EP0408842A2 - On-off switch - Google Patents

On-off switch Download PDF

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Publication number
EP0408842A2
EP0408842A2 EP90107518A EP90107518A EP0408842A2 EP 0408842 A2 EP0408842 A2 EP 0408842A2 EP 90107518 A EP90107518 A EP 90107518A EP 90107518 A EP90107518 A EP 90107518A EP 0408842 A2 EP0408842 A2 EP 0408842A2
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EP
European Patent Office
Prior art keywords
switch according
bellows
contact
spring
switch
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Granted
Application number
EP90107518A
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German (de)
French (fr)
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EP0408842A3 (en
EP0408842B1 (en
Inventor
Roland Dr. Gesche
Stefan Locher
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Balzers und Leybold Deutschland Holding AG
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Leybold AG
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Publication of EP0408842A2 publication Critical patent/EP0408842A2/en
Publication of EP0408842A3 publication Critical patent/EP0408842A3/en
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Publication of EP0408842B1 publication Critical patent/EP0408842B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H3/00—Mechanisms for operating contacts
    • H01H3/22—Power arrangements internal to the switch for operating the driving mechanism
    • H01H3/24—Power arrangements internal to the switch for operating the driving mechanism using pneumatic or hydraulic actuator

Definitions

  • the invention relates to an on / off switch according to the preamble of patent claim 1.
  • Such switches are also known (DE-A-37 18 304, DE-A-38 15 107, DE-GM 19 65 771, DE-GM 84 30 787, US-A-2 997 671), including those with bellows structures (DE-A-39 09 321, DE-A-35 01 603, DE-A-33 14 514, DE-PS 754 566, GB-PS 637 121, FR-PS 882 291, FR-PS 1 317 246).
  • the invention is therefore based on the object of providing an on / off switch with which it is possible to switch large high-frequency currents.
  • the advantage achieved by the invention is, in particular, that the surface current caused by the current displacement has a large conductor area in the form of a metal bellows.
  • the components made of metal, e.g. B. the return spring, are shielded by this metal bellows and are therefore not exposed to the high electromagnetic field strengths.
  • the fact that the metal bellows connects the function of the electrical conductor with that of a pneumatic cylinder enables a compact design of the switch.
  • the flat contact surfaces allow a short stroke and represent a favorable transition surface for the surface currents.
  • FIG. 1 shows a first embodiment of a pneumatically operated switch 1, which has a housing 2 made of electrically insulating material and is provided with an electrically conductive contact part 3, 4 at the top and bottom.
  • the contact parts 3, 4 are fixedly connected to the housing 2 by means of electrically non-conductive screws 5, 6, the screws 7, 8 being located on one of the projections 9, 10 of the contact parts 3, 4 with their heads.
  • In the wall of the housing 2 there is a screw channel 11 into which the screws 5, 6 are screwed.
  • the housing 2 itself is, for. B. cylindrical and has compared to the screw channel 11 on a nozzle 12 with a through hole 13.
  • In the housing 2 there is an electrically conductive metal bellows 14, in the interior of which compressed air is admitted via an inlet 15.
  • This compressed air works against the force of a spring 16 which is suspended at one end 17 on the hook 18 and the other end 19 of which is suspended in a transverse bolt 20 which rests in a vertical extension 21 of the contact part 4.
  • This extension 21 of the contact part 4 is essentially in the form of a hollow cylindrical pin with two end stops 22, 23, these end stops 22, 23 serving to support the upper and lower ends of the metal bellows 14. However, the upper end stop 23 is not connected in one piece to the extension 21, but lies on it. If compressed air is now introduced into the inlet 15, it enters the cavity 24 of the extension, where the spring 16 is also located, and presses against the underside of a contact surface 25 which is connected to the metal bellows 14 at its lateral edge.
  • the metal bellows 14 expands until the contact surface 25 abuts the contact part 3. In this way, an electrical connection is established between the contact surfaces 3, 4, the current being able to flow from the contact part 3 via the metal bellows 14 and the extension 21 to the contact part 4 or vice versa. If the compressed air supplied becomes weaker or stops flowing completely, the force of the spring 16 prevails and the contact surface is returned to the position shown in FIG. 1.
  • the through hole 13 serves to create a pressure equalization in the interior of the housing 2. If the housing 2 were hermetically sealed, the metal bellows 14 with the contact surface 25 would have to compress the air in the interior of the housing so that the contact surface 25 reaches the contact part 3. Above and below the through bore 13, the housing 2 has a bore 27, 28, into which high-frequency lines, as a rule tapes, are inserted.
  • the bores 27, 28 can also be provided with a thread.
  • FIG. 2 shows a further embodiment of the invention, in which those components which can also be found in the device according to FIG. 1 have the same reference numbers as these.
  • the embodiment according to FIG. 2 does not have a spring which pulls the contact surface 25 downward and is only stretched by the inflow of compressed air, but a spring 29 which presses outwards.
  • This spring 29 is surrounded by the metal bellows 14 and rests with its one end on a projection 30 which is connected in one piece to the contact part 4 and has a through-hole 31.
  • the projection 30 has at its upper end a taper 36 which serves to guide the one end 32 of the spring 29.
  • the other end 33 of the spring 29 is guided in a corresponding manner by a taper 35 which merges into the contact surface 25.
  • the contact parts 3 and 4 are electrically connected to one another via the metal bellows 14, because the spring 29 presses the contact surface 25 permanently against the contact part 4.
  • this compressed air reaches a surface 34 of the contact surface 25 via a bore and presses it downwards.
  • the through hole 31 has the same function as the through hole 13 in Fig. 1, i. H. it serves to create pressure equalization inside the housing.
  • the difference between the switch according to FIG. 1 and the switch according to FIG. 2 essentially consists in the fact that the switch according to FIG. 1 is open in the depressurized state, while the switch according to FIG. 2 is closed in the depressurized state.
  • the compressed air always works against the force of the tension or compression spring.
  • the spring force of the bellows is of minor importance.

