EP0964999B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP0964999B1
EP0964999B1 EP98907961A EP98907961A EP0964999B1 EP 0964999 B1 EP0964999 B1 EP 0964999B1 EP 98907961 A EP98907961 A EP 98907961A EP 98907961 A EP98907961 A EP 98907961A EP 0964999 B1 EP0964999 B1 EP 0964999B1
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EP
European Patent Office
Prior art keywords
pump
chamber
gas
housing
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98907961A
Other languages
German (de)
French (fr)
Other versions
EP0964999A1 (en
Inventor
Hans Josef Burghard
Wolfgang Giebmanns
Rudolf Bahnen
Jürgen Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
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Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0964999A1 publication Critical patent/EP0964999A1/en
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Publication of EP0964999B1 publication Critical patent/EP0964999B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting

Definitions

  • the invention relates to a vacuum pump with at least a scoop and at least one adjacent to the scoop Space, such as engine, drive, transmission, crankshaft or the like room.
  • vacuum pumps need to be here Promote corrosive and / or toxic gases. These gases can enter the vacuum pump Adjacent rooms usually arrive through seals (shaft seals, labyrinth seals etc.) are separated from the creative spaces. Corrosive gases cause corrosion or abrasion in these rooms, leading to premature wear of bearings or lead to damage to other components located there. It can also cause corrosive and toxic gases neighboring spaces on the way above the creative spaces Atmosphere. In the semiconductor industry, will the need for dry, that is, at least in relation oil-free vacuum pumps are getting bigger and bigger. The reason for this is that the processes involved in the vacuum chambers connected to the vacuum pumps run off, protected from disruptive hydrocarbons are. The used in the semiconductor industry or resulting gases to be pumped by the vacuum pump often the property during their compression form. Deposits of this type can also be found in the Creative space adjacent rooms may be harmful.
  • JP-A-6310 5294 JP-A-6310 5294:
  • This document discloses a scroll vacuum pump with a fixed and a rotating component.
  • the rotating component is driven by a Drive shaft and a grease-lubricated bearing.
  • the warehouse is in a room.
  • To evaporation of the Preventing grease becomes one in the storage room Maintain nitrogen atmosphere. Bit by bit the nitrogen penetrates holes in the rotating component and gets into the pump.
  • This describes a multi-stage claw vacuum pump.
  • This has an inert gas supply.
  • the inert gas is fed to one or more pump stages to prevent that getting into or during the pump the compression of the gases into the pump Solid particles not on the rotors or walls of the scoops.
  • the ballast gas becomes one of the two stages fed directly to the pump via the line.
  • the present invention is based on the object to design a vacuum pump of the type mentioned at the outset, that the dangers of causing damage in the rooms adjacent to the creative rooms as well as the Escape of corrosive or toxic gases from the Vacuum pump are largely eliminated.
  • a vacuum pump according to this invention has an outer gas ballast or purge gas inlet and one immediately on Gas inlet housing located. Between gas inlet and gas inlet are the or the flushing rooms adjacent to the creative space. At a Pump designed in the specified manner has that gas entering via the gas ballast inlet has the effect to rinse the room or rooms adjacent to the creative space. Corrosive or toxic gases penetrate through seals; which their sealing function is not or no longer completely meet in the adjacent to the creative space Space, then together with the ballast or purge gas is pumped back into the pump before it Can cause damage or get into the atmosphere.
