EP0332741A1 - Multistage vacuum pump - Google Patents

Multistage vacuum pump Download PDF

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Publication number
EP0332741A1
EP0332741A1 EP88117706A EP88117706A EP0332741A1 EP 0332741 A1 EP0332741 A1 EP 0332741A1 EP 88117706 A EP88117706 A EP 88117706A EP 88117706 A EP88117706 A EP 88117706A EP 0332741 A1 EP0332741 A1 EP 0332741A1
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EP
European Patent Office
Prior art keywords
pump according
sleeve
plug
channel
bore
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88117706A
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German (de)
French (fr)
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EP0332741B1 (en
Inventor
Hanns-Peter Dr. Berges
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
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Leybold AG
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Application filed by Leybold AG filed Critical Leybold AG
Priority to JP1036453A priority Critical patent/JPH01247787A/en
Priority to US07/313,165 priority patent/US4943215A/en
Publication of EP0332741A1 publication Critical patent/EP0332741A1/en
Application granted granted Critical
Publication of EP0332741B1 publication Critical patent/EP0332741B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Definitions

  • the invention relates to a multi-stage vacuum pump with a housing, with at least two scoops in the housing and with a channel connecting the scoops with each other.
  • Multi-stage vacuum pumps are known from DE-OS 31 47 824 and DE-OS 32 44 099. If pumps of this or a similar type are used to evacuate chambers in which etching, coating or other vacuum treatment or manufacturing processes are carried out, it often happens that solids get into the pump. There is even the possibility that such solids only arise during the compression of the gases, that is, during the passage of the gases to be pumped out through the vacuum pump. Examples are the formation of aluminum chloride in aluminum etching, ammonium chloride in coating processes, etc.
  • the present invention has for its object to provide a vacuum pump of the type mentioned, in which the detection of contamination of the endangered passage channels is particularly simple.
  • this object is achieved in that the passage channel which is at risk of contamination is part of an outwardly leading bore which can be closed with a stopper.
  • This solution makes it possible to inspect the connection channel or channels without dismantling the pump. After removing the plug, the connecting channel is z. B. accessible for the introduction of an endoscope.
  • the stopper is expediently provided with a longitudinal bore, to which a pipe section provided with a flange connects to the outside. About the flange z. B. pressure or temperature sensors are inserted in a vacuum-tight manner into the interior of the connecting channel, so that these parameters can be monitored during operation.
  • a sleeve is inserted into the bore, which forms at least a part of the inner wall of the passage channel. Due to the outward opening of the bore, the sleeve in which the solids are deposited can be removed and either cleaned or replaced with a new sleeve. This makes it particularly easy to clean critical areas of passage channels.
  • the exemplary embodiment shown in FIG. 1 is a three-stage vacuum pump 1 with two shafts 2 and 3 and three pairs of rotors 4, 5 or 6, 7 or 8, 9.
  • the axial length of the rotors decreases from the suction side to the pressure side .
  • the rotary pistons are of the claw type (see FIG. 2) and rotate in the scoops 11, 12, 13, which are formed by the shields or side walls 14 to 17 and the housing rings 18 to 20.
  • the shafts 2, 3 are arranged vertically. This also applies to the drive motor 22 arranged next to the pump housing. Below the lower bearing plate 17, the shafts 2, 3 are equipped with gear wheels 23, 24 of the same diameter, which synchronize the movement of the rotor pairs 4, 5 or 6, 7 or 8 , 9 serve.
  • the drive motor 22 also has a gearwheel 25 on its underside. The drive connection is established by a further gearwheel 26 which is in engagement with the gearwheels 24 and 25.
  • the upper bearing wall 14 is equipped with a horizontally arranged connecting flange 28, which forms the inlet 29 of the pump.
  • the inlet channel 31 opens at the end (opening 32) into the scoop chamber 11 of the first stage.
  • the front opening of the first stage is designated 33 and leads into the connecting channel 34.
  • the connecting channel 34 located in the wall 15 communicates with the second stage inlet port 35.
  • the bearing wall 16 is designed accordingly. Below the lowest (third) pump stage is the outlet 36, which is connected to the front outlet opening 37 in the lower bearing wall 17.
  • the side wall 16 shown in FIGS. 3 to 6 serves to separate two scooping spaces 12, 13 of the claw pump 1.
  • one (12) of the scooping spaces is above and the second scooping space (14) below the shield (16).
  • the contour of the scoops 12, 13 is shown in dash-dot lines.
  • the shafts 2, 3 carrying the rotors pass through the disk 16. Their direction of rotation is indicated by the arrows 49 and 51.
  • the passage channel 52 is provided. It connects the outlet 53 of the scoop chamber 12 located on the front side to the inlet 54 of the scoop chamber 13 also located on the front side. Outlet 53 and inlet 54 are formed by arcuate cutouts in the disk 16.
  • the channel 52 is formed by a blind bore 55 in the disk 16, which intersects the outlet 53 and inlet 54 and thus establishes their connection.
  • a sleeve 56 is inserted into the bore 55, which in particular in the region of the section that connects the outlet 53 and the inlet 54 forms the inner wall of the passage 52.
  • Outlet 53 is assigned to the inclined inner end face 57 of the sleeve 56, while the inlet 54 is assigned an opening 58 in the sleeve.
  • the outer end face of the sleeve 56 is equipped with a plug 59.
  • Sleeve 56 and plug 59 are welded together.
  • the plug 59 serves to seal the outer opening of the blind bore 55.
  • the plug is equipped with the radial sealing ring 61.
  • the plug has a thread 62 which is accessible from the outside. This thread 62 receives a screw 63 with which a bolt 64 is fastened on the stopper 59.
  • the plug 59 is equipped with the edge 65. With the help of a further screw 66, the bolt 64 is fastened to the disk 16.
  • the invention has been described with the aid of a multi-stage vacuum pump of the claw type, the stages of which have inlets and outlets located on the end face.
  • the inlets and outlets are usually peripheral. Your connecting channels therefore have different directions than with claw pumps.
  • the possibility of providing them with a sleeve 56 according to the invention is, however, independent of the direction of the channels.
  • FIGS. 5 and 6 show exemplary embodiments in which - as in the other exemplary embodiments - the connecting channel 52 is part of an outwardly leading bore 55 in the side wall 16.
  • the bore 55 is closed with the plug 59.
  • the connecting channel 52 is used for inspections, e.g. B. with the help of an endoscope, accessible without disassembly.
  • FIG. 6 shows a variant in which the stopper 59 is provided with a longitudinal bore 67 in which there is a pipe section 68 leading to the outside.
  • the outer end of the pipe section 68 is provided with a flange 69, on which a blind flange 70 is placed in a vacuum-tight manner in the exemplary embodiment shown.
  • holders for sensors inserted into the connecting channel 52 can be attached to the flange 69 in a vacuum-tight manner.

