EP0379431A1 - Glas-Aluminium-Abdichtungsverfahren, insbesondere für eine elektrische Durchführung eines Gehäuses für Hybridschaltungen, entsprechend zusammengesetzter Gegenstand und Glaszusammensetzung - Google Patents

Glas-Aluminium-Abdichtungsverfahren, insbesondere für eine elektrische Durchführung eines Gehäuses für Hybridschaltungen, entsprechend zusammengesetzter Gegenstand und Glaszusammensetzung Download PDF

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Publication number
EP0379431A1
EP0379431A1 EP90400134A EP90400134A EP0379431A1 EP 0379431 A1 EP0379431 A1 EP 0379431A1 EP 90400134 A EP90400134 A EP 90400134A EP 90400134 A EP90400134 A EP 90400134A EP 0379431 A1 EP0379431 A1 EP 0379431A1
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EP
European Patent Office
Prior art keywords
approximately
vitreous
taken
combination
object according
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Granted
Application number
EP90400134A
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English (en)
French (fr)
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EP0379431B1 (de
Inventor
Paul Viret
Bernard Ledain
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Thales SA
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Dassault Electronique SA
Electronique Serge Dassault SA
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Publication of EP0379431A1 publication Critical patent/EP0379431A1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/32—Sealing leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/26—Lead-in insulators; Lead-through insulators
    • H01B17/30—Sealing
    • H01B17/303—Sealing of leads to lead-through insulators
    • H01B17/305—Sealing of leads to lead-through insulators by embedding in glass or ceramic material