  • Another advantage of the invention is that that the designer regarding the choice of location the gas ballast or purge gas inlet more options be available. Finally, on Gas inlet located gas inlet constantly open be held so that the adjacent to the scoop Room sets a negative pressure. The danger, that toxic or corrosive Gases from leaks in the outer housing penetrate outside is further reduced.
  • the rotary vane vacuum pump shown in Figure 1 includes a scoop chamber 1 and a drive motor 2.
  • the scoop chamber 1 is located in the pump room 3, formed by the outer housing 4, the engine in the engine compartment 5, formed by the motor housing 6, which to the outer pump housing 4 is flanged.
  • In the chamber 1 are the scoops 7 and 8 with their rotors 9 and 10.
  • the rotors 9 and 10 are on the motor shaft 11 attached, which is stored several times in the scoop chamber 2 and is sealed.
  • the larger level 7, 9 of the Pump is the inlet stage and stands with inlet 12 in connection.
  • the outlet 13 is at the outlet stage 8, 10 connected. Entry level 7, 9 and exit level 8, 10 are interconnected via the bore 14.
  • In this bore 14 opens the bore 15. It stands with the pump chamber 3 in connection and is referred to as designated gas ballast or purge gas inlet.
  • the gas ballast outside the pump or purge gas inlet is designated 16. It includes the valve 17 and the throttle 18.
  • the gas inlet 16 is attached to the motor housing 6 in an area remote from the pump housing 4.
  • the valve 17 When the valve 17 is open, that is to say during a gas ballast or flushing operation, the gas flows through the engine compartment 5 and through the pump compartment 3 to the inlet of the bore 15, the gas inlet located directly on the pump chamber housing. Gases entering the pump or engine compartment through leaky shaft seals are flushed back into outlet stage 8, 10. If necessary, baffles and / or a plurality of inlet connections 16 can be present in order to ensure complete flushing of the spaces adjacent to the scooping spaces 7, 8.
  • An inert gas storage container can also be connected to the inlet connection 16 if an inert gas, for example N 2 , is to be flushed or gas ballast is to be generated.
  • the ballast gas or purge gas inlet 15 near the pumping chamber is constantly open to pump room 3. Is the valve 17 closed, turns up in the pump room 3 and in the engine compartment 5 a vacuum. In the pump room 3 and the engine room 5 gases can leak through the housings 4, 6 do not penetrate to the outside. With open Valve 16 maintains throttle 18 a negative pressure in the housings 4 and 6.
  • Figure 2 shows a four-stage dry piston vacuum pump with their head space parts 21 and 22, in which are the cylindrical scoops 23 to 26. Is located between the housing parts 21, 22 the crankshaft chamber 27, the housing designated 28 is.
  • the pistons 31 to 34 are stepped and form eight pump chambers, some of which are connected in parallel are, so that the pump shown four pump stages Has. Your entrance is 35, your outlet is 36 designated.
  • the last annular pump chamber forms the last stage of the vacuum pump shown. Your entrance is designated 37, its outlet 38.
  • the last stage inlet 37 of the pump protrudes the line 39 with the crankshaft space 27 in connection. Your mouth forms the gas inlet close to the pumping chamber 41. It is located near one end of the Crankshaft housing 28. In the area of the opposite Side of the crankshaft housing 28 is the Gas ballast or purge gas inlet 16 with valve 17 and Throttle 18. In the one already described for FIG. 1 Way can flow in through the gas inlet 16 Gas flushed the crankshaft chamber 27 and a negative pressure therein be maintained.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

