EP0389296B1 - Tintendruckkopf-Substrat und Tintendruckkopf mit einem solchen Substrat - Google Patents

Tintendruckkopf-Substrat und Tintendruckkopf mit einem solchen Substrat Download PDF

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Publication number
EP0389296B1
EP0389296B1 EP90303137A EP90303137A EP0389296B1 EP 0389296 B1 EP0389296 B1 EP 0389296B1 EP 90303137 A EP90303137 A EP 90303137A EP 90303137 A EP90303137 A EP 90303137A EP 0389296 B1 EP0389296 B1 EP 0389296B1
Authority
EP
European Patent Office
Prior art keywords
ink
ink jet
recording head
layer
heat generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90303137A
Other languages
English (en)
French (fr)
Other versions
EP0389296A2 (de
EP0389296A3 (de
Inventor
Torachika Osada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP7218389A external-priority patent/JPH02249648A/ja
Priority claimed from JP2003479A external-priority patent/JP2714200B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP0389296A2 publication Critical patent/EP0389296A2/de
Publication of EP0389296A3 publication Critical patent/EP0389296A3/de
Application granted granted Critical
Publication of EP0389296B1 publication Critical patent/EP0389296B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Definitions

  • the present invention relates to an ink jet recording head substrate and an ink jet recording head having the same.
  • a recording head used in an ink jet recording system generally comprises a plurality of fine ejection outlets (orifices) for ejecting ink, ink passages communicating with the orifices, a common chamber for supplying ink to the respective ink passages and ejection energy generating elements disposed corresponding to the ink passages.
  • the following manufacturing method is known, for example.
  • the number of grooves for constituting the ink passages are formed on a substrate with photosensitive resin.
  • Another substrate (top plate) is bonded on the groove-formed surface to provide the ink passages, by which the number of orifices are disposed with good positional precision.
  • means is provided on the substrate for permitting to display identification of each of the energy generating elements (electrothermal transducer) in order to facilitate quality control and observation of the change after inspection and repair during the manufacturing step or after the manufacturing of the ink jet recording head substrate and the ink jet recording head using the substrate wherein the number, particularly the great number of electrothermal transducer are disposed on a supporting member, corresponding to orifices.
  • reference electrodes having a cut corner 3-1 are provided at regular intervals (every 16 electrodes, in Figure 1), by which each of the electrothermal transducers can be identified.
  • the method shown in Figure 2 involves the problem that there is a limit to the reduction of the size of the numerical, and therefore, it is not suitable to the electrothermal transducers disposed at a high density.
  • the heat generating resistor are disposed at a density higher than 400 dpi (dot per inch), and when the numericals are reduced correspondingly, the numericals are not easily read when they are observed by the operator's eyes through an enlarging optical system or when they are automatically read using a CCD (charge coupled device) camera, an optical microscope and a computer.
  • CCD charge coupled device
  • the recording head manufactured through the process described above may be inspected after the manufacturing at the orifice and the portions therearound to inspect the ink ejection or the like.
  • the inspection is carried out for each of the orifices. If some trouble is discovered, the ejection energy generating element corresponding to the orifice is energized to eject the ink, and the ink ejection and the ink dot deposited on the recording medium are inspected further in detail. In addition, the trouble orifice is identified to take some measure thereto, as the case may be.
  • US Patent 4,740,800 discloses liquid jet recording head comprising: a plurality of discharge ports through which liquid is discharged; a plurality of electro-thermal converting elements, each provided correspondingly to each discharge port and generating thermal energy used for discharging said liquid, the electro-thermal converting elements having a heat resistive layer provided on a substrate and an electrically, conductive layer for forming at least one set of electrodes electrically connected to the heat resistive layer; and a dummy heater provided adjacent to a group of plural elements of the heat resistive layer.
  • an ink jet recording head substrate comprising a supporting member, a plurality of electrothermal transducers having heat generating elements, and electrodes electrically connected thereto; and identification marks for easy identification of each of said electrothermal transducers, is characterized in that said identification mark comprises an information code representing a binary coded decimal number and being located adjacent the electrothermal transducers.
  • the identification mark used in this embodiment indicates the number by dot arrangement in a predetermined area, and therefore is easily formed in a small area, and in addition, is easily read in the observation and the automatic inspection.
  • the identification mark can be easily formed at the correct position by a simple process step change, for example, by adding a pattern for the formation of the identification mark to the exposure pattern when the pattern is formed using the photolithography for the electrode and the heat generating resistor constituting the electrothermal transducer, for example.
  • the material for forming the identification mark and the method for the formation are not limited to the above, and various methods are usable.
  • the identification mark is formed using an electrode layer and a heat generating resistance layer, it will suffice if the materials of such layers have different refraction indexes.
  • the marks are provided for every predetermined number of ejection outlets on the ejection surface where the plural ejection outlets are aligned, by which the position of the ejection outlet can be counted on the basis of the mark, so that the ejection outlet can be identified easily.
  • Figures 1 and 2 are top plan views of conventional substrates in a background art.
  • Figure 3 is a top plan view of a major part of the ink jet recording head substrate according to an embodiment of the present invention.
  • Figure 4A is a part sectional view taken along a line B-B of Figure 3.
  • Figure 4B is a part sectional view taken along a line A-A of Figure 3.
  • Figures 5A - 5F are top plan views of an example of an identification mark.
  • Figure 6A is a perspective view of an ink jet recording head including the substrate of Figure 3.
  • Figure 6B is a part sectional view taken along an ink passage of the recording head of Figure 6A.
  • Figures 7 and 9 are top plan views illustrating another example of arrangements of the identification marks.
  • Figures 8A - 8F and Figures 10A - 10D are top plan views of other examples of the identification marks.
  • Figure 11 is a top plan view illustrating another example of the identification mark arrangement.
  • Figure 12 is a perspective view of an ink jet recording head according to another embodiment of the present invention.
  • Figures 13A - 13E are perspective view illustrating an example of ink jet recording head manufacturing.
  • Figure 14 is a perspective view of an ink jet recording head according to a further embodiment of the present invention.
  • Figure 15 is a somewhat schematic perspective view illustrating a major part of an ink jet apparatus provided with the ink jet recording head according to the present invention.
  • the ink jet recording head substrates in this embodiment includes a supporting member 1, on which a great number of electrothermal transducers are disposed at a desired density.
  • Each of the electrothermal transducers includes a heat generating resistor 2a and electrodes 3a and 3b electrically connected to the heat generating resistor 2a, wherein the heat generating resistor 2a is constituted by a heat generating resistor layer 2 between electrode layers to constitute a heat generating portion for generating heat by electric power supply.
  • Identification marks 4 representing identification numbers are formed above (adjacent one side of the substrate) for representative electrothermal transducers.
  • the identification mark 4 is constituted by projection dots 4-1 provided by the electrode layer on the lower layer 4-2 constituting the heat generating resistance layer, correspondingly to the identification number.
  • the dots 4-1 are discriminated on the lower layer 4-2.
  • the top line of the identification mark 4 as seen from the above represents the number of tens
  • the bottom line represents the number of units.
  • the columns (1) - (4) represents the number in the binary system, wherein the digit increases from (1) column to (4) column.
  • the presence of the dot 4-1 in the columns (1) - (4) represents "1" in the binary system, whereas the absence thereof represents "0" in the binary system.
  • the identification mark in Figure 5A represents "0001" in the units, and "0001" in the tens, and therefore, it represents "11" in the decimal system.
  • Figures 5C - 5F represent "44”, “88”, "34” and "51”, respectively.
  • the identification mark 4 can be formed when the electrothermal transducers are formed by patterning the heat generating resistor layer and the electrode layer laminated on the supporting member 1. This is done by remaining the proper portions of the layers on the supporting member as a predetermined configuration of the lower layer 4-2 and as the dots 4-1 at the predetermined positions on the lower layer.
  • the identification marks can be formed simultaneously with the formation of the electrothermal transducer simply adding the identification mark forming pattern into the exposure mask.
  • the supporting member 1, the heat generating resistor 2A and the electrodes 3A and 3B may be made of material ordinarily used.
  • the configuration of the identification mark 4, more particularly, the configurations of the dots 4-1 and the lower layer 4-2 are not limited to those illustrated in the Figures, but may be in various forms.
  • the dot 4-1 may be in the form of a circle or the like.
  • ink passages and ejection outlets or the like are formed corresponding to the heat generating resistors 2a through a usual method which will be described hereinafter, by which an ink jet recording head having the structure shown in Figures 6A and 6B, for example, can be provided.
  • the materials of various parts of the ink jet recording head may be those ordinarily used.
  • the correct identification number of each of the electrothermal transducer can be known quickly without difficulty during the inspection after the power supply test for the substrate or during the inspection after the printing test for the ink jet recording head.
  • An ink jet recording head having the structure shown in Figures 6A and 6B has actually been manufactured through the process which will be described hereinafter.
  • the identification number has easily been known for each of the electrothermal transducers by observation through metallurgical or through a stereoscopic microscope into the ink passage 9 from the ejection outlet 8 side.
  • the substrate 1 is a silicon plate having a surface layer of SiO2 provided by heat oxidation (layer thickness is 2.75 microns).
  • layer thickness is 2.75 microns.
  • HfB2 layer having a layer thickness of 0.13 micron is formed as the heat generating resistor layer by bias sputtering, and on the HfB2 layer, an Al layer having a layer thickness of 0.55 micron is laminated as the electrode layer 3 by the bias sputtering.
  • the electrode 3a and 3b line width of 26 microns
  • the heat generating resistor layer 2a 100 microns x 20 microns with a pitch of 63.5 microns
  • identification marks 4 14 microns x 28 microns of the lower layer 4-2 and 7 microns x 7 microns of the dot 4-1) are formed by remaining the layers on the supporting member 1 in the configuration shown in Figures 3, 4A and 4B.
  • a protection layer of SiO2 having a thickness of 1.9 microns by bias sputtering.
  • the walls constituting the ink passages 9 and the ink chamber (not shown) is formed by a cured layer of epoxy resin.
  • a top plate 6 is bonded thereto to provide the ink jet recording head having the structure shown in Figures 6A and 6B.
  • the identification mark shown in Figures 9, 10A - 10D is constituted by two mark elements each having two lines, thus providing in total four lines to represents the numbers of hundreds. As will be understood, Figures 10A - 10D represent "1", “1822”, “1280” and "4736".
  • the two identification marks may be formed over a plurality of electrothermal transducers, depending on the density of the electrothermal transducers. In this case, by cutting a corner of the electrode to provide the pattern 11, it can be made clear which electrothermal transducer corresponds to the identification mark.