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  • Switches Operated By Changes In Physical Conditions (AREA)
  • Push-Button Switches (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)

Abstract

Die Erfindung betrifft einen Ein/Aus-Schalter (1) für die Schaltung von Hochfrequenzströmen. Dieser Schalter (1) weist ein Gehäuse (2) aus elektrisch nichtleitendem Kunststoff auf, das auf seiner Oberseite und auf seiner Unterseite durch elektrisch leitende Kontaktteile (3, 4) abgeschlossen ist. In dem Gehäuse (2) befindet sich ein Metallbalg (14), der mit seinem einen Ende mit einem der Kontaktteile (4) und mit seinem anderen Ende mit einem Kontaktkopf (25) in Verbindung steht. Mit Hilfe von Druckluft kann der Kontaktkopf (25) mit dem anderen Kontaktteil (3) in Verbindung gebracht oder von diesem wieder entfernt werden.The invention relates to an on / off switch (1) for switching high-frequency currents. This switch (1) has a housing (2) made of electrically non-conductive plastic, which is closed on its top and on its bottom by electrically conductive contact parts (3, 4). In the housing (2) there is a metal bellows (14) which is connected at one end to one of the contact parts (4) and at the other end to a contact head (25). With the aid of compressed air, the contact head (25) can be connected to the other contact part (3) or removed from it again.

Description

Die Erfindung betrifft einen Ein/Aus-Schalter nach dem Oberbegriff des Patentanspruchs 1.The invention relates to an on / off switch according to the preamble of patent claim 1.

