EP0964999A1 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
EP0964999A1
EP0964999A1 EP98907961A EP98907961A EP0964999A1 EP 0964999 A1 EP0964999 A1 EP 0964999A1 EP 98907961 A EP98907961 A EP 98907961A EP 98907961 A EP98907961 A EP 98907961A EP 0964999 A1 EP0964999 A1 EP 0964999A1
Authority
EP
European Patent Office
Prior art keywords
pump
chamber
gas
gas inlet
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98907961A
Other languages
German (de)
French (fr)
Other versions
EP0964999B1 (en
Inventor
Hans Josef Burghard
Wolfgang Giebmanns
Rudolf Bahnen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0964999A1 publication Critical patent/EP0964999A1/en
Application granted granted Critical
Publication of EP0964999B1 publication Critical patent/EP0964999B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting

Definitions

  • the invention relates to a vacuum pump with at least one pumping chamber and at least one chamber adjacent to the pumping chamber, such as a motor, drive, transmission, crankshaft or the like chamber.
  • vacuum pumps of the type concerned here have to convey corrosive and / or toxic gases. These gases can get into the rooms adjacent to the pumping chambers of the vacuum pumps, which are usually separated from the pumping chambers by seals (elbow seals, labyrinth seals, etc.). Corrosive gases cause corrosion or abrasion in these rooms, which leads to premature wear of bearings or damage to other components located there. In addition, caustic and toxic gases can pass into neighboring atmospheres on the way above the scoops. In the semiconductor industry, the need for dry, i.e. oil-free vacuum pumps, at least in relation to the delivery space, is increasing.
  • the present invention is based on the object of designing a vacuum pump of the type mentioned at the outset in such a way that the dangers of damage arising in the rooms adjacent to the pumping spaces and of the emergence of caustic or toxic gases from the vacuum pump are largely eliminated.
  • this object is achieved in that the vacuum pump is equipped with a gas ballast device and in that the ballast gas is supplied via the space adjacent to the pumping chamber.
  • a vacuum pump according to this invention has an outer gas ballast or purge gas inlet and a gas inlet located directly on the pump chamber housing. Between the gas inlet and the gas inlet are the rooms to be flushed, which are adjacent to the pump room. In the case of a pump designed in the manner specified, the gas entering via the gas ballast inlet has the effect of flushing the space or spaces adjacent to the pumping space.
  • caustic or toxic gases penetrate into the space adjacent to the pumping chamber through seals that do not or no longer fulfill their sealing function, then they are conveyed back into the pump together with the ballast or flushing gas before they cause damage or into the Atmosphere.
  • Another advantage of the invention is that the designer has more options with regard to the choice of the location of the gas ballast or purge gas inlet.
  • the gas inlet located on the pump chamber can be kept open at all times, so that a negative pressure is established in the chamber adjacent to the pump chamber. The risk that toxic or leaking gases through leaks in the outer housing is further reduced.
  • FIGS. 1 and 2 Show it
  • Figure 1 shows a two-stage rotary vane vacuum pump and Figure 2 shows a four-stage piston vacuum pump.
  • the rotary vane vacuum pump shown in Figure 1 comprises a pump chamber housing 1 and a drive motor 2.
  • the pump chamber housing 1 is located in the pump chamber 3, formed by the outer housing 4, the motor in the motor chamber 5, formed by the motor housing 6, which is flanged to the outer pump housing 4.
  • the scoops 7 and 8 with their rotors are located in the scoop chamber 1
  • the rotors 9 and 10 are fastened on the motor shaft 11, which is mounted and sealed several times in the pump chamber housing 2.
  • the larger stage 7, 9 of the pump is the inlet stage and is connected to the inlet 12.
  • the outlet 13 is at the outlet stage 8,
  • Inlet stages 7, 9 and outlet stages 8, 10 are connected to one another via the bore 14.
  • the bore 15 opens into this bore 14. It is connected to the pump chamber 3 and is hereinafter referred to as gas ballast or purge gas inlet close to the pump chamber.
  • the gas ballast or purge gas inlet located outside the pump is designated 16. It comprises the valve 17 and the throttle 18.
  • the gas inlet 16 is attached to the motor housing 6 in an area remote from the pump housing 4. With the valve 17 open, that is to say with a gas ballast or Flushing operation, the gas flows through the engine compartment 5 and through the pump compartment 3 to the entrance of the bore 15, the gas inlet located directly on the pump chamber. Gases entering the pump or engine compartment through leaky shaft seals are flushed back into outlet stage 8, 10. If necessary, baffles and / or a plurality of inlet connections 16 can be present in order to ensure complete flushing of the spaces adjacent to the scooping spaces 7, 8.
  • An inert gas storage container can also be connected to the inlet connection 16 if an inert gas, for example N2, is to be flushed or gas ballast is to be generated.
  • the ballast gas or purge gas inlet 15 close to the pumping chamber is constantly open to the pump chamber 3. If the valve 17 is closed, a vacuum is established in the pump chamber 3 and in the motor chamber 5. Gases entering the pump chamber 3 and the motor chamber 5 can therefore not escape to the outside due to leaks in the housings 4, 6. When the valve 16 is open, the throttle 18 ensures that a negative pressure is maintained in the housings 4 and 6.
  • FIG. 2 shows a four-stage dry piston vacuum pump with its pump chamber parts 21 and 22, in which the cylindrical pump chambers 23 to 26 are located.
  • the crankshaft chamber 27, the housing of which is designated 28, is located between the housing parts 21, 22.
  • the pistons 31 to 34 are each stepped and form eight pump chambers, some of which are connected in parallel, so that the pump shown has four pump stages. Its inlet is designated 35, its outlet 36.
  • a vacuum pump of this type is described in detail.
  • the last annular pump chamber forms the last stage of the vacuum pump shown. Their inlet is 37 and their outlet is 38.
  • the inlet 37 of the last stage of the pump is connected to the crankshaft chamber 27 via the line 39.
  • crankshaft space 27 can be flushed through gas flowing in via the gas inlet 16 and a negative pressure can be maintained therein.