Abstract

The invention relates to a multistage vacuum pump (1) with a housing with a minimum of two expansion chambers (11, 12, 13) in the housing and with a minimum of one duct (52) joining the expansion chambers to one another; in order to be able to detect contamination in the particularly susceptible connecting ducts by simple means it is proposed to design this as part of a bore hole (55) leading to the outside which can be closed by means of a plug (59). <IMAGE>

Description

Die Erfindung bezieht sich auf eine mehrstufige Vakuumpumpe mit einem Gehäuse, mit mindestens zwei Schöpfräumen in dem Gehäuse und mit einem die Schöpfräume miteinander verbindenden Kanal.The invention relates to a multi-stage vacuum pump with a housing, with at least two scoops in the housing and with a channel connecting the scoops with each other.

Mehrstufige Vakuumpumpen sind aus der DE-OS 31 47 824 sowie der DE-OS 32 44 099 bekannt. Werden Pumpen dieser oder ähnlicher Art zur Evakuierung von Kammern eingesetzt, in denen Ätz-, Beschich­tungs- oder andere Vakuumbehandlungs- oder -herstellverfahren durchgeführt werden, dann geschieht es häufig, daß Feststoffe in die Pumpe gelangen. Es besteht sogar die Möglichkeit, daß solche Feststoffe erst während der Verdichtung der Gase, also während des Durchtritts der abzupumpenden Gase durch die Vakuumpumpe entstehen. Beispiele sind die Entstehung von Aluminium-Chlorid beim Aluminium-Ätzen, Amoniumchlorid bei Beschichtungsverfahren usw.Multi-stage vacuum pumps are known from DE-OS 31 47 824 and DE-OS 32 44 099. If pumps of this or a similar type are used to evacuate chambers in which etching, coating or other vacuum treatment or manufacturing processes are carried out, it often happens that solids get into the pump. There is even the possibility that such solids only arise during the compression of the gases, that is, during the passage of the gases to be pumped out through the vacuum pump. Examples are the formation of aluminum chloride in aluminum etching, ammonium chloride in coating processes, etc.