In Anlagen zum Aufbringen und Abtragen von dünnen Schichten hat die Plasmaerzeugung mittels Hochfrequenz weite Verbreitung gefunden. Hierbei liegt die Hochfrequenz üblicherweise bei 13,56 MHz, während die zu über­tragenden Ströme bis zu 50 A betragen können. Um derart hohe Ströme schalten zu können, müssen die Schalter besondere Anforderungen erfüllen. Eine dieser Anforderungen besteht z. B. darin, daß sie im offenen Zustand eine Überschlagfestigkeit von 10 kV besitzen müssen.In plants for applying and removing thin layers, plasma generation by means of high frequency has become widespread. The high frequency is usually 13.56 MHz, while the currents to be transmitted can be up to 50 A. In order to be able to switch such high currents, the switches have to meet special requirements. One of these requirements is e.g. B. in the fact that they must have a flashover resistance of 10 kV in the open state.

Es sind zwar schon mehrere Hochfrequenz-Plasmaanlagen mit Elektroden bekannt, denen die Hochfrequenzleistung zugeführt wird (J. Electrochem. Soc. Solid State Science, Bd. 114, Nr. 5, 1967, S. 505 bis 508; US-PS 4 207 137; J. Vac. Sci. Technol., Bd. 5, Nr. 3, 1987, S. 647 bis 651), doch sind keine Schalter beschrieben, mit denen hochfrequente Ströme von großer Stromstärke auf eine Elektrode oder von dieser weggeschaltet werden können.Several high-frequency plasma systems with electrodes to which the high-frequency power is supplied are known (J. Electrochem. Soc. Solid State Science, Vol. 114, No. 5, 1967, pp. 505 to 508; US Pat. No. 4,207,137) ; J. Vac. Sci. Technol., Vol. 5, No. 3, 1987, pp. 647 to 651), but no switches are described with which high-frequency currents of large current strength can be switched to or from an electrode.

Derartige Schalter sind indessen ebenfalls bekannt (DE-A-37 18 304, DE-A- 38 15 107, DE-GM 19 65 771, DE-GM 84 30 787, US-A-2 997 671), und zwar auch solche mit Balgenstrukturen (DE-A-39 09 321, DE-A-­35 01 603, DE-A-33 14 514, DE-PS 754 566, GB-PS 637 121, FR-PS 882 291, FR-PS 1 317 246).Such switches are also known (DE-A-37 18 304, DE-A-38 15 107, DE-GM 19 65 771, DE-GM 84 30 787, US-A-2 997 671), including those with bellows structures (DE-A-39 09 321, DE-A-35 01 603, DE-A-33 14 514, DE-PS 754 566, GB-PS 637 121, FR-PS 882 291, FR-PS 1 317 246).

Bei einem bekannten Schalter mit Balgenstrukturen sind zwei in einem Abstand angeordnete und miteinander zu verbindende Kontaktteile vor­gesehen sowie ein elektrisch leitender Balg in einem Innenraum, der in einem gedehnten Zustand die beiden Kontaktteile miteinander verbindet und in einem gestauchten Zustand die beiden Kontaktteile voneinander trennt (US-PS 2 794 087). Hierbei wird der Balg jedoch nicht zur pneu­matischen Betätigung mitverwendet.In a known switch with bellows structures, two contact parts which are arranged at a distance and are to be connected to one another are provided, and an electrically conductive bellows in an interior space which connects the two contact parts to one another in an expanded state and separates the two contact parts from one another in a compressed state (US Pat. PS 2 794 087). However, the bellows is not used for pneumatic actuation.

Der Erfindung liegt deshalb die Aufgabe zugrunde, einen Ein/Aus-Schalter zu schaffen, mit dem es möglich ist, große Hochfrequenzströme zu schalten.The invention is therefore based on the object of providing an on / off switch with which it is possible to switch large high-frequency currents.

Diese Aufgabe wird gemäß den Merkmalen des Patentanspruchs 1 gelöst.This object is achieved in accordance with the features of patent claim 1.

