ES2052365T3 - Dispositivo para la depuracion continua de los gases de escape de una instalacion de vacio. - Google Patents

Dispositivo para la depuracion continua de los gases de escape de una instalacion de vacio.

Info

Publication number
ES2052365T3
ES2052365T3 ES91901589T ES91901589T ES2052365T3 ES 2052365 T3 ES2052365 T3 ES 2052365T3 ES 91901589 T ES91901589 T ES 91901589T ES 91901589 T ES91901589 T ES 91901589T ES 2052365 T3 ES2052365 T3 ES 2052365T3
Authority
ES
Spain
Prior art keywords
pct
gas permeation
vacuum unit
vacuum
depuration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91901589T
Other languages
English (en)
Inventor
Gerhard Hauk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sihi GmbH and Co KG
Original Assignee
Sihi GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sihi GmbH and Co KG filed Critical Sihi GmbH and Co KG
Application granted granted Critical
Publication of ES2052365T3 publication Critical patent/ES2052365T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

DISPOSITIVO PARA EL LIMPIADO CONTINUO DE LOS GASES DE ESCAPE DE UNA INSTALACION AL VACIO POR MEDIO DE DIAFRAGMAS DE PENETRACION DE GAS. SE MANTIENEN BAJOS LOS COSTES DE INSTALACION Y OPERACION PARA UNA BUENA REALIZACION DE SEPARACION AL FORZAR EL FLUJO DE GAS DE ESCAPE POR MEDIO DE LA BOMBA DE VACIO DE LA INSTALACION AL VACIO A TRAVES DE UN MODULO DE DIAFRAGMA DE PENETRACION DE GAS Y CONECTANDO EL LADO PERMEABLE DEL MODULO DE DIAFRAGMA AL LADO DE ENTRADA DE LA MISMA BOMBA DE VACIO.
ES91901589T 1989-12-09 1990-12-03 Dispositivo para la depuracion continua de los gases de escape de una instalacion de vacio. Expired - Lifetime ES2052365T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH465189 1989-12-09

Publications (1)

Publication Number Publication Date
ES2052365T3 true ES2052365T3 (es) 1994-07-01

Family

ID=4280099

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91901589T Expired - Lifetime ES2052365T3 (es) 1989-12-09 1990-12-03 Dispositivo para la depuracion continua de los gases de escape de una instalacion de vacio.

Country Status (9)

Country Link
US (1) US5194074A (es)
EP (1) EP0457895B1 (es)
JP (1) JP3043805B2 (es)
KR (1) KR0148490B1 (es)
AT (1) ATE103202T1 (es)
DE (1) DE59005126D1 (es)
DK (1) DK0457895T3 (es)
ES (1) ES2052365T3 (es)
WO (1) WO1991008825A1 (es)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4118787A1 (de) * 1991-06-07 1992-12-24 Sihi Gmbh & Co Kg Prozessintegriertes betriebsfluessigkeitsreinigungssystem fuer verdichter
WO1994003397A1 (en) * 1992-08-07 1994-02-17 Miura Co., Ltd. Improvement to membrane type deaerator
EP0598424A3 (en) * 1992-11-16 1996-05-15 Novellus Systems Inc Apparatus for removing dissolved gases from a liquid.
US5730780A (en) * 1993-10-15 1998-03-24 Opus Services, Inc. Method for capturing nitrogen from air using gas separation membrane
DE19739144C2 (de) * 1997-09-06 2002-04-18 Geesthacht Gkss Forschung Vorrichtung zur Entfernung von Wasserdampf aus unter Druck befindlichen Gasen oder Gasgemischen
DE112006002871B8 (de) 2005-11-10 2014-04-10 Toyota Jidosha Kabushiki Kaisha Rohrförmiges Brennstoffzellenmodul und Verfahren zur Herstellung desselben

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0110858A1 (en) * 1982-10-13 1984-06-13 Monsanto Company Membrane gas separation process
GB8327143D0 (en) * 1983-10-11 1983-11-09 Petrocarbon Dev Ltd Purification of helium
US4772295A (en) * 1986-05-27 1988-09-20 Nippon Kokan Kabushiki Kaisha Method for recovering hydrocarbon vapor
JPS631419A (ja) * 1986-06-20 1988-01-06 Tsukishima Kikai Co Ltd 可変分配機構を有するガス分離膜モジユ−ル
JPS638204A (ja) * 1986-06-26 1988-01-14 Teijin Ltd 酸素富化器
JPS638205A (ja) * 1986-06-26 1988-01-14 Teijin Ltd 酸素富化器
JPH0824815B2 (ja) * 1987-08-21 1996-03-13 住友精化株式会社 ガスの分離方法
DE3806107C2 (de) * 1988-02-26 1994-06-23 Geesthacht Gkss Forschung Verfahren zum Austrag organischer Verbindungen aus Luft/Permanentgasgemischen
DE3824400A1 (de) * 1988-07-19 1990-01-25 Dahlhoff Bernd Verfahren und einrichtung zur aufbereitung eines kohlenwasserstoff-luftgemisches
JPH02252609A (ja) * 1989-03-28 1990-10-11 Ube Ind Ltd 酸素富化装置
US4931070A (en) * 1989-05-12 1990-06-05 Union Carbide Corporation Process and system for the production of dry, high purity nitrogen
JPH0386210A (ja) * 1989-08-29 1991-04-11 Nitto Denko Corp 有機溶剤蒸気混合気体の処理方法
DE3937796A1 (de) * 1989-11-14 1991-05-16 Basf Ag Verfahren zur abtrennung von wasser aus einem wasser, co(pfeil abwaerts)2(pfeil abwaerts) und amine enthaltenden gemisch
US5034025A (en) * 1989-12-01 1991-07-23 The Dow Chemical Company Membrane process for removing water vapor from gas

Also Published As

Publication number Publication date
EP0457895A1 (de) 1991-11-27
DE59005126D1 (de) 1994-04-28
ATE103202T1 (de) 1994-04-15
KR920700740A (ko) 1992-08-10
JP3043805B2 (ja) 2000-05-22
WO1991008825A1 (de) 1991-06-27
JPH04505417A (ja) 1992-09-24
US5194074A (en) 1993-03-16
EP0457895B1 (de) 1994-03-23
KR0148490B1 (en) 1998-11-16
DK0457895T3 (da) 1994-06-27

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