Die Erfindung betrifft eine Vakuumpumpe mit mindestens einem Schöpfraum und mindestens einem dem Schöpfraum benachbarten Raum, wie Motor- Antriebs-, Getriebe-, Kurbelwellen- oder dergleichen -Raum.The invention relates to a vacuum pump with at least a scoop and at least one adjacent to the scoop Space, such as engine, drive, transmission, crankshaft or the like room.

In vielen Industriezweigen müssen Vakuumpumpen der hier betroffenen Art ätzende und/oder toxische Gase fördern. Diese Gase können in die den Schöpfräumen der Vakuumpumpen benachbarten Räume gelangen, die in aller Regel durch Dichtungen (Wellendicht-ringe, Labyrinthdichtungen usw.) von den Schöpfräumen getrennt sind. Ätzende Gase verursachen in diesen Räumen Korrosionen oder Abrasionen, die zu einem vorzeitigen Verschleiß von Lagern oder zu Schäden an anderen dort befindlichen Bauteilen führen. Darüber hinaus können ätzende und toxische Gase auf dem Weg über den Schöpfräumen benachbarte Räume in die Atmosphäre gelangen. In der Halbleiterindustrie, wird der Bedarf an trockenen, das heißt zumindest in Bezug auf den Schöpfraum ölfreien Vakuumpumpen immer größer. Der Grund dafür liegt darin, dass die Prozesse, die in den an die Vakuumpumpen angeschlossenen Vakuumkammern ablaufen, vor störenden Kohlenwasserstoffen geschützt sind. Die in der Halbleiterindustrie eingesetzten oder entstehenden, von der Vakuumpumpe zu fördernden Gase haben häufig die Eigenschaft, während ihrer Kompression bilden. Auch Ablagerungen dieser Art können in den dem Schöpfraum benachbarten Räumen schädlich sein.In many industries, vacuum pumps need to be here Promote corrosive and / or toxic gases. These gases can enter the vacuum pump Adjacent rooms usually arrive through seals (shaft seals, labyrinth seals etc.) are separated from the creative spaces. Corrosive gases cause corrosion or abrasion in these rooms, leading to premature wear of bearings or lead to damage to other components located there. It can also cause corrosive and toxic gases neighboring spaces on the way above the creative spaces Atmosphere. In the semiconductor industry, will the need for dry, that is, at least in relation oil-free vacuum pumps are getting bigger and bigger. The reason for this is that the processes involved in the vacuum chambers connected to the vacuum pumps run off, protected from disruptive hydrocarbons are. The used in the semiconductor industry or resulting gases to be pumped by the vacuum pump often the property during their compression form. Deposits of this type can also be found in the Creative space adjacent rooms may be harmful.

Zum Stand der Technik gehört der Inhalt folgender Dokumente :The content of the following documents belongs to the state of the art :

JP-A-6310 5294:JP-A-6310 5294:

Dieses Dokument offenbart eine Scroll-Vakuumpumpe mit einem feststehenden und einem kreisenden Bauteil. Der Antrieb des kreisenden Bauteils erfolgt über eine Antriebswelle und ein fettgeschmiertes Lager. Das Lager befindet sich in einem Raum. Um eine Verdampfung des Lagerfettes zu verhindern, wird im Lagerraum eine Stickstoff-Atmosphäre aufrecht erhalten. Nach und nach durchsetzt der Stickstoff Bohrungen im kreisenden Bauteil und gelangt in die Pumpe.This document discloses a scroll vacuum pump with a fixed and a rotating component. The The rotating component is driven by a Drive shaft and a grease-lubricated bearing. The warehouse is in a room. To evaporation of the Preventing grease becomes one in the storage room Maintain nitrogen atmosphere. Bit by bit the nitrogen penetrates holes in the rotating component and gets into the pump.

WO 92/15786:WO 92/15786:

Sie beschreibt eine mehrstufige Klauenvakuumpumpe. Diese besitzt eine Inertgaszufuhr. Das Inertgas wird einer oder mehreren Pumpstufen zugeführt, um zu verhindern, dass sich in die Pumpe gelangende oder sich während der Verdichtung der Gase in die Pumpe bildende Feststoffpartikel nicht an den Rotoren oder Wandungen der Schöpfräume anlagern.It describes a multi-stage claw vacuum pump. This has an inert gas supply. The inert gas is fed to one or more pump stages to prevent that getting into or during the pump the compression of the gases into the pump Solid particles not on the rotors or walls of the scoops.

EP-A-597 730:EP-A-597 730:

Daraus ist eine ein- und zweistufig betreibbare Drehschieber-Vakuumpumpe mit einer Gasballasteinrichtung bekannt. Das Ballastgas wird einer der beiden Stufen der Pumpe über die Leitung unmittelbar zugeführt. This is a one and two-stage operated rotary vane vacuum pump with a gas ballast facility known. The ballast gas becomes one of the two stages fed directly to the pump via the line.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe der eingangs erwähnten Art derart auszubilden, dass die Gefahren der Entstehung von Schäden in den den Schöpfräumen benachbarten Räumen sowie des Austretens von ätzenden oder toxischen Gasen aus der Vakuumpumpe weitestgehend beseitigt sind.The present invention is based on the object to design a vacuum pump of the type mentioned at the outset, that the dangers of causing damage in the rooms adjacent to the creative rooms as well as the Escape of corrosive or toxic gases from the Vacuum pump are largely eliminated.

