EP1422423B1 - Apparatus with evacuatable chamber - Google Patents
Apparatus with evacuatable chamber Download PDFInfo
- Publication number
- EP1422423B1 EP1422423B1 EP03029746A EP03029746A EP1422423B1 EP 1422423 B1 EP1422423 B1 EP 1422423B1 EP 03029746 A EP03029746 A EP 03029746A EP 03029746 A EP03029746 A EP 03029746A EP 1422423 B1 EP1422423 B1 EP 1422423B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- vacuum
- housing
- friction
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
- F04D29/602—Mounting in cavities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
Definitions
- the invention relates to a device with a friction vacuum pump and with a housing in which at least one evacuated chamber is located, as well as with the further features of the preamble of the claim 1.
- the associated friction vacuum pump is equipped with several connection openings. These each have a different pressure level.
- Friction vacuum pumps of this type are preferably used the evacuation of particle beam devices (z. B. mass spectrometers) with each other by diaphragms separate chambers in which during operation of the Corpuscular beam device generates different pressures and should be maintained.
- the present invention is based on the object a device of the kind concerned here with a substantial one improved connection geometry between the chamber (s) to be evacuated and the friction vacuum pump to accomplish.
- a particular advantage of the invention is that a friction pump can be used in the the functions described at the beginning of the usual, one-piece housing distributed over two components are.
- An inner component secures the assignment of Chassis, stator and rotor to each other. This creates a friction vacuum pump in the form of a slide, the already many functional tests, z. B. the balancing, can be subjected.
- the outer case has the job, which works well without external housing Friction vacuum pump to the application of Customize customers. It is no longer necessary, one Manufacture or maintain a variety of friction pump types, but only one or a few universal, compact and functional pumping units (Inserts, cartridges). It's enough for the customer the outer dimensions of the slide-in friction vacuum pump to inform.
- a particularly simple solution for him is that he is in the case or Housing part of his provided with the bore device (Plant, device or the like with one or several chambers to be evacuated) only one slide-shaped Can use friction vacuum pump.
- working order Condition then forms the housing or housing part the customer's facility the second outer Housing of the friction vacuum pump according to the invention.
- a friction vacuum pump 1 with stator 3, Rotor 4 and chassis 5 shown.
- the motor drive 6, 7, whose armature 7 is about the bearing 8 in the chassis 5 is supported.
- the anchor 7 With the anchor 7 the shaft 9 led out of the chassis 5 is connected, which carries the rotor 4.
- the axis of rotation of the rotor system is denoted by 11.
- the friction vacuum pump 1 according to FIG 1 three pumping stages 12, 13, 14, two of which (12, 13) as turbomolecular vacuum pumping stages and one (14) as Molecular (Holweck) pumping stage are formed. To the Molecular pumping stage 14 joins the outlet of the Pump 17 on.
- the pump 1 is provided with two housings 18, 19 equipped.
- the inner housing 18 is substantially cylindrical and surrounds the stator 3.
- On his high-vacuum-side end face is with one inside directed edge 20 equipped, the stator 3 and in this case at the same time the upper one Stator ring forms.
- the housing 18th attached to the chassis 5, with the help of the flange 21.
- Flange 21 and chassis 5 are vacuum-tight connected with each other. This is between the flange 21st and the chassis 5, the sealing ring 21 'is arranged.
- the outer housing 19 has an inner bore 22 with an inward grading 23, whose height the width of the rim 20 corresponds to the first housing 18.
- a seal 24 which expedient in the front side of the housing 18 is inserted.
- a radial Sealing is possible.
- the housing 19 a device, e.g. the flange 25, with which it is attached to the chassis 5 or on the housing 18 is. After loosening this attachment, the from the inner housing 18 and the components therein formed unit as a whole from the bore 22nd be taken out. It forms one of the second housing 19 independent slot 27.
- the first, high vacuum side pump stage 12 is of four pairs of rotor blade rows and stator blade rows. Your inlet, the effective gas passage area, is designated 26.
- the edge 20 of the Housing 18 surrounds the gas passage area 26 and forms a passage opening 28 for entering the pump 1 Gases.
- the first pumping stage 12 is closed the second pumping stage 13, which consists of three pairs of each a stator blade row and a rotor blade row consists. Your inlet is designated 29.
- the second pumping stage 13 is from the first pumping stage 12 spaced.
- the selected distance (height) a secures the free accessibility of the gas molecules to be pumped Gas inlet 29.
- the distance a is greater than a quarter, preferably greater than one third of the Diameter of the rotor system 4.
- the adjoining Holweck pump includes one rotating cylinder section 30, the outside and inside in a known manner, each with a thread groove 31, 32 equipped stator elements 33, 34 facing.
- Another, formed by the inner housing 18 gas passage opening is arranged laterally and with 35 designated. It serves the passage of gases directly the inlet 29 of the second pumping stage 13 is supplied become.
- the outer housing 19 has the task of the pump 1 and two pump stages (12, 13) of this pump with the device of the customer.