Lagern sich Stoffe dieser Art in den Durchtrittskanälen für das zu evakuierende Gas ab, dann verringert sich der Durchmesser dieser Kanäle, was eine Reduzierung der Leistung der Vakuumpumpe zur Folge hat. Die Feststellung einer beginnenden Verschmutzung setzt eine Demontage der Pumpe voraus, welche aufwendig und deshalb teuer ist.If substances of this type are deposited in the passage channels for the gas to be evacuated, the diameter of these channels is reduced, which results in a reduction in the performance of the vacuum pump. Determining the onset of contamination requires dismantling the pump, which is complex and therefore expensive.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe der eingangs genannten Art zu schaffen, bei der die Feststellung von Verschmutzungen der gefährdeten Durchtritts­kanäle besonders einfach ist.The present invention has for its object to provide a vacuum pump of the type mentioned, in which the detection of contamination of the endangered passage channels is particularly simple.

Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß der durch Verschmutzungen gefährdete Durchtrittskanal Teil einer nach außen führenden Bohrung ist, die mit einem Stopfen verschließbar ist. Diese Lösung erlaubt es, den oder die Verbindungskanäle ohne Demontage der Pumpe zu inspizieren. Nach der Entfernung des Stopfens ist der Verbindungskanal z. B. für die Einführung eines Endoskopes zugänglich.According to the invention, this object is achieved in that the passage channel which is at risk of contamination is part of an outwardly leading bore which can be closed with a stopper. This solution makes it possible to inspect the connection channel or channels without dismantling the pump. After removing the plug, the connecting channel is z. B. accessible for the introduction of an endoscope.

Zweckmäßig ist der Stopfen mit einer Längsbohrung versehen, an die sich nach außen ein mit einem Flansch versehener Rohrab­schnitt anschließt. Über den Flansch können z. B. Druck- oder Temperatur-Sensoren vakuumdicht in das Innere des Verbindungska­nals eingeführt werden, so daß diese Parameter während des Betriebes überwacht werden können.The stopper is expediently provided with a longitudinal bore, to which a pipe section provided with a flange connects to the outside. About the flange z. B. pressure or temperature sensors are inserted in a vacuum-tight manner into the interior of the connecting channel, so that these parameters can be monitored during operation.

Bei einer weiteren vorteilhaften Lösung ist in die Bohrung eine Hülse eingeschoben ist, welche zumindest einen Teil der Innenwandung des Durchtrittskanals bildet. Durch die nach außen führende Mündung der Bohrung kann die Hülse, in der sich die Feststoffe ablagern, herausgenommen und entweder gereinigt oder durch eine neue Hülse ersetzt werden. Die Reinigung kritischer Bereiche von Durchtrittskanälen ist damit besonders einfach.In a further advantageous solution, a sleeve is inserted into the bore, which forms at least a part of the inner wall of the passage channel. Due to the outward opening of the bore, the sleeve in which the solids are deposited can be removed and either cleaned or replaced with a new sleeve. This makes it particularly easy to clean critical areas of passage channels.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 6 dargestellten Ausführungsbeispielen erläutert werden. Es zeigen:

  • - Figur 1 einen Längsschnitt durch eine mehrstufige Pumpe nach der Erfindung mit nebeneinander angeordnetem Pumpengehäuse und Antriebsmotor,
  • - Figur 2 einen Schnitt durch ein Rotorpaar,
  • - Figur 3 und 5 jeweils einen Schnitt durch eine Seitenwand einer mehrstufigen Vakuumpumpe vom Klauentyp, senkrecht zur Drehachse der Rotoren und
  • - Figur 4 und 6 jeweils einen zum Schnitt nach den Figuren 3 bzw. 5 senkrechten Schnitt durch eine Seitenwand.
Further advantages and details of the invention will be explained on the basis of the exemplary embodiments shown in FIGS. 1 to 6. Show it:
  • 1 shows a longitudinal section through a multi-stage pump according to the invention with a pump housing and drive motor arranged side by side,
  • FIG. 2 shows a section through a pair of rotors,
  • - Figures 3 and 5 each show a section through a side wall of a multi-stage vacuum pump of the claw type, perpendicular to the axis of rotation of the rotors and
  • 4 and 6 each show a section perpendicular to the section according to FIGS. 3 and 5 through a side wall.