Erfindungsgemäß wird diese Aufgabe dadurch gelöst, dass die Vakuumpumpe mit einer Gasballasteinrichtung ausgerüstet ist und dass die Zufuhr des Ballastgases über den dem Schöpfraum benachbarten Raum erfolgt. Eine Vakuumpumpe gemäß dieser Erfindung hat einen äußeren Gasballast- oder Spülgaseinlass und einen unmittelbar am Schöpfraumgehäuse gelegenen Gaseintritt. Zwischen Gaseinlass und Gaseintritt befinden sich der oder die zu spülenden, dem Schöpfraum benachbarten Räume. Bei einer in der angegebenen Weise ausgebildeten Pumpe hat das über den Gasballasteinlass eintretende Gas die Wirkung, den oder die dem Schöpfraum benachbarten Räume zu spülen. Dringen ätzende oder toxische Gase durch Dichtungen; die ihre Dichtfunktion nicht oder nicht mehr vollständig erfüllen, in den dem Schöpfraum benachbarten Raum ein, dann werden sie zusammen mit dem Ballast- bzw. Spülgas zurück in die Pumpe gefördert, bevor sie Schäden anrichten oder in die Atmosphäre gelangen können. Ein weiterer Vorteil der Erfindung liegt darin, dass dem Konstrukteur in Bezug auf die Wahl des Ortes des Gasballast- bzw. Spülgaseinlasses mehr Möglichkeiten zur Verfügung stehen. Schließlich kann der am Schöpfraumgehäuse gelegene Gaseintritt ständig offen gehalten werden, so dass sich in dem dem Schöpfraum benachbarten Raum ein Unterdruck einstellt. Die Gefahr, dass toxische oder ätzende Gase durch Undichtigkeiten im äußeren Gehäuse nach außen dringen, ist dadurch weiter vermindert.According to the invention, this object is achieved in that the vacuum pump is equipped with a gas ballast device is and that the supply of ballast gas is over the space adjacent to the creative space takes place. A vacuum pump according to this invention has an outer gas ballast or purge gas inlet and one immediately on Gas inlet housing located. Between gas inlet and gas inlet are the or the flushing rooms adjacent to the creative space. At a Pump designed in the specified manner has that gas entering via the gas ballast inlet has the effect to rinse the room or rooms adjacent to the creative space. Corrosive or toxic gases penetrate through seals; which their sealing function is not or no longer completely meet in the adjacent to the creative space Space, then together with the ballast or purge gas is pumped back into the pump before it Can cause damage or get into the atmosphere. Another advantage of the invention is that that the designer regarding the choice of location the gas ballast or purge gas inlet more options be available. Finally, on Gas inlet located gas inlet constantly open be held so that the adjacent to the scoop Room sets a negative pressure. The danger, that toxic or corrosive Gases from leaks in the outer housing penetrate outside is further reduced.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 und 2 schematisch dargestellten Ausführungsbeispielen erläutert werden. Es zeigen

  • Figur 1 eine zweistufige Drehschiebervakuumpumpe und
  • Figur 2 eine vierstufige Kolbenvakuumpumpe.
Further advantages and details of the invention will be explained on the basis of exemplary embodiments shown schematically in FIGS. 1 and 2. Show it
  • Figure 1 is a two-stage rotary vane vacuum pump and
  • Figure 2 shows a four-stage piston vacuum pump.

Die in Figur 1 dargestellte Drehschiebervakuumpumpe umfaßt ein Schöpfraumgehäuse 1 und einen Antriebsmotor 2. Das Schöpfraumgehäuse 1 befindet sich im Pumpenraum 3, gebildet vom äußeren Gehäuse 4, der Motor im Motorraum 5, gebildet vom Motorgehäuse 6, das an das äußere Pumpengehäuse 4 angeflanscht ist. Im Schöpfraumgehäuse 1 befinden sich die Schöpfräume 7 und 8 mit ihren Rotoren 9 und 10. Die Rotoren 9 und 10 sind auf der Motorwelle 11 befestigt, welche mehrfach im Schöpfraumgehäuse 2 gelagert und abgedichtet ist. Die größere Stufe 7, 9 der Pumpe ist die Einlassstufe und steht mit dem Einlass 12 in Verbindung. Der Auslass 13 ist an die Auslassstufe 8, 10 angeschlossen. Einlassstufe 7, 9 und Auslassstufe 8, 10 sind über die Bohrung 14 miteinander verbunden. In diese Bohrung 14 mündet die Bohrung 15. Sie steht mit dem Pumpenraum 3 in Verbindung und wird im weiteren als schöpfraumnaher Gasballast- oder Spülgaseintritt bezeichnet. Der außerhalb der Pumpe befindliche Gasballast- oder Spülgaseinlass ist mit 16 bezeichnet. Er umfasst das Ventil 17 und die Drossel 18.The rotary vane vacuum pump shown in Figure 1 includes a scoop chamber 1 and a drive motor 2. The scoop chamber 1 is located in the pump room 3, formed by the outer housing 4, the engine in the engine compartment 5, formed by the motor housing 6, which to the outer pump housing 4 is flanged. In the chamber 1 are the scoops 7 and 8 with their rotors 9 and 10. The rotors 9 and 10 are on the motor shaft 11 attached, which is stored several times in the scoop chamber 2 and is sealed. The larger level 7, 9 of the Pump is the inlet stage and stands with inlet 12 in connection. The outlet 13 is at the outlet stage 8, 10 connected. Entry level 7, 9 and exit level 8, 10 are interconnected via the bore 14. In this bore 14 opens the bore 15. It stands with the pump chamber 3 in connection and is referred to as designated gas ballast or purge gas inlet. The gas ballast outside the pump or purge gas inlet is designated 16. It includes the valve 17 and the throttle 18.

Bei dem in Figur 1 dargestellten Ausführungsbeispiel ist der Gaseinlass 16 in einem vom Pumpengehäuse 4 entfernt liegenden Bereich am Motorgehäuse 6 angebracht. Bei geöffnetem Ventil 17, also bei einem Gasballast- bzw. Spülbetrieb, strömt das Gas durch den Motorraum 5 und durch den Pumpenraum 3 zum Eintritt der Bohrung 15, dem unmittelbar am Schöpfraumgehäuse gelegenen Gaseintritt. Durch undichte Wellendichtungen in den Pumpen- oder Motorraum gelangende Gase werden in die Auslassstufe 8, 10 zurückgespült. Bei Bedarf können Schikanen und/oder mehrere Einlassstutzen 16 vorhanden sein, um eine vollständige Spülung der den Schöpfräumen 7, 8 benachbarten Räume sicherzustellen. An den Einlassstutzen 16 kann außerdem ein Inertgas-Vorratsbehälter angeschlossen sein, wenn mit einem Inertgas, z.B. N2, gespült oder Gasballast erzeugt werden soll.In the exemplary embodiment shown in FIG. 1, the gas inlet 16 is attached to the motor housing 6 in an area remote from the pump housing 4. When the valve 17 is open, that is to say during a gas ballast or flushing operation, the gas flows through the engine compartment 5 and through the pump compartment 3 to the inlet of the bore 15, the gas inlet located directly on the pump chamber housing. Gases entering the pump or engine compartment through leaky shaft seals are flushed back into outlet stage 8, 10. If necessary, baffles and / or a plurality of inlet connections 16 can be present in order to ensure complete flushing of the spaces adjacent to the scooping spaces 7, 8. An inert gas storage container can also be connected to the inlet connection 16 if an inert gas, for example N 2 , is to be flushed or gas ballast is to be generated.