Abstract

The invention relates to a vacuum pump, comprising at least one pump chamber (7, 8, 23 to 26) and at least one chamber (3, 5, 27) adjoining said pump chamber. The vacuum pump is fitted with a gas ballast device in order to avoid damage being caused in the adjoining chambers by the gases being pumped, the ballast gas being delivered via the chamber adjoining the pump chamber.

Description

VakuumpumpeVacuum pump
Die Erfindung betrifft eine Va uumpumpe mit mindestens einem Schöpfraum und mindestens einem dem Schöpfraum benachbarten Raum, wie Motor- Antriebs-, Getriebe-, Kurbelwellen- oder dergleichen -Raum.The invention relates to a vacuum pump with at least one pumping chamber and at least one chamber adjacent to the pumping chamber, such as a motor, drive, transmission, crankshaft or the like chamber.
In vielen Industriezweigen müssen Vakuumpumpen der hier betroffenen Art ätzende und/oder toxische Gase fördern. Diese Gase können in die den Schöpfräumen der Vakuumpumpen benachbarten Räume gelangen, die in aller Regel durch Dichtungen ( ellendicht-ringe, Labyrinthdichtungen usw.) von den Schöpfräumen getrennt sind. Ätzende Gase verursachen in diesen Räumen Korrosionen oder Abrasionen, die zu einem vorzeitigen Verschleiß von Lagern oder zu Schäden an anderen dort befindlichen Bauteilen führen. Darüber hinaus können ätzende und toxische Gase auf dem Weg über den Schöpfräumen benachbarte Räume in die Atmosphäre gelangen. In der Halbleiterindustrie, wird der Bedarf an trockenen, das heißt zumindest in Bezug auf den Schöpfräum ölfreien Vakuumpumpen immer größer. Der Grund dafür liegt darin, dass die Prozesse, die in den an die Vakuumpumpen angeschlossenen Vakuumkammern ablaufen, vor störenden Kohlenwasserstoffen geschützt sind. Die in der Halbleiterindustrie eingesetzten oder entstehenden, von der Vakuumpumpe zu fördernden Gase haben häufig die Eigenschaft, während ihrer Kompression auf Atmosphärendruck Feststoffe zu bilden. Auch Ablagerungen dieser Art können in den dem Schöpfraum benachbarten Räumen schädlich sein.In many branches of industry, vacuum pumps of the type concerned here have to convey corrosive and / or toxic gases. These gases can get into the rooms adjacent to the pumping chambers of the vacuum pumps, which are usually separated from the pumping chambers by seals (elbow seals, labyrinth seals, etc.). Corrosive gases cause corrosion or abrasion in these rooms, which leads to premature wear of bearings or damage to other components located there. In addition, caustic and toxic gases can pass into neighboring atmospheres on the way above the scoops. In the semiconductor industry, the need for dry, i.e. oil-free vacuum pumps, at least in relation to the delivery space, is increasing. The reason for this is that the processes that take place in the vacuum chambers connected to the vacuum pumps are protected from disruptive hydrocarbons. The gases used or generated in the semiconductor industry, which are to be conveyed by the vacuum pump, often have the property during their compression to form solids at atmospheric pressure. Deposits of this type can also be harmful in the rooms adjacent to the pumping chamber.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe der eingangs erwähnten Art derart auszubilden, dass die Gefahren der Entstehung von Schäden in den den Schöpfräumen benachbarten Räumen sowie des Austretens von ätzenden oder toxischen Gasen aus der Vakuumpumpe weitestgehend beseitigt sind.The present invention is based on the object of designing a vacuum pump of the type mentioned at the outset in such a way that the dangers of damage arising in the rooms adjacent to the pumping spaces and of the emergence of caustic or toxic gases from the vacuum pump are largely eliminated.
