EP0382603B1 - Procédé d'usinage par rectification comportant des mesures d'une meule de forme et machine le mettant en oeuvre - Google Patents
Procédé d'usinage par rectification comportant des mesures d'une meule de forme et machine le mettant en oeuvre Download PDFInfo
- Publication number
- EP0382603B1 EP0382603B1 EP90400276A EP90400276A EP0382603B1 EP 0382603 B1 EP0382603 B1 EP 0382603B1 EP 90400276 A EP90400276 A EP 90400276A EP 90400276 A EP90400276 A EP 90400276A EP 0382603 B1 EP0382603 B1 EP 0382603B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- machine
- grinding
- grinding wheel
- machining
- checking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 20
- 239000011888 foil Substances 0.000 claims description 33
- 238000003754 machining Methods 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 239000012777 electrically insulating material Substances 0.000 claims description 2
- 239000011159 matrix material Substances 0.000 claims description 2
- 238000012546 transfer Methods 0.000 claims description 2
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000523 sample Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 240000008042 Zea mays Species 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/06—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
- B24B53/08—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels controlled by information means, e.g. patterns, templets, punched tapes or the like
Definitions
- the present invention relates to a method of machining by grinding using a grinding wheel, in particular for the finishing of grooves or teeth.
- the invention also relates to a machine for machining by rectification used for the implementation of said method.
- US-A-4,295,301 and US-A-4,359,841 describe a method and means for dressing a grinding wheel associated with the detection of grinding wheel wear by means of a probe contact sensor.
- devices are also known for geometrical control of the contours of parts, in particular using laser means, for example according to US-A-4,158,507 or EP-A-0 195 405.
- a machine to be machined by grinding allowing an advantageous implementation of said process and comprising a workpiece holder assembly, a tool holder assembly and a set of control and sharpening of the grinding wheel, the three sets being connected to an integrated computer control system is characterized in that the control and sharpening assembly of the grinding wheel comprises means -supports of a foil on which the grinding wheel is capable of forming the imprint of its own profile and a control head comprising means of geometric control of the contour of said imprint.
- said control head comprises a laser diode which emits a laser beam directed by a first optical device on the contour of said foil imprint to form through a second optical device an image of the imprint on a sensitive plate, said image being analyzed by the computer.
- the foil support means consist of two plates of electrically insulating material whose face tightened on the foil comprises an electroconductive coating and the control head comprises an electroconductive wire connected to a potential source, the electroconductive face of said foil support being connected to an input of the computer so as to transmit to the computer a signal corresponding to the contact between said wire and tinsel at the level of the imprint whose coordinates are thus noted.
- a third advantageous embodiment making it possible in particular to reduce the control times, provides for a control head comprising an optical profilometer of the type known which gives a profile of the fingerprint profile by photodetection.
- the machine schematically represented in FIG. 1 is intended in particular for machining by rectification of grooves or teeth by means of a grinding wheel 1, in particular on aeronautical parts for which the severe acceptance criteria impose frequent dimensional control of the grinding wheel and of the sharpening of the grinding wheel from which arises an obligation to integrate the dimension of the grinding wheel in the control parameters of the operation of rectification of parts on the machine.
- Said machine is composed, in the example shown in the drawings and according to a principle known per se, of a workpiece holder assembly 2, of a tool holder assembly 3 and of a control and sharpening assembly 4 of the grinding wheel 1.
- the workpiece holder assembly 2 comprises, placed on a base 5, on the one hand, a support 6 of a part such as 7 comprising in particular grooves to be rectified and, on the other hand, a plate 8 associated with means 9 for clamping the part 7, said plate 8 being secured to a spindle associated with rotation drive means 10 making it possible in particular to obtain the angular indexing of the part 7.
- the support 6 piece is mounted on a table 6a movable in a longitudinal direction indicated by the arrow Z3.
- the tool holder assembly comprises, arranged in the same way on a base 11, on the one hand, a connection and connection assembly 12 to the various power sources of the machine, in electricity 13, in oil 14, in air 15 and a link 16 to the central control and calculation unit 17 and, on the other hand, a double carriage 18 with crossed movements, the lower element 19 of which can move relative to the base 11 in two perpendicular, longitudinal directions , indicated by arrow Z2 and transverse indicated by arrow X1.
- Said lower element 19 carries on the one hand, a carriage 20 movable in a longitudinal direction indicated by arrow Z1 and which carries the grinding wheel of form 1 used for the rectification of splines of the part 7 and, on the other hand, a measuring device 21 comprising a measuring sensor 22 retractable in the longitudinal direction indicated by the arrow Z4 and carrying a feeler device 23.
- the e nsemble 4 for controlling and sharpening the grinding wheel comprises a support frame 24 which carries two superimposed tables with crossed movements, a lower table 25 movable in a direction transverse to the machine indicated by arrow X2 and an upper table 26 movable according to a vertical direction indicated by the arrow Y and which carries at its lower end a device 27 for sharpening a grinding wheel and at its upper end a device 28 for supporting a foil 29 arranged in a strip between two rods 30 and 31 of reel.
- a support arm 32 integral with the control and sharpening assembly 4 carries a control head 33 capable of cooperating with the foil 29 for its control, in a manner which will be described later.
- FIG. 1 represents the first step (a) consisting of a calibration of the geometric measuring probe 23 connected to the measuring sensor 22 integrated in the machine.
- step (b) of measuring the axial positioning of the part, by means of said probe 23 and sensor 22, as shown in FIG. 1a.
- step (c) we then proceed, as shown in Figure 1b to the angular orientation of the part 7, in a third step (c).
- step (d) after retraction of the sensor 22 and positioning of the grinding wheel 1, the grooves of the part 7 are machined by finishing by rectification.
- an imprint 34 is produced during the sixth step (f), the contour of which reproduces the profile of the grinding wheel 1 on the foil 29, as shown in FIGS. 1e and 2, said grinding wheel 1 being moved towards the foil 29 in the plane of said foil, as symbolized by the arrow 35 in FIG. 2.
- the contour of the imprint 34 obtained in the previous step on the foil 29 and which consequently reproduces the profile of the grinding wheel of form 1.
- the grinding wheel 1 is sharpened , using the sharpening device 27.
- control head 33 used in the seventh step (g) to carry out the control of the imprint 34, according to FIG. 1f can be carried out according to several embodiments including two examples adapted to the implementation of the process in accordance with invention will be described.
- said control head 33 comprises an optical system 36 composed of a laser diode 37, of an optical focusing device 38, d an optical recovery device 39 beyond the foil 29 and a sensitive plate 40, for example with a network of the charge transfer type and with a matrix structure.
- the movement of the control head 33 relative to the foil 29, according to the movements of the arm 32 along two perpendicular axes X transverse to the machine and Y vertical and controlled by the calculation unit or computer 17 makes it possible to follow the contour of the 'imprint 34 made in the foil 29 by the grinding wheel 1 in the previous step.
- the image of the light spot 41 obtained on the sensitive network plate 40 in digitized form is reproduced at 41a by the screen 42 of the computer which performs the image processing and the analysis of the fingerprint. where result the geometric data in coordinates of the profile of the grinding wheel 1.
- control data of the grinding wheel 1 are integrated by the computer 17 into the machine control program and serve in particular as a reference for carrying out the following step d automatic sharpening of the grinding wheel 1, the new geometrical dimensions of the grinding wheel 1 being then taken into account for the following operations of rectification of the grooves of a new part 7.
- FIG. 4a, 4b A second embodiment of a control head 133 used during the seventh step (g) to carry out the control of the contour of the imprint 34 on the foil 29 corresponding to the profile of the grinding wheel 1, in the implementation of the method according to the invention, is shown in Figures 4a, 4b.
- the elements identical to those which were used in the first embodiment described with reference to FIGS. 1 to 3f will keep the same references and the analogous elements will have a reference increased by a hundred.
- a support arm 132 which is now made of electrical insulating material, for example of plastic material of the bakelite type and remains as previously secured to the control and sharpening assembly 4 and capable of being moved along two perpendicular axes.
- the control head 133 at the end of the arm 132 comprises an electric conductive wire 43, stretched between two elements 44 and 45, forming two fingers spaced apart at the end of the arm 132.
- the finger 45 carries on its internal face situated opposite the finger 44 a plate 46 in which a hole is made metallized 47 through which the wire 43 passes.
- a source of potential 48 for example 5 volts, to which the wire 43 is connected.
- the foil strip 29 stretched between the s support rods 30 and 31 is immobilized, as shown in FIG.
- the operation of the fingerprint control device 34 on the foil 29 is as follows, in this second embodiment.
- the arm 132 carrying the control head 133 is moved until the wire 43 comes into contact with the foil 29 at the level of the imprint 34.
- the wire being brought to potential, for example 5 volts, by the source 48, the foil 29 and the copper-colored faces 50a and 51a of the plates 50 and 51 are brought to the same potential during the contact between wire 43 and foil 29.