  • the direction in which the ink is supplied in the ink passage to the position corresponding to the heat generating resistor is substantially the same as the direction in which the ink is ejected through the ejection outlet. If the directions are different, for example, if the directions form right angles, the identification mark 4 may be disposed at a position shown in Figure 11, for example.
  • Figure 12 is a perspective view of an ink jet recording head of a so-called full line type manufactured by a manufacturing method according to an embodiment of the present invention.
  • the recording head is provided with not less than 3000 orifices through which ink is ejected to perform the recording.
  • a substrate 31 is provided with electrothermal transducer elements for producing energy for ejecting the ink and function elements or the like for driving the electrothermal transducer element.
  • the substrate is made of a silicon wafer.
  • Designated by a reference numeral 32 is a layer of material curable by active energy radiation which will constitute ink passages.
  • a top plate 33 is made of glass.
  • Ejection or discharging outlets (orifices) 34 are effective to form ink droplets.
  • An ink supply port 35 functions to supply ink to the recording head from an ink container.
  • Grooves 36 are formed at a pitch of 10 orifices. The grooves function as orifice identification marks. By counting the orifices on the basis of the mark, an orifice can be identified by smaller number of counting operations.
  • FIGS 13A - 13E are perspective views illustrating various manufacturing steps for manufacturing the ink jet recording head of Figure 12, according to an embodiment of the present invention. Referring to this Figure, the manufacturing method for the recording head will be described.
  • Figure 13A illustrates the substrate provided with the ejection energy generating elements 37.
  • the ejection energy generating elements 37 are disposed at the portions corresponding to the portions at which the ink passages will be formed.
  • the material for the substrate 31 glass silicon wafer or the like are usable.
  • the ejection energy generating element 37 a piezoelectric element or a heat generating element may be used, for example.
  • the substrate is made of silicon wafer, and the element 37 is an electrothermal transducer element.
  • the substrate 31 is provided with function elements and electrode wiring (not shown) for driving the electrothermal transducer element 37.
  • a dissolvable and removable solid layer 38 is formed on the substrate 31 in the pattern of the liquid passages and in the pattern corresponding to the common liquid chamber communicating with all the liquid passages and in the pattern of grooves adjacent to the orifices for each of 10 orifices.
  • the material of the solid layer 38 is of a positive type photoresist material containing as major components naphthoquinonediazide derivative and orthocrezolenovolak resin or a positive type dry film photoresist material.
  • the pattern of the solid layer 38 is formed by the photolithographic technology, for example, to a thickness of 20 - 100 microns with the passage width of 20 - 100 microns.
  • the material of the solid layer 38 will suffice if it can be dissolved and removed by solvent after the formation of the pattern.
  • the other chemical properties are not limited.
  • the positive chemical reaction may be of any type.
  • the formation of the solid layer 38 at the portions corresponding to the common chamber is not inevitable. The formation thereof may be selected depending on the heads and the subsequent processing steps.
  • the side 31 having the solid layer 38 is coated with a material 32 curable by active energy radiation.
  • the material 32 constitutes the walls of the liquid passages, and therefore, it is preferable that the material exhibits good bonding property with the substrate, sufficient mechanical strength and good chemical resistance.
  • the curable material 32 does not easily dissolve the solid layer 38 when it is applied on the solid layer 38.
  • Figure 13D is a perspective view of a top plate having a recess 39 which will constitute the common chamber.
  • an ink supply port 35 is formed on the top side of the top plate 33.
  • the material of the top plate 33 may be, for example, metal, glass, plastic resin, ceramic material or the like.
  • the recess 39 and the ink supply port 35 may be formed through a process suitable for the material selected.
  • the surfaces bonded together is not warped, but it is not inevitably necessary that the surfaces are smooth. They may be physically or chemically treated for the improvement in the bonding property therebetween.
  • the side of the bonded assembly in which the orifices are formed is cut, abraded to provide a correct predetermined distance between the ejection energy generating elements 37 and the orifices 35.
  • the side is finished into a smooth orifice surface (ejection surface).
  • the metallizing treatment or the like such as ink repelling treatment or metal evaporation.
  • the abrading or other processing is carried out, the passages and grooves for each ten orifices are filled with the solid layer 38, and therefore, the abrading or other processes do not influence the internal walls of the liquid passage. If necessary or desired, the other portions may be cut. If not necessary, the abrading and the other processing may not be performed.
  • a precision cutting device for manufacturing semiconductor devices is preferably used.
  • the filling solid layer 38 is dissolved and removed, and the inside is cleaned. In this manner, the liquid passages are formed and the grooves are formed in the orifice surface.
  • an ink jet recording head shown in Figure 12 may be provided.
  • Figure 14 is a perspective view of a full line type recording head manufactured by the manufacturing method described in the foregoing embodiment.
  • the numbers of the grooves 36 for each 10 orifices, for each 100 orifices and for each 1000 orifices are different to facilitate identification of an orifice. By this, the orifice can be identified quickly.
  • the correct identification number of each of the electrothermal transducer may be known by eyes quickly using the identification mark representing the identification of the electrothermal transducers, which can be easily read.
  • the discrimination of the identification number can be carried out automatically. if a binary representation, a CCD camera, an optical microscope or a computer or the like which constitute an automatic reading device.
  • the identification mark according to this embodiment can be made at the same time as and by the same material as the electrothermal transducers.
  • the area occupied by the identification mark can be very easily reduced, as compared with the case where figures are written. Therefore, it can meet the high density of the thermal electrotransducers.
  • a mark in the form of a groove or grooves is provided for each predetermined number of ejection outlets on the ejection orifice surface where the plural ejection outlets are disposed, by which the position of an ejection outlet may be counted on the basis of the mark, so that an ejection outlet can be identified.
  • the positional relation with the ejection outlet can be made correct, and the ink ejection is not adversely affected by the provision of the marks.
  • an ejection outlet can be identified quickly during the ejection outlet inspecting operation, for example. Therefore, the time required for the inspection can be reduced.
  • Figure 15 is a somewhat schematic perspective view of an ink jet recording apparatus provided with the ink jet recording head according to an embodiment of the present invention.
  • the apparatus includes the ink jet recording head 230.
  • ejection outlets are formed over the entire width of the recording region for a recording material (not shown).
  • the ink is ejected downwardly through the ejection outlets.
  • the recording material is supplied to the conveyer belt 265 by unshown means, and is conveyed by the movement of the conveyer belt 265 driven by the conveying roller 264.
  • the apparatus further comprises an ejection recovery system 215, and an ink absorbing material 261.
  • the ink is ejected by the ink jet head 232 (preliminary ejection), the ejection trouble is prevented.
  • a blade 260 is effective to wipe the ejection side surface 231 of the head. In order for the blade 260 to continuously wipe the plural ejection outlets in the ejection side surface 231, it is driven by a motor 262 along the guide shaft 263.
  • the present invention is particularly suitable to an ink jet recording head of a type wherein electrothermal transducers generating thermal energy for the ejection of the ink are provided for plural ejection outlets (for example, not less than 1000 outlets and further not less than 2000 outlets) covering the entire recording region for the recording material.
  • electrothermal transducers generating thermal energy for the ejection of the ink are provided for plural ejection outlets (for example, not less than 1000 outlets and further not less than 2000 outlets) covering the entire recording region for the recording material.
  • the present invention provides excellent effects particularly in a recording head, recording device of a bubble jet recording system among the ink jet recording systems.
  • the ink ejection principle the one disclosed in U.S. Patents Nos. 4,723,129 and 4,740,796 is preferred.
  • This system is applicable to either of the so-called on-demand type and the continuous type.
  • the on-demand type is preferable because in that type, by applying at least one driving signal which gives rapid temperature rise exceeding the nuclear boiling, corresponding to the recording information supplied to the electrothermal transducers arranged corresponding to the sheets or the liquid passages containing liquid (ink), heat energy is generated by the electrothermal transducers to produce film boiling at the heating surface of the recording head, and consequently a bubble is formed in the liquid (ink), corresponding to each of the driving signals.
  • the present invention can be also advantageously practiced using the structure disclosed in Japanese Laid-Open Application No. 123670/1984 disclosing a slit common to a plurality of electrotransducers as the discharging portions of the transducer or Japanese Laid-Open Patent Application No. 138461/1984 disclosing an opening for absorbing pressure wave of thermal energy corresponding to the discharging portion.
  • the recording head of the full line type having a length corresponding to the maximum recording width for a maximum usable recording medium
  • either the construction which satisfies its length by combination of a plurality of recording heads or the construction of one recording head may be used, and the present invention provides the corresponding effect.
  • the present invention is effective for a recording head of the freely exchangeable chip type which enables electric connection to the main device or supply of ink from the main device by being mounted on the main device, or for the case by use of a recording head of the cartridge type provided integrally on the recording head itself.
  • a restoration means for the recording head, a preliminary auxiliary means, or the like provided as the construction of the recording device of the present invention is preferable, because the effect of the present invention can be further stabilized.
  • Specific examples of these may include, for the recording head, capping means, cleaning means, pressurizing or aspiration means, electrothermal transducers or another heating element or preliminary heating means according to a combination of them and it is also effective for performing stable recording operation to perform preliminary mode which performs discharging the liquid for not performing the recording operation.
  • the present invention is extremely effective for not only the recording mode only of a primary stream color such as black or the like, but also a device equipped with at least one of plural different colors or full-color by color mixing, whether the recording head may be either integrally constructed or combined in plural number.
  • liquid ink is taken.
  • the present invention is applicable to ink which is solid or softened in the room temperature, since in the ink jet recording apparatus described above, the ink is heated to and maintained at a temperature not less than 30 degrees and not more than 70 degrees to provide stabilized ink viscosity so as to place it in a stabilized ejection region. Therefore, the present invention is applicable to any ink if it is in liquid state when the recording signal is applied.
  • the present invention is applicable to the ink liquefied by application of the thermal energy, even if it starts to solidify at the time reaching the recording material, wherein the temperature rise by the thermal energy is positively prevented by causing the energy to be consumed for the phase change from the solid state to the liquid state of the ink, or wherein the ink may be such that it is solidified to prevent evaporation.
  • the ink may be retained in the form of liquid or solid material in recess or through holes of porous sheet, which is faced to the electrothermal transducers.
  • the present invention is most advantageous when the above-described film boiling is used.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Electronic Switches (AREA)
  • Ink Jet (AREA)

Claims (6)

  1. Tintenstrahlaufzeichnungskopf-Substrat, mit einem Tragelement (1), einer Vielzahl von elektrothermischen Wandlern, die Wärmeerzeugungselemente (2a) und mit diesen elektrisch verbundene Elektroden (3a, 3b) aufweisen, und Identifikationsmarken (4) zur einfachen Identifikation von jedem der elektrothermischen Wandler, dadurch gekennzeichnet, daß
    die Identifikationsmarke (4) einen Informationskode aufweist, der eine binär kodierte Dezimalzahl repräsentiert und angrenzend der elektrothermischen Wandler angeordnet ist.
  2. Substrat gemäß Anspruch 1, wobei die Identifikationsmarken (4) aus dem gleichen Material wie die elektrothermischen Wandler gefertigt sind.
  3. Substrat gemäß Anspruch 1, wobei der Kode durch Punkte (4-1) gebildet ist.
  4. Substrat gemäß Anspruch 3, wobei die Punkte (4-1) durch eine Schicht der Elektrode geschaffen sind, die in der Form von Inseln auf einer Schicht (4-2) des wärmeerzeugenden Widerstands angeordnet ist.
  5. Tintenstrahlaufzeichnungskopf, bei dem das Tintenstrahlaufzeichnungskopf-Substrat gemäß Anspruch 1, 2 oder 3 verwendet wird, wobei Tintenkanäle (35) mit Tintenausstoßauslässen (10) in Verbindung stehen, um die Tinte unter Anwendung von thermischer Energie auszustoßen, die durch einen wärmeerzeugenden Abschnitt des wärmeerzeugenden Widerstands erzeugt wird.
  6. Substrat gemäß Anspruch 4, wobei die Schicht der Elektroden (4-1) und die Schicht der wärmeerzeugenden Widerstände (4-2) verschiedene Brechzahlen haben.
EP90303137A 1989-03-24 1990-03-23 Tintendruckkopf-Substrat und Tintendruckkopf mit einem solchen Substrat Expired - Lifetime EP0389296B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP72183/89 1989-03-24
JP7218389A JPH02249648A (ja) 1989-03-24 1989-03-24 インクジェット記録ヘッド用基体及び該基体を用いたインクジェット記録ヘッド
JP3479/89 1990-01-12
JP2003479A JP2714200B2 (ja) 1990-01-12 1990-01-12 インクジェット記録ヘッドの製造方法

