EP0387838A3 - Appareil pour produire un plasma avec un rayonnement plus intense dans la région des rayons X - Google Patents
Appareil pour produire un plasma avec un rayonnement plus intense dans la région des rayons X Download PDFInfo
- Publication number
- EP0387838A3 EP0387838A3 EP19900104819 EP90104819A EP0387838A3 EP 0387838 A3 EP0387838 A3 EP 0387838A3 EP 19900104819 EP19900104819 EP 19900104819 EP 90104819 A EP90104819 A EP 90104819A EP 0387838 A3 EP0387838 A3 EP 0387838A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrodes
- plasma source
- producing
- insulator
- radiation intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000005855 radiation Effects 0.000 title 1
- 239000012212 insulator Substances 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
- H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Plasma Technology (AREA)
- X-Ray Techniques (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3908480 | 1989-03-15 | ||
DE19893908480 DE3908480C1 (fr) | 1989-03-15 | 1989-03-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0387838A2 EP0387838A2 (fr) | 1990-09-19 |
EP0387838A3 true EP0387838A3 (fr) | 1991-05-15 |
Family
ID=6376421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19900104819 Withdrawn EP0387838A3 (fr) | 1989-03-15 | 1990-03-14 | Appareil pour produire un plasma avec un rayonnement plus intense dans la région des rayons X |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0387838A3 (fr) |
DE (1) | DE3908480C1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19753696A1 (de) * | 1997-12-03 | 1999-06-17 | Fraunhofer Ges Forschung | Vorrichtung und Verfahren zur Erzeugung von Extrem-Ultraviolettstrahlung und weicher Röntgenstrahlung aus einer Gasentladung |
CN101065999B (zh) * | 2004-11-29 | 2011-04-06 | 皇家飞利浦电子股份有限公司 | 用于产生波长范围从大约1nm至大约30nm的辐射并在光刻装置或计量学中使用的方法和设备 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0037917A1 (fr) * | 1980-04-11 | 1981-10-21 | International Business Machines Corporation | Source de flash à rayon-X |
EP0140005A2 (fr) * | 1983-09-10 | 1985-05-08 | Firma Carl Zeiss | Appareil pour produire un plasma avec un rayonnement plus intense dans la region des rayons X |
US4715054A (en) * | 1984-11-09 | 1987-12-22 | Hitachi, Ltd. | Plasma x-ray source |
US4841556A (en) * | 1986-03-07 | 1989-06-20 | Hitachi, Ltd. | Plasma X-ray source |
-
1989
- 1989-03-15 DE DE19893908480 patent/DE3908480C1/de not_active Expired - Fee Related
-
1990
- 1990-03-14 EP EP19900104819 patent/EP0387838A3/fr not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0037917A1 (fr) * | 1980-04-11 | 1981-10-21 | International Business Machines Corporation | Source de flash à rayon-X |
EP0140005A2 (fr) * | 1983-09-10 | 1985-05-08 | Firma Carl Zeiss | Appareil pour produire un plasma avec un rayonnement plus intense dans la region des rayons X |
US4715054A (en) * | 1984-11-09 | 1987-12-22 | Hitachi, Ltd. | Plasma x-ray source |
US4841556A (en) * | 1986-03-07 | 1989-06-20 | Hitachi, Ltd. | Plasma X-ray source |
Non-Patent Citations (1)
Title |
---|
INSTRUMENTS & EXPERIMENTAL TECHNIQUES, Band 31, Nr. 1, Januar/Februar 1988, Seiten 221-223, New York, US; R.B. BAKSHT et al.: "Compact plasma source of soft X-rays" * |
Also Published As
Publication number | Publication date |
---|---|
DE3908480C1 (fr) | 1990-08-09 |
EP0387838A2 (fr) | 1990-09-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT CH DE FR GB IT LI NL |
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17P | Request for examination filed |
Effective date: 19901228 |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): AT CH DE FR GB IT LI NL |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 19911116 |