EP0378163B1 - Gaede'sche Vakuumpumpe - Google Patents

Gaede'sche Vakuumpumpe Download PDF

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Publication number
EP0378163B1
EP0378163B1 EP90100362A EP90100362A EP0378163B1 EP 0378163 B1 EP0378163 B1 EP 0378163B1 EP 90100362 A EP90100362 A EP 90100362A EP 90100362 A EP90100362 A EP 90100362A EP 0378163 B1 EP0378163 B1 EP 0378163B1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
hemispherical
delivery
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90100362A
Other languages
English (en)
French (fr)
Other versions
EP0378163A3 (en
EP0378163A2 (de
Inventor
Sébastien Frindel
Luc Mathieu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to AT90100362T priority Critical patent/ATE94620T1/de
Publication of EP0378163A2 publication Critical patent/EP0378163A2/de
Publication of EP0378163A3 publication Critical patent/EP0378163A3/fr
Application granted granted Critical
Publication of EP0378163B1 publication Critical patent/EP0378163B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the present invention relates to a vacuum pump of the Ga ⁇ de channel type comprising a stator and a rotor driven in rotation inside the stator, the stator comprising a suction inlet and a discharge outlet.
  • the rotor has the shape of a disc or a cylinder of revolution or a cone and its surface is provided with at least one helical groove and the surface of the stator facing it, is smooth or so, which is more often the case, it is the opposite, the surface of the rotor being smooth and that of the stator carrying the grooves.
  • the two facing surfaces carry such grooves. These grooves generally have a depth which decreases in the direction of the suction towards the discharge.
  • German document DE-C-912 007 describes a pump of this type but with a spherical rotor. This is quite interesting because the spherical surfaces can be produced with very high precision greater than a thousandth of a millimeter, by milling with a milling cutter or cup wheel, or by molding, and therefore reducing the operating clearances.
  • the present invention aims to improve a pump of this type by increasing its compression ratio.
  • the subject of the invention is therefore a vacuum pump of the ga ⁇ de channel type comprising a stator and a rotor driven in rotation inside the stator, the stator comprising a suction inlet and a discharge outlet, characterized in that that said rotor, in its active part situated between the suction and the discharge, consists of two hemispherical parts joined by a cylindrical central part, disposed in a cavity of the rotor also comprising two hemispherical cavities connected by an intermediate portion corresponding to the cylindrical part of the rotor and through which the intake takes place, the center of each hemispherical part of the rotor being offset from the center of the corresponding hemispherical cavity of the stator so that the radial clearance at suction j a , at the level of the large circle of hemispheres, ie greater than the radial clearance at discharge j r located, for each hemisphere, in the vicinity of the top of the hemisphere, the axis of rotation of
  • the invention relates to a vacuum pump of the Ga ⁇ de channel type comprising a stator and a rotor driven in rotation inside the stator, the stator comprising a suction inlet and a discharge outlet , characterized in that the rotor, in its active part located between the suction and the discharge, has a hemispherical shape and is disposed inside a also hemispherical cavity of the stator, the axis ⁇ of said rotor being coincident with the axis of the hemispherical cavity of the stator, the suction being done on the side of the large circle of the hemispherical rotor, by the radial clearance between the rotor and the stator and the discharge on the side of the top of the hemispherical rotor, an adjusting shim positioning axially the rotor with respect to the stator so that the radial clearance at the discharge is lower than the radial clearance at the intake.
  • said shim comprises axial adjustment means so as to adjust the radial clearance between the stator and the rotor, on the side of the exhaust, by axial offset of the rotor relative to the stator.
  • the wedge is for example movable in rotation and comprises inclined ramps cooperating with balls.
  • a vacuum pump comprising a stator 1 and a rotor 2.
  • the rotor 2 comprises a shaft 3 by which it is supported in the stator 1 by means of bearings 4 and 5
  • the rotor 2 is driven in rotation by means of a motor 6 fixed inside the stator by flanges 7 and 8.
  • the active part of the rotor has a hemispherical shape 9 situated in a cavity 10 also hemispherical of the stator.
  • the axis ⁇ of the rotor coincides with the axis of the hemispherical cavity of the stator.
  • the surface of the rotor is hollowed out with a helical groove 11 whose depth is decreasing from the suction 12 located on the side of the large circle of the hemisphere towards the discharge 13 located on the side of the top of the hemisphere.
  • the pump shown in FIG. 1 is a block diagram and in reality there are a plurality of helical grooves 11. These grooves can moreover be produced not on the rotor but in the stator cavity or even possibly on the rotor and also in the stator.
  • the center 0 ′ of the rotor is axially offset from the center 0 of the hemispherical cavity of the stator so that the radial clearance at suction j a is greater than the radial clearance at repression j r .
  • the precise relative adjustment of these clearances j r and j a is carried out by means of a shim 14. This makes it possible to improve the compression ratio which is of the form K R2 r2 , formula in which R and r are respectively the radii of the rotor on suction and discharge and K a constant depending on parameters such as in particular the ratio j r j at .
  • K increases with the decrease of this ratio j r j at .
  • the value of K is also increased by decreasing the depth of the helical grooves 11 from the suction to the discharge.
  • a dynamic groove seal 15 provides dynamic sealing between the stator 10 and the shaft 3 of the rotor 2 downstream of the discharge 13 and upstream of the first bearing 4.
  • An orifice 16 is provided downstream of the dynamic seal.
  • FIG. 2 is a detail showing an embodiment in which the shim 14 is adjustable, making it possible to vary the clearance at the delivery j r .
  • the wedge 14 comprises inclined ramps 17 associated with balls 18 held in a cage 19. The rotation of the wedge, for its adjustment, is carried out by a motor 20.
  • FIG 3 shows a variant in which the rotor 2 is double and therefore consists of two hemispherical parts 21 and 22 joined by a cylindrical central part 30.
  • the central part 30 allowing to play the role of decentering of the two hemispherical parts 21 and 22 of the rotor relative to the two hemispherical cavities 31, 32 of the stator.
  • the axis ⁇ of the rotor coincides with the axis which joins the centers 0 and 01 of the two large circles of the hemispherical cavities of the stator.
  • the hemispherical cavities 31 and 32 are joined by an intermediate portion 33 which forms an intake ring.
  • the inlet 23 is located in the middle and the flow is distributed to the right and to the left, the outlets 24 and 25 of the two parts meet at 26. This arrangement makes it possible to approximately double the flow rate of the pump.
  • the compression ratio varies from around 25 to 300 depending on the value of the ratio j at j r .
  • the flow is between 0.3 l / s and 2.7 l / s for rotors whose large diameter is between 100 and 300 mm with a rotation speed of 24,000 rpm.
  • the compression ratio can be up to 9.104.
  • the pump also has the usual advantages of dry pumps.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of The Air-Fuel Ratio Of Carburetors (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (4)