Der mit der Erfindung erzielte Vorteil besteht insbesondere darin, daß der durch die Stromverdrängung hervorgerufene Oberflächenstrom eine große Leiterfläche in Form eines Metallbalgs zur Verfügung hat. Die Bauteile aus Metall, z. B. die Rückholfeder, werden durch diesen Metallbalg abge­schirmt und sind deshalb nicht den hohen elektromagnetischen Feldstärken ausgesetzt. Dadurch, daß der Metallbalg die Funktion des elektrischen Leiters mit der eines Pneumatikzylinders verbindet, wird eine kompakte Bauform des Schalters ermöglicht. Die ebenen Kontaktflächen erlauben einen geringen Hub und stellen für die Oberflächenströme eine günstige Übergangsfläche dar.The advantage achieved by the invention is, in particular, that the surface current caused by the current displacement has a large conductor area in the form of a metal bellows. The components made of metal, e.g. B. the return spring, are shielded by this metal bellows and are therefore not exposed to the high electromagnetic field strengths. The fact that the metal bellows connects the function of the electrical conductor with that of a pneumatic cylinder enables a compact design of the switch. The flat contact surfaces allow a short stroke and represent a favorable transition surface for the surface currents.

Ausführungsbeispiele der Erfindung sind in der Zeichnung dargestellt und werden im folgenden näher beschrieben. Es zeigen:

  • Fig. 1 eine erste Ausführungsform eines Schalters zum Schalten großer Hochfrequenz-Ströme;
  • Fig. 2 eine zweite Ausführungsform eines Schalters zum Schalten großer Hochfrequenz-Ströme.
Embodiments of the invention are shown in the drawing and are described in more detail below. Show it:
  • Figure 1 shows a first embodiment of a switch for switching large high-frequency currents.
  • Fig. 2 shows a second embodiment of a switch for switching large high-frequency currents.