Der schöpfraumnahe Ballastgas- oder Spülgaseintritt 15 ist zum Pumpenraum 3 ständig offen. Ist das Ventil 17 geschlossen, stellt sich im Pumpenraum 3 und im Motorraum 5 ein Vakuum ein. In den Pumpenraum 3 und den Motorraum 5 gelangende Gase können deshalb durch Lecks in den Gehäusen 4, 6 nicht nach außen dringen. Bei offenem Ventil 16 sorgt die Drossel 18 für die Aufrechterhaltung eines Unterdruckes in den Gehäusen 4 und 6.The ballast gas or purge gas inlet 15 near the pumping chamber is constantly open to pump room 3. Is the valve 17 closed, turns up in the pump room 3 and in the engine compartment 5 a vacuum. In the pump room 3 and the engine room 5 gases can leak through the housings 4, 6 do not penetrate to the outside. With open Valve 16 maintains throttle 18 a negative pressure in the housings 4 and 6.

Figur 2 zeigt eine vierstufige trockene Kolbenvakuumpumpe mit ihren Schöpfraumgehäuseteilen 21 und 22, in denen sich die zylindrischen Schöpfräume 23 bis 26 befinden. Zwischen den Gehäuseteilen 21, 22 befindet sich der Kurbelwellenraum 27, dessen Gehäuse mit 28 bezeichnet ist. Die Kolben 31 bis 34 sind jeweils gestuft und bilden acht Pumpenkammern, die zum Teil parallel geschaltet sind, so dass die dargestellte Pumpe vier Pumpstufen hat. Ihr Einlass ist mit 35, ihr Auslass mit 36 bezeichnet. In der älteren deutschen Patentanmeldung 196 34 519.7 ist eine Vakuumpumpe dieser Art im einzelnen beschrieben. Die letzte ringförmige Pumpkammer bildet die letzte Stufe der dargestellten Vakuumpumpe. Ihr Einlass ist mit 37, ihr Auslass mit 38 bezeichnet. Figure 2 shows a four-stage dry piston vacuum pump with their head space parts 21 and 22, in which are the cylindrical scoops 23 to 26. Is located between the housing parts 21, 22 the crankshaft chamber 27, the housing designated 28 is. The pistons 31 to 34 are stepped and form eight pump chambers, some of which are connected in parallel are, so that the pump shown four pump stages Has. Your entrance is 35, your outlet is 36 designated. In the older German patent application 196 34 519.7 is a vacuum pump of this type in detail described. The last annular pump chamber forms the last stage of the vacuum pump shown. Your entrance is designated 37, its outlet 38.

Der Einlass 37 der letzten Stufe der Pumpe steht über die Leitung 39 mit dem Kurbelwellenraum 27 in Verbindung. Ihre Mündung bildet den schöpfraumnahen Gaseintritt 41. Sie liegt in der Nähe der einen Stirnseite des Kurbelwellengehäuses 28. Im Bereich der gegenüberliegenden Seite des Kurbelwellengehäuses 28 befindet sich der Gasballast- oder Spülgaseinlass 16 mit Ventil 17 und Drossel 18. In der bereits zu Figur 1 beschriebenen Weise kann durch über den Gaseinlass 16 einströmendes Gas der Kurbelwellenraum 27 gespült und darin ein Unterdruck aufrechterhalten werden.The last stage inlet 37 of the pump protrudes the line 39 with the crankshaft space 27 in connection. Your mouth forms the gas inlet close to the pumping chamber 41. It is located near one end of the Crankshaft housing 28. In the area of the opposite Side of the crankshaft housing 28 is the Gas ballast or purge gas inlet 16 with valve 17 and Throttle 18. In the one already described for FIG. 1 Way can flow in through the gas inlet 16 Gas flushed the crankshaft chamber 27 and a negative pressure therein be maintained.

