DE69003256T2 - Gaede'sche Vakuumpumpe. - Google Patents

Gaede'sche Vakuumpumpe.

Info

Publication number
DE69003256T2
DE69003256T2 DE90100362T DE69003256T DE69003256T2 DE 69003256 T2 DE69003256 T2 DE 69003256T2 DE 90100362 T DE90100362 T DE 90100362T DE 69003256 T DE69003256 T DE 69003256T DE 69003256 T2 DE69003256 T2 DE 69003256T2
Authority
DE
Germany
Prior art keywords
rotor
stator
semi
intake
spherical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90100362T
Other languages
English (en)
Other versions
DE69003256D1 (de
Inventor
Sebastien Frindel
Luc Mathieu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Publication of DE69003256D1 publication Critical patent/DE69003256D1/de
Application granted granted Critical
Publication of DE69003256T2 publication Critical patent/DE69003256T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of The Air-Fuel Ratio Of Carburetors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
DE90100362T 1989-01-09 1990-01-09 Gaede'sche Vakuumpumpe. Expired - Fee Related DE69003256T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8900152A FR2641582B1 (fr) 1989-01-09 1989-01-09 Pompe a vide du type a canal de gaede

Publications (2)

Publication Number Publication Date
DE69003256D1 DE69003256D1 (de) 1993-10-21
DE69003256T2 true DE69003256T2 (de) 1994-01-13

Family

ID=9377538

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90100362T Expired - Fee Related DE69003256T2 (de) 1989-01-09 1990-01-09 Gaede'sche Vakuumpumpe.

Country Status (7)

Country Link
US (1) US5011368A (de)
EP (1) EP0378163B1 (de)
JP (1) JPH02227598A (de)
AT (1) ATE94620T1 (de)
DE (1) DE69003256T2 (de)
ES (1) ES2045570T3 (de)
FR (1) FR2641582B1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10224604A1 (de) * 2002-06-04 2003-12-18 Leybold Vakuum Gmbh Evakuierungseinrichtung
DE102004047930A1 (de) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Reibungsvakuumpumpe
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2651280A1 (fr) * 1989-08-28 1991-03-01 Cit Alcatel Pompe a vide primaire.
US5312224A (en) * 1993-03-12 1994-05-17 International Business Machines Corporation Conical logarithmic spiral viscosity pump
DE4410656A1 (de) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe
US6196263B1 (en) 1998-05-06 2001-03-06 American Cyanamid Company Methods and apparatus for metering flowable material
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP2003129991A (ja) * 2001-10-24 2003-05-08 Boc Edwards Technologies Ltd 分子ポンプ
US8197231B2 (en) 2005-07-13 2012-06-12 Purity Solutions Llc Diaphragm pump and related methods
US9610392B2 (en) 2012-06-08 2017-04-04 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
DE102013114290A1 (de) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US651400A (en) * 1899-04-25 1900-06-12 Gustave Trouve Rotary pump.
GB242084A (en) * 1924-11-13 1925-11-05 Radions Ltd Improvements in vacuum pumps
US1810083A (en) * 1927-11-30 1931-06-16 Norinder Ernst Harald High vacuum molecular pump
US2001800A (en) * 1930-04-22 1935-05-21 Explorotor A G Rotor for rotary engines
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE912007C (de) * 1951-12-14 1954-05-24 Zeiss Carl Fa Molekularluftpumpe
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
DE1809902C3 (de) * 1968-11-20 1973-11-15 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Mehrstufige Turbo Molekularhoch vakuumpumpe
US4642036A (en) * 1984-09-17 1987-02-10 Young Niels O Magnet ball pump
JPS63154891A (ja) * 1986-12-18 1988-06-28 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10224604A1 (de) * 2002-06-04 2003-12-18 Leybold Vakuum Gmbh Evakuierungseinrichtung
US7264439B2 (en) 2002-06-04 2007-09-04 Oerlikon Leybold Vacuum Gmbh Evacuating device
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
DE102004047930A1 (de) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Reibungsvakuumpumpe
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
EP2594803B1 (de) * 2011-11-16 2016-07-20 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe

Also Published As

Publication number Publication date
JPH02227598A (ja) 1990-09-10
EP0378163B1 (de) 1993-09-15
DE69003256D1 (de) 1993-10-21
FR2641582B1 (fr) 1991-03-22
FR2641582A1 (fr) 1990-07-13
US5011368A (en) 1991-04-30
EP0378163A2 (de) 1990-07-18
EP0378163A3 (en) 1990-10-10
ES2045570T3 (es) 1994-01-16
ATE94620T1 (de) 1993-10-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee