EP0344333A1 - Kryogene adsorptionspumpe - Google Patents

Kryogene adsorptionspumpe Download PDF

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Publication number
EP0344333A1
EP0344333A1 EP89900946A EP89900946A EP0344333A1 EP 0344333 A1 EP0344333 A1 EP 0344333A1 EP 89900946 A EP89900946 A EP 89900946A EP 89900946 A EP89900946 A EP 89900946A EP 0344333 A1 EP0344333 A1 EP 0344333A1
Authority
EP
European Patent Office
Prior art keywords
pump
cryogenic
housing
vessel
cryogenic agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP89900946A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0344333A4 (de
Inventor
Marxen Petrovich Larin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akcionernoe Obscestvo Zakrytogo Tipa Lavs
Original Assignee
NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Akcionernoe obscestvo zakrytogo tipa "LAVS"
NT OB AKADEMII NAUK SSSR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR, Akcionernoe obscestvo zakrytogo tipa "LAVS", NT OB AKADEMII NAUK SSSR filed Critical NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Publication of EP0344333A4 publication Critical patent/EP0344333A4/de
Publication of EP0344333A1 publication Critical patent/EP0344333A1/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Definitions

  • the invention relates to vacuum technology and in particular to constructions of cryoadsorption vacuum pumps.
  • the invention can most advantageously be used in vacuum technology, which is widely used in the electronics and high-frequency industry, in other branches of industry and in scientific research, as a preparatory or main means for producing an ultra-pure oil-free vacuum in working chambers with a volume of 1.10 -3 up to 1.10 2 m 3 in a pressure range 1.10 5 to 1.10 -2 or 1.10 2 to 1.10 -7 Pa and below.
  • cryogenic adsorption pumps are being perfected by optimizing their design both by developing new assembly arrangements and by providing the pumps with new design elements.
  • the two approaches aim to improve the pump performance and the cryogenic indicators of the pumps mentioned.
  • a cryogenic adsorption pump comprising a housing with a lid, a bottom and an inlet connector arranged on the lid, a cryogenic agent vessel, which is accommodated in the housing and provided with a gas-permeable screen, a thermal bridge connecting the inlet connector with the cryogenic agent vessel Adsorbent, tubes for filling a cryogen and for discharging its vapors (Journal of the Academy of Sciences of the USSR "Pribory i tekhnika experimenta" "No. 6, 1983, Moscow, MPLarin” Sverkhvysokovakuumny agregat s gelievym kriogennym nasosom ", p. 123 bis 132, p. 129).
  • a disadvantage of this pump is that in order to produce a completely oil-free high vacuum in a working chamber, additional means, for example a mechanical fore-vacuum pump and one, are used by this pump Liquid nitrogen cooled oil vapor trap has to use.
  • the usual designs of the vacuum traps mentioned at the moment are uneconomical due to increased nitrogen consumption and a short (10 to 35 hours) operating time after a single nitrogen filling, because this means a great deal of additional work for the regeneration and flushing of the traps and the connecting lines and an unproductive consumption of liquid nitrogen for subsequent trap cooling - from room temperature up to 77.4 K.
  • a cryogenic adsorption pump comprising a housing with a lid, a bottom and an inlet connector arranged on the lid, a cryogenic agent vessel which is accommodated in the housing and provided with a gas-permeable screen, a thermal bridge which connects the inlet connector to the cryogenic agent vessel, an adsorbent, pipes for filling a cryogen and for the discharge of its vapors and a vacuum line arranged in the cavity of the cryogen vessel, one end of which is led out of the housing above the bottom (SU, A, 1333833).
  • the vacuum line is used at the stage of a pre-evacuation of the working chamber by a mechanical fore-vacuum pump and performs functions of freezing-out on the walls of which a condensation of the gases and vapors easily condensable at the cryogen temperature, e.g. Oil vapors from the mechanical backing pump occur.
  • a disadvantage of the device described is that when the cryogen container is designed in the form of an annular cavity between two coaxial cylinders. and when arranging an adsorbent with a limited thickness between the inner cylinder and the gas-permeable screen in the area of the pump dimensions, an insufficient volume of the adsorbent and a too small area of the gas-permeable screen are required, and this sets the pump's pump performance values, i.e. adsorption capacity and speed.
  • the vacuum line In addition, its diameter and length are limited by the design and arrangement of the vacuum line.
  • the diameter of the vacuum line is limited by the annular space of the cryogenic agent vessel and the length of the vacuum line cannot be less than the height of the pump housing.
  • the mentioned parameters of the vacuum line i.e. their diameter and length, determine their permeability and their limitation reduces the permeability of the vacuum line, which means that a relatively long time is required to evacuate the working chamber.
  • cryogen container does not allow effective use of the internal pump volume to increase the capacity of this container and the amount of cryogen filled.
  • An insufficient capacity of the cryogenic agent vessel leads to a shortening of the con improper operation of the pump and thereby worsens its cryogenic parameters.
  • the invention has for its object to provide a cryogenic adsorption pump containing a cryogenic agent vessel, an adsorbent, a gas-permeable screen and a vacuum line arranged in the cavity of the cryogenic agent vessel, wherein said elements are designed and arranged in the interior of the pump housing so that at un - Changed pump dimensions, the surface of the gas-permeable screen expanded, the volume of the adsorbent increased, the permeability of the vacuum line increased and thereby improved the pump characteristics of the pump, ie the speed of the pump can be increased, its adsorption capacity increased and the evacuation of the working chamber can be accelerated.
  • a cryogenic adsorption pump with a housing which has a lid, a bottom and an inlet connector attached to the lid, a cryogenic agent vessel which is accommodated in the housing, an adsorbent, a gas-permeable screen, a thermal bridge, one in the cavity of the cryogenic agent vessel arranged vacuum line, one end of which is led out of the housing over the floor, and with tubes for filling a cryogen and for discharging its vapors according to the invention solved in that the cryogen vessel is designed as two frames arranged one above the other in the central region of the pump, which are formed by a ring element are connected and of which the upper one contains a lid and the lower one a bottom, the cryogenic agent vessel being provided with a heat conduction which is fastened on the ring element and enclosing the upper frame to form a cavity between the frame and the heat conduction, in which the the ring element attached gas-permeable screen is arranged, the adsorbent is arranged between the heat
  • cryogenic agent vessel in the form of two frames arranged in the central region of the pump, which are connected by a ring element, and the fitting of this vessel with a heat conduction, which is fastened on the ring element to form a cavity between the upper frame and the heat conduction firstly, effective cooling of the heat conduction by means of cryogen via the ring element, and secondly, it makes it possible to increase the diameter of the heat conduction to a maximum.
  • the surface of the gas-permeable screen can be increased significantly as a result of its diameter being increased, and thus the speed of the pump can be increased.
  • the arrangement of an adsorbent between the heat conduction and the gas-permeable screen ensures effective cooling of the adsorbent. In this way, with a limited thickness of the adsorbent, its total amount is increased by increasing the diameter of the heat conduction and the gas-permeable screen and consequently the cross-sectional area of the annular space in which the adsorbent is accommodated, thereby increasing the adsorption capacity of the pump.
  • the vacuum line is arranged inside a frame of the cryogenic agent vessel, which is designed as described above, the diameter of the vacuum line can be increased and its length can be reduced. This increases the permeability of the vacuum line and thereby accelerates it evacuating the work chamber. In addition, when the second end of the vacuum line is led out over the bottom of the pump cover, conditions for pump connection to the working chamber and to the mechanical forevacuum pump are improved, and the pump operation is thereby facilitated.
  • the vacuum line is provided with heat lines, which are attached to it and arranged inside the frame of the cryogenic agent vessel, an effective cooling of the vacuum line with any cryogenic agent level in the vessel is ensured at the preliminary stage of evacuating the working chamber, regardless of whether the pump is upward or downward inlet fitting is attached. This creates the prerequisites for generating optimal key figures for the evacuation at subsequent stages of the evacuation of the working chamber.
  • cryogenic agent vessel can effectively utilize the inner pump space to increase the vessel volume and accordingly the amount of the cryogenic agent to be filled.
  • the tubes for filling the cryogenic agent and for discharging its vapors inside the cryogenic agent vessel and with one end leading out of the housing over its bottom, the other end of one tube on the lid of the upper frame and that of the other Place the tube on the bottom of the lower frame.
  • Such an arrangement of the tubes for filling the cryogen and for discharging its vapors increases the tube length, consequently reduces the heat input and lowers the evaporability of the cryogen, which improves the cryogenic characteristics of the pump.
  • the aforementioned arrangement of the pipes ensures the possibility of operating the pump regardless of whether the inlet connection is directed upwards or downwards, without deteriorating conditions for filling the cryogen and for discharging its vapors. Only the purpose of the two pipes changes. In addition, if necessary, the cryogen can be quickly eva kiss.
  • the pump prefferably provides a shield which is arranged on the inside of the pump housing at a distance therefrom.
  • This screen reduces heat input into the cryogenic agent vessel as a result of heat radiation from the pump housing. This reduces the vaporizability of the cryogen and thus improves the cryogenic parameters of the pump.
  • a screen coaxially to the inside of the thermal bridge.
  • an undesirable phenomenon occurs on the surface of the thermal bridge, which has a variable temperature from 78 to 295 K, namely condensation of water vapor and vapors of gases (carbon dioxide, freons, some hydrocarbons), which prolongs the evacuation of the working chamber up to the limit vacuum due to recondensation.
  • This phenomenon is eliminated with the above-mentioned screen and this contributes to a further improvement in the pumping-out key figures of the pump.
  • the pump with rods, one of which is fastened in the bottom of the housing, the other in the inlet connection of the pump and in the lid of the upper and in the bottom of the lower frame of the cryogenic agent container to make recesses for the rod stop.
  • the rods and the design of the depressions mentioned in the bottom and in the cover of the frames of the cryogenic agent vessel provide the possibility of rigidly fixing the cryogenic agent vessel in the pump housing, thereby protecting internal pump elements from damage during transport of the pump.
  • the cryogenic adsorption pump contains a housing 1 (FIG. 1) with a cover 2, a base 3 and an inlet connection 4 arranged on the cover 2.
  • the pump is provided with a screen 5, which has a play 6 on the inner side of the housing 1 the pump is arranged.
  • a cryogen container 7 which is made up of two frames, one above the other, the upper 8 and the lower 9, which are connected by a ring element 10.
  • the upper frame 8 has a lid 11 and the lower frame 9 has a bottom 12.
  • the cryogenic agent container 7 is provided with a heat conduit 13 which is fastened to the ring element 10. The heat conduction 13 is thus cooled by cryogenic means via the ring element 10.
  • This embodiment of the cryogenic means vessel consists of two frames 8 and 9 located in the central area of the pump, which are connected by the ring element 10, and its equipment with the heat conduction 13, which is on the ring element 10 is attached to form a cavity between the upper frame 8 and the heat pipe 13, firstly gives the possibility of cooling the heat pipe 13 by means of cryogen via the ring element 10 and secondly allows a maximum increase in the diameter of the heat pipe 13.
  • the heat pipe 13 encloses the upper frame 8 and thereby forms a cavity in which a gas-permeable Screen 14 is housed, which is attached to the ring member 10.
  • the heat pipe 13 and the gas-permeable screen 14 are connected by a ring 15.
  • An adsorbent 16 is located between the heat conduction 13 and the gas-permeable screen 14.
  • the evacuated gas reaches the adsorbent 16 from the working chamber via a cavity 17 between the gas-permeable screen 14 and the frame 8.
  • the surface of the gas-permeable screen 14 can be enlarged by increasing its diameter and thus increasing the speed of the pump.
  • the arrangement of the adsorbent 16 between the heat pipe 13 and the gas-permeable screen 14 ensures effective cooling of the adsorbent 16 and prevents the adsorbent dust from entering the working chamber. If the thickness of the adsorbent 16 is limited, its total volume is increased by increasing the diameter of the heat pipe 13 and the gas-permeable screen 14 and consequently the cross-sectional area of the annular space in which the adsorbent is accommodated, and as a result the adsorption capacity of the pump is increased.
  • thermal bridge 18 which is designed as a bellows, is connected to the inlet connection 4.
  • the other end of the thermal bridge 18 is connected to a ring cover 19, which in turn is attached to the ring 15.
  • the space between the inner surface of the housing 1 and the outer surfaces of the thermal bridge 18, the ring cover 19, the heat pipe 13, the lower frame 9 and the bottom 12 of the lower frame 9 represents a "protective vacuum space" 20.
  • the thermal bridge 18 has a screen 21 which is arranged with a play coaxial to the thermal bridge 18.
  • An annular pocket 22 with the adsorbent 16 is embodied on one side surface of the lower frame 9.
  • the pocket 22 is covered by a gas-permeable screen 23, which faces the “usable vacuum space” 20. This in The adsorbent 16 enclosed in the pocket 22 is intended for evacuating residual gas from the “protective vacuum space” 20.
  • a vacuum line 24 is accommodated in the interior of the lower frame 9 of the cryogenic agent container 7.
  • This vacuum line 24 is intended for pre-evacuating the working chamber and acts as a freezer trap, on the walls of which the gases and vapors which are easily condensable at the cryogenic medium temperature are condensed and which can penetrate into the working chamber from the mechanical forevacuum pump.
  • the vacuum line 24 represents an optically dense element, the ends 25 and 26 of which are provided with thermal bridges 27 and 23, respectively, and are led beyond the bottom 3 of the housing 1.