- the variation in potential is detected by the computer 17 by means of an electroconductive connection established between the part copper plate and an input interface of the computer 17 which simultaneously records the coordinates X and Y corresponding consequently to a point of the profile of impression 34 and of the profile of the grinding wheel 1.
- the data for controlling the profile of the grinding wheel 1 are again used to control the next step of automatic sharpening of the grinding wheel in the eight me step (g) of the method according to the invention as well as to serve as tool reference dimensions for the following operation of rectification of the grooves of a part 7, intervening in particular in the fourth step (d) of the method d machining by rectification according to the invention.
- the operation of the control head 133 which has just been described also includes a safety provision.
- the arm 132 continues to advance and the wire 43 pressing on the imprint 34 of the foil 29 is deflected, the wire 43 touches then the edge of the metallized hole 47 of the plate 46, allowing the advance of the arm 132 to stop and thus detecting the malfunction when, during normal operation, the wire 43 is not in contact with the edges of the metallized hole 47.
- a control head 233 of a type known per se can be placed at the end of the arm 232 in order to obtain a reading of the profile of the imprint 34 made on the foil 29, as described above in step (g) of the rectification machining process according to the invention.
- the diagram in FIG. 8 indicates the known principle of an optical profilometer integrated into the control head 233 which can be used in particular to respond to time saving requirements in controlling the fingerprint 34.
- a laser diode 54 sends a beam focused by lenses 55, 56 onto the imprint 34 of the foil 29.
- the correct position of the focal point is obtained by displacement of a lens 56 controlled from a unit 57 which records the data corresponding measurement and receives from a photodetection device 58 the signal corresponding to the difference obtained on the path of the beams through the divider 59, the lens 60 and the prism 61.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8901600 | 1989-02-08 | ||
FR8901600A FR2642693B1 (fr) | 1989-02-08 | 1989-02-08 | Procede d'usinage par rectification comportant des mesures d'une meule de forme et machine le mettant en oeuvre |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0382603A1 EP0382603A1 (fr) | 1990-08-16 |
EP0382603B1 true EP0382603B1 (fr) | 1992-06-17 |
Family
ID=9378579
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP90400276A Expired - Lifetime EP0382603B1 (fr) | 1989-02-08 | 1990-02-02 | Procédé d'usinage par rectification comportant des mesures d'une meule de forme et machine le mettant en oeuvre |
Country Status (6)
Country | Link |
---|---|
US (2) | US5042205A (ja) |
EP (1) | EP0382603B1 (ja) |
JP (1) | JPH074767B2 (ja) |
CA (1) | CA2009521C (ja) |
DE (1) | DE69000140T2 (ja) |
FR (1) | FR2642693B1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2710258C1 (ru) * | 2019-05-29 | 2019-12-25 | Федеральное государственное бюджетное учреждение науки Институт машиноведения им. А.А. Благонравова Российской академии наук (ИМАШ РАН) | Устройство для шлифования пазов дисков газотурбинных двигателей |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69119333T2 (de) * | 1990-09-20 | 1996-10-24 | Toyoda Machine Works Ltd | Werkzeugmaschine zum Schleifen eines Werkstückes mit einer Abdichtungsvorrichtung |
EP0512956B1 (fr) * | 1991-05-07 | 1994-09-07 | Voumard Machines Co. S.A. | Rectifieuse à commande numérique |
FR2691663B1 (fr) * | 1992-05-26 | 1996-10-11 | Essilor Int | Procede de ravivage de meules, disque et machine pour sa mise en óoeuvre. |
DE19625370C1 (de) * | 1996-06-25 | 1997-04-30 | Reishauer Ag | Schleifmaschine zum Schleifen von Stirnzahnrädern |
US6553880B2 (en) * | 1996-09-16 | 2003-04-29 | Sarcos, Lc | Micromachining system |
DE19648790C2 (de) * | 1996-11-26 | 2003-09-25 | Internat Tool Machines Of Flor | Werkzeugschleifmaschine |