Definitions

  • the invention relates to the sealing of a glassy material on a material comprising aluminum.
  • hybrid electronic circuits In addition to monolithic integrated circuits, hybrid electronic circuits are used, or more briefly "hybrid circuits". Their name comes from the fact that, on a ceramic substrate, they include monolithic integrated circuit chips, associated with discrete connections and components produced by metallic deposition on the ceramic.
  • the hybrid circuits, used by group are combined in a hybrid box.
  • a housing generally has a bottom, a cover and a plurality of electrical bushings located on at least one of these walls. In certain cases, it must be airtight both at the connection between the base and the cover and at the electrical bushings.
  • Each electrical bushing includes a conductive pin, generally made of KOVAR, hermetically fixed in a passage of the wall by a glass-metal seal well known to those skilled in the art.
  • the connection between the cover and the bottom is provided by a conventional electrical weld.
  • a “macrohybrid” box is a large hybrid box and its production in KOVAR, according to the aforementioned technique, has two major drawbacks, in particular when such boxes are used inside computers on board an aircraft.
  • the first of these drawbacks is linked to the density of the KOVAR which gives the macrohybrid housing a high mass which can become detrimental for the aforementioned use, the weight factor being particularly important in aeronautics.
  • the second drawback is linked to the poor thermal conductivity of KOVAR. Due to its size, a macrohybrid box generally contains a very large number of hybrid circuits (or a very large hybrid circuit) which, in operation, release the heat energy usually evacuated by the body of the box. However, this poor thermal conductivity of KOVAR harms good heat dissipation and can therefore cause degraded operations, or even breakdowns.
  • the main object of the present invention is therefore to provide a solution to this problem.
  • An object of the invention is to allow direct sealing of a vitreous material on a material comprising aluminum.
  • the invention relates to a composite part of the type comprising a wall and an insert mounted in a housing of said wall.
  • the wall is composed of an aluminum-based material and the insert comprises, at least on the periphery, a vitreous material directly sealed on at least a portion of the internal surface of the housing. Wall.
  • This part can for example be a macrohybrid box element or else a complete macrohybrid box, comprising a bottom hermetically closed by at least one cover.
  • the insert may also include a metallic element directly sealed within the vitreous material.
  • This metallic element may for example be a conductive pin passing right through the glassy material so as to form an electrical crossing through the wall.
  • the insert In order to ensure good sealing performance, it is advantageous for the insert to comprise a first effective quantity of a first metal oxide located in the vicinity of the wall of the housing. Adjusting the thickness of this oxide layer also influences the hermeticity of the seal.
  • the insert when it comprises a metallic element within it, it is advantageous that it also comprises a second effective quantity of a second metallic oxide located in the vicinity of this metallic element. This ensures better adhesion of this metallic element in the vitreous material and the adjustment of this quantity of oxide also influences the hermeticity of the seal.
  • the invention also relates to a method of implanting at least one insert in at least one housing of a wall made of a material comprising aluminum.
  • the dilatometric softening temperature of a vitreous material is a temperature for which this material has a viscosity of 1011 ⁇ 3 Poises.
  • the notion of compatibility between the vitreous material and the material of the wall relates here, in particular, to the relationship between the dilatometric softening temperature of this vitreous material and the melting temperature of the material of the wall. It also relates, in particular, to the comparison of the respective expansion coefficients of these two materials.
  • step b) comprises a sub-step b1), of forming the vitreous element of the insert from said powder, in the presence of a binder mixed with it; this sub-step b1) is followed by a sub-step of sintering this glassy element formed.
  • the housing can be a passage passing through the wall and the insert can then comprise a metallic element such as a pin passing right through the insert, which makes it possible to obtain an electrical crossing.
  • This wall can be an element of a macrohybrid housing.
  • the method further comprises a step of laser welding of the cover of the housing on the bottom of the latter.
  • the invention also relates to the composition of glass as that means capable of allowing the implementation of the implantation method according to the invention, this composition also being that of the glassy element of an insert of a composite part according to the invention.
  • phosphate glass is used, that is to say phosphate-based, as opposed to certain other types of glass, in particular lead-based or silica-based (used in conventional glass sealing -KOVAR).
  • a phosphate glass is not a "glass” in the strict sense, but in fact a partially crystalline ceramic glass. It will nevertheless be called here "glass-phosphate” in accordance with a dominant usage.
  • a phosphate glass having the following composition: - between approximately 20% and approximately 50% in moles of sodium oxide (Na2O), - between approximately 5% and approximately 30% in moles of barium oxide (BaO), - between approximately 0.5% and approximately 3% by mole of alumina (Al2O3) - between approximately 40% and approximately 60% by moles of phosphoric anhydride (P2O5).
  • the Applicant has found that it is preferable to add to the glass phosphate a crystallization modifying agent such as aluminum nitride (AlN) in an effective amount of less than approximately 7%. The reasons for this addition will be explained below.
  • a crystallization modifying agent such as aluminum nitride (AlN)
  • the glassy material must have a dilatometric softening temperature and an expansion coefficient compatible respectively with the melting temperature and the expansion coefficient of aluminum. It is therefore preferable to take a vitreous material having a dilatometric softening temperature comprised between approximately 300 ° C. and approximately 550 ° C. and a coefficient of expansion comprised between approximately 10 and approximately 25 ppm / ° C. (The notation ° C means degree Celsius and the notation ppm means part per millionth).