  • the leading of the two ends 25 and 26 of the vacuum line 24 over the bottom 3 of the housing 1 of the pump requires the formation of an optically sealed vacuum line. Since the vacuum line is accommodated in the interior of the lower frame 9, the diameter of the vacuum line 24 can be increased and its length shortened, which increases the permeability of the vacuum line and consequently accelerates the pre-evacuation of the working chamber.
  • the vacuum line 24 is provided with heat lines 29 and 30 which are fastened thereon and arranged in the interior of the frames 8 and 9 over their entire length.
  • the vacuum line 24 is provided with the heat lines 29 and 30, a constant temperature on the walls of the vacuum line 24 is maintained at an arbitrary cryogen level in the vessel 7, regardless of whether the pump is set up with the inlet connection pointing upwards or downwards.
  • the pump has a tube 31 (FIG. 2) for filling in the cryogen and a tube 32 for discharging the cryogen vapors, which are arranged in the interior of the frames 8 and 9 of the cryogen container.
  • Each tube 31 and 32 is led with one end 33 or 34 out of the housing 1 over the bottom 3.
  • the other end 35 of the U-shaped tube 31 is attached to the bottom 12 of the lower frame 9 and the end 36 of the tube 32 to the lid 11 of the upper frame 8.
  • the construction of the pipes 31 and 32 for filling in a cryogenic agent or for discharging its vapors and the arrangement of their ends 35 and 36, respectively, gives the possibility of filling cryogenic agent into the cryogenic agent vessel 7 regardless of whether the inlet connection 4 of the pump points upwards or downwards. If the inlet nozzle is at the top, cryogen is filled via the pipe 31 and if the pump is set up so that the inlet nozzle 4 is at the bottom, then via the pipe 32.
  • the pump is provided with two rods 37 and 38, which are arranged on the pump axis, the rod 37 is fastened in the bottom 3 of the housing 1 and the rod 38 is connected to the inlet connection 4 via a plug 39.
  • the end of the rod 37 is coupled to a recess 40, which is implemented in the bottom 12, and the end of the rod 33 is coupled to a recess 41, which is implemented in the cover 11.
  • FIG 3 shows a diagram of a connection of the cryogenic adsorption pump 42 according to the invention to a working chamber 43 to be evacuated and a mechanical fore-vacuum pump 44.
  • the pump 42 according to the invention is connected to the working chamber 43 through the inlet connection 4 via a valve 45.
  • One end 25 of the vacuum line 24 of the pump 42 according to the invention is via the thermal bridge 27 to a valve 46 and above it to the working chamber 43 and the other end 26 of the vacuum line 24 via the thermal bridge 28 to a valve 47 and above it to the mechanical backing pump 44 connected.
  • the working chamber 43 is connected to the mechanical fore-vacuum pump 44 via a valve 48, the “protective vacuum space” 20 of the pump 42 according to the invention via a valve 49 and the entire volume of the pump 42 according to the invention below the inlet connection 4 via a valve 50.
  • the cryogenic adsorption pump works as follows.
  • the pump 42 is brought into the operating state, its entire volume below the inlet connection 4, including the cavity 17, is evacuated to a pressure of 100 to 40 Pa by means of the mechanical fore-vacuum pump 44 via the valve 50.
  • the adsorbent enclosed in the pocket 22 is cooled and adsorbs the residual gas which is located in the “protective vacuum space” 20.
  • the pressure in the "protective vacuum chamber” 20 drops to a value of 1.10 -4 Pa and below, as a result of which the supply of heat into the cryogenic agent vessel 7 from the housing 1 is greatly reduced by heat exchange of the residual gas molecules. As a result, there will be minimal heat input into the cryogenic agent vessel 7 regardless of the pressure at the inlet to the pump.
  • the residual gas in the entire pump volume below the inlet connection 4, including the cavity 17, is adsorbed by the adsorbent 16, which is located between the heat pipe 13 and the gas-permeable screen 14.
  • the pump is ready for operation after all of the above-mentioned operations have been carried out.
  • Evacuating the working chamber 43 includes a precursor which by means of the mechanical roughing pump 44 via the valve 48 to a pressure from 100 to 40 Pa and then by means of the vacuum line 24 via the valves 46 and 4 7 up to a pressure 5 to 1 Pa he follows.
  • the vacuum line 24 functions as a freezing trap, on the walls of which oil vapors condense, which diffuse from the mechanical forevacuum pump.
  • valves 46 and 47 are closed, the valve 45 is opened and the working chamber 43 is evacuated to the desired pressure with the aid of the adsorption pump 42 according to the invention.
  • the invention can most advantageously be used in vacuum technology, which is widely used in the electronics and high-frequency industry, in other branches of industry and in scientific research, as a ballast or main means for producing an ultra-pure oil-free vacuum in working chambers with a volume of 1.10 . 3 to 1,102 m 3 in a pressure range 1.10 5 to 1.10 -2 b z w . 1.10 2 to 1.10 -7 Pa and below can be used.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
EP89900946A 1987-12-17 1988-11-14 Kryogene adsorptionspumpe Withdrawn EP0344333A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SU874344470A SU1698481A1 (ru) 1987-12-17 1987-12-17 Криогенный адсорбционный насос
SU4344470 1987-12-17

