EP0370478A3 - Präzisions-Widerstands-Dünnschicht - Google Patents

Präzisions-Widerstands-Dünnschicht Download PDF

Info

Publication number
EP0370478A3
EP0370478A3 EP19890121543 EP89121543A EP0370478A3 EP 0370478 A3 EP0370478 A3 EP 0370478A3 EP 19890121543 EP19890121543 EP 19890121543 EP 89121543 A EP89121543 A EP 89121543A EP 0370478 A3 EP0370478 A3 EP 0370478A3
Authority
EP
European Patent Office
Prior art keywords
substance
layers
proportions
hydrogen
precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP19890121543
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0370478A2 (de
Inventor
Volker Dr. Rer. Nat. Riede
Gerhard Dr. Rer. Nat. Sobe
Hartmut Dr. Rer. Nat. Schreiber
Günter Dr.-Ing. Weise
Armin Dr. Sc. Nat. Heinrich
Hartmut Dr. Rer. Nat. Vinzelberg
Winfried Dr. sc. nat. Brückner
Lutz Bierbrauer
Albrecht Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VEB ELEKTRONISCHE BAUELEMENTE CARL VON OSSIETZKY
Original Assignee
Microtech Electronic GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microtech Electronic GmbH filed Critical Microtech Electronic GmbH
Publication of EP0370478A2 publication Critical patent/EP0370478A2/de
Publication of EP0370478A3 publication Critical patent/EP0370478A3/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
EP19890121543 1988-11-22 1989-11-21 Präzisions-Widerstands-Dünnschicht Ceased EP0370478A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD32203888A DD283755A7 (de) 1988-11-22 1988-11-22 Praezisions-widerstands-duennschicht
DD322038 1988-11-22

Publications (2)

Publication Number Publication Date
EP0370478A2 EP0370478A2 (de) 1990-05-30
EP0370478A3 true EP0370478A3 (de) 1991-05-08

Family

ID=5604132

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19890121543 Ceased EP0370478A3 (de) 1988-11-22 1989-11-21 Präzisions-Widerstands-Dünnschicht

Country Status (4)

Country Link
EP (1) EP0370478A3 (fi)
DD (1) DD283755A7 (fi)
DK (1) DK582989A (fi)
FI (1) FI895533A0 (fi)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5221639A (en) * 1991-10-20 1993-06-22 Motorola, Inc. Method of fabricating resistive conductive patterns on aluminum nitride substrates
DE59605278D1 (de) * 1995-03-09 2000-06-29 Philips Corp Intellectual Pty Elektrisches Widerstandsbauelement mit CrSi-Widerstandsschicht

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3498832A (en) * 1967-03-16 1970-03-03 Motorola Inc Material and method for producing cermet resistors
DD158725A3 (de) * 1980-02-21 1983-02-02 Joachim Sonntag Praezisions-widerstandsschicht
DD230106A1 (de) * 1984-12-20 1985-11-20 Akad Wissenschaften Ddr Praezisionswiderstandsschicht fuer den mittel- und hochohmbereich

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3498832A (en) * 1967-03-16 1970-03-03 Motorola Inc Material and method for producing cermet resistors
DD158725A3 (de) * 1980-02-21 1983-02-02 Joachim Sonntag Praezisions-widerstandsschicht
DD230106A1 (de) * 1984-12-20 1985-11-20 Akad Wissenschaften Ddr Praezisionswiderstandsschicht fuer den mittel- und hochohmbereich

Also Published As

Publication number Publication date
DK582989D0 (da) 1989-11-20
EP0370478A2 (de) 1990-05-30
FI895533A0 (fi) 1989-11-21
DD283755A7 (de) 1990-10-24
DK582989A (da) 1990-05-23

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