EP0387838A3 - Appareil pour produire un plasma avec un rayonnement plus intense dans la région des rayons X - Google Patents

Appareil pour produire un plasma avec un rayonnement plus intense dans la région des rayons X Download PDF

Info

Publication number
EP0387838A3
EP0387838A3 EP19900104819 EP90104819A EP0387838A3 EP 0387838 A3 EP0387838 A3 EP 0387838A3 EP 19900104819 EP19900104819 EP 19900104819 EP 90104819 A EP90104819 A EP 90104819A EP 0387838 A3 EP0387838 A3 EP 0387838A3
Authority
EP
European Patent Office
Prior art keywords
electrodes
plasma source
producing
insulator
radiation intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19900104819
Other languages
German (de)
English (en)
Other versions
EP0387838A2 (fr
Inventor
Franz Richter
Willi Neff
Jürgen Eberle
Rainer Lebert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karl Suess KG Prazisionsgerate fur Wissenschaft und Industrie - & Co GmbH
Original Assignee
Karl Suess KG Prazisionsgerate fur Wissenschaft und Industrie - & Co GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Karl Suess KG Prazisionsgerate fur Wissenschaft und Industrie - & Co GmbH filed Critical Karl Suess KG Prazisionsgerate fur Wissenschaft und Industrie - & Co GmbH
Publication of EP0387838A2 publication Critical patent/EP0387838A2/fr
Publication of EP0387838A3 publication Critical patent/EP0387838A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Plasma Technology (AREA)
  • X-Ray Techniques (AREA)
EP19900104819 1989-03-15 1990-03-14 Appareil pour produire un plasma avec un rayonnement plus intense dans la région des rayons X Withdrawn EP0387838A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3908480 1989-03-15
DE19893908480 DE3908480C1 (fr) 1989-03-15 1989-03-15

Publications (2)

Publication Number Publication Date
EP0387838A2 EP0387838A2 (fr) 1990-09-19
EP0387838A3 true EP0387838A3 (fr) 1991-05-15

Family

ID=6376421

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19900104819 Withdrawn EP0387838A3 (fr) 1989-03-15 1990-03-14 Appareil pour produire un plasma avec un rayonnement plus intense dans la région des rayons X

Country Status (2)

Country Link
EP (1) EP0387838A3 (fr)
DE (1) DE3908480C1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19753696A1 (de) 1997-12-03 1999-06-17 Fraunhofer Ges Forschung Vorrichtung und Verfahren zur Erzeugung von Extrem-Ultraviolettstrahlung und weicher Röntgenstrahlung aus einer Gasentladung
CN101065999B (zh) * 2004-11-29 2011-04-06 皇家飞利浦电子股份有限公司 用于产生波长范围从大约1nm至大约30nm的辐射并在光刻装置或计量学中使用的方法和设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0037917A1 (fr) * 1980-04-11 1981-10-21 International Business Machines Corporation Source de flash à rayon-X
EP0140005A2 (fr) * 1983-09-10 1985-05-08 Firma Carl Zeiss Appareil pour produire un plasma avec un rayonnement plus intense dans la region des rayons X
US4715054A (en) * 1984-11-09 1987-12-22 Hitachi, Ltd. Plasma x-ray source
US4841556A (en) * 1986-03-07 1989-06-20 Hitachi, Ltd. Plasma X-ray source

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0037917A1 (fr) * 1980-04-11 1981-10-21 International Business Machines Corporation Source de flash à rayon-X
EP0140005A2 (fr) * 1983-09-10 1985-05-08 Firma Carl Zeiss Appareil pour produire un plasma avec un rayonnement plus intense dans la region des rayons X
US4715054A (en) * 1984-11-09 1987-12-22 Hitachi, Ltd. Plasma x-ray source
US4841556A (en) * 1986-03-07 1989-06-20 Hitachi, Ltd. Plasma X-ray source

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
INSTRUMENTS & EXPERIMENTAL TECHNIQUES, Band 31, Nr. 1, Januar/Februar 1988, Seiten 221-223, New York, US; R.B. BAKSHT et al.: "Compact plasma source of soft X-rays" *

Also Published As

Publication number Publication date
DE3908480C1 (fr) 1990-08-09
EP0387838A2 (fr) 1990-09-19

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