DE19901338C1 (de) * | 1999-01-15 | 2000-03-02 | Reishauer Ag | Verfahren zum Profilieren von schnelldrehenden Schleifschnecken sowie Vorrichtung zur Durchführung des Verfahrens |
US6802759B1 (en) * | 1999-12-31 | 2004-10-12 | Voith Paper Holding Gmbh | Grinder |
US7104169B2 (en) * | 2002-10-17 | 2006-09-12 | Toyoda Koki Kabushiki Kaisha | Machine tool and bed structure thereof |
JP4923549B2 (ja) * | 2005-12-08 | 2012-04-25 | 株式会社ジェイテクト | 定寸装置の取付構造 |
EP2308866A1 (de) | 2009-10-09 | 2011-04-13 | Bayer CropScience AG | Phenylpyri(mi)dinylpyrazole und ihre Verwendung als Fungizide |
CN102335872B (zh) * | 2011-09-14 | 2013-04-03 | 桂林电子科技大学 | 基于人工神经网络的磨床砂轮自动修整方法和修整装置 |
CN103962914B (zh) * | 2014-04-21 | 2016-05-18 | 浙江石轴数控设备有限公司 | 一种球面滚子轴承内圈滚道磨床装置及其方法 |
JP7004262B2 (ja) * | 2016-02-09 | 2022-01-21 | グレバー アクイジション, エルエルシー | 研削ホイールのフィードバック型ドレッシング用システムおよび方法 |
CN108161742B (zh) * | 2018-01-29 | 2024-01-02 | 苏州温特金刚石滚轮有限公司 | 基于金刚石滚轮修整磨床的数字化检测系统 |
CN108747823B (zh) * | 2018-06-19 | 2020-08-11 | 湖南镭盛机电科技有限公司 | 一种自动复合砂轮修整机 |
CN108714854B (zh) * | 2018-06-19 | 2020-09-11 | 湖南镭盛机电科技有限公司 | 基于复映法的成形砂轮检测修整装置及砂轮整形方法 |
CN111823116A (zh) * | 2020-08-14 | 2020-10-27 | 柳州市中晶科技有限公司 | 一种金属管材加工用除锈抛光装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE359343C (de) * | 1922-09-22 | Konrad Schnell | Luftbereifung fuer Fahrzeuge | |
DE1111054B (de) * | 1955-06-15 | 1961-07-13 | Klingelnberg Soehne Ferd | Verfahren und Einrichtung zum Profilabrichten der Schleifscheiben zum Schleifen von Schnecken |
US3090171A (en) * | 1959-07-31 | 1963-05-21 | United Greenfield Corp | Surface measurement apparatus and control |
US3552374A (en) * | 1968-03-25 | 1971-01-05 | Brown & Sharpe Mfg | Grinding wheel dresser |
IT1078563B (it) * | 1976-10-01 | 1985-05-08 | Giardino Loris | Dispositivo elettronico di controllo per macchine rettificatrici basato sulla valutazione della posizione del diamante rispetto al pezzo |
US4158507A (en) * | 1977-07-27 | 1979-06-19 | Recognition Equipment Incorporated | Laser measuring system for inspection |
CH636034A5 (de) * | 1979-03-17 | 1983-05-13 | Maag Zahnraeder & Maschinen Ag | Abrichtgeraet fuer eine tellerfoermige schleifscheibe an einer zahnflankenschleifmaschine. |
US4359841A (en) * | 1979-11-08 | 1982-11-23 | Trw Inc. | Grinding wheel wear detection and dressing method |
US4295301A (en) * | 1979-11-08 | 1981-10-20 | Trw Inc. | Dressing apparatus with means for detecting grinding wheel wear |
JPS5892008A (ja) * | 1981-11-27 | 1983-06-01 | Amada Co Ltd | 研削盤の制御方法 |
CH654782A5 (de) * | 1982-03-19 | 1986-03-14 | Maag Zahnraeder & Maschinen Ag | Verfahren und vorrichtung zum kompensieren der abnuetzung eines zustellbaren schleifscheibenabrichtwerkzeuges. |
JPS59122209U (ja) * | 1983-02-07 | 1984-08-17 | 株式会社デイスコ | 切断機 |
JPS6033006A (ja) * | 1983-08-02 | 1985-02-20 | Toyoda Mach Works Ltd | 円筒型砥石車のツル−イング装置 |
US4634879A (en) * | 1985-03-21 | 1987-01-06 | General Electric Company | Method and system for determining surface profile information |
US4803871A (en) * | 1986-05-20 | 1989-02-14 | Hitachi, Ltd | Inspection device for inspecting projections on the surface of parts |
-
1989
- 1989-02-08 FR FR8901600A patent/FR2642693B1/fr not_active Expired - Lifetime
-
1990
- 1990-02-02 EP EP90400276A patent/EP0382603B1/fr not_active Expired - Lifetime
- 1990-02-02 DE DE9090400276T patent/DE69000140T2/de not_active Expired - Fee Related
- 1990-02-06 JP JP2027016A patent/JPH074767B2/ja not_active Expired - Lifetime
- 1990-02-07 US US07/476,778 patent/US5042205A/en not_active Expired - Fee Related
- 1990-02-07 CA CA002009521A patent/CA2009521C/fr not_active Expired - Fee Related
-
1991
- 1991-03-20 US US07/672,868 patent/US5072548A/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2710258C1 (ru) * | 2019-05-29 | 2019-12-25 | Федеральное государственное бюджетное учреждение науки Институт машиноведения им. А.А. Благонравова Российской академии наук (ИМАШ РАН) | Устройство для шлифования пазов дисков газотурбинных двигателей |
Also Published As
Publication number | Publication date |
---|---|
DE69000140T2 (de) | 1993-02-11 |
FR2642693A1 (fr) | 1990-08-10 |
CA2009521C (fr) | 1999-10-12 |
FR2642693B1 (fr) | 1991-04-19 |
US5072548A (en) | 1991-12-17 |
EP0382603A1 (fr) | 1990-08-16 |
JPH074767B2 (ja) | 1995-01-25 |
JPH02237755A (ja) | 1990-09-20 |
US5042205A (en) | 1991-08-27 |
DE69000140D1 (de) | 1992-07-23 |
CA2009521A1 (fr) | 1990-08-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0382603B1 (fr) | Procédé d'usinage par rectification comportant des mesures d'une meule de forme et machine le mettant en oeuvre | |
US5433649A (en) | Blade position detection apparatus | |
CN106903553B (zh) | 微径铣刀磨损检测方法 | |
EP0401351B1 (fr) | Procede et dispositif de mesure optique | |
US4074104A (en) | Opto-electronic position sensing method | |
EP0342123A1 (fr) | Procédé de positionnement d'un objet par rapport à un plan, procédé de mesure de longueur et dispositifs de mise en oeuvre de ces procédés | |
JPS63288658A (ja) | バリ取り用ロボット装置 | |
FR2624600A1 (fr) | Procede et dispositif de controle de contours geometriques sans contact | |
JPH066262B2 (ja) | 砥石車のツル−イング装置 | |
EP3338944B1 (fr) | Machine-outil présentant une configuration de montage avec outil en porte-à-faux | |
EP0141717A2 (fr) | Dispositif de positionnement pour robot | |
EP0077243A1 (fr) | Procédé de saisie de données représentatives de la forme d'un objet | |
FR2467384A1 (fr) | Procede et appareil pour controler la precision d'un contour usine dans une piece | |
EP1352708B1 (fr) | Procédé et machine pour meuler une lentille ophtalmique comportant une étape de relevé sans contact | |
EP0362029A1 (fr) | Procédé de détermination et de contrôle de la forme du bord d'un objet galbé | |
EP1892502B1 (en) | Surface position detector and laser beam processing machine | |
JP6687455B2 (ja) | 研削装置 | |
JP3074668B2 (ja) | ブレード変位検出装置 | |
FR2633748A1 (fr) | Procede et dispositif d'identification d'outil d'ecriture | |
JPH10177973A (ja) | ブレード変位検出装置 | |
EP0229557A1 (fr) | Procédé de positionnement réciproque d'une fibre optique et d'un laser semiconducteur, et appareil de positionnement mettant en oeuvre ce procédé | |
EP0101375B1 (fr) | Procédé et dispositif de détermination sans contact de la rugosité d'une surface | |
CH630186A5 (en) | Method for producing an electronic program usable on the machine tool | |
FR2620242A1 (fr) | Procede d'utilisation d'un robot d'ebavurage | |
JP2865336B2 (ja) | 半導体ウエハのスクライブ方法およびスクライブ装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19900219 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): BE DE FR GB IT SE |
|
17Q | First examination report despatched |
Effective date: 19911112 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): BE DE FR GB IT SE |
|
ITF | It: translation for a ep patent filed | ||
REF | Corresponds to: |
Ref document number: 69000140 Country of ref document: DE Date of ref document: 19920723 |
|
GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) | ||
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed | ||
EAL | Se: european patent in force in sweden |
Ref document number: 90400276.3 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: SE Payment date: 19960117 Year of fee payment: 7 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: BE Payment date: 19960207 Year of fee payment: 7 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SE Effective date: 19970203 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Effective date: 19970228 |
|
BERE | Be: lapsed |
Owner name: HISPANO-SUIZA Effective date: 19970228 |
|
EUG | Se: european patent has lapsed |
Ref document number: 90400276.3 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: IF02 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20020131 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20020206 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20020429 Year of fee payment: 13 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20030202 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20030902 |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee | ||
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20031031 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED. Effective date: 20050202 |