Publications (3)

Publication Number Publication Date
EP0389296A2 EP0389296A2 (de) 1990-09-26
EP0389296A3 EP0389296A3 (de) 1991-04-03
EP0389296B1 true EP0389296B1 (de) 1995-06-14

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Application Number Title Priority Date Filing Date
EP90303137A Expired - Lifetime EP0389296B1 (de) 1989-03-24 1990-03-23 Tintendruckkopf-Substrat und Tintendruckkopf mit einem solchen Substrat

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EP (1) EP0389296B1 (de)
AT (1) ATE123705T1 (de)
DE (1) DE69020021T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69224421T2 (de) * 1991-10-22 1998-07-02 Canon K.K., Tokio/Tokyo Verfahren zur Herstellung eines Tintenstrahlaufzeichnungskopfes
US5363134A (en) * 1992-05-20 1994-11-08 Hewlett-Packard Corporation Integrated circuit printhead for an ink jet printer including an integrated identification circuit
DE69426999T2 (de) * 1993-04-30 2001-08-23 Canon K.K., Tokio/Tokyo Basiskörper für einen Farbstrahlkopf, Farbstrahlkopf damit versehen und Herstellungsverfahren
JP4235820B2 (ja) 2004-05-07 2009-03-11 ブラザー工業株式会社 インクジェット記録ヘッド、ヘッドユニット及びインクジェット記録ヘッドの製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3123031A1 (de) * 1981-06-10 1983-01-05 Siemens AG, 1000 Berlin und 8000 München Verfahren zur kennzeichnung von halbleiterchips und kennzeichenbarer halbleiterchip
JPH0648841B2 (ja) * 1985-10-18 1994-06-22 キヤノン株式会社 記録装置
DE3702643A1 (de) * 1986-02-10 1987-08-13 Toshiba Kawasaki Kk Tintenstrahlschreiber sowie schreibkopf und schreibkopfkassette dafuer
US4740800A (en) * 1986-02-18 1988-04-26 Canon Kabushiki Kaisha Liquid jet recording head

Also Published As

Publication number Publication date
EP0389296A2 (de) 1990-09-26
ATE123705T1 (de) 1995-06-15
DE69020021T2 (de) 1995-11-02
EP0389296A3 (de) 1991-04-03
DE69020021D1 (de) 1995-07-20

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