EP0387838A3 - Vorrichtung zur Erzeugung einer Plasmaquelle hoher Strahlungsintensität im Röntgenbereich - Google Patents

Vorrichtung zur Erzeugung einer Plasmaquelle hoher Strahlungsintensität im Röntgenbereich Download PDF

Info

Publication number
EP0387838A3
EP0387838A3 EP19900104819 EP90104819A EP0387838A3 EP 0387838 A3 EP0387838 A3 EP 0387838A3 EP 19900104819 EP19900104819 EP 19900104819 EP 90104819 A EP90104819 A EP 90104819A EP 0387838 A3 EP0387838 A3 EP 0387838A3
Authority
EP
European Patent Office
Prior art keywords
electrodes
plasma source
producing
insulator
radiation intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19900104819
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0387838A2 (de
Inventor
Franz Richter
Willi Neff
Jürgen Eberle
Rainer Lebert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karl Suess KG Prazisionsgerate fur Wissenschaft und Industrie - & Co GmbH
Original Assignee
Karl Suess KG Prazisionsgerate fur Wissenschaft und Industrie - & Co GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Karl Suess KG Prazisionsgerate fur Wissenschaft und Industrie - & Co GmbH filed Critical Karl Suess KG Prazisionsgerate fur Wissenschaft und Industrie - & Co GmbH
Publication of EP0387838A2 publication Critical patent/EP0387838A2/de
Publication of EP0387838A3 publication Critical patent/EP0387838A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Plasma Technology (AREA)
  • X-Ray Techniques (AREA)
EP19900104819 1989-03-15 1990-03-14 Vorrichtung zur Erzeugung einer Plasmaquelle hoher Strahlungsintensität im Röntgenbereich Withdrawn EP0387838A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3908480A DE3908480C1 (enrdf_load_stackoverflow) 1989-03-15 1989-03-15
DE3908480 1989-03-15

Publications (2)

Publication Number Publication Date
EP0387838A2 EP0387838A2 (de) 1990-09-19
EP0387838A3 true EP0387838A3 (de) 1991-05-15

Family

ID=6376421

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19900104819 Withdrawn EP0387838A3 (de) 1989-03-15 1990-03-14 Vorrichtung zur Erzeugung einer Plasmaquelle hoher Strahlungsintensität im Röntgenbereich

Country Status (2)

Country Link
EP (1) EP0387838A3 (enrdf_load_stackoverflow)
DE (1) DE3908480C1 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19753696A1 (de) * 1997-12-03 1999-06-17 Fraunhofer Ges Forschung Vorrichtung und Verfahren zur Erzeugung von Extrem-Ultraviolettstrahlung und weicher Röntgenstrahlung aus einer Gasentladung
US7688948B2 (en) 2004-11-29 2010-03-30 Koninklijke Philips Electronics N.V. Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0037917A1 (en) * 1980-04-11 1981-10-21 International Business Machines Corporation Flash X-ray source
EP0140005A2 (de) * 1983-09-10 1985-05-08 Firma Carl Zeiss Vorrichtung zur Erzeugung einer Plasmaquelle mit hoher Strahlungsintensität in Röntgenbereich
US4715054A (en) * 1984-11-09 1987-12-22 Hitachi, Ltd. Plasma x-ray source
US4841556A (en) * 1986-03-07 1989-06-20 Hitachi, Ltd. Plasma X-ray source

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0037917A1 (en) * 1980-04-11 1981-10-21 International Business Machines Corporation Flash X-ray source
EP0140005A2 (de) * 1983-09-10 1985-05-08 Firma Carl Zeiss Vorrichtung zur Erzeugung einer Plasmaquelle mit hoher Strahlungsintensität in Röntgenbereich
US4715054A (en) * 1984-11-09 1987-12-22 Hitachi, Ltd. Plasma x-ray source
US4841556A (en) * 1986-03-07 1989-06-20 Hitachi, Ltd. Plasma X-ray source

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
INSTRUMENTS & EXPERIMENTAL TECHNIQUES, Band 31, Nr. 1, Januar/Februar 1988, Seiten 221-223, New York, US; R.B. BAKSHT et al.: "Compact plasma source of soft X-rays" *

Also Published As

Publication number Publication date
EP0387838A2 (de) 1990-09-19
DE3908480C1 (enrdf_load_stackoverflow) 1990-08-09

Similar Documents

Publication Publication Date Title
DE3889649T2 (de) Ätzverfahren und -gerät.
DE2463431C2 (enrdf_load_stackoverflow)
EP0839436B1 (de) Verfahren zum betreiben eines beleuchtungssystems und dafür geeignetes beleuchtungssystem
DE69809943T2 (de) Glimmentladungs-plasmavorrichung
EP1260196B1 (de) Beleuchtungsvorrichtung
BR8502757A (pt) Metodo e processo de fabricacao de estrutura de desprendimento de metais com niveis multiplos atraves do uso de polimeros despolimerizaveis
DE3102174A1 (de) Plasmareaktionsvorrichtung zur behandlung von halbleitern u.dgl.
EP0140005A2 (de) Vorrichtung zur Erzeugung einer Plasmaquelle mit hoher Strahlungsintensität in Röntgenbereich
MY8600180A (en) Radiation polymerizable composition for forming heat-resistant relief structures on electrical devices such as semiconductors and capacitors
DE69014098T2 (de) Strahlungsaussendende paneele und anzeigeanordnungen.
EP0378608A1 (de) Vorrichtung zur erzeugung von ozon.
MX165683B (es) Dispositivo de carga
DE69714426T2 (de) Sterilisationsvorrichtung
EP0387838A3 (de) Vorrichtung zur Erzeugung einer Plasmaquelle hoher Strahlungsintensität im Röntgenbereich
DE102009003811A1 (de) Parabollampe mit Kurzlichtbogen-Hochleistungsentladungslichtquelle und Ausschnitt im Aluminium um Überschlagbildung zu verhindern
DE2110323A1 (de) Vorrichtung zur Prüfung von Material mit Hilfe von Röntgenfluoreszenz
ES2024303A6 (es) Indicador de intensidad de campo para inspeccion de particulas magneticas.
DE102017000571B3 (de) Led-leuchtenmodul und verfahren zu dessen herstellung
DE3014151C2 (de) Generator für gepulste Elektronenstrahlen
CH667947A5 (de) Wellenleiterlaser.
AR226767A1 (es) Composiciones fluidas,homogeneas y conformables para fabricar laminas,filamentos o hilos,procedimiento para obtenerlas y procedimiento de conformacion de dichas soluciones
DE2048862C3 (de) Vorrichtung zur spektralphotometrischen Analyse
DE4036122A1 (de) Koronaentladungs-lichtquellenzelle
DE615732C (de) Elektrische Gasentladungslampe ohne Innenelektrode, deren Gas- oder Dampffuellung durch Fernwirkung eines Hochfrequenzfeldes zum Leuchten gebracht wird
ES540431A0 (es) Metodo con su aparato correspondiente para el tratamiento detejidos con liquido

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT CH DE FR GB IT LI NL

17P Request for examination filed

Effective date: 19901228

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT CH DE FR GB IT LI NL

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 19911116