Claims (11)

  1. Vacuum pump having at least one suction chamber (7, 8, 23 to 26), and a gas ballast device,
    wherein disposed in an outer housing (4) is a pump housing (1), in which the suction chamber (7, 8, 23 to 26) is situated, and
    wherein at least one chamber (3, 5, 27) adjoining the suction chamber is provided,
    characterized in that the gas ballast device has the following features:
    a gas ballast entry (15, 41) in the vicinity of the suction chamber and taking the form of a connection, which penetrates the pump housing (4), between the suction chamber (7, 8, 23 to 26) and an adjoining chamber (3, 5, 27);
    a gas ballast inlet (16), which is remote from the suction chamber housing (1) and disposed on the housing (4, 6) of a chamber (3, 5, 27) adjoining the suction chamber (7, 8, 23 to 26) and is equipped with a valve (17);
    the chamber (3, 5, 27) adjoining the suction chamber is situated at least partially between gas ballast inlet (16) and gas ballast entry (15, 41).
  2. Pump according to claim 1, characterized in that the gas ballast inlet (16) next to the valve (17) is equipped with a throttle (18).
  3. Pump according to claim 1 or 2, characterized in that a plurality of gas inlets (16) are provided at various points of the pump.
  4. Pump according to claim 1, 2 or 3, characterized in that the gas inlet or inlets (16) are in communication with an inert gas storage container.
  5. Pump according to one of the preceding claims, characterized in that it is designed as a slide vane rotary vacuum pump.
  6. Pump according to claim 5, characterized in that it is of a two-stage design, that it comprises a pump chamber (3) and a motor chamber (5), and that a bore (15) is provided, which connects a connecting bore (14) between the two stages (7, 9 and 8, 10) to the pump chamber (3).
  7. Pump according to claim 6, characterized in that the gas inlet (16) is disposed on the motor housing (6).
  8. Pump according to one of claims 1 to 4, characterized in that it is designed as a multistage reciprocating vacuum pump.
  9. Pump according to claim 8, characterized in that the inlet (37) of the last pump stage is in communication with a crankshaft chamber (27).
  10. Pump according to claim 9 , characterized in that the opening (41) of the line (39) into the crankshaft chamber (27) and the gas inlet (16) are disposed in the regions of mutually opposite ends of the crankshaft housing (28).
  11. Pump according to one of claims 1 to 10, characterized in that it is a dry vacuum pump.
EP98907961A 1997-03-06 1998-01-20 Vacuum pump Expired - Lifetime EP0964999B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19709206 1997-03-06
DE19709206A DE19709206A1 (en) 1997-03-06 1997-03-06 Vacuum pump
PCT/EP1998/000288 WO1998039570A1 (en) 1997-03-06 1998-01-20 Vacuum pump

Publications (2)

Publication Number Publication Date
EP0964999A1 EP0964999A1 (en) 1999-12-22
EP0964999B1 true EP0964999B1 (en) 2002-09-25

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EP98907961A Expired - Lifetime EP0964999B1 (en) 1997-03-06 1998-01-20 Vacuum pump

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US (1) US6123516A (en)
EP (1) EP0964999B1 (en)
JP (1) JP4067572B2 (en)
KR (1) KR100592161B1 (en)
CN (1) CN1133813C (en)
DE (2) DE19709206A1 (en)
WO (1) WO1998039570A1 (en)

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Also Published As

Publication number Publication date
WO1998039570A1 (en) 1998-09-11
KR100592161B1 (en) 2006-06-23
JP4067572B2 (en) 2008-03-26
JP2001513862A (en) 2001-09-04
CN1243563A (en) 2000-02-02
US6123516A (en) 2000-09-26
DE59805694D1 (en) 2002-10-31
EP0964999A1 (en) 1999-12-22
CN1133813C (en) 2004-01-07
DE19709206A1 (en) 1998-09-10
KR20000075898A (en) 2000-12-26

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