  1. Vakuumpumpe mit Gaede-Kanal, die einen Stator (1) und einen Rotor (2) aufweist, der im Inneren des Stators in Drehung versetzt wird, wobei der Stator einen Ansaugeinlaß (12) und einen Druckauslaß (13) besitzt, dadurch gekennzeichnet, daß der Rotor in seinem aktiven Abschnitt zwischen Einlaß und Auslaß aus zwei halbkugelförmigen Abschnitten (21, 22) besteht, die durch einen zylindrischen Mittelabschnitt (30) verbunden sind, und in einem Hohlraum des Rotors angeordnet ist, der ebenfalls zwei halbkugelförmige Hohlräume (31, 32) aufweist, die durch einen entsprechenden, dem zylindrischen Abschnitt des Rotors entsprechenden Zwischenabschnitt verbunden sind, durch den der Einlaß erfolgt, wobei der Mittelpunkt jedes halbkugelförmigen Abschnittes des Rotors relativ zum Mittelpunkt des entsprechenden halbkugelförmigen Hohlraumes des Stators versetzt ist, derart, daß der radiale Spalt ja am Einlaß in Hohe des Großkreises der Halbkugeln größer als der radiale Spalt jr am Auslaß ist, der für jede Halbkugel in der Nähe der Kuppe der Halbkugel liegt, und wobei die Drehachse Δ des Rotors mit der durch die Mittelpunkte (0, 0₁) der beiden Großkreise der halbkugelförmigen Hohlräume des Stators verlaufenden Achse zusammenfällt.
  2. Vakuumpumpe mit Gaede-Kanal, die einen Stator (1) und einen Rotor (2) aufweist, der im Inneren des Stators in Drehung versetzt wird, wobei der Stator einen Ansaugeinlaß (12) und einen Druckauslaß (13) besitzt, dadurch gekennzeichnet, daß der Rotor in seinem aktiven Abschnitt zwischen Einlaß und Auslaß eine halbkugelige Form (9) besitzt und im Inneren eines ebenfalls halbkugeligen Hohlraumes (10) des Stators angeordnet ist, wobei die Achse Δ des Rotors mit der Achse des halbkugeligen Hohlraumes des Stators zusammenfällt, und der Einlaß an der Seite des Großkreises des halbkugeligen Rotors durch den radiale Spalt ja zwischen dem Rotor und dem Stator erfolgt, während der Auslaß an der Seite der Kuppe des halbkugeligen Rotors erfolgt, wobei ein Justierzwischenstück (14) den Rotor (2) axial relativ zum Stator (1) so einstellt, daß der radiale Spalt jr am Auslaß kleiner als der radiale Spalt ja am Einlaß ist.
  3. Vakuumpumpe nach Anspruch 2, dadurch gekennzeichnet, daß das Zwischenstück (14) Mittel (17, 18, 19) zum axialen Einstellen aufweist, derart, daß der axiale Spalt jr zwischen Stator und Rotor am Auslaß durch axiale Versetzung des Rotors relativ zum Stator eingestellt wird.
  4. Vakuumpumpe nach Anspruch 3, dadurch gekennzeichnet, daß das Zwischenstück drehbeweglich ist und schräge Rampen (17) aufweist, die mit Kugeln (18) zusammenwirken.
EP90100362A 1989-01-09 1990-01-09 Gaede'sche Vakuumpumpe Expired - Lifetime EP0378163B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT90100362T ATE94620T1 (de) 1989-01-09 1990-01-09 Gaede'sche vakuumpumpe.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8900152 1989-01-09
FR8900152A FR2641582B1 (fr) 1989-01-09 1989-01-09 Pompe a vide du type a canal de gaede