Bei dem in Figur 1 dargestellten Ausführungsbeispiel handelt es sich um eine dreistufige Vakuumpumpe 1 mit zwei Wellen 2 und 3 sowie drei Rotorpaaren 4, 5 bzw. 6, 7 bzw. 8, 9. Die axiale Länge der Rotoren nimmt von der Saugseite zur Druckseite ab. Die Drehkolben sind vom Klauentyp (vgl. Figur 2) und rotieren in den Schöpfräumen 11, 12, 13, welche von den Schilden bzw. Seitenwän­den 14 bis 17 und den Gehäuseringen 18 bis 20 gebildet werden.The exemplary embodiment shown in FIG. 1 is a three-stage vacuum pump 1 with two shafts 2 and 3 and three pairs of rotors 4, 5 or 6, 7 or 8, 9. The axial length of the rotors decreases from the suction side to the pressure side . The rotary pistons are of the claw type (see FIG. 2) and rotate in the scoops 11, 12, 13, which are formed by the shields or side walls 14 to 17 and the housing rings 18 to 20.

Die Wellen 2, 3 sind vertikal angeordnet. Dieses gilt ebenfalls für den neben dem Pumpengehäuse angeordneten Antriebsmotor 22. Unterhalb des unteren Lagerschildes 17 sind die Wellen 2, 3 mit Zahnrädern 23, 24 gleichen Durchmessers ausgerüstet, welche der Synchronisation der Bewegung der Rotorpaare 4, 5 bzw. 6, 7 bzw. 8, 9 dienen. Auch der Antriebsmotor 22 weist an seiner Unterseite ein Zahnrad 25 auf. Die Antriebsverbindung wird hergestellt durch ein weiteres Zahnrad 26, das mit den Zahnrädern 24 und 25 in Eingriff steht.The shafts 2, 3 are arranged vertically. This also applies to the drive motor 22 arranged next to the pump housing. Below the lower bearing plate 17, the shafts 2, 3 are equipped with gear wheels 23, 24 of the same diameter, which synchronize the movement of the rotor pairs 4, 5 or 6, 7 or 8 , 9 serve. The drive motor 22 also has a gearwheel 25 on its underside. The drive connection is established by a further gearwheel 26 which is in engagement with the gearwheels 24 and 25.

In der oberen Lagerwand 14 und der unteren Lagerwand 17 stützen sich die Wellen 2, 3 über Wälzlager 27 ab. Die obere Lagerwand 14 ist mit einem horizontal angeordneten Anschlußflansch 28 ausge­rüstet, welcher den Einlaß 29 der Pumpe bildet. Der Einlaßkanal 31 mündet stirnseitig (Öffnung 32) in den Schöpfraum 11 der ersten Stufe. Die stirnseitig angeordnete Auslaßöffnung der ersten Stufe ist mit 33 bezeichnet und führt in den Verbindungs­kanal 34. Der in der Wand 15 befindliche Verbindungskanal 34 steht mit der Einlaßöffnung 35 der zweiten Stufe in Verbindung. Die Lagerwand 16 ist entsprechend gestaltet. Unterhalb der untersten (dritten) Pumpstufe befindet sich der Auslaß 36, der mit der stirnseitigen Auslaßöffnung 37 in der unteren Lagerwand 17 in Verbindung steht.In the upper bearing wall 14 and the lower bearing wall 17, the shafts 2, 3 are supported by roller bearings 27. The upper bearing wall 14 is equipped with a horizontally arranged connecting flange 28, which forms the inlet 29 of the pump. The inlet channel 31 opens at the end (opening 32) into the scoop chamber 11 of the first stage. The front opening of the first stage is designated 33 and leads into the connecting channel 34. The connecting channel 34 located in the wall 15 communicates with the second stage inlet port 35. The bearing wall 16 is designed accordingly. Below the lowest (third) pump stage is the outlet 36, which is connected to the front outlet opening 37 in the lower bearing wall 17.