In der Fig. 1 ist eine erste Ausführungsform eines pneumatisch betätigten Schalters 1 dargestellt, der ein Gehäuse 2 aus elektrisch isolierendem Material aufweist und oben und unten jeweils mit einem elektrisch leiten­den Kontaktteil 3, 4 versehen ist. Die Kontaktteile 3, 4 sind mit dem Gehäuse 2 über elektrisch nichtleitende Schrauben 5, 6 fest verbunden, wobei die Schrauben mit ihren Köpfen 7, 8 auf jeweils einem der Vor­sprünge 9, 10 der Kontaktteile 3, 4 liegen. In der Wand des Gehäuses 2 befindet sich ein Schraubkanal 11, in den die Schrauben 5, 6 eingeschraubt sind. Das Gehäuse 2 selbst ist z. B. zylindrisch ausgebildet und weist gegenüber dem Schraubkanal 11 einen Stutzen 12 mit einer Durchbohrung 13 auf. In dem Gehäuse 2 befindet sich ein elektrisch leitender Metall­balg 14, in dessen Inneres über einen Einlaß 15 Druckluft eingelassen wird. Diese Druckluft arbeitet gegen die Kraft einer Feder 16, die mit ihrem einen Ende 17 am Haken 18 aufgehängt ist und deren anderes Ende 19 in einen Querbolzen 20 eingehängt ist, der in einer vertikalen Verlängerung 21 des Kontaktteils 4 ruht. Diese Verlängerung 21 des Kontaktteils 4 hat im wesentlichen die Form eines hohlen Zylinderstifts mit zwei Endanschlägen 22, 23, wobei diese Endanschläge 22, 23 für die Abstützung des oberen und des unteren Endes des Metallbalgs 14 dienen. Der obere Endanschlag 23 ist allerdings nicht einstückig mit der Verlängerung 21 verbunden, sondern liegt auf dieser auf. Wird nun Druckluft in den Einlaß 15 eingeführt, so gelangt diese in den Hohlraum 24 der Verlängerung, wo sich auch die Feder 16 befindet, und drückt gegen die Unterseite einer Kontaktfläche 25, die an ihrem seitlichen Rand mit dem Metallbalg 14 verbunden ist. Ist die durch die Druckluft ausgeübte Kraft größer als die Kraft der Feder 16, so dehnt sich der Metallbalg 14 solange aus, bis die Kontakt­fläche 25 gegen das Kontaktteil 3 stößt. Auf diese Weise ist eine elektri­sche Verbindung zwischen den Kontaktflächen 3, 4 hergestellt, wobei der Strom von dem Kontaktteil 3 über den Metallbalg 14 und die Verlängerung 21 zum Kontaktteil 4 bzw. umgekehrt fließen kann. Wird die zugeführte Druckluft schwächer oder hört sie gar ganz auf zu strömen, so überwiegt die Kraft der Feder 16 und die Kontaktfläche wird wieder in diejenige Position zurückgeführt, die in der Fig. 1 dargestellt ist. Die Durchbohrung 13 dient dazu, einen Druckausgleich im Innern des Gehäuses 2 zu schaffen. Wäre das Gehäuse 2 hermetisch abgeschlossen, so müßte der Metallbalg 14 mit der Kontaktfläche 25 die Luft im Innenraum des Gehäuses kompri­mieren, damit die Kontaktfläche 25 an den Kontaktteil 3 gelangt. Ober- und unterhalb der Durchbohrung 13 weist das Gehäuse 2 jeweils eine Bohrung 27, 28 auf, in die Hochfrequenzleitungen, in der Regel Bänder, eingeführt werden. Die Bohrungen 27, 28 können auch mit einem Gewinde versehen sein.1 shows a first embodiment of a pneumatically operated switch 1, which has a housing 2 made of electrically insulating material and is provided with an electrically conductive contact part 3, 4 at the top and bottom. The contact parts 3, 4 are fixedly connected to the housing 2 by means of electrically non-conductive screws 5, 6, the screws 7, 8 being located on one of the projections 9, 10 of the contact parts 3, 4 with their heads. In the wall of the housing 2 there is a screw channel 11 into which the screws 5, 6 are screwed. The housing 2 itself is, for. B. cylindrical and has compared to the screw channel 11 on a nozzle 12 with a through hole 13. In the housing 2 there is an electrically conductive metal bellows 14, in the interior of which compressed air is admitted via an inlet 15. This compressed air works against the force of a spring 16 which is suspended at one end 17 on the hook 18 and the other end 19 of which is suspended in a transverse bolt 20 which rests in a vertical extension 21 of the contact part 4. This extension 21 of the contact part 4 is essentially in the form of a hollow cylindrical pin with two end stops 22, 23, these end stops 22, 23 serving to support the upper and lower ends of the metal bellows 14. However, the upper end stop 23 is not connected in one piece to the extension 21, but lies on it. If compressed air is now introduced into the inlet 15, it enters the cavity 24 of the extension, where the spring 16 is also located, and presses against the underside of a contact surface 25 which is connected to the metal bellows 14 at its lateral edge. If the force exerted by the compressed air is greater than the force of the spring 16, the metal bellows 14 expands until the contact surface 25 abuts the contact part 3. In this way, an electrical connection is established between the contact surfaces 3, 4, the current being able to flow from the contact part 3 via the metal bellows 14 and the extension 21 to the contact part 4 or vice versa. If the compressed air supplied becomes weaker or stops flowing completely, the force of the spring 16 prevails and the contact surface is returned to the position shown in FIG. 1. The through hole 13 serves to create a pressure equalization in the interior of the housing 2. If the housing 2 were hermetically sealed, the metal bellows 14 with the contact surface 25 would have to compress the air in the interior of the housing so that the contact surface 25 reaches the contact part 3. Above and below the through bore 13, the housing 2 has a bore 27, 28, into which high-frequency lines, as a rule tapes, are inserted. The bores 27, 28 can also be provided with a thread.