  • the implantation of an insert in a housing of a wall requires, before sealing, a step a) of preparation of the housing and a step b) of preparation of the insert; these two steps can be carried out independently of each other in an order any.
  • the insert comprises at the periphery a sintered vitreous element, obtained from a powder of a vitreous material of the type of those mentioned above.
  • This powder can result, for example, from the grinding of a continuous body.
  • Step b) of preparing such a vitreous element first consists in shaping it, in a sub-step b1), from the powder mixed with a binder. After removal of the binder, a sintering of the vitreous element is then carried out in a sub-step b2). The purpose of this sintering is to "stick" the glass grains to each other so as to obtain an insert whose consistency and consistency allow easy handling compatible with an industrial process.
  • the sintered peripheral element of the insert is an FFR sheath.
  • the powder P is obtained from a continuous body CC obtained in a sub-step 1 comprising the succession of operations illustrated in FIG. 2.
  • An intimate mixture (operation 10) of various powders of base constituents CB is produced in order to obtain a base powder PB.
  • a base powder PB For the production of this basic powder, 42.4 g of sodium carbonate (Na2CO3), 19.74 g of barium carbonate (BaCO3), 1.02 g of alumina (Al2O3), 112.73 g are used. of ammonium dihydrogen phosphate (NH4H2PO4), and 1.76 g of aluminum nitride (AlN).
  • the basic powder thus obtained is placed in an alumina crucible (operation 11) then calcined at 300 ° for 12 hours (operation 12) to remove ammonia and water. Then a grinding (operation 13) of the calcined product is carried out, followed by a cooking of the BRO ground material (operation 14) in order to obtain a vitreous substance SV.
  • This cooking 14 includes a rise in temperature of about one hour, at a rate of 750 ° C / hour, until reaching the temperature of 750 ° C, then a plateau at this temperature for 2 hours.
  • the glassy substance is then subjected to thermal quenching by pouring onto a KOVAR or stainless steel plate at 200 ° C. (operation 15).
  • the continuous body CC is then obtained containing approximately 38.35% in moles of Na2O, 9.59% in moles of BaO, 0.96% in moles of Al2O3, 46.98% in moles of P2O5, and 4.12% in moles of AlN.
  • Such a vitreous material then has a dilatometric softening temperature of approximately 330 ° C, a coefficient of expansion of approximately 20 ppm / ° C, and its melting temperature is approximately 600 ° C.
  • the powder P is then obtained from the continuous body CC in a sub-step 2 illustrated in detail in FIG. 3.
  • a binder LI optionally comprising a polycarbon compound having a chain length at least equal to 1500 and at most equal to 6000.
  • the polycarbon compound is polyethylene glycol 4000, therefore having by definition a chain length equal to 4000. Its quantity is 3% by weight.
  • the mixture thus obtained is ground for approximately 5 minutes in a pestle mill (operation 21).
  • the BROY ground material thus obtained is then sieved (operation 22) to obtain said powder P. By passing it through a sieve, this powder has a particle size between 75 and 106 micrometers.
  • This particle size should generally be greater than about 5 micrometers. Its upper limit is chosen according to the desired size of the glassy element of the insert.
  • the sub-step b1) of forming the sheath bears the reference 3, and is illustrated in detail in FIG. 4.
  • Operation 30 consists in introducing into a pressing mold, having a shape combined with that of the sheath to be obtained, a quantity of powder chosen taking into account the geometry of the sheath.
  • This mold comprises in particular a rod making it possible to produce a central channel in the sheath.
  • an intermediate sheath FI is obtained. It should be noted here that it is important to use an organic binder having a chain length greater than 1500 to ensure good consistency of the intermediate sheath.
  • This organic binder is then removed from the intermediate sheath by an oven 31, which in this embodiment is carried out at 200 ° C for 12 hours.
  • the binder is thus evacuated from the inside of the intermediate sheath towards the outside.
  • a scabbard formed FF is then obtained.
  • step 2 for obtaining the powder P does not include any addition of binder, and that the latter only intervenes in step 3 of obtaining the sheath formed FF, prior to the pressing operation 30.
  • the sintering sub-step b2) (reference 4) is generally carried out at a temperature located in the immediate vicinity of the dilatometric softening temperature of the glassy material, that is to say at a temperature where one begins to have softening of this material without deformation.
  • the sintering of the sheath formed FF (reference 4) is carried out in a PYREX cup (registered trademark) according to a temperature gradient of 20 ° C / min until reaching the temperature of 335 ° C.
  • Such a sintered sheath FF is shown in Figure 5. It consists of a cylinder with a length of about 1.9 mm, traversed longitudinally right through by a central channel CFF. The external diameter of this cylinder is approximately 1.3 mm while the diameter of the channel is approximately 0.6 mm.
  • the housing intended to receive the insert may have various configurations depending on the applications envisaged.
  • the housing is a passage through the wall. Step a) of preparation of this passage bears the reference 8 and is illustrated in FIG. 6. The passage obtained is illustrated in figure 7.
  • machining 80 of the passage is carried out. This is then made up, from the internal face FAI of the wall to its external face FAE, of two bores AL1, AL2.
  • the lengths of the bores AL1 and AL2 are respectively of the order of 0.50 mm and 2.50 mm. Their respective diameters are of the order of 1.2 mm and 1.35 mm.
  • the material of the PAR wall is an aluminum alloy called "5086" according to the French standard. Its melting temperature is between 580 ° C and 640 ° C and its coefficient of expansion is 23.5 ppm / ° C. Its composition is as follows: - about 4% by weight of magnesium - about 0.5% by weight of manganese - about 95.5% by weight of aluminum.
  • the wall is immersed in a bath of chromic acid in order to undergo an anodic chromic oxidation therein 81. It then deposits on the edges. of the passage NOT an alumina layer whose thickness is adjusted between approximately 1 micron and approximately 1.5 microns.
  • the adjustment of the thickness of the layer of this first metal oxide OX1 is an important element for the characteristics of the sealing and we will return later to the usefulness of the deposition of such a layer.
  • This PAS passage is intended to receive a conductive pin trice B, illustrated in FIG. 9, and the preparation step 9 of which is illustrated in FIG. 8.
  • a spindle B is machined in the form of an elongated cylinder with a length of approximately 9.75 mm, one end of which is extended by a rounded truncated cone having an apex angle of approximately 30 °.
  • Such a pin has a coefficient of expansion of 17.4 ppm / ° C and an electrical conductivity of 2.5.10 ⁇ 6 ohms.centimeter.
  • metallic materials having a coefficient of expansion between about 15 and about 20 ppm per ° C and an electrical conductivity between about 2.10 ⁇ 6 and about 10.10 ⁇ 6 ohms.centimeter.
  • This pin B will then undergo nickel plating 91 consisting of the deposition of a layer of nickel with a thickness of approximately 5 microns. This nickel plating is followed by air oxidation for 15 minutes in an oven at 490 ° C. Pin B is then found at the end of this oxidation step covered with nickel oxide OX2.
  • nickel oxide OX2 The presence of this second metal oxide OX2 is also an important element for the good behavior of the spindle within the insert and its usefulness will be explained later.
  • the assembly thus formed is brought into an oven in order to proceed to sealing 7 (FIG. 11) of the electrical bushing.
  • the sealing step according to the invention is carried out under a neutral atmosphere, in particular of nitrogen, by raising the baking temperature above the dilatometric softening temperature of the vitreous material constituting the sintered sheath according to a chosen temperature profile.
  • a temperature rise is first carried out with a gradian of 12 ° C. per minute (operation 700) and then a plateau at a cooking temperature equal to 450 ° C. for 50 minutes (operation 701). , then a temperature drop from this level with a gradian of 12 ° C per minute (operation 702).
  • This cooking therefore takes place in the presence of the first oxide metal between the sintered sheath and the wall and in the presence of the second metal oxide between the sheath and the conductive pin.
  • the presence of alumina between the sheath and the wall makes it possible to maintain the seal thus obtained by the interpenetration of the oxygen atoms of the alumina with the oxygen atoms belonging to the various oxides of the vitreous material.
  • the adjustment of the thickness of the alumina layer which therefore induces a first effective amount of this first metal oxide, plays an important role, not only in the strength of the seal, but also in its hermeticity.
  • a thickness of between approximately 1 and approximately 1.5 micrometers makes it possible in particular to obtain a vitreous material called "hermetically sealed".
  • the hermeticity is then less than or equal to 10 ⁇ 9 cm3.s ⁇ 1 of Helium for a pressure difference of 1 atmosphere on either side of a seal having a unit area of 1 cm2.
  • an effective amount of the first metal oxide is an amount which makes it possible to obtain a seal having a strength and hermeticity compatible with the intended application.
  • an oxide thickness of less than approximately 0.5 microns does not make it possible to obtain mechanical strength of the glass on the aluminum.
  • the maximum oxide thickness depends on the desired strength and hermeticity, it is preferable not to exceed 10 microns.
  • the presence of nickel oxide in an effective amount, between the spindle and the glassy material contributes to ensuring good adhesion of these two bodies by interpenetration of the oxygen atoms of the nickel oxide with those of the various glass oxides.
  • the 5 micron nickel layer deposited on the spindle leads, after oxidation, to a thickness of nickel oxide (about 3 microns) helping to ensure a hermetic seal.
  • a thickness of nickel oxide of between approximately 2 and approximately 5 microns makes it possible to obtain the hermeticity indicated above.
  • the sintered sheath conforms to the geometry of the passage, which makes it possible to obtain a direct simultaneous sealing, that is to say requiring no external material, from the spindle to the sheath and the scabbard on the wall.
  • This hermetic and electrically insulating seal provides the required electrical crossing ( Figure 12).
  • gilding 9 ′ For some applications, it may be necessary to perform on the pins, an additional treatment of gilding 9 ′, illustrated in FIG. 13.
  • This gilding will make it possible to obtain a BD pin partially gilded, that is to say gilded only on its internal and external parts located outside the vitreous sealing material.
  • the assembly In order to carry out such treatment, the assembly should be immersed in an electrolytic gilding bath (operation 90 ′).
  • the Applicant has observed that the use of phosphate glass does not require protecting the seal before it is immersed in the gilding bath.
  • vitreous material did not contain a crystallization modifying agent, it would be advisable to protect the seal, for example with a film of epoxy resin, before immersing the assembly in the gilding bath, because otherwise, the acid character of this bath would lead to a more or less significant degradation of the vitreous material of the seal.
  • the sealing step 7 would comprise, after the cooking operation 70, annealing the sealing in order to ensure growth of the crystals. The gilding of the pins is then carried out after annealing.
  • Figures 14A to 14C are arranged according to the conventional conventions of French industrial design, Figure 14B being more particularly section AA of Figure 14A, while Figure 14C partially includes section BB of Figure 14A.
  • the BO case is substantially rectangular with a length of approximately 70 mm and a width of approximately 50 mm.
  • This box comprises a bottom FD having two lateral edges BL1 and BL2 as well as a central part PCFD extending in the longitudinal direction of the housing between two lateral edges.
  • An intermediate edge BIN is formed in a region of the central part PCFD. This edge BIN extends substantially perpendicularly to the lateral edge BL1 and is then folded back to square substantially parallel to the lateral edge BL2.
  • the box BO is closed on the one hand by a first cover COUV1 extending between the intermediate edge BIN and the edges BL1 and BL2 forming an L. It is closed on the other hand by a second cover COUV2 disposed on the other side of the central part PCF2 between the lateral edges BL1 and BL2.
  • a first cover COUV1 extending between the intermediate edge BIN and the edges BL1 and BL2 forming an L.
  • a second cover COUV2 disposed on the other side of the central part PCF2 between the lateral edges BL1 and BL2.
  • the material making up the bottom of the case comprises an aluminum alloy called "5086".
  • the material constituting the two lids of the housing is an aluminum alloy known as "4047" according to French standard. It is made up of around 12% silicon and around 88% aluminum.
  • the glassy material sealing each spindle to the wall consists of phosphate glass, the various components and their quantity ranges as well as the forks the dilatometric softening temperature and the expansion coefficient have been defined above.
  • the glassy material comprises approximately 38.35% in moles of Na2O, 9.59% in moles of BaO, 0.96% in moles of Al2O3, 46.98% in moles of P2O5, and 4, 12 mole% AlN.
  • It can also contain, as crystallization modifying agent, platinum in an effective amount and less than 0.5 mol%.
  • the first metal oxide (alumina) located in the vicinity of the wall in an effective amount of between about 0.5% by weight and about 0.8% by weight.
  • the sealed vitreous material comprises in the vicinity of the spindle (copper-beryllium alloy) the second metal oxide (nickel oxide) in an effective amount of between approximately 0.6% by weight and approximately 1.5% by weight.
  • vitreous material directly sealed on aluminum will comprise an amount of alumina at least equal to 0.2% by weight.
  • the maximum amount will preferably be of the order of 10% by weight.
  • the parts of the spindle located outside the sealed vitreous material are golden.
  • the different covers and the bottom are assembled using laser welding, thus ensuring airtightness required.
  • the respective alloys of the bottom and the covers were chosen to allow such welding.
  • two aluminum-based materials can be laser welded if each of them is free of copper and if at least one of the two contains silicon.
  • a working temperature zone in which the glass has a viscosity allowing it to be deformed while retaining a certain consistency.
  • the lower temperature of this working zone is the dilatometric softening temperature and the upper temperature is that for which the vitreous material has a viscosity of 104 poises.
  • the phosphate glass comprises an agent modifying its working area which tends to increase the latter. Indeed, the larger this working area, the less critical are the details on the different temperatures used in the steps of the method according to the invention. This contributes in particular to further improving the reproducibility and consequently to an even easier industrialization of the process.
  • This modifying agent for the working area is, for example, boron trioxide (B2O3) in an amount less than about 15 mol%.
  • composition of such a glassy material is the next one : - 35% in moles of Na2O - 8.75% in moles of BaO - 0.87 mole% of Al2O3 - 42.88% in moles of P2O5 - 3.75% in moles of AlN - 8.75% in moles of B2O3.
  • Such a vitreous material then has a dilatometric softening temperature of approximately 475 ° C. and a coefficient of expansion of approximately 16 ppm / ° C. Its working area is between around 475 ° C and 550 ° C and its melting temperature is around 700 ° C.
  • the cooking of the BRO ground material (operation 14) making it possible to obtain the vitreous substance SV involves a rise in temperature of about one hour at a rate of 1100 ° C./hours then a level at 1100 ° C for 2 hours and finally a drop in temperature for about 30 minutes until reaching the temperature of about 850 ° C.
  • the sintering step of the vitreous material (reference 4) is carried out in a PYREX dish according to a temperature gradient of 20 ° C / min until reaching the temperature of 470 ° C.
  • the sealing step first includes a temperature rise with a gradient of 12 ° C per minute (operation 700) then a plateau at a cooking temperature equal to 525 ° C for 15 min (operation 701) then a descent in temperature from this level with a gradient of 12 ° C per minute (operation 702).
  • the invention is not limited to the embodiments and embodiments described above, but embraces all variants, in particular the following: - It is conceivable that the spindle is replaced, in other applications, by another metallic element, at least; - the presence of the first and second metal oxides is only necessary at the level of the seal. Also, it is possible to envisage carrying out partial oxidations of the metallic element and of the housing only in the useful zones; - one could also conceive, in certain applications requiring only a direct sealing "spindle- glass "without good mechanical strength and airtightness being important factors, to perform this sealing without the presence of metal oxide between the spindle and the glassy material.
  • step 3 it is possible, in step 3, to replace the rod of the pressing tool, used to shape the central channel of the sleeve, by the spindle itself.
  • a composite insert is obtained at the periphery of the sleeve, and at the center of the spindle, which after removal of the binder and sintering becomes an element ready to be introduced into the passage of the wall.
  • This variant makes it possible to limit the various centering and positioning tools used previously.
  • the second metal oxide will have been deposited on the spindle before the formation of the single element.
  • sheath of such an insert obtained after pressing, or, after removal of the binder, sintered at a temperature higher than the sintering temperature previously indicated so as to further increase its consistency.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Glass Compositions (AREA)
  • Connections Arranged To Contact A Plurality Of Conductors (AREA)
EP90400134A 1989-01-20 1990-01-17 Glas-Aluminium-Abdichtungsverfahren, insbesondere für eine elektrische Durchführung eines Gehäuses für Hybridschaltungen, entsprechend zusammengesetzter Gegenstand und Glaszusammensetzung Expired - Lifetime EP0379431B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8900709A FR2642257B1 (fr) 1989-01-20 1989-01-20 Procede de scellement verre-aluminium, notamment pour traversee electrique de boitier de circuit hybride, objet composite et composition de verre correspondants
FR8900709 1989-01-20