Die in den Figuren 3 bis 6 dargestellte Seitenwand 16 dient der Trennung von zwei Schöpfräumen 12, 13 der Klauenpumpe 1. Mit Bezug auf die in Figur 1 gewählte Darstellung liegt einer (12) der Schöpfräume oberhalb und der zweite Schöpfraum (14) unterhalb des Schildes (16). Die Kontur der Schöpfräume 12, 13 ist strich­punktiert dargestellt. In diesen Schöpfräumen 12, 13 befindet sich je ein Rotorpaar 6,7 bzw. 8, 9, dessen Konturen gestrichelt dargestellt sind. Die die Rotoren tragenden Wellen 2, 3 durch­setzen die Scheibe 16. Ihre Drehrichtung ist durch die Pfeile 49 und 51 angegeben.The side wall 16 shown in FIGS. 3 to 6 serves to separate two scooping spaces 12, 13 of the claw pump 1. With reference to the illustration selected in FIG. 1, one (12) of the scooping spaces is above and the second scooping space (14) below the shield (16). The contour of the scoops 12, 13 is shown in dash-dot lines. In these scoops 12, 13 there is a pair of rotors 6, 7 or 8, 9, the contours of which are shown in broken lines. The shafts 2, 3 carrying the rotors pass through the disk 16. Their direction of rotation is indicated by the arrows 49 and 51.

Um dem gepumpten Medium den Durchtritt von der hochvakuumseitigen Stufe mit dem Schöpfraum 12 oberhalb der Scheibe 16 zur vor­vakuumseitigen Stufe mit dem Schöpfraum 13 unterhalb der Scheibe zu ermöglichen, ist der Durchtrittskanal 52 vorgesehen. Er verbindet den stirnseitig gelegenen Auslaß 53 des Schöpfraumes 12 mit dem ebenfalls stirnseitig gelegenen Einlaß 54 des Schöpf­raumes 13. Auslaß 53 und Einlaß 54 werden von bogenförmigen Aussparungen in der Scheibe 16 gebildet.In order to allow the pumped medium to pass from the high-vacuum step with the scooping space 12 above the disk 16 to the fore-vacuum step with the scooping space 13 below the disk, the passage channel 52 is provided. It connects the outlet 53 of the scoop chamber 12 located on the front side to the inlet 54 of the scoop chamber 13 also located on the front side. Outlet 53 and inlet 54 are formed by arcuate cutouts in the disk 16.

Der Kanal 52 wird von einer Sackbohrung 55 in der Scheibe 16 gebildet, die Auslaß 53 und Einlaß 54 schneidet und so deren Verbindung herstellt. Bei den Ausführungsbeispielen nach den Figuren 3 und 4 ist in die Bohrung 55 eine Hülse 56 eingeführt, die insbesondere im Bereich des Abschnittes, der Auslaß 53 und Einlaß 54 miteinander verbindet, die Innenwandung des Durch­trittskanales 52 bildet. Auslaß 53 ist der schräg gestalteten inneren Stirnseite 57 der Hülse 56 zugeordnet, während dem Einlaß 54 eine Durchbrechung 58 in der Hülse zugeordnet ist.The channel 52 is formed by a blind bore 55 in the disk 16, which intersects the outlet 53 and inlet 54 and thus establishes their connection. In the exemplary embodiments according to FIGS. 3 and 4, a sleeve 56 is inserted into the bore 55, which in particular in the region of the section that connects the outlet 53 and the inlet 54 forms the inner wall of the passage 52. Outlet 53 is assigned to the inclined inner end face 57 of the sleeve 56, while the inlet 54 is assigned an opening 58 in the sleeve.

Die äußere Stirnseite der Hülse 56 ist mit einem Stopfen 59 ausgerüstet. Hülse 56 und Stopfen 59 sind miteinander ver­schweißt. Zum einen dient der Stopfen 59 dem dichten Verschluß der äußeren Öffnung der Sackbohrung 55. Dazu ist er mit dem Radialdichtring 61 ausgerüstet. Weiterhin weist der Stopfen ein von außen zugängliches Gewinde 62 auf. Dieses Gewinde 62 nimmt eine Schraube 63 auf, mit der ein Riegel 64 auf dem Stopfen 59 befestigt ist. Um dem Riegel 64 eine definierte Position auf dem Stopfen 59 zu geben, ist der Stopfen 59 mit dem Rand 65 ausgerü­stet. Mit Hilfe einer weiteren Schraube 66 ist der Riegel 64 an der Scheibe 16 befestigt.The outer end face of the sleeve 56 is equipped with a plug 59. Sleeve 56 and plug 59 are welded together. On the one hand, the plug 59 serves to seal the outer opening of the blind bore 55. For this purpose, it is equipped with the radial sealing ring 61. Furthermore, the plug has a thread 62 which is accessible from the outside. This thread 62 receives a screw 63 with which a bolt 64 is fastened on the stopper 59. In order to give the bolt 64 a defined position on the plug 59, the plug 59 is equipped with the edge 65. With the help of a further screw 66, the bolt 64 is fastened to the disk 16.

Fallen während des Betriebes des Pumpe 1 Feststoffverschmutzungen an, dann lagern sich diese bevorzugt im Durchtrittskanal 52 ab. Um diesen zu reinigen, genügt es in der Regel, die Schraube 66 zu lösen, die Hülse 56 herauszuziehen und zu reinigen oder durch eine neue zu ersetzen. Läßt sich die Hülse nicht ohne weiteres bewegen, dann besteht die Möglichkeit, auch die Schraube 63 zu lösen und in das Gewinde 62 ein Werkzeug einzusetzen, mit dessen Hilfe festsitzende Hülsen unter Aufwendung größerer Kraft gelöst und herausgezogen werden können. Nach der Reinigung wird wieder der Riegel 64 mit der Schraube 63 auf dem Stopfen 59 befestigt. Die gereinigte Hülse 56 wird in die Bohrung 55 eingeschoben. Danach wird der Riegel 64 mit Hilfe der Schraube 66 an der Scheibe 16 befestigt. Die Position dieser Schraube 66 und der Rand 65 am Stopfen 59 sichern die richtige Lage der Hülse 56 in der Bohrung 55, d. h. daß die schräge Stirnseite 57 der Hülse 56 dem Auslaß 53 und die Durchbrechung 58 dem Einlaß 54 zugeordnet sind.If solid particles accumulate during operation of the pump 1, these are preferably deposited in the passage channel 52. To clean it, it is usually sufficient to loosen the screw 66, pull out the sleeve 56 and clean it or replace it with a new one. If the sleeve cannot be moved easily, there is also the possibility of loosening the screw 63 and inserting a tool into the thread 62, with the aid of which fixed sleeves can be loosened and pulled out with the application of greater force. After cleaning, the bolt 64 is fastened again with the screw 63 on the plug 59. The cleaned sleeve 56 is inserted into the bore 55. Then the bolt 64 is fastened to the disk 16 with the aid of the screw 66. The position of this screw 66 and the edge 65 on the plug 59 ensure the correct position of the sleeve 56 in the bore 55, i. H. that the oblique end face 57 of the sleeve 56 is assigned to the outlet 53 and the opening 58 to the inlet 54.

Die Erfindung ist anhand einer mehrstufigen Vakuumpumpe vom Klauentyp beschrieben worden, deren Stufen stirnseitig gelegene Ein- und Auslässe haben. Bei anderen Vakuumpumpentypen liegen die Einlässe und Auslässe in der Regel peripher. Ihre Verbindungska­näle haben deshalb andere Richtungen als bei Klauenpumpen. Von der Richtung der Kanäle ist jedoch die Möglichkeit, diese mit einer erfindungsgemäßen Hülse 56 zu versehen, unabhängig.The invention has been described with the aid of a multi-stage vacuum pump of the claw type, the stages of which have inlets and outlets located on the end face. In other types of vacuum pumps, the inlets and outlets are usually peripheral. Your connecting channels therefore have different directions than with claw pumps. The possibility of providing them with a sleeve 56 according to the invention is, however, independent of the direction of the channels.

Die Figuren 5 und 6 zeigen Ausführungsbeispiele, bei denen - wie bei den übrigen Ausführungsbeispielen - der Verbindungskanal 52 Teil einer nach außen führenden Bohrung 55 in der Seitenwand 16 ist. Die Bohrung 55 ist mit dem Stopfen 59 verschlossen. Nach dem Entfernen des Stopfens 59 ist der Verbindungskanal 52 für In­spektionen, z. B. mit Hilfe eines Endoskopes, zugänglich, ohne daß eine Demontage erforderlich ist.FIGS. 5 and 6 show exemplary embodiments in which - as in the other exemplary embodiments - the connecting channel 52 is part of an outwardly leading bore 55 in the side wall 16. The bore 55 is closed with the plug 59. After removing the plug 59, the connecting channel 52 is used for inspections, e.g. B. with the help of an endoscope, accessible without disassembly.

Figur 6 zeigt eine Variante, bei der der Stopfen 59 mit einer Längsbohrung 67 versehen ist, in sich der ein nach außen führen­der Rohrabschnitt 68 befindet. Das äußere Ende des Rohrab­schnittes 68 ist mit einem Flansch 69 versehen, auf den beim dargestellten Ausführungsbeispiel ein Blindflansch 70 vakuumdicht aufgesetzt ist. Statt eines Blindflansches 70 können Halterungen für in den Verbindungskanal 52 eingeführte Sensoren am Flansch 69 vakuumdicht befestigt sein.FIG. 6 shows a variant in which the stopper 59 is provided with a longitudinal bore 67 in which there is a pipe section 68 leading to the outside. The outer end of the pipe section 68 is provided with a flange 69, on which a blind flange 70 is placed in a vacuum-tight manner in the exemplary embodiment shown. Instead of a blind flange 70, holders for sensors inserted into the connecting channel 52 can be attached to the flange 69 in a vacuum-tight manner.

Claims (10)

1. Mehrstufige Vakuumpumpe (1) mit einem Gehäuse mit mindestens zwei Schöpfräumen (11, 12, 13) in dem Gehäuse und mit mindestens einem die Schöpfräume miteinander verbindenden Kanal (52), dadurch gekennzeichnet, daß der Kanal (52) Teil einer nach außen führenden Bohrung (55) ist, die mit einem Stopfen (59) verschließbar ist.1. Multi-stage vacuum pump (1) with a housing with at least two pumping chambers (11, 12, 13) in the housing and with at least one channel connecting the pumping chambers (52), characterized in that the channel (52) is part of an outside leading bore (55) which can be closed with a stopper (59). 2. Pumpe nach Anspruch 1, dadurch gekennzeichnet, daß die Schöpfräume (11, 12, 13) durch eine Seitenwand (15, 16) voneinander getrennt sind, in welchem sich die den Verbin­dungskanal (52) bildende Bohrung (55) befindet.2. Pump according to claim 1, characterized in that the scooping spaces (11, 12, 13) are separated from one another by a side wall (15, 16) in which the bore (55) forming the connecting channel (52) is located. 3. Pumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß der Stopfen (59) mit einer Längsbohrung (67) versehen ist, an die sich nach außen ein mit einem Flansch (70) versehener Rohrabschnitt (68) anschließt.3. Pump according to claim 1 or 2, characterized in that the plug (59) is provided with a longitudinal bore (67), to which a pipe section (68) provided with a flange (70) is connected to the outside. 4. Pumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß am Stopfen (59) eine Hülse (56) befestigt ist, welche zumindest einen Teil der Innenwandung des Verbindungskanals (52) bildet.4. Pump according to claim 1 or 2, characterized in that a sleeve (56) is attached to the stopper (59), which forms at least part of the inner wall of the connecting channel (52). 5. Pumpe nach Anspruch 4, dadurch gekennzeichnet, daß die Hülse mit Öffnungen bzw. Durchbrechungen (57, 58) ausgerüstet ist, welche den Ein- und Austritt der durch den Verbindungskanal (52) strömenden Medien dienen.5. Pump according to claim 4, characterized in that the sleeve is equipped with openings or openings (57, 58) which serve the entry and exit of the media flowing through the connecting channel (52). 6. Pumpe nach Anspruch 4 oder 5, dadurch gekennzeichnet, daß das innenliegende Ende der Hülse (56) abgeschrägt ist.6. Pump according to claim 4 or 5, characterized in that the inner end of the sleeve (56) is chamfered. 7. Pumpe nach Anspruch 4, 5 oder 6, dadurch gekennzeichnet, daß der Stopfen (59) mit einem Gewinde (62) ausgerüstet ist.7. Pump according to claim 4, 5 or 6, characterized in that the plug (59) is equipped with a thread (62). 8. Pumpe nach einem der Ansprüche 4 bis 7, dadurch gekenn­zeichnet, daß auf dem Stopfen (59) ein Riegel (64) ange­ordnet ist, der an der Wand (16) lösbar befestigt ist.8. Pump according to one of claims 4 to 7, characterized in that on the plug (59) a bolt (64) is arranged, which is releasably attached to the wall (16). 9. Pumpe nach Anspruch 8, dadurch gekennzeichnet, daß dem Riegel (64) ein am Stopfen (59) vorgesehener Anschlag oder Rand (65) zur Festlegung seiner Position zugeordnet ist.9. Pump according to claim 8, characterized in that the bolt (64) on the stopper (59) provided stop or edge (65) is assigned to determine its position. 10. Pumpe nach Anspruch 3 und 4, dadurch gekennzeichnet, daß der Stopfen (59) sowohl mit dem Rohrabschnitt (68) als auch mit der Hülse (56) ausgerüstet ist.10. Pump according to claim 3 and 4, characterized in that the plug (59) is equipped with both the pipe section (68) and with the sleeve (56).
EP88117706A 1988-02-29 1988-10-25 Multistage vacuum pump Expired - Lifetime EP0332741B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1036453A JPH01247787A (en) 1988-02-29 1989-02-17 Multistage vacuum pump
US07/313,165 US4943215A (en) 1988-02-29 1989-02-17 Multistage vacuum pump with bore for fouling removal

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP88102986 1988-02-29
EP88102986 1988-02-29

Publications (2)

Publication Number Publication Date
EP0332741A1 true EP0332741A1 (en) 1989-09-20
EP0332741B1 EP0332741B1 (en) 1991-09-18

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ID=8198761

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88117706A Expired - Lifetime EP0332741B1 (en) 1988-02-29 1988-10-25 Multistage vacuum pump

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EP (1) EP0332741B1 (en)
DE (1) DE3865009D1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0476631A1 (en) * 1990-09-21 1992-03-25 Ebara Corporation Multistage vacuum pump
EP1024290A1 (en) * 1999-01-29 2000-08-02 The BOC Group plc Vacuum pump systems
DE10019066A1 (en) * 2000-04-18 2001-10-25 Leybold Vakuum Gmbh Vacuum pump with two cooperating rotors has drive shaft with drive pulley engaging directly with take-off hear on rotor shaft to form transmission stage

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US1626484A (en) * 1926-11-24 1927-04-26 James Mccaffrey R Pump
GB315365A (en) * 1928-07-12 1930-02-06 Gebrueder Ludwig
US1854318A (en) * 1926-06-17 1932-04-19 Westinghouse Electric & Mfg Co Compressor
GB531798A (en) * 1939-08-02 1941-01-10 Siemens Brothers & Co Ltd Improvements in or relating to electrical filter networks
FR1120279A (en) * 1955-01-24 1956-07-03 Hermetic compressor unit
DE2158868A1 (en) * 1971-11-27 1973-06-07 Claas Maschf Gmbh Geb MACHINE FOR CRUSHING BULK WASTE
US3837764A (en) * 1972-05-11 1974-09-24 Robinair Mfg Corp Multi-stage rotary vacuum pump with separate oil reservoir
DE2503020A1 (en) * 1975-01-25 1976-07-29 Wikotool Syst Tech Maschbau Compressor or motor with meshing rotary pistons - has housing cut from length of extruded profile, and end covers

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DE2158866A1 (en) * 1971-11-27 1973-05-30 Engstfeld Wilh Fa Melt out gassing lance - with porous refractory tube

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1854318A (en) * 1926-06-17 1932-04-19 Westinghouse Electric & Mfg Co Compressor
US1626484A (en) * 1926-11-24 1927-04-26 James Mccaffrey R Pump
GB315365A (en) * 1928-07-12 1930-02-06 Gebrueder Ludwig
GB531798A (en) * 1939-08-02 1941-01-10 Siemens Brothers & Co Ltd Improvements in or relating to electrical filter networks
FR1120279A (en) * 1955-01-24 1956-07-03 Hermetic compressor unit
DE2158868A1 (en) * 1971-11-27 1973-06-07 Claas Maschf Gmbh Geb MACHINE FOR CRUSHING BULK WASTE
US3837764A (en) * 1972-05-11 1974-09-24 Robinair Mfg Corp Multi-stage rotary vacuum pump with separate oil reservoir
DE2503020A1 (en) * 1975-01-25 1976-07-29 Wikotool Syst Tech Maschbau Compressor or motor with meshing rotary pistons - has housing cut from length of extruded profile, and end covers

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0476631A1 (en) * 1990-09-21 1992-03-25 Ebara Corporation Multistage vacuum pump
US5173041A (en) * 1990-09-21 1992-12-22 Ebara Corporation Multistage vacuum pump with interstage solid material collector and cooling coils
EP1024290A1 (en) * 1999-01-29 2000-08-02 The BOC Group plc Vacuum pump systems
DE10019066A1 (en) * 2000-04-18 2001-10-25 Leybold Vakuum Gmbh Vacuum pump with two cooperating rotors has drive shaft with drive pulley engaging directly with take-off hear on rotor shaft to form transmission stage
US6964559B2 (en) 2000-04-18 2005-11-15 Leybold Vakuum Gmbh Two shaft vacuum pump with cantilevered rotors

Also Published As

Publication number Publication date
EP0332741B1 (en) 1991-09-18
DE3865009D1 (en) 1991-10-24

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