- the housing 19 is formed in the embodiment of Figure 1 in such a way that the levels of all connection openings 36, 37 are located laterally. This is especially the Distance of the opening 37 to the associated gas inlet 29th very small, so the pumping speed of the pumping stage 13 negligible conductance losses negligible are. This would also for any further connection opening apply, the downstream of the connection opening 37 would be located. Otherwise, the diameter exceeds the connection opening 37, the height a by about the Double. This measure also serves to reduce the conductance losses between inlet 29 and port 37.
- the side connection openings can be equipped with one flange each. In the embodiment according to Figure 1 is a common Flange 39 is provided.
- the illustrated pump 1 or its pump-effective elements are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the connection opening 37, a pressure of about 10 -2 to 10 -4 mbar is generated.
- a high pumping speed is to be generated (eg 200 l / s).
- the subsequent, two-stage Holweck pumping stage (29, 30, 29, 31) ensures a high prevacuum resistance, so that usually the pumping speed of the second pumping stage is independent of the fore-vacuum pressure.
- FIG. 2 shows a device 51 according to the invention with chambers to be evacuated 52, 53, 54 and a push-in Unit 27, as described for Figure 1 has been.
- the housing of the device e.g. a particle beam device - Is essentially in one piece formed and designated 55.
- Close the chambers to be evacuated 53, 54 is the housing equipped with the bore 22 in which the insert 27 is located.
- About the gas passage openings 28, 35 in the housing 18 of the insert 27 and the connection openings 36, 37 are the chambers 53, 54 with the respective Inlets 26, 29 in conjunction.
- the distances between the chambers to be evacuated 53, 54 and the Inlets 26, 29 are optimally small.
- the two components of two are concentric Housing formed, of which the inner of the centering, Assignment and mounting of chassis 5, stator 3 and rotor 4 is used, which thereby the already operational, form independent drawer from the outer casing.
- the outer housing 19, 55 seals the vacuum pump to the outside and serves to connect with those to be evacuated Chambers, whether via connecting flanges or in that it already forms part of the facility with the chambers to be evacuated.
- tie rod system It is particularly useful in the inner slot the to replace inner housings with a tie rod system. This allows a more compact design of the interior Slot. In addition, held together by the tie rod system Components are made easier. For example, the tie rods take over the centering of stator rings, so that they themselves are no longer with Centering must be equipped.
- FIGS. 3 and 4 show exemplary embodiments (FIG 3: longitudinal section through a slot 27; Figure 4: cross section through a slot 27 at the level of the gas passage opening 35) for an inner slot 27 with a Tie rod system 61.
- This includes three to six (or more) tie rods 62 and holes and threads in the components (Chassis 5, Stator 3), those of the tie rod system 61 are joined together to form a structural unit should.
- Figures 3 and 4 show that the gas passage opening 35 over the entire circumference of the insert 27 extends and interrupted only by the tie rods 62 is.
- the access of gas molecules to the inlet 29 of the pumping stage 13 is thus free without hindrance.
- the attachment the outer case - be it the second case 18, which fulfills further functions of a pump housing, or a housing 55, which is part of a device with to be evacuated chambers - takes place on the flange 21st of the chassis 5.
- FIG. 3 makes the structure particularly advantageous Recognize tie rod 62. They are designed in two parts.
- the pre-vacuum side tie rod sections 63 with their heads 64 pass through the stator of the pumping stage 13 and the outer stator element 33 of the pumping stage 14. Their threaded ends are in the Screwed flange 21 of the chassis 5.
- the length of the Heads 64 determines the axial extent of the gas passage opening 35th
- Heads 64 each provided with an internal thread, in the respective high-vacuum-side tie rod sections 65 can be screwed.
- Their heads 66 are the highest Statorring the pumping stage 13 on. In other enforce they cause the stator rings of the pumping stage 12 and thereby when screwed in not just a connection the high vacuum stage 12 with the remaining stages 13 and 14 but also a centering of the stator rings.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Description
Die Erfindung bezieht sich auf ein Gerät mit einer Reibungsvakuumpumpe und mit einem Gehäuse, in dem sich mindestens eine evakuierbare Kammer befindet, sowie mit den weiteren Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to a device with a friction vacuum pump and with a housing in which at least one evacuated chamber is located, as well as with the further features of the preamble of the claim 1.
Ein Gerät dieser Art ist aus der EP-A-0 603 694 (= DE 43 31 589) bekannt. Die zugehörige Reibungsvakuumpumpe ist mit mehreren Anschlussöffnungen ausgerüstet. Diese haben jeweils ein unterschiedliches Druckniveau. Reibungsvakuumpumpen dieser Art dienen vorzugsweise der Evakuierung von Korpuskularstrahlgeräten (z. B. Massenspektrometern) mit durch Blenden voneinander getrennten Kammern, in denen während des Betriebs des Korpuskularstrahlgerätes unterschiedliche Drücke erzeugt und aufrecht erhalten werden soll. Solche Geräte mit den zugehörigen, zu evakuierbaren Kammern befinden sich in einem unabhängigen Gehäuse. Mit diesem Gehäuse sind die Anschlussöffnungen der Reibungsvakuumpumpe über ein separates Anschlussgehäuse mit relativ langen Anschlussleitungen (15, 26, 17) verbunden mit dem Nachteil relativ hoher Leitwertverluste.A device of this kind is known from EP-A-0 603 694 (= DE 43 31 589) known. The associated friction vacuum pump is equipped with several connection openings. These each have a different pressure level. Friction vacuum pumps of this type are preferably used the evacuation of particle beam devices (z. B. mass spectrometers) with each other by diaphragms separate chambers in which during operation of the Corpuscular beam device generates different pressures and should be maintained. Such devices with the associated, to be evacuated chambers in an independent housing. With this case are the connection openings of the friction vacuum pump over a separate connector housing with relatively long Connecting lines (15, 26, 17) associated with the disadvantage relatively high conductance losses.