Erfindungsgemäß wird diese Aufgabe dadurch gelöst, dass die Vakuumpumpe mit einer Gasballasteinrichtung ausgerüstet ist und dass die Zufuhr des Ballastgases über den dem Schöpfräum benachbarten Raum erfolgt. Eine Vakuumpumpe gemäß dieser Erfindung hat einen äußeren Gasballast- oder Spülgaseinlass und einen unmittelbar am Schöpfraumgehäuse gelegenen Gaseintritt. Zwischen Ga- seinlass und Gaseintritt befinden sich der oder die zu spülenden, dem Schöpfräum benachbarten Räume. Bei einer in der angegebenen Weise ausgebildeten Pumpe hat das über den Gasballasteinlass eintretende Gas die Wirkung, den oder die dem Schöpfraum benachbarten Räume zu spülen. Dringen ätzende oder toxische Gase durch Dichtungen, die ihre Dichtfunktion nicht oder nicht mehr vollständig erfüllen, in den dem Schöpfraum benachbarten Raum ein, dann werden sie zusammen mit dem Ballast- bzw. Spülgas zurück in die Pumpe gefördert, bevor sie Schäden anrichten oder in die Atmosphäre gelangen können. Ein weiterer Vorteil der Erfindung liegt darin, dass dem Konstrukteur in Bezug auf die Wahl des Ortes des Gasballast- bzw. Spülgaseinlasses mehr Möglichkeiten zur Verfügung stehen. Schließlich kann der am Schöpfraumgehäuse gelegene Gaseintritt ständig offen gehalten werden, so dass sich in dem dem Schöpfraum benachbarten Raum ein Unterdruck einstellt. Die Gefahr, dass toxische oder ät- zende Gase durch Undichtigkeiten im äußeren Gehäuse nach außen dringen, ist dadurch weiter vermindert.According to the invention, this object is achieved in that the vacuum pump is equipped with a gas ballast device and in that the ballast gas is supplied via the space adjacent to the pumping chamber. A vacuum pump according to this invention has an outer gas ballast or purge gas inlet and a gas inlet located directly on the pump chamber housing. Between the gas inlet and the gas inlet are the rooms to be flushed, which are adjacent to the pump room. In the case of a pump designed in the manner specified, the gas entering via the gas ballast inlet has the effect of flushing the space or spaces adjacent to the pumping space. If caustic or toxic gases penetrate into the space adjacent to the pumping chamber through seals that do not or no longer fulfill their sealing function, then they are conveyed back into the pump together with the ballast or flushing gas before they cause damage or into the Atmosphere. Another advantage of the invention is that the designer has more options with regard to the choice of the location of the gas ballast or purge gas inlet. Finally, the gas inlet located on the pump chamber can be kept open at all times, so that a negative pressure is established in the chamber adjacent to the pump chamber. The risk that toxic or leaking gases through leaks in the outer housing is further reduced.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 und 2 schematisch dargestellten Ausführungsbeispielen erläutert werden. Es zeigenFurther advantages and details of the invention will be explained on the basis of exemplary embodiments shown schematically in FIGS. 1 and 2. Show it
Figur 1 eine zweistufige Drehschiebervakuumpumpe und Figur 2 eine vierstufige Kolbenvakuumpumpe.Figure 1 shows a two-stage rotary vane vacuum pump and Figure 2 shows a four-stage piston vacuum pump.
Die in Figur 1 dargestellte Drehschiebervakuumpumpe umfaßt ein Schöpfraumgehäuse 1 und einen Antriebsmotor 2. Das Schöpfraumgehäuse 1 befindet sich im Pumpenraum 3, gebildet vom äußeren Gehäuse 4, der Motor im Motorraum 5, gebildet vom Motorgehäuse 6, das an das äußere Pumpengehäuse 4 angeflanscht ist. Im Schöpfraumgehäuse 1 befinden sich die Schöpfräume 7 und 8 mit ihren RotorenThe rotary vane vacuum pump shown in Figure 1 comprises a pump chamber housing 1 and a drive motor 2. The pump chamber housing 1 is located in the pump chamber 3, formed by the outer housing 4, the motor in the motor chamber 5, formed by the motor housing 6, which is flanged to the outer pump housing 4. The scoops 7 and 8 with their rotors are located in the scoop chamber 1
9 und 10. Die Rotoren 9 und 10 sind auf der Motorwelle 11 befestigt, welche mehrfach im Schöpfraumgehäuse 2 gelagert und abgedichtet ist. Die größere Stufe 7, 9 der Pumpe ist die Einlassstufe und steht mit dem Einlass 12 in Verbindung. Der Auslass 13 ist an die Auslassstufe 8,9 and 10. The rotors 9 and 10 are fastened on the motor shaft 11, which is mounted and sealed several times in the pump chamber housing 2. The larger stage 7, 9 of the pump is the inlet stage and is connected to the inlet 12. The outlet 13 is at the outlet stage 8,
10 angeschlossen. Einlassstufe 7, 9 und Auslassstufe 8, 10 sind über die Bohrung 14 miteinander verbunden. In diese Bohrung 14 mündet die Bohrung 15. Sie steht mit dem Pumpenraum 3 in Verbindung und wird im weiteren als schöpfraumnaher Gasballast- oