EP0408842B1 - On-off switch - Google Patents
On-off switch Download PDFInfo
- Publication number
- EP0408842B1 EP0408842B1 EP90107518A EP90107518A EP0408842B1 EP 0408842 B1 EP0408842 B1 EP 0408842B1 EP 90107518 A EP90107518 A EP 90107518A EP 90107518 A EP90107518 A EP 90107518A EP 0408842 B1 EP0408842 B1 EP 0408842B1
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- EP
- European Patent Office
- Prior art keywords
- bellows
- switch according
- contact parts
- contact
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H3/00—Mechanisms for operating contacts
- H01H3/22—Power arrangements internal to the switch for operating the driving mechanism
- H01H3/24—Power arrangements internal to the switch for operating the driving mechanism using pneumatic or hydraulic actuator
Definitions
- the invention relates to an on / off switch according to the preamble of claims 1 and 15 (see US-A-2 794 087).
- Plasma generation by means of high frequency has become widespread in plants for applying and removing thin layers.
- the high frequency is usually 13.56 MHz, while the currents to be transmitted can be up to 50 A.
- the switches In order to be able to switch such high currents, the switches have to meet special requirements.
- One of these requirements is e.g. B. in the fact that they must have a flashover resistance of 10 kV in the open state.
- an electrical switching device which has a movable contact which is sealed in a housing by a metal bellows or the like (DE-A-1 590 360).
- the movable contact is moved between the open position and the closed position by a fluid pressure that is supplied to the bellows.
- the bellows consists of two halves, each of which is attached at one end to stationary end plates.
- a bellows is also provided, which is divided into two halves (GB-A-1 182 782). There is therefore no uniform bellows, one end of which is fixedly connected to a contact part and the other end of which is movable.
- a switch with a bellows structure in which two contact parts which are arranged at a distance and are to be connected to one another and a bellows are provided in an interior (US Pat. No. 2,794,087). In its stretched state, the bellows connects the two contact parts to one another and separates them in a compressed state.
- the cavity in which the bellows is located consists of copper, ie not of an insulator.
- the invention is therefore based on the object of providing an on / off switch with which it is possible to switch large high-frequency currents.
- the advantage achieved with the invention is in particular that the surface current caused by the current displacement has a large conductor surface in the form of a metal bellows.
- the metal components e.g. B. the return spring, are shielded by this metal bellows and are therefore not exposed to the high electromagnetic field strengths.
- the fact that the metal bellows connects the function of the electrical conductor with that of a pneumatic cylinder enables a compact design of the switch.
- the flat contact surfaces allow a short stroke and represent a favorable transition surface for the surface currents.
- FIG. 1 shows a first embodiment of a pneumatically actuated switch 1, which has a housing 2 made of electrically insulating material and is provided with an electrically conductive contact part 3, 4 at the top and bottom.
- the contact parts 3, 4 are firmly connected to the housing 2 by means of electrically non-conductive screws 5, 6, the screws 7, 8 being located on one of the projections 9, 10 of the contact parts 3, 4 with their heads.
- In the wall of the housing 2 there is a screw channel 11 into which the screws 5, 6 are screwed.
- the housing 2 itself is, for. B. cylindrical and has compared to the screw channel 11 on a nozzle 12 with a through hole 13.
- In the housing 2 there is an electrically conductive metal bellows 14, in the interior of which compressed air is admitted via an inlet 15.
- This compressed air works against the force of a spring 16 which is suspended at one end 17 on the hook 18 and the other end 19 of which is suspended in a transverse bolt 20 which rests in a vertical extension 21 of the contact part 4.
- This extension 21 of the contact part 4 essentially has the shape of a hollow cylindrical pin with two end stops 22, 23, these end stops 22, 23 serving to support the upper and lower ends of the metal bellows 14.
- the upper end stop 23 is, however, not integrally connected to the extension 21, but rests on it. If compressed air is now introduced into the inlet 15, it enters the cavity 24 of the extension, where the spring 16 is also located, and presses against the underside of a contact surface 25 which is connected to the metal bellows 14 at its lateral edge.
- the metal bellows 14 expands until the contact surface 25 abuts the contact part 3. In this way, an electrical connection is established between the contact surfaces 3, 4, the current being able to flow from the contact part 3 via the metal bellows 14 and the extension 21 to the contact part 4 or vice versa. If the compressed air supplied becomes weaker or if it stops flowing completely, the force of the spring 16 prevails and the contact surface is returned to the position shown in FIG. 1.
- the through hole 13 serves to create a pressure equalization in the interior of the housing 2. If the housing 2 were hermetically sealed, the metal bellows 14 with the contact surface 25 would have to compress the air in the interior of the housing so that the contact surface 25 reaches the contact part 3. Above and below the through bore 13, the housing 2 has a bore 27, 28, into which high-frequency lines, as a rule tapes, are inserted.
- the bores 27, 28 can also be provided with a thread.
- FIG. 2 shows a further embodiment of the invention, in which those components which can also be found in the device according to FIG. 1 have the same reference numbers as these.
- the embodiment according to FIG. 2 does not have a spring which pulls the contact surface 25 downwards and is only stretched by the inflow of compressed air, but a spring 29 which presses outwards.
- This spring 29 is surrounded by the metal bellows 14 and rests with its one end on a projection 30 which is connected in one piece to the contact part 4 and has a through-hole 31.
- the projection 30 has at its upper end a taper 36 which serves to guide the one end 32 of the spring 29.
- the other end 33 of the spring 29 is guided in a corresponding manner by a taper 35 which merges into the contact surface 25.
- the contact parts 3 and 4 are electrically connected to one another via the metal bellows 14, because the spring 29 presses the contact surface 25 permanently against the contact part 4.
- this compressed air reaches a surface 34 of the contact surface 25 via a bore and presses it downwards.
- the through hole 31 has the same function as the through hole 13 in Fig. 1, i. H. it serves to create a pressure equalization inside the housing.
- the difference between the switch according to FIG. 1 and the switch according to FIG. 2 essentially consists in the fact that the switch according to FIG. 1 is open in the depressurized state, while the switch according to FIG. 2 is closed in the depressurized state.
- the compressed air always works against the force of the tension or compression spring.
- the spring force of the bellows is of minor importance.
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- Switches Operated By Changes In Physical Conditions (AREA)
- Push-Button Switches (AREA)
- Waveguide Switches, Polarizers, And Phase Shifters (AREA)
Description
Die Erfindung betrifft einen Ein/Aus-Schalter nach dem Oberbegriff der Patentansprüche 1 und 15 (siehe US-A-2 794 087).The invention relates to an on / off switch according to the preamble of claims 1 and 15 (see US-A-2 794 087).
In Anlagen zum Aufbringen und Abtragen von dünnen Schichten hat die Plasmaerzeugung mittels Hochfrequenz weite Verbreitung gefunden. Hierbei liegt die Hochfrequenz üblicherweise bei 13,56 MHz, während die zu übertragenden Ströme bis zu 50 A betragen können. Um derart hohe Ströme schalten zu können, müssen die Schalter besondere Anforderungen erfüllen. Eine dieser Anforderungen besteht z. B. darin, daß sie im offenen Zustand eine Überschlagfestigkeit von 10 kV besitzen müssen.Plasma generation by means of high frequency has become widespread in plants for applying and removing thin layers. The high frequency is usually 13.56 MHz, while the currents to be transmitted can be up to 50 A. In order to be able to switch such high currents, the switches have to meet special requirements. One of these requirements is e.g. B. in the fact that they must have a flashover resistance of 10 kV in the open state.
Es sind zwar schon mehrere Hochfrequenz-Plasmaanlagen mit Elektroden bekannt, denen die Hochfrequenzleistung zugeführt wird (J. Electrochem. Soc. Solid State Science, Bd. 114, Nr. 5, 1967, S. 505 bis 508; US-PS 4 207 137; J. Vac. Sci. Technol., Bd. 5, Nr. 3, 1987, S. 647 bis 651), doch sind keine Schalter beschrieben, mit denen hochfrequente Ströme von großer Stromstärke auf eine Elektrode oder von dieser weggeschaltet werden können.Several high-frequency plasma systems with electrodes to which the high-frequency power is supplied are known (J. Electrochem. Soc. Solid State Science, Vol. 114, No. 5, 1967, pp. 505 to 508; US Pat. No. 4,207,137 ; J. Vac. Sci. Technol., Vol. 5, No. 3, 1987, pp. 647 to 651), but no switches are described with which high-frequency currents of large current strength can be switched to or from an electrode.
Weiterhin ist eine elektrische Schaltvorrichtung bekannt, die einen beweglichen Kontakt aufweist, der in einem Gehäuse durch einen Metallbalg oder dergleichen abgedichtet ist (DE-A-1 590 360). Der bewegliche Kontakt wird hierbei zwischen der Öffnungsstellung und der Schließstellung durch einen Strömungsmitteldruck bewegt, der dem Balg zugeführt wird. Der Balg besteht hierbei aus zwei Hälften, die jeweils mit ihrem einen Ende an ortsfesten Stirnplatten befestigt sind.Furthermore, an electrical switching device is known which has a movable contact which is sealed in a housing by a metal bellows or the like (DE-A-1 590 360). The movable contact is moved between the open position and the closed position by a fluid pressure that is supplied to the bellows. The bellows consists of two halves, each of which is attached at one end to stationary end plates.
Bei einem anderen bekannten Vakuumschalter ist ebenfalls ein Balg vorgesehen, der in zwei Hälften unterteilt ist (GB-A-1 182 782). Es ist somit kein einheitlicher Balg vorgesehen, dessen eines Ende mit einem Kontaktteil ortsfest verbunden ist und dessen anderes Ende beweglich ist.In another known vacuum switch, a bellows is also provided, which is divided into two halves (GB-A-1 182 782). There is therefore no uniform bellows, one end of which is fixedly connected to a contact part and the other end of which is movable.
Schließlich ist auch noch ein Schalter mit einer Balgenstruktur bekannt, bei dem zwei in einem Abstand angeordnete und miteinander zu verbindende Kontaktteile sowie ein Balg in einem Innenraum vorgesehen sind (US-A-2 794 087). Der Balg verbindet in seinem gedehnten Zustand die beiden Kontaktteile miteinander und trennt diese in einem gestauchten Zustand. Der Hohlraum, in dem sich der Balg befindet, besteht hierbei aus Kupfer, d. h. nicht aus einem Isolator.Finally, a switch with a bellows structure is also known, in which two contact parts which are arranged at a distance and are to be connected to one another and a bellows are provided in an interior (US Pat. No. 2,794,087). In its stretched state, the bellows connects the two contact parts to one another and separates them in a compressed state. The cavity in which the bellows is located consists of copper, ie not of an insulator.
Der Erfindung liegt deshalb die Aufgabe zugrunde, einen Ein/Aus-Schalter zu schaffen, mit dem es möglich ist, große Hochfrequenzströme zu schalten.The invention is therefore based on the object of providing an on / off switch with which it is possible to switch large high-frequency currents.
Diese Aufgabe wird gemäß den Merkmalen des Patentanspruchs 1, bzw. 15 gelöstThis object is achieved according to the features of
Der mit der Erfindung erzielte Vorteil besteht insbesondere darin, daß der durch die Stromverdrängung hervorgerufene Oberflächenstrom eine große Leiterfläche in Form eines Metallbalgs zur Verfügung hat. Die Bauteile aus Metall, z. B. die Rückholfeder, werden durch diesen Metallbalg abgeschirmt und sind deshalb nicht den hohen elektromagnetischen Feldstärken ausgesetzt. Dadurch, daß der Metallbalg die Funktion des elektrischen Leiters mit der eines Pneumatikzylinders verbindet, wird eine kompakte Bauform des Schalters ermöglicht. Die ebenen Kontaktflächen erlauben einen geringen Hub und stellen für die Oberflächenströme eine günstige Übergangsfläche dar.The advantage achieved with the invention is in particular that the surface current caused by the current displacement has a large conductor surface in the form of a metal bellows. The metal components, e.g. B. the return spring, are shielded by this metal bellows and are therefore not exposed to the high electromagnetic field strengths. The fact that the metal bellows connects the function of the electrical conductor with that of a pneumatic cylinder enables a compact design of the switch. The flat contact surfaces allow a short stroke and represent a favorable transition surface for the surface currents.
Ausführungsbeispiele der Erfindung sind in der Zeichnung dargestellt und werden im folgenden näher beschrieben. Es zeigen:
- Fig. 1
- eine erste Ausführungsform eines Schalters zum Schalten großer Hochfrequenz-Ströme;
- Fig. 2
- eine zweite Ausführungsform eines Schalters zum Schalten großer Hochfrequenz-Ströme.
- Fig. 1
- a first embodiment of a switch for switching large high-frequency currents;
- Fig. 2
- a second embodiment of a switch for switching large high-frequency currents.
In der Fig. 1 ist eine erste Ausführungsform eines pneumatisch betätigten Schalters 1 dargestellt, der ein Gehäuse 2 aus elektrisch isolierendem Material aufweist und oben und unten jeweils mit einem elektrisch leitenden Kontaktteil 3, 4 versehen ist. Die Kontaktteile 3, 4 sind mit dem Gehäuse 2 über elektrisch nichtleitende Schrauben 5, 6 fest verbunden, wobei die Schrauben mit ihren Köpfen 7, 8 auf jeweils einem der Vorsprünge 9, 10 der Kontaktteile 3, 4 liegen. In der Wand des Gehäuses 2 befindet sich ein Schraubkanal 11, in den die Schrauben 5, 6 eingeschraubt sind. Das Gehäuse 2 selbst ist z. B. zylindrisch ausgebildet und weist gegenüber dem Schraubkanal 11 einen Stutzen 12 mit einer Durchbohrung 13 auf. In dem Gehäuse 2 befindet sich ein elektrisch leitender Metallbalg 14, in dessen Inneres über einen Einlaß 15 Druckluft eingelassen wird. Diese Druckluft arbeitet gegen die Kraft einer Feder 16, die mit ihrem einen Ende 17 am Haken 18 aufgehängt ist und deren anderes Ende 19 in einen Querbolzen 20 eingehängt ist, der in einer vertikalen Verlängerung 21 des Kontaktteils 4 ruht. Diese Verlängerung 21 des Kontaktteils 4 hat im wesentlichen die Form eines hohlen Zylinderstifts mit zwei Endanschlägen 22, 23, wobei diese Endanschläge 22, 23 für die Abstützung des oberen und des unteren Endes des Metallbalgs 14 dienen. Der obere Endanschlag 23 ist allerdings nicht einstückig mit der Verlängerung 21 verbunden, sondern liegt auf dieser auf. Wird nun Druckluft in den Einlaß 15 eingeführt, so gelangt diese in den Hohlraum 24 der Verlängerung, wo sich auch die Feder 16 befindet, und drückt gegen die Unterseite einer Kontaktfläche 25, die an ihrem seitlichen Rand mit dem Metallbalg 14 verbunden ist. Ist die durch die Druckluft ausgeübte Kraft größer als die Kraft der Feder 16, so dehnt sich der Metallbalg 14 solange aus, bis die Kontaktfläche 25 gegen das Kontaktteil 3 stößt. Auf diese Weise ist eine elektrische Verbindung zwischen den Kontaktflächen 3, 4 hergestellt, wobei der Strom von dem Kontaktteil 3 über den Metallbalg 14 und die Verlängerung 21 zum Kontaktteil 4 bzw. umgekehrt fließen kann. Wird die zugeführte Druckluft schwächer oder hört sie gar ganz auf zu strömen, so überwiegt die Kraft der Feder 16 und die Kontaktfläche wird wieder in diejenige Position zurückgeführt, die in der Fig. 1 dargestellt ist. Die Durchbohrung 13 dient dazu, einen Druckausgleich im Innern des Gehäuses 2 zu schaffen. Wäre das Gehäuse 2 hermetisch abgeschlossen, so müßte der Metallbalg 14 mit der Kontaktfläche 25 die Luft im Innenraum des Gehäuses komprimieren, damit die Kontaktfläche 25 an den Kontaktteil 3 gelangt. Ober- und unterhalb der Durchbohrung 13 weist das Gehäuse 2 jeweils eine Bohrung 27, 28 auf, in die Hochfrequenzleitungen, in der Regel Bänder, eingeführt werden. Die Bohrungen 27, 28 können auch mit einem Gewinde versehen sein.1 shows a first embodiment of a pneumatically actuated switch 1, which has a
Die Fig. 2 zeigt eine weitere Ausführungsform der Erfindung, bei welcher diejenigen Bauteile, die auch in der Vorrichtung gemäß Fig. 1 zu finden sind, dieselben Bezugszahlen wie diese besitzen. Im Unterschied zur ersten Ausführungsform weist die Ausführungsform gemäß Fig. 2 keine Feder auf, welche die Kontaktfläche 25 nach unten zieht und erst durch Einströmen von Druckluft gedehnt wird, sondern eine Feder 29, die nach außen drückt. Diese Feder 29 ist von dem Metallbalg 14 umgeben und ruht mit ihrem einen Ende auf einem Vorsprung 30, der mit dem Kontaktteil 4 einstückig verbunden ist und eine Durchbohrung 31 aufweist. Der Vorsprung 30 besitzt an seinem oberen Ende eine Verjüngung 36, die zur Führung des einen Endes 32 der Feder 29 dient. Das andere Ende 33 der Feder 29 ist in entsprechender Weise von einer Verjüngung 35 geführt, die in die Kontaktfläche 25 übergeht. Ohne die Einwirkung von Druckluft sind die Kontaktteile 3 und 4 über den Metallbalg 14 elektrisch miteinander verbunden, weil die Feder 29 die Kontaktfläche 25 permanent an den Kontaktteil 4 drückt. Wird jedoch Druckluft in den Raum zwischen dem Metallbalg 14 und dem Gehäuse 2 durch die Öffnung 13 eingelassen, so gelangt diese Druckluft über eine Bohrung an eine Oberfläche 34 der Kontaktfläche 25 und drückt diese nach unten.FIG. 2 shows a further embodiment of the invention, in which those components which can also be found in the device according to FIG. 1 have the same reference numbers as these. In contrast to the first embodiment, the embodiment according to FIG. 2 does not have a spring which pulls the
Die Durchbohrung 31 hat dieselbe Funktion wie die Durchbohrung 13 in Fig. 1, d. h. sie dient dazu, im Innern des Gehäuses einen Druckausgleich zu schaffen. Der Unterschied zwischen dem Schalter gemäß Fig. 1 und dem Schalter gemäß Fig. 2 besteht im wesentlichen darin, daß der Schalter gemäß Fig. 1 im drucklosen Zustand offen ist, während der Schalter gemäß Fig. 2 im drucklosen Zustand geschlossen ist. Die Druckluft arbeitet dabei immer gegen die Kraft der Zug- bzw. Druckfeder. Die Federkraft des Balgs ist von untergeordneter Bedeutung.The through
Claims (17)
- An on/off switch, in particular for high-frequency currents, having1.1 two non-deformable contact parts (3, 4) which are electrically connected to one another and are spaced from one another;1.2 an electrically conducting bellows (14) which, by a first end, is connected to one of the contact parts (4, 21) and which1.3 has a movable second end (23) provided with an electrically conducting contact head (25),characterized by the following features:1.3.1 the bellows (14) pressing, in the extended state, a contact head (25) against a contact part (3) and1.3.2 in the unextended state of the bellows (14), the contact head (25) not being connected to the other contact part (3),1.4 there is provided between the contact parts (3, 4) an electrical insulator (2) which separates them electrically from one another and which has a cavity;1.5 the respective ends of the insulator (2) are in physical contact with the respective contact parts (3, 4);1.6 the bellows (14) is arranged in the cavity in the insulator (2).
- An on/off switch according to Claim 1, characterized in that the electrically conducting bellows (14) may be moved from the unextended to the extended state or vice versa by means of a fluid, this fluid flowing into or out of the bellows (14).
- An on/off switch according to Claim 2, characterized in that the fluid is compressed air.
- An on/off switch according to Claim 1, characterized in that a spring (16) is arranged in the electrically conducting bellows (14) and is connected by its ends (17, 19) to components (25, 20) which close off the ends of the bellows (14).
- An on/off switch according to Claim 1, characterized in that the insulator (2) forms a housing which is closed off at its ends by the respective contact parts (3, 4).
- An on/off switch according to Claim 5, characterized in that the contact parts (3, 4) are connected to the housing (2) by means of screws (7, 8).
- An on/off switch according to Claim 6, characterized in that the screws (7, 8) are made of an electrically nonconducting material.
- An on/off switch according to Claim 4, characterized in that the spring is a tension spring (16).
- An on/off switch according to Claim 4, characterized in that the spring is a pressure spring (29).
- An on/off switch according to Claim 1, characterized in that there is provided in one of the two contact parts a passage (31) through which compressed air may be introduced into the bellows (14) or may be removed therefrom.
- An on/off switch according to Claim 1, characterized in that an opening (13) is provided in the insulator (2), through which compressed air is removed from the cavity in order to move the bellows from the extended into the unextended state.
- An on/off switch according to Claim 4, characterized in that one of the components is an electrical contact head (25) and the other one of the components is a projection (19) on one of the contact parts (4).
- An on/off switch according to Claims 8 and 12, characterized in that the tension spring (16) is suspended in the contact head (25) by its one end and in a transverse pin (20) connected to a projection (21) by its other end.
- An on/off switch according to Claims 1 and 9, characterized in that the pressure spring (29) surrounds a tapered portion (31) of the projection (30) by its one end and a tapered portion (35) of the contact head (25) by its other end.
- An on/off switch, in particular for high-frequency currents, having15.1 two contact parts (3, 4);15.2 an electrically conducting bellows which has a base end connected to one of the contact parts (4) and whichcharacterized by the following features:15.2.1 has an electrically conducting head (25) which forms a closed remote end of the bellows (14) lying opposite the other contact part (3),15.2.2 the bellows (14) producing, in the extended state, an electrical connection between the contact parts (3, 4) by way of the head (25), and15.2.3 the bellows (14) separating, in the unextended state, the head (25) from one of the contact parts (3) and thus interrupting an electrical connection,15.3 the contact parts (3, 4) are separated from one another by a hollow insulator (2), this insulator touching the contact parts (3, 4) and defining a cavity between the contact parts (3, 4);15.4 the bellows (14) is provided in the cavity between the contact parts;15.5 a fluid is provided which generates the force by means of which the bellows (14) may be moved from the extended into the unextended state and vice versa;15.6 there is provided in the electrically conducting bellows (14) a spring which is connected by its one end to the head (25) and by its other end to the base at the end of the bellows (14) in order to apply a counter-force in opposition to the force of the fluid;
15.6.1 the cavity having a bore through which the pressure between the interior and the exterior of the bellows (14) is balanced. - An on/off switch according to Claim 15, characterized in that the fluid is compressed air.
- An on/off switch according to Claim 15, characterized in that a passage is provided in one of the two contact parts (3, 4) in order to allow compressed air to reach the interior of the bellows (14).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3923660 | 1989-07-18 | ||
| DE3923660A DE3923660A1 (en) | 1989-07-18 | 1989-07-18 | ON / OFF SWITCH |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP0408842A2 EP0408842A2 (en) | 1991-01-23 |
| EP0408842A3 EP0408842A3 (en) | 1991-11-27 |
| EP0408842B1 true EP0408842B1 (en) | 1996-12-04 |
Family
ID=6385239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP90107518A Expired - Lifetime EP0408842B1 (en) | 1989-07-18 | 1990-04-20 | On-off switch |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5087800A (en) |
| EP (1) | EP0408842B1 (en) |
| JP (1) | JPH0358601A (en) |
| DE (2) | DE3923660A1 (en) |
Families Citing this family (3)
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| JPH07150508A (en) * | 1993-11-26 | 1995-06-13 | Sekizai Center:Kk | Stone pavement construction method |
| PL207604B1 (en) * | 2005-11-07 | 2011-01-31 | ABB Spółka z ograniczoną odpowiedzialnością | Inspection sensor for use in devices filled with liquid |
| FR3107986B1 (en) * | 2020-03-03 | 2022-06-03 | Alstom Transp Tech | System for interrupting an electric current and railway vehicle comprising such an interruption system |
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| DE3314514A1 (en) * | 1983-04-21 | 1984-10-25 | Brown, Boveri & Cie Ag, 6800 Mannheim | Radio-frequency switching contact for a rotary switch |
| DE3501603A1 (en) * | 1984-02-02 | 1985-08-01 | Westinghouse Electric Corp., Pittsburgh, Pa. | LOW VOLTAGE HIGH FREQUENCY VACUUM SWITCH |
| DE8430787U1 (en) * | 1984-10-19 | 1985-01-17 | Doduco KG Dr. Eugen Dürrwächter, 7530 Pforzheim | Hydraulically operated switch |
| US4633213A (en) * | 1985-05-01 | 1986-12-30 | Borg-Warner Corporation | Pressure temperature sensor |
| DE3679179D1 (en) * | 1986-03-07 | 1991-06-13 | Dexaero | TEMPERATURE COMPENSATED PRESSURE REGULATOR AND SAFETY DEVICE FOR FIRE EXTINGUISHERS WITH SUCH A PRESSURE REGULATOR. |
| DE3718304A1 (en) * | 1987-05-30 | 1988-12-15 | Rohde & Schwarz | RF power switch |
| JPH01142129U (en) * | 1988-03-23 | 1989-09-28 | ||
| DE3815107A1 (en) * | 1988-05-04 | 1989-11-16 | Eichhoff Werke | Electromagnetic relay |
-
1989
- 1989-07-18 DE DE3923660A patent/DE3923660A1/en not_active Withdrawn
-
1990
- 1990-04-20 EP EP90107518A patent/EP0408842B1/en not_active Expired - Lifetime
- 1990-04-20 DE DE59010589T patent/DE59010589D1/en not_active Expired - Fee Related
- 1990-07-12 JP JP2185162A patent/JPH0358601A/en active Pending
-
1991
- 1991-01-17 US US07/642,704 patent/US5087800A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0358601A (en) | 1991-03-13 |
| DE59010589D1 (en) | 1997-01-16 |
| DE3923660A1 (en) | 1991-01-24 |
| US5087800A (en) | 1992-02-11 |
| EP0408842A3 (en) | 1991-11-27 |
| EP0408842A2 (en) | 1991-01-23 |
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