Publications (3)

Publication Number Publication Date
EP0378163A2 EP0378163A2 (de) 1990-07-18
EP0378163A3 EP0378163A3 (en) 1990-10-10
EP0378163B1 true EP0378163B1 (de) 1993-09-15

Family

ID=9377538

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90100362A Expired - Lifetime EP0378163B1 (de) 1989-01-09 1990-01-09 Gaede'sche Vakuumpumpe

Country Status (7)

Country Link
US (1) US5011368A (de)
EP (1) EP0378163B1 (de)
JP (1) JPH02227598A (de)
AT (1) ATE94620T1 (de)
DE (1) DE69003256T2 (de)
ES (1) ES2045570T3 (de)
FR (1) FR2641582B1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2651280A1 (fr) * 1989-08-28 1991-03-01 Cit Alcatel Pompe a vide primaire.
US5312224A (en) * 1993-03-12 1994-05-17 International Business Machines Corporation Conical logarithmic spiral viscosity pump
DE4410656A1 (de) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe
US6196263B1 (en) 1998-05-06 2001-03-06 American Cyanamid Company Methods and apparatus for metering flowable material
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP2003129991A (ja) * 2001-10-24 2003-05-08 Boc Edwards Technologies Ltd 分子ポンプ
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
DE102004047930A1 (de) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Reibungsvakuumpumpe
US8197231B2 (en) 2005-07-13 2012-06-12 Purity Solutions Llc Diaphragm pump and related methods
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
US9610392B2 (en) 2012-06-08 2017-04-04 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
DE102013114290A1 (de) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US651400A (en) * 1899-04-25 1900-06-12 Gustave Trouve Rotary pump.
GB242084A (en) * 1924-11-13 1925-11-05 Radions Ltd Improvements in vacuum pumps
US1810083A (en) * 1927-11-30 1931-06-16 Norinder Ernst Harald High vacuum molecular pump
US2001800A (en) * 1930-04-22 1935-05-21 Explorotor A G Rotor for rotary engines
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE912007C (de) * 1951-12-14 1954-05-24 Zeiss Carl Fa Molekularluftpumpe
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
DE1809902C3 (de) * 1968-11-20 1973-11-15 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Mehrstufige Turbo Molekularhoch vakuumpumpe
US4642036A (en) * 1984-09-17 1987-02-10 Young Niels O Magnet ball pump
JPS63154891A (ja) * 1986-12-18 1988-06-28 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ

Also Published As

Publication number Publication date
DE69003256T2 (de) 1994-01-13
US5011368A (en) 1991-04-30
DE69003256D1 (de) 1993-10-21
ATE94620T1 (de) 1993-10-15
ES2045570T3 (es) 1994-01-16
EP0378163A3 (en) 1990-10-10
FR2641582B1 (fr) 1991-03-22
FR2641582A1 (fr) 1990-07-13
JPH02227598A (ja) 1990-09-10
EP0378163A2 (de) 1990-07-18

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