Die Fig. 2 zeigt eine weitere Ausführungsform der Erfindung, bei welcher diejenigen Bauteile, die auch in der Vorrichtung gemäß Fig. 1 zu finden sind, dieselben Bezugszahlen wie diese besitzen. Im Unterschied zur ersten Ausführungsform weist die Ausführungsform gemäß Fig. 2 keine Feder auf, welche die Kontaktfläche 25 nach unten zieht und erst durch Einströmen von Druckluft gedehnt wird, sondern eine Feder 29, die nach außen drückt. Diese Feder 29 ist von dem Metallbalg 14 umgeben und ruht mit ihrem einen Ende auf einem Vorsprung 30, der mit dem Kontaktteil 4 einstückig verbunden ist und eine Durchbohrung 31 aufweist. Der Vorsprung 30 be­sitzt an seinem oberen Ende eine Verjüngung 36, die zur Führung des einen Endes 32 der Feder 29 dient. Das andere Ende 33 der Feder 29 ist in entsprechender Weise von einer Verjüngung 35 geführt, die in die Kontaktfläche 25 übergeht. Ohne die Einwirkung von Druckluft sind die Kontaktteile 3 und 4 über den Metallbalg 14 elektrisch miteinander ver­bunden, weil die Feder 29 die Kontaktfläche 25 permanent an den Kontakt­teil 4 drückt. Wird jedoch Druckluft in den Raum zwischen dem Metall­balg 14 und dem Gehäuse 2 durch die Öffnung 13 eingelassen, so gelangt diese Druckluft über eine Bohrung an eine Oberfläche 34 der Kontakt­fläche 25 und drückt diese nach unten.FIG. 2 shows a further embodiment of the invention, in which those components which can also be found in the device according to FIG. 1 have the same reference numbers as these. In contrast to the first embodiment, the embodiment according to FIG. 2 does not have a spring which pulls the contact surface 25 downward and is only stretched by the inflow of compressed air, but a spring 29 which presses outwards. This spring 29 is surrounded by the metal bellows 14 and rests with its one end on a projection 30 which is connected in one piece to the contact part 4 and has a through-hole 31. The projection 30 has at its upper end a taper 36 which serves to guide the one end 32 of the spring 29. The other end 33 of the spring 29 is guided in a corresponding manner by a taper 35 which merges into the contact surface 25. Without the action of compressed air, the contact parts 3 and 4 are electrically connected to one another via the metal bellows 14, because the spring 29 presses the contact surface 25 permanently against the contact part 4. However, if compressed air is admitted into the space between the metal bellows 14 and the housing 2 through the opening 13, this compressed air reaches a surface 34 of the contact surface 25 via a bore and presses it downwards.

Die Durchbohrung 31 hat dieselbe Funktion wie die Durchbohrung 13 in Fig. 1, d. h. sie dient dazu, im Innern des Gehäuses einen Druckausgleich zu schaffen. Der Unterschied zwischen dem Schalter gemäß Fig. 1 und dem Schalter gemäß Fig. 2 besteht im wesentlichen darin, daß der Schalter gemäß Fig. 1 im drucklosen Zustand offen ist, während der Schalter gemäß Fig. 2 im drucklosen Zustand geschlossen ist. Die Druckluft arbeitet dabei immer gegen die Kraft der Zug- bzw. Druckfeder. Die Federkraft des Balgs ist von untergeordneter Bedeutung.The through hole 31 has the same function as the through hole 13 in Fig. 1, i. H. it serves to create pressure equalization inside the housing. The difference between the switch according to FIG. 1 and the switch according to FIG. 2 essentially consists in the fact that the switch according to FIG. 1 is open in the depressurized state, while the switch according to FIG. 2 is closed in the depressurized state. The compressed air always works against the force of the tension or compression spring. The spring force of the bellows is of minor importance.

Claims (15)

1. Ein/Aus-Schalter, insbesondere für Hochfrequenzströme, mit zwei in einem Abstand voneinander angeordneten und miteinander zu verbindenden Kontaktteilen sowie mit einem elektrisch leitenden Balg, über den die zu schaltenden Ströme fließen, gekennzeichnet durch die Kombination folgen­der Merkmale: a) der Balg (14) ist mit seinem einen Ende (22) ortsfest mit einem ersten elektrischen Kontaktteil (4) verbunden; b) der Balg (14) trägt an seinem anderen und beweglichen Ende eine Kontaktfläche (25); c) innerhalb des Balgs (14) ist eine mechanische Feder (16) angeordnet, die auf die Kontaktfläche (25) Kräfte ausübt; d) der Balg (14) ist durch ein Fluid betätigbar. 1. On / off switch, in particular for high-frequency currents, with two contact parts which are arranged at a distance from one another and are to be connected to one another, and with an electrically conductive bellows over which the currents to be switched flow, characterized by the combination of the following features: a) the bellows (14) is connected at one end (22) to a first electrical contact part (4); b) the bellows (14) carries at its other and movable end a contact surface (25); c) a mechanical spring (16) is arranged inside the bellows (14) and exerts forces on the contact surface (25); d) the bellows (14) can be actuated by a fluid. 2. Ein/Aus-Schalter nach Anspruch 1, dadurch gekennzeichnet, daß zwischen den miteinander zu verbindenden Kontaktteilen (3, 4) ein Isolator (2) mit einem hohlen Innenraum vorgesehen ist.2. On / off switch according to claim 1, characterized in that between the contact parts to be connected (3, 4) an insulator (2) is provided with a hollow interior. 3. Ein/Aus-Schalter nach Anspruch 1, dadurch gekennzeichnet, daß der Balg (14) in einem gedehnten Zustand die beiden Kontaktteile (3, 4) miteinander verbindet und in einem gestauchten Zustand die beiden Kontakt­teile (3, 4) voneinander trennt.3. On / off switch according to claim 1, characterized in that the bellows (14) connects the two contact parts (3, 4) to one another in an expanded state and separates the two contact parts (3, 4) from one another in a compressed state. 4. Ein/Aus-Schalter nach Anspruch 1, dadurch gekennzeichnet, daß das Fluid Druckluft ist.4. On / off switch according to claim 1, characterized in that the fluid is compressed air. 5. Ein/Aus-Schalter nach Anspruch 1, dadurch gekennzeichnet, daß die Feder (16, 29) mit ihren Enden an Bauteile (21, 25) angeschlossen ist, die mit jeweils einem Ende des Balgs (14) in Verbindung stehen.5. On / off switch according to claim 1, characterized in that the spring (16, 29) is connected at its ends to components (21, 25) which are connected to one end of the bellows (14). 6. Ein/Aus-Schalter nach Anspruch 2, dadurch gekennzeichnet, daß der Isolator (2) ein Gehäuse bildet, das auf der Oberseite und auf der Unter­seite durch jeweils ein Kontaktteil (3, 4) abgeschlossen ist.6. On / off switch according to claim 2, characterized in that the insulator (2) forms a housing which is closed on the top and on the bottom by a contact part (3, 4). 7. Ein/Aus-Schalter nach Anspruch 5, dadurch gekennzeichnet, daß die Kontaktteile (3, 4) mit dem Gehäuse (2) über Schrauben (5, 7) verbunden sind.7. On / off switch according to claim 5, characterized in that the contact parts (3, 4) with the housing (2) via screws (5, 7) are connected. 8. Ein/Aus-Schalter nach Anspruch 7, dadurch gekennzeichnet, daß die Schrauben (5, 7) aus elektrisch nichtleitendem Material bestehen.8. On / off switch according to claim 7, characterized in that the screws (5, 7) consist of electrically non-conductive material. 9. Ein/Aus-Schalter nach Anspruch 5, dadurch gekennzeichnet, daß die Feder eine Zugfeder (16) ist.9. On / off switch according to claim 5, characterized in that the spring is a tension spring (16). 10. Ein/Aus-Schalter nach Anspruch 5, dadurch gekennzeichnet, daß die Feder eine Druckfeder (29) ist.10. On / off switch according to claim 5, characterized in that the spring is a compression spring (29). 11. Ein/Aus-Schalter nach Anspruch 1, dadurch gekennzeichnet, daß in einem Kontaktteil (4) eine Öffnung (15) vorgesehen ist, durch die Druckluft in das Innere des Balgs (14) einführbar ist.11. On / off switch according to claim 1, characterized in that an opening (15) is provided in a contact part (4) through which compressed air can be introduced into the interior of the bellows (14). 12.Ein/Aus-Schalter nach Anspruch 1, dadurch gekennzeichnet, daß in dem Isolator (2) eine Öffnung (13) vorgesehen ist, durch die Druckluft auf die Außenseite des Balgs (14) führbar ist.12. On / off switch according to claim 1, characterized in that an opening (13) is provided in the insulator (2) through which compressed air can be guided to the outside of the bellows (14). 13. Ein/Aus-Schalter nach den Ansprüchen 1, 5 und 9, dadurch gekenn­zeichnet, daß das eine Bauteil (25) ein elektrischer Kontaktkopf ist, wäh­rend das andere Bauteil (21) der Vorsprung des einen Kontaktteils (4) ist.13. On / off switch according to claims 1, 5 and 9, characterized in that the one component (25) is an electrical contact head, while the other component (21) is the projection of a contact part (4). 14. Ein/Aus-Schalter nach Anspruch 13, dadurch gekennzeichnet, daß die Zugfeder (16) mit ihrem einen Ende in den Kontaktkopf (25) und mit ihrem anderen Ende in einen mit dem Vorsprung (21) verbundenen Quer­bolzen (20) eingehängt ist.14. On / off switch according to claim 13, characterized in that the tension spring (16) with one end in the contact head (25) and with its other end in a with the projection (21) connected to the transverse bolt (20) . 15. Ein/Aus-Schalter nach den Ansprüchen 1, 5, 10 und 13, dadurch gekennzeichnet, daß die Druckfeder (29) mit ihrem einen Ende eine Ver­jüngung (31) des Vorsprungs (30) und mit ihrem anderen Ende eine Ver­jüngung (35) des Kontaktkopfes (25) umschließt.15. On / off switch according to claims 1, 5, 10 and 13, characterized in that the compression spring (29) with one end a taper (31) of the projection (30) and with its other end a taper (35 ) of the contact head (25).
EP90107518A 1989-07-18 1990-04-20 On-off switch Expired - Lifetime EP0408842B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3923660A DE3923660A1 (en) 1989-07-18 1989-07-18 ON / OFF SWITCH
DE3923660 1989-07-18