Aus den Dokumenten DE-A-34 02 549 und DE-A-43 14 419 sind weitere Reibungsvakuumpumpen (Turbomolekularpumpen, Pumpen mit Turbomolekularpumpenstufen und anderen Reibungspumpenstufen) mit einer Bauart bekannt, wie sie z. Zt. üblich ist und auf dem Markt angeboten wird. Sie besitzen ein Chassis, das mit dem Antriebsmotor ausgerüstet ist und auf dem sich der Rotor abstützt. Außerdem stützt sich das Gehäuse der Pumpe auf dem Chassis ab. Es umgibt den Rotor und den Stator und auch mehr oder weniger das Chassis. Das Gehäuse sichert die Zuordnung der genannten Bauteile zueinander. Weiterhin hat es die Aufgabe, den aus Statorhalbring-Scheiben und Distanzringen bestehenden Stator exakt zu zentrieren, damit die bei Reibungsvakuumpumpen notwendigen kleinen Spalte eingehalten werden können. Das Gehäuse dichtet die Vakuumpumpe nach außen hin ab. Schließlich ist es mit dem stirnseitig angeordneten Anschlussflansch ausgerüstet, mit dem die Reibungsvakuumpumpen an Einrichtungen mit zu evakuierenden Kammern angeschlossen werden.From the documents DE-A-34 02 549 and DE-A-43 14 419 are further friction vacuum pumps (turbomolecular pumps, Pumps with turbomolecular pump stages and other friction pump stages) known with a type as z. Is currently common and offered on the market. she own a chassis equipped with the drive motor is and on which the rotor is supported. Furthermore The housing of the pump is supported on the chassis from. It surrounds the rotor and the stator and more or less the chassis. The housing secures the assignment said components to each other. Farther It has the task of Statorhalbring discs and Center spacers existing stator exactly, so that necessary for friction vacuum pumps small Column can be maintained. The housing seals the vacuum pump to the outside. Finally it is equipped with the connection flange on the front side, with which the friction vacuum pumps on facilities be connected with evacuated chambers.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, ein gerät der hier betroffenen Art mit einer wesentlich verbesserten Anschluss-Geometrie zwischen der/den zu evakuierenden Kammern und der Reibungsvakuumpumpe zu schaffen.The present invention is based on the object a device of the kind concerned here with a substantial one improved connection geometry between the chamber (s) to be evacuated and the friction vacuum pump to accomplish.
Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale des Patent-Anspruchs 1 gelöst.According to the invention this object is achieved by the characterizing Features of the patent claim 1 solved.
Durch diese Maßnahmen wird es möglich, auf ein separates, aufwendiges Anschlussgehäuse verzichten zu können. Außerdem werden Leitwertverluste durch die kammernahe Anbindung der Reibungsvakuumpumpe klein gehalten und damit die prozessabhängigen niedrigen Kammerdrücke technisch günstig realisiert. Eine optimale Leitwert-Situation wird erreicht.These measures make it possible to focus on a separate, to be able to do without expensive connection housing. In addition, conductance losses are due to the near-by Connection of the friction vacuum pump kept small and so that the process-dependent low chamber pressures realized technically favorable. An optimal conductance situation is achieved.