Publications (2)

Publication Number Publication Date
EP0379431A1 true EP0379431A1 (de) 1990-07-25
EP0379431B1 EP0379431B1 (de) 1994-10-05

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EP90400134A Expired - Lifetime EP0379431B1 (de) 1989-01-20 1990-01-17 Glas-Aluminium-Abdichtungsverfahren, insbesondere für eine elektrische Durchführung eines Gehäuses für Hybridschaltungen, entsprechend zusammengesetzter Gegenstand und Glaszusammensetzung

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US (1) US5538527A (de)
EP (1) EP0379431B1 (de)
CA (1) CA2008297C (de)
DE (1) DE69013017D1 (de)
FR (1) FR2642257B1 (de)
IL (1) IL93101A (de)

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DE102006004036A1 (de) * 2006-01-27 2007-08-09 Schott Ag Metall-Fixiermaterial-Durchführung und Verwendung einer derartigen Durchführung sowie Airbag und Gurtspanner mit einer Zündeinrichtung
US8733250B2 (en) * 2006-01-27 2014-05-27 Schott Ag Metal-sealing material-feedthrough and utilization of the metal-sealing material feedthrough with an airbag, a belt tensioning device, and an ignition device
JP4856025B2 (ja) * 2007-08-10 2012-01-18 セイコーインスツル株式会社 気密端子の製造方法及び気密端子、圧電振動子の製造方法及び圧電振動子、発振器、電子機器、電波時計
DE102010045641A1 (de) 2010-09-17 2012-03-22 Schott Ag Verfahren zur Herstellung eines ring- oder plattenförmigen Elementes
US10684102B2 (en) 2010-09-17 2020-06-16 Schott Ag Method for producing a ring-shaped or plate-like element
FR3036396B1 (fr) 2015-05-22 2020-02-28 Axon Cable Composition de verre pour le scellement de connecteur micro-d

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IL93101A (en) 1994-07-31
CA2008297C (en) 1995-08-01
EP0379431B1 (de) 1994-10-05
IL93101A0 (en) 1990-11-05
FR2642257B1 (fr) 1996-05-24
DE69013017D1 (de) 1994-11-10
FR2642257A1 (fr) 1990-07-27
US5538527A (en) 1996-07-23
CA2008297A1 (en) 1990-07-20

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