Publications (3)

Publication Number Publication Date
EP0408842A2 true EP0408842A2 (en) 1991-01-23
EP0408842A3 EP0408842A3 (en) 1991-11-27
EP0408842B1 EP0408842B1 (en) 1996-12-04

Family

ID=6385239

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90107518A Expired - Lifetime EP0408842B1 (en) 1989-07-18 1990-04-20 On-off switch

Country Status (4)

Country Link
US (1) US5087800A (en)
EP (1) EP0408842B1 (en)
JP (1) JPH0358601A (en)
DE (2) DE3923660A1 (en)

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EP1783796A3 (en) * 2005-11-07 2008-09-10 ABB Sp.zo.o. Control sensor for devices filled with dielectric liquid, especially transformers
EP3876253A1 (en) * 2020-03-03 2021-09-08 ALSTOM Transport Technologies Electric current interruption system and railway vehicle comprising such an interruption system

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JPH07150508A (en) * 1993-11-26 1995-06-13 Sekizai Center:Kk Stone pavement construction method

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Also Published As

Publication number Publication date
DE3923660A1 (en) 1991-01-24
EP0408842A3 (en) 1991-11-27
DE59010589D1 (en) 1997-01-16
US5087800A (en) 1992-02-11
EP0408842B1 (en) 1996-12-04
JPH0358601A (en) 1991-03-13

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