connected to the suction side of the same vacuum pump.
  • the vacuum pump of the vacuum system itself is used to generate the pressure difference that is required for the operation of the gas permeation membrane module. This eliminates the need for several separate pumps. Furthermore, the invention leads to the fact that the recycling of the permeate into the exhaust gas stream enriches the pollutants therein, so that pollutant separation and / or removal can take place effectively. If the term vacuum pump or the membrane module is used here in a simplified manner, this should include the case that several vacuum pumps or membrane modules are provided in a functional unit.
  • a small part of the suction capacity of the vacuum pump is used to operate the gas permeation membrane module.
  • this part can be, for example, 5-30%.
  • This is achieved by recycling the pollutants in the form of the permeate stream with a high load. They can be removed in any way from the gas circuit formed between the vacuum pump and the membrane module in order to be destroyed or processed in some other way.
  • part of the permeate stream returned from the membrane module to the vacuum pump can be branched off continuously.
  • a condenser can also be provided in the gas circuit, which cools the pollutants out of the gas circuit.
  • the condensation can be carried out particularly efficiently in a condenser arranged there or in the vacuum pump.
  • the pollutants are expediently condensed out of the permeate stream on the suction side and discharged before entering the vacuum pump.
  • it can also be expedient to provide a condenser in the exhaust gas flow between the vacuum pump and the membrane module, since the pollutant concentration is also increased in this area of the circulation of the permeate according to the invention.
  • the pressure difference acting on the membrane module can be kept better constant. This can also be beneficial for the start phase of the vacuum process.
  • membrane module is not important for the invention. E.g. can capillary, winding or pillow modules be used. Polydimethylsiloxane and silicone have proven themselves as membrane materials; however, other membrane materials can also be used.
  • the membrane module is expediently additionally designed as a flame arrester.
  • the device according to the invention is in principle independent of the type of vacuum pump.
  • a permeate-side vacuum between 20 and 300 mbar, preferably between 50 and 200 mbar, is particularly expedient. The greatest specific cleaning efficiency is achieved in this rough vacuum range because the cleaning effect increases less than the power requirement at lower permeate-side pressures.
  • pollutants used for simplification includes non-harmful substances to be separated.
  • Fig. 1 shows the process scheme for the case that a liquid ring pump, which is operated with a closed ring liquid circuit, is used. These pumps are characterized by an almost unlimited compatibility with regard to the condensate contained in the flow. The condensate can serve as the operating fluid that forms the fluid ring of the pump.
  • Gas is sucked out of a vacuum process vessel 1 via a control valve 2 by a vacuum pump 3.
  • the exhaust gas stream from the vacuum pump is fed via line 4 into a cooler in which the condensable substances are extracted from the exhaust gas stream.
  • the cooling can also take place separately in a gas and liquid cooler. Depending on the level in the operating fluid container 6 controlled by means of probe 8, the excess liquid is drawn off via line 9.
  • the exhaust gas stream which is still loaded with pollutants, passes via line 10 and droplet separator 11 through the exhaust gas part 12 of the membrane module 13 and is discharged as purified gas via line 14.
  • the membrane 15 separates the exhaust gas space 12 from the permeate space 16. While the pressure in the exhaust gas space 12 does not deviate significantly from the atmospheric pressure, the pressure in the permeate space 16 is determined by the vacuum on the suction side of the vacuum pump 3. Under the influence of this pressure difference, the pollutants diffuse through the membrane 15 and are discharged as permeate through the line 17 and the buffer tank 18 and a control valve 19 to the suction side of the pump 3.
  • the control valve allows a higher pressure to be set on the permeate side than in system 1 if the system-side vacuum should be too low for an effective and low-performance cleaning operation.
  • the pollutants are enriched up to the condenser 5 so that they can be efficiently separated there.
  • FIG. 2 is the same as that of FIG. 1 with the exception of the fact that condensate accumulating in the condenser 5 'and the condensate container 6' is not returned to the pump 3 as operating fluid. This is the case if a pump is used in which no condensation takes place and / or an operating fluid to be kept separate from the condensate, for example oil as a lubricant, is used or no operating fluid is used.
  • the condenser is arranged in the exhaust gas flow between the pump and the membrane module, in the exemplary embodiment of FIG. 3 it is provided in the permeate flow between the membrane module and the pump suction side. Since the major part of the pollutant content of the highly contaminated permeate stream condenses in the low-temperature condenser 5 ′′ and therefore does not get into the vacuum pump 3, this design is suitable for vacuum pumps with low condensate compatibility.
  • the condensate is discharged from the condenser 5 ′′ via a pressure lock 20.
  • condensation can be carried out particularly efficiently in spite of the vacuum there, because on the one hand there is a high pollutant load and on the other hand a very low condensation temperature can be set due to the low water vapor content.
  • the low water vapor content in the permeate stream is due to the low permeability of the membrane for water vapor.
  • This system variant is used in particular for those vacuum pump types in which the compression process would be disturbed by condensate. This is particularly relevant for diaphragm, reciprocating and some rotary vane vacuum pump types. In principle, however, the version according to Fig. 3 can be used for all types of vacuum pumps and for pumps with gas ballast control.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Cleaning By Liquid Or Steam (AREA)
EP91901589A 1989-12-09 1990-12-03 Vorrichtung zur kontinuierlichen reinigung der abgase einer vakuumanlage Expired - Lifetime EP0457895B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH4651/89 1989-12-09
CH465189 1989-12-09

Publications (2)

Publication Number Publication Date
EP0457895A1 EP0457895A1 (de) 1991-11-27
EP0457895B1 true EP0457895B1 (de) 1994-03-23

Family

ID=4280099

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91901589A Expired - Lifetime EP0457895B1 (de) 1989-12-09 1990-12-03 Vorrichtung zur kontinuierlichen reinigung der abgase einer vakuumanlage

Country Status (9)

Country Link
US (1) US5194074A (es)
EP (1) EP0457895B1 (es)
JP (1) JP3043805B2 (es)
KR (1) KR0148490B1 (es)
AT (1) ATE103202T1 (es)
DE (1) DE59005126D1 (es)
DK (1) DK0457895T3 (es)
ES (1) ES2052365T3 (es)
WO (1) WO1991008825A1 (es)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4118787A1 (de) * 1991-06-07 1992-12-24 Sihi Gmbh & Co Kg Prozessintegriertes betriebsfluessigkeitsreinigungssystem fuer verdichter
CA2141612C (en) * 1992-08-07 1999-03-09 Yasutoshi Senoo Improvement to membrane type deaerator
EP0598424A3 (en) * 1992-11-16 1996-05-15 Novellus Systems Inc Apparatus for removing dissolved gases from a liquid.
US5730780A (en) * 1993-10-15 1998-03-24 Opus Services, Inc. Method for capturing nitrogen from air using gas separation membrane
DE19739144C2 (de) * 1997-09-06 2002-04-18 Geesthacht Gkss Forschung Vorrichtung zur Entfernung von Wasserdampf aus unter Druck befindlichen Gasen oder Gasgemischen
WO2007054793A1 (en) 2005-11-10 2007-05-18 Toyota Jidosha Kabushiki Kaisha Tubular fuel cell module and manufacturing method thereof

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0110858A1 (en) * 1982-10-13 1984-06-13 Monsanto Company Membrane gas separation process
GB8327143D0 (en) * 1983-10-11 1983-11-09 Petrocarbon Dev Ltd Purification of helium
US4772295A (en) * 1986-05-27 1988-09-20 Nippon Kokan Kabushiki Kaisha Method for recovering hydrocarbon vapor
JPS631419A (ja) * 1986-06-20 1988-01-06 Tsukishima Kikai Co Ltd 可変分配機構を有するガス分離膜モジユ−ル
JPS638204A (ja) * 1986-06-26 1988-01-14 Teijin Ltd 酸素富化器
JPS638205A (ja) * 1986-06-26 1988-01-14 Teijin Ltd 酸素富化器
JPH0824815B2 (ja) * 1987-08-21 1996-03-13 住友精化株式会社 ガスの分離方法
DE3806107C2 (de) * 1988-02-26 1994-06-23 Geesthacht Gkss Forschung Verfahren zum Austrag organischer Verbindungen aus Luft/Permanentgasgemischen
DE3824400A1 (de) * 1988-07-19 1990-01-25 Dahlhoff Bernd Verfahren und einrichtung zur aufbereitung eines kohlenwasserstoff-luftgemisches
JPH02252609A (ja) * 1989-03-28 1990-10-11 Ube Ind Ltd 酸素富化装置
US4931070A (en) * 1989-05-12 1990-06-05 Union Carbide Corporation Process and system for the production of dry, high purity nitrogen
JPH0386210A (ja) * 1989-08-29 1991-04-11 Nitto Denko Corp 有機溶剤蒸気混合気体の処理方法
DE3937796A1 (de) * 1989-11-14 1991-05-16 Basf Ag Verfahren zur abtrennung von wasser aus einem wasser, co(pfeil abwaerts)2(pfeil abwaerts) und amine enthaltenden gemisch
US5034025A (en) * 1989-12-01 1991-07-23 The Dow Chemical Company Membrane process for removing water vapor from gas

Also Published As

Publication number Publication date
US5194074A (en) 1993-03-16
KR0148490B1 (en) 1998-11-16
ATE103202T1 (de) 1994-04-15
WO1991008825A1 (de) 1991-06-27
EP0457895A1 (de) 1991-11-27
ES2052365T3 (es) 1994-07-01
JP3043805B2 (ja) 2000-05-22
JPH04505417A (ja) 1992-09-24
DE59005126D1 (de) 1994-04-28
DK0457895T3 (da) 1994-06-27
KR920700740A (ko) 1992-08-10

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