Ein besonderer Vorteil der Erfindung besteht darin, dass eine Reibungspumpe eingesetzt werden kann, bei der die eingangs beschriebenen Funktionen des bisher üblichen, einteiligen Gehäuses auf zwei Bauteile verteilt sind. Ein inneres Bauteil sichert die Zuordnung von Chassis, Stator und Rotor zueinander. Dadurch entsteht eine Reibungsvakuumpumpe in Form eines Einschubs, die bereits vielen Funktionsprüfungen, z. B. der des Auswuchtens, unterworfen werden kann. Das äußere Gehäuse hat die Aufgabe, die auch ohne äußeres Gehäuse funktionstüchtige Reibungsvakuumpumpe an die Applikation des Kunden anzupassen. Es ist nicht mehr erforderlich, eine Vielfalt von Reibungspumpentypen herzustellen oder bereitzuhalten, sondern lediglich eine oder wenige universelle, kompakte und funktionsfähige Pumpeinheiten (Einschübe, Kartuschen). Es reicht aus, den Kunden über die äußeren Abmessungen der einschubförmigen Reibungsvakuumpumpe zu informieren. Eine besonders einfache Lösung für ihn besteht darin, dass er in dem Gehäuse oder Gehäuseteil seiner mit der Bohrung versehenden Einrichtung (Anlage, Gerät oder dergleichen mit einer oder mehreren zu evakuierenden Kammern) lediglich eine einschubförmige Reibungsvakuumpumpe einsetzen kann. Im betriebsfertigen Zustand bildet dann das Gehäuse oder Gehäuseteil der Einrichtung des Kunden das zweite äußere Gehäuse der erfindungsgemäßen Reibungsvakuumpumpe. A particular advantage of the invention is that a friction pump can be used in the the functions described at the beginning of the usual, one-piece housing distributed over two components are. An inner component secures the assignment of Chassis, stator and rotor to each other. This creates a friction vacuum pump in the form of a slide, the already many functional tests, z. B. the balancing, can be subjected. The outer case has the job, which works well without external housing Friction vacuum pump to the application of Customize customers. It is no longer necessary, one Manufacture or maintain a variety of friction pump types, but only one or a few universal, compact and functional pumping units (Inserts, cartridges). It's enough for the customer the outer dimensions of the slide-in friction vacuum pump to inform. A particularly simple solution for him is that he is in the case or Housing part of his provided with the bore device (Plant, device or the like with one or several chambers to be evacuated) only one slide-shaped Can use friction vacuum pump. In working order Condition then forms the housing or housing part the customer's facility the second outer Housing of the friction vacuum pump according to the invention.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von den Figuren 1 bis 4 dargestellten Ausführungsbeispielen erläutert werden. Es zeigen
- Figur 1 eine mit drei Pumpstufen ausgerüstete Reibungsvakuumpumpe nach der Erfindung,
- Figur 2 ein mit einer Reibungsvakuumpumpe nach der Erfindung ausgerüstetes Gerät und
Figuren 3 und 4 Schnitte durch eine Ausführung des Einschubs mit Zugankern.
- FIG. 1 shows a friction pump equipped with three pump stages according to the invention,
- FIG. 2 shows a device equipped with a friction vacuum pump according to the invention; and
- Figures 3 and 4 sections through an embodiment of the insert with tie rods.
In Figur 1 ist eine Reibungsvakuumpumpe 1 mit Stator 3,
Rotor 4 und Chassis 5 dargestellt. Im Chassis 5 befindet
sich der Motorantrieb 6, 7, dessen Anker 7 sich über
die Lager 8 im Chassis 5 abstützt. Mit dem Anker 7
ist die aus dem Chassis 5 herausgeführte Welle 9 verbunden,
die den Rotor 4 trägt. Die Drehachse des Rotorsystems
ist mit 11 bezeichnet.1 is a friction vacuum pump 1 with
Insgesamt besitzt die Reibungsvakuumpumpe 1 nach Figur
1 drei Pumpstufen 12, 13, 14, von denen zwei (12, 13)
als Turbomolekularvakuumpumpstufen und eine (14) als
Molekular(Holweck)-Pumpstufe ausgebildet sind. An die
Molekularpumpstufe 14 schließt sich der Auslass der
Pumpe 17 an.Overall, the friction vacuum pump 1 according to FIG
1 three
Erfindungsgemäß ist die Pumpe 1 mit zwei Gehäusen 18,
19 ausgerüstet. Das innere Gehäuse 18 ist im wesentlichen
zylindrisch und umgibt den Stator 3. Auf seiner
hochvakuumseitigen Stirnseite ist es mit einem nach innen
gerichteten Rand 20 ausgerüstet, der dem Stator 3
aufliegt und in diesem Falle gleichzeitig den oberen
Statorring bildet. Vorvakuumseitig ist das Gehäuse 18
am Chassis 5 befestigt, und zwar mit Hilfe des Flansches
21. Flansch 21 und Chassis 5 sind vakuumdicht
miteinander verbunden. Dazu ist zwischen dem Flansch 21
und dem Chassis 5 der Dichtring 21' angeordnet.According to the invention, the pump 1 is provided with two
Das äußere Gehäuse 19 besitzt eine innere Bohrung 22
mit einer einwärts gerichteten Stufung 23, deren Höhe
der Breite des Randes 20 am ersten Gehäuse 18 entspricht.
Zwecks Abdichtung des Spaltes zwischen den
beiden Gehäusen 18, 19 zur Hochvakuumseite der Pumpe 1
hin befindet sich zwischen deren Rand 20 und der Stufung
23 eine Dichtung 24, die zweckmäßig in die Stirnseite
des Gehäuses 18 eingelassen ist. Auch eine radiale
Abdichtung ist möglich. Vorvakuumseitig besitzt
auch das Gehäuse 19 eine Vorrichtung, z.B. den Flansch
25, mit dem es am Chassis 5 oder auch am Gehäuse 18 befestigt
ist. Nach dem Lösen dieser Befestigung kann die
vom inneren Gehäuse 18 und den darin befindlichen Bauteilen
gebildete Einheit als Ganzes aus der Bohrung 22
herausgenommen werden. Sie bildet einen vom zweiten Gehäuse
19 unabhängigen Einschub 27.The
Die erste, hochvakuumseitig gelegene Pumpstufe 12 besteht
aus vier Paaren von Rotorschaufelreihen und Statorschaufelreihen.
Ihr Einlass, die wirksame Gasdurchtrittsfläche,
ist mit 26 bezeichnet. Der Rand 20 des
Gehäuses 18 umgibt die Gasdurchtrittsfläche 26 und bildet
eine Durchtrittsöffnung 28 für in die Pumpe 1 eintretenden
Gase. An die erste Pumpstufe 12 schließt sich
die zweite Pumpstufe 13 an, die aus drei Paaren von je
einer Statorschaufelreihe und einer Rotorschaufelreihe
besteht. Ihr Einlass ist mit 29 bezeichnet.The first, high vacuum
Die zweite Pumpstufe 13 ist von der ersten Pumpstufe 12
beabstandet. Der gewählte Abstand (Höhe) a sichert die
freie Zugänglichkeit der zu fördernden Gasmoleküle zum
Gaseinlass 29. Zweckmäßig ist der Abstand a größer als
ein Viertel, vorzugsweise größer als ein Drittel des
Durchmessers des Rotorsystems 4. The
Die sich daran anschließende Holweck-Pumpe umfasst einen
rotierenden Zylinderabschnitt 30, dem außen und innen
in bekannter Weise mit jeweils einer Gewindenut 31,
32 ausgerüstete Statorelemente 33, 34 gegenüberstehen.The adjoining Holweck pump includes one
rotating
Eine weitere, vom inneren Gehäuse 18 gebildete Gasdurchtrittsöffnung
ist seitlich angeordnet und mit 35
bezeichnet. Sie dient dem Durchtritt von Gasen, die unmittelbar
dem Einlass 29 der zweiten Pumpstufe 13 zugeführt
werden.Another, formed by the
Das äußere Gehäuse 19 hat die Aufgabe, die Pumpe 1 bzw.
zwei Pumpenstufen (12, 13) dieser Pumpe mit der Einrichtung
des Kunden zu verbinden. Das Gehäuse 19 ist
beim Ausführungsbeispiel nach Figur 1 derart ausgebildet,
dass sich die Ebenen sämtlicher Anschlussöffnungen
36, 37 seitlich befinden. Dadurch ist insbesondere der
Abstand der Öffnung 37 zum zugehörigen Gaseinlass 29
sehr klein, so dass das Saugvermögen der Pumpstufe 13
beeinträchtigende Leitwertverluste vernachlässigbar
sind. Dieses würde auch für jede weitere Anschlussöffnung
gelten, die stromabwärts von der Anschlussöffnung
37 gelegen wäre. Im übrigen überschreitet der Durchmesser
der Anschlussöffnung 37 die Höhe a um etwa das
Doppelte. Auch diese Maßnahme dient der Verringerung
der Leitwertverluste zwischen Einlass 29 und Anschlussöffnung
37. Die seitlichen Anschlussöffnungen
können mit je einem Flansch ausgerüstet sein. Beim Ausführungsbeispiel
nach Figur 1 ist ein gemeinsamer
Flansch 39 vorgesehen.The
Die dargestellte Pumpe 1 bzw. ihre pumpwirksamen Elemente
(Stator-, Rotorschaufeln, Gewindestufen) sind
zweckmäßig derart ausgebildet, dass im Bereich der Anschlussöffnung
36 ein Druck von 10-4 bis 10-7, vorzugsweise
10-5 bis 10-6, und im Bereich der Anschlussöffnung
37 ein Druck von etwa 10-2 bis 10-4 mbar erzeugt wird.
Dadurch ergibt sich für die erste Pumpstufe 12 die Notwendigkeit,
für ein Kompressionsverhältnis von 102 bis
104, vorzugsweise größer 100, zu sorgen. Mit der zweiten
Pumpstufe soll ein hohes Saugvermögen erzeugt werden
(z.B. 200 l/s). Die sich anschließende, zweistufige
Holweck-Pumpstufe (29, 30; 29, 31) sichert eine hohe
Vorvakuumbeständigkeit, so dass üblicherweise das Saugvermögen
der zweiten Pumpstufe vom Vorvakuumdruck unabhängig
ist.The illustrated pump 1 or its pump-effective elements (stator, rotor blades, screw threads) are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the
Für den Fall, dass im Bereich der Anschlussöffnung 36
ein besonders hohes Saugvermögen nicht gefordert wird,
kann dieses Ziel durch entsprechende Gestaltung der
Schaufeln der ersten Pumpstufe 12 erreicht werden. Eine
andere Möglichkeit besteht darin, vor dem Einlass 26
der ersten Pumpstufe eine Blende 38 anzuordnen, deren
Innendurchmesser das gewünschte Saugvermögen bestimmt.In the event that in the region of the connection opening 36
a particularly high pumping speed is not required,
can achieve this goal by appropriate design of
Shovels of the
Figur 2 zeigt eine Einrichtung 51 nach der Erfindung
mit zu evakuierenden Kammern 52, 53, 54 und einer einschubförmigen
Einheit 27, wie sie zu Figur 1 beschrieben
wurde. Das Gehäuse der Einrichtung - z.B. ein Korpuskularstrahlgerät
- ist im wesentlichen einstückig
ausgebildet und mit 55 bezeichnet. In unmittelbarer Nähe
der zu evakuierenden Kammern 53, 54 ist das Gehäuse
mit der Bohrung 22 ausgerüstet, in der sich der Einschub
27 befindet. Über die Gasdurchtrittsöffnungen 28,
35 im Gehäuse 18 des Einschubs 27 und die Anschlussöffnungen
36, 37 stehen die Kammern 53, 54 mit den jeweiligen
Einlässen 26, 29 in Verbindung. Durch die Integration
des Einschubs 27 im Gehäuse der Einrichtung
51 entfallen gesonderte Anschlussmittel. Die Abstände
zwischen den zu evakuierenden Kammern 53, 54 und den
Einlässen 26, 29 sind optimal klein. FIG. 2 shows a
Der Kern der vorliegenden Idee liegt darin, dass eine
weitgehend funktionsfähige Einheit (Einschub, Kartusche)
einer Reibungsvakuumpumpe in einem der Applikation
angepassten Gehäuse lösbar gehaltert ist. Das bisher
beschriebene innere Gehäuse 18 hat die Aufgabe, die
Funktionselemente der Reibungsvakuumpumpe zu der gewünschten
Einheit zusammenzufassen. Anstelle des Gehäuses
können auch andere Bauteile - z.B. Zuganker, Klammern
oder dgl. - vorhanden sein, die diese Aufgabe erfüllen.
Wesentlich ist, dass für die Erfüllung der
Funktionen des sonst üblichen Gehäuses beim Gegenstand
der Erfindung zwei Bauelemente 18 bzw. 19, 55 vorgesehen
sind. Bei den Ausführungen nach den Figuren 1 bis 3
werden die beiden Bauelemente von zwei konzentrischen
Gehäusen gebildet, von denen das innere der Zentrierung,
Zuordnung und Halterung von Chassis 5, Stator 3
und Rotor 4 dient, welche dadurch den bereits betriebsfähigen,
vom äußeren Gehäuse unabhängigen Einschub bilden.
Das äußere Gehäuse 19, 55 dichtet die Vakuumpumpe
nach außen ab und dient der Verbindung mit den zu evakuierenden
Kammern, sei es über Anschlussflansche oder
dadurch, dass es bereits Bestandteil der Einrichtung
mit den zu evakuierenden Kammern ist.The essence of the present idea is that a
largely functional unit (inset, cartridge)
a friction vacuum pump in one of the application
adapted housing is releasably supported. That so far
described
Besonders zweckmäßig ist es, beim inneren Einschub das innere Gehäuse durch ein Zugankersystem zu ersetzen. Dieses ermöglicht eine kompaktere Gestaltung des inneren Einschubs. Außerdem können vom Zugankersystem zusammengehaltene Bauteile einfacher hergestellt werden. Beispielsweise übernehmen die Zuganker die Zentrierung von Statorringen, so dass diese selbst nicht mehr mit Zentriermitteln ausgerüstet sein müssen.It is particularly useful in the inner slot the to replace inner housings with a tie rod system. This allows a more compact design of the interior Slot. In addition, held together by the tie rod system Components are made easier. For example, the tie rods take over the centering of stator rings, so that they themselves are no longer with Centering must be equipped.
Die Figuren 3 und 4 zeigen Ausführungsbeispiele (Figur
3: Längsschnitt durch einen Einschub 27; Figur 4: Querschnitt
durch einen Einschub 27 in Höhe der Gasdurchtrittsöffnung
35) für einen inneren Einschub 27 mit einem
Zugankersystem 61. Dieses umfasst drei bis sechs
(oder mehr) Zuganker 62 sowie Bohrungen und Gewinde in
den Bauteilen (Chassis 5, Stator 3), die vom Zugankersystem
61 zu einer Baueinheit zusammengefügt werden
sollen.FIGS. 3 and 4 show exemplary embodiments (FIG
3: longitudinal section through a
Die Figuren 3 und 4 lassen erkennen, dass sich die Gasdurchtrittsöffnung
35 über den gesamten Umfang des Einschubs
27 erstreckt und nur durch die Zuganker 62 unterbrochen
ist. Der Zugang der Gasmoleküle zum Einlass
29 der Pumpstufe 13 (in Figur 4 in Draufsicht dargestellt)
ist dadurch nahezu ungehindert frei. Die Befestigung
des äußeren Gehäuses - sei es das zweite Gehäuse
18, das weitere Funktionen eines Pumpgehäuses erfüllt,
oder ein Gehäuse 55, das Bestandteil eines Gerätes mit
zu evakuierenden Kammern ist - erfolgt am Flansch 21
des Chassis 5.Figures 3 and 4 show that the gas passage opening
35 over the entire circumference of the
Figur 3 lässt den Aufbau besonders vorteilhaft gestalteter
Zuganker 62 erkennen. Sie sind zweiteilig ausgebildet.
Die vorvakuumseitigen Zugankerabschnitte 63 mit
ihren Köpfen 64 durchsetzen die Statorringe der Pumpstufe
13 und das äußere Statorelement 33 der Pumpstufe
14. Ihre mit einem Gewinde versehenen Enden sind in den
Flansch 21 des Chassis 5 eingeschraubt. Die Länge der
Köpfe 64 bestimmt die axiale Ausdehnung der Gasdurchtrittsöffnung
35.FIG. 3 makes the structure particularly advantageous
Recognize
Im Bereich ihrer hochvakuumseitigen Stirnseite sind die
Köpfe 64 jeweils mit einem Innengewinde versehen, in
die jeweils hochvakuumseitige Zugankerabschnitte 65
einschraubbar sind. Ihre Köpfe 66 liegen dem obersten
Statorring der Pumpstufe 13 auf. In übrigen durchsetzen
sie die Statorringe der Pumpstufe 12 und bewirken dadurch
im eingeschraubten Zustand nicht nur eine Verbindung
der Hochvakuumstufe 12 mit den übrigen Stufen 13
und 14 sondern auch eine Zentrierung der Statorringe.In the area of their high-vacuum-side end are the
Claims (20)
- Device (51) having a friction vacuum pump and having a housing (55), in which are situated at least two successively disposed evacuable chambers (52, 53, 54), in which during operation different pressures are generated and maintained, and which has a bore (22) for receiving the friction vacuum pump (1) and which is equipped with a connection opening (36, 37), by which an inlet of the friction vacuum pump is connected to one of the chambers to be evacuated, characterized in that the friction vacuum pump is of an at least two-stage design and there are accordingly at least two connection openings (36, 37), that the connection openings (36, 37) are situated laterally alongside the friction vacuum pump (1), that the bore (22) is disposed laterally alongside the chambers (52, 53, 54) in such a way that the distances between the chambers to be evacuated and the respective inlets (26, 29) of the friction pump stages (12, 13, 14) are optimally small and that the chambers (52, 53, 54) are connected by the connection openings (36, 37) in the common housing (55) to the respective inlets (26, 29) of friction pump stages (12, 13, 14).
- Device according to claim 1, characterized in that the friction vacuum pump comprises a housing, a chassis (5), a stator (3) and a rotor (4), that for performing the functions of the housing of the friction vacuum pump two elements (18, 61; 55) are provided, of which the first, inner element (18, 61) is used to associate, centre and mount chassis (5), stator (3) and rotor (4) and is assembled with said components as a unit, and of which the second element (55) is used to seal off the friction vacuum pump from the outside as well as for connection to the chamber to be evacuated and is formed by the housing (55) of the device (51).
- Device according to claim 2, characterized inthat the friction vacuum pump (1) is designed at least in sections as a turbomolecular vacuum pump having rotor blade rows and stator blade rows,that the stator comprises a plurality of stator rings andthat the first, inner element (18, 61), in addition to the association and mounting of chassis (5), stator (3) and rotor (4), is used also to centre the stator rings and forms a unit with said components.
- Device according to claim 2 or 3, characterized in that the first inner element of the pump (1) is an inner housing (18).
- Device according to claim 4, characterized in that in the region of the high-vacuum side of the pump (1) a seal (24) is situated between inner housing (18) and outer housing (19, 55).
- Device according to claim 4 or 5, characterized in that inner and outer housing (18; 19, 55) in the region of the fore-vacuum side of the pump (1) are equipped with flanges, which are fastened detachably to the chassis (5).
- Device according to one of claims 4 to 6, characterized in that the inner housing (18) of the pump (1) at the high-vacuum side is equipped with an inwardly directed edge (20).
- Device according to claim 7, characterized in that the inwardly directed edge (20) of the pump (1) forms a first, high-vacuum-side stator ring.
- Device according to one of the preceding claims 4 to 8, characterized in that associated with the high-vacuum-side end face of the inner housing (18) of the pump (1) is a stepped reduction (23) of the bore (22) of the outer housing (19, 55).
- Device according to claims 5 and 9, characterized in that an O-ring (24) is situated between the end face of the inner housing (18) and the step (23), formed by the diameter reduction, of the outer housing (19, 55) of the pump (1).
- Device according to one of the preceding claims 2 to 10, characterized in that the high-vacuum-side end of the inner housing (18) forms a gas through-opening (28) for the gases that enter the pump (1).
- Device according to claim 11, characterized in that the friction vacuum pump has three pump stages (12, 13, 14) and that the inner housing (18) of the pump (1) is equipped with at least one further, downstream through-opening for gases that enter the third pump stage (14).
- Device according to claim 12, characterized in that the third pump stage (14) is designed as a molecular pump stage.
- Device according to one of the preceding claims, characterized in that for the connection openings (36, 37) a common connection flange (39) is provided, which is disposed laterally on the second housing (55).
- Device according to claim 2 or 3, characterized in that the first inner element of the pump (1) is formed by a tie-rod system (61).
- Device according to claim 15, characterized in that the tie-rod system (61) comprises a plurality of tie-rods (62), which connect the stator (3) to the chassis (5).
- Device according to claim 16, characterized in that the tie-rods (62) penetrate the stator rings.
- Device according to one of claims 15 to 17, characterized in that the tie-rods (62) are of a two-part construction and comprise in each case a fore-vacuum-side tie-rod portion (63) with head (64) and a high-vacuum-side tie-rod portion (65) with head (66).
- Device according to claim 18, characterized in that the length of the head (64) of the fore-vacuum-side tie-rod portion (63) determines the axial extent of a through-opening (35) between high-vacuum stage (12) and fore-vacuum stage (13 and/or 13, 14).
- Device according to one of claims 18 or 19, characterized in that the heads (64) of the fore-vacuum-side tie-rod portions (63) are equipped in each case at the front end with a thread, into which the high-vacuum-side tie-rod portions (65) are screwable.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19823270 | 1998-05-26 | ||
DE19823270 | 1998-05-26 | ||
DE19901340.3A DE19901340B4 (en) | 1998-05-26 | 1999-01-15 | Friction vacuum pump with chassis, rotor and housing and device equipped with a friction vacuum pump of this type |
DE19901340 | 1999-01-15 | ||
EP99917896.5A EP1090231B2 (en) | 1998-05-26 | 1999-03-27 | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
Related Parent Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99917896.5A Division EP1090231B2 (en) | 1998-05-26 | 1999-03-27 | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
EP99917896.5A Division-Into EP1090231B2 (en) | 1998-05-26 | 1999-03-27 | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
EP99917896.5 Division | 1999-03-27 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1422423A1 EP1422423A1 (en) | 2004-05-26 |
EP1422423B1 true EP1422423B1 (en) | 2005-10-05 |
EP1422423B2 EP1422423B2 (en) | 2016-01-20 |
Family
ID=7868823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03029746.9A Expired - Lifetime EP1422423B2 (en) | 1998-05-26 | 1999-03-27 | Apparatus with evacuatable chamber |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1422423B2 (en) |
JP (1) | JP5069264B2 (en) |
KR (1) | KR100613957B1 (en) |
DE (1) | DE19901340B4 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8529218B2 (en) | 2007-02-28 | 2013-09-10 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum pump having nested chambers associated with a mass spectrometer |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3777498B2 (en) * | 2000-06-23 | 2006-05-24 | 株式会社荏原製作所 | Turbo molecular pump |
GB0414316D0 (en) | 2004-06-25 | 2004-07-28 | Boc Group Plc | Vacuum pump |
DE102007044945A1 (en) * | 2007-09-20 | 2009-04-09 | Pfeiffer Vacuum Gmbh | vacuum pump |
DE102014105582A1 (en) * | 2014-04-17 | 2015-10-22 | Pfeiffer Vacuum Gmbh | vacuum pump |
EP3564538B1 (en) | 2019-02-20 | 2021-04-07 | Pfeiffer Vacuum Gmbh | Vacuum system and method for manufacturing the same |
KR102669882B1 (en) * | 2022-02-08 | 2024-05-28 | (주)엘오티베큠 | Turbo molecular pump |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1942139A (en) * | 1930-12-26 | 1934-01-02 | Central Scientific Co | Molecular vacuum pump |
DE2229725B2 (en) * | 1972-06-19 | 1975-05-07 | Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln | Centrifugal vacuum pump for high vacua - has rotor projecting beyond coupling flange |
DE2442614A1 (en) † | 1974-09-04 | 1976-03-18 | Siemens Ag | Rotary high vacuum pump - has second inlet opening so that it can produce two levels of vacuum |
DE3402549A1 (en) * | 1984-01-26 | 1985-08-01 | Leybold-Heraeus GmbH, 5000 Köln | Molecular vacuum pump |
CH674785A5 (en) * | 1988-03-07 | 1990-07-13 | Dino Systems Limited | Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls |
EP0408791B1 (en) * | 1989-07-20 | 1994-03-16 | Leybold Aktiengesellschaft | Drag pump with a bell-shaped rotor |
JPH04330397A (en) * | 1991-04-30 | 1992-11-18 | Fujitsu Ltd | Turbo molecular pump |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
DE4331589C2 (en) * | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vacuum pumping system |
EP0603694A1 (en) * | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vacuum system |
DE4314419A1 (en) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Friction vacuum pump with bearing support |
FR2736103B1 (en) * | 1995-06-30 | 1997-08-08 | Cit Alcatel | TURBOMOLECULAR PUMP |
-
1999
- 1999-01-15 DE DE19901340.3A patent/DE19901340B4/en not_active Expired - Lifetime
- 1999-03-27 EP EP03029746.9A patent/EP1422423B2/en not_active Expired - Lifetime
- 1999-03-27 KR KR1020007013247A patent/KR100613957B1/en not_active IP Right Cessation
-
2009
- 2009-03-12 JP JP2009059969A patent/JP5069264B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8529218B2 (en) | 2007-02-28 | 2013-09-10 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum pump having nested chambers associated with a mass spectrometer |
US8858188B2 (en) | 2007-02-28 | 2014-10-14 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum pump or vacuum apparatus with vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
EP1422423A1 (en) | 2004-05-26 |
JP2009121491A (en) | 2009-06-04 |
DE19901340B4 (en) | 2016-03-24 |
JP5069264B2 (en) | 2012-11-07 |
EP1422423B2 (en) | 2016-01-20 |
KR20010043815A (en) | 2001-05-25 |
DE19901340A1 (en) | 1999-12-09 |
KR100613957B1 (en) | 2006-08-18 |
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