Publications (2)

Publication Number Publication Date
EP0344333A4 EP0344333A4 (de) 1989-10-30
EP0344333A1 true EP0344333A1 (de) 1989-12-06

Family

ID=21342665

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89900946A Withdrawn EP0344333A1 (de) 1987-12-17 1988-11-14 Kryogene adsorptionspumpe

Country Status (7)

Country Link
US (1) US5005363A (ru)
EP (1) EP0344333A1 (ru)
JP (1) JPH02502559A (ru)
AU (1) AU615248B2 (ru)
PL (1) PL160316B1 (ru)
SU (1) SU1698481A1 (ru)
WO (1) WO1989005917A1 (ru)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1682628A1 (ru) * 1988-03-10 1991-10-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криоадсорбционный насос
US6154478A (en) * 1998-06-30 2000-11-28 The Boeing Company Chemical oxygen-iodine laser (coil)/cryosorption vacuum pump system
US6621848B1 (en) 2000-04-25 2003-09-16 The Boeing Company SECOIL reprocessing system
US6650681B1 (en) 2000-04-25 2003-11-18 The Boeing Company Sealed exhaust chemical oxygen-iodine laser system
DE10331201A1 (de) * 2003-07-10 2005-01-27 Leybold Vakuum Gmbh Kryopumpe
JP2008502557A (ja) * 2004-06-14 2008-01-31 ヤング、ロバート、ダブリュ 乾燥容器およびその製造方法
CN101612507B (zh) * 2008-06-26 2013-07-10 北京谊安医疗系统股份有限公司 气体吸收系统
CH703216A1 (de) * 2010-05-27 2011-11-30 Hsr Ag Vorrichtung zur Verhinderung des Memory-Effekts bei Kryopumpen.

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
DE1285091B (de) * 1964-01-02 1968-12-12 Norton Co Vakuumapparat zum Erzeugen eines Ultrahochvakuums
US3335550A (en) * 1964-04-24 1967-08-15 Union Carbide Corp Cryosorption apparatus
US3344852A (en) * 1964-06-15 1967-10-03 Bergson Gustav Gas drying apparatus
US3371499A (en) * 1966-11-02 1968-03-05 Union Carbide Corp Cryosorption vacuum pumping system
US3416326A (en) * 1967-06-02 1968-12-17 Stuffer Rowen Efficient nitrogen trap
FR1549434A (ru) * 1967-10-20 1968-12-13
FR1587077A (ru) * 1968-08-01 1970-03-13
FR2048253A5 (ru) * 1969-12-01 1971-03-19 Air Liquide
FR2146100B2 (ru) * 1971-07-16 1974-03-29 Air Liquide
SU515884A1 (ru) * 1974-04-30 1976-05-30 Ленинградский Ордена Ленина Политехнический Институт Им. М.И. Калинина Криогенный сверхвысоковакуумный насос
SU694656A1 (ru) * 1978-06-07 1979-10-30 Предприятие П/Я В-8851 Способ и устройство дл получени вакуума
US4446702A (en) * 1983-02-14 1984-05-08 Helix Technology Corporation Multiport cryopump

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Keine weitere Entgegenhaltungen. *
See also references of WO8905917A1 *

Also Published As

Publication number Publication date
WO1989005917A1 (en) 1989-06-29
US5005363A (en) 1991-04-09
JPH02502559A (ja) 1990-08-16
EP0344333A4 (de) 1989-10-30
PL276459A1 (en) 1989-07-24
AU2829989A (en) 1989-07-19
PL160316B1 (en) 1993-02-26
SU1698481A1 (ru) 1991-12-15
AU615248B2 (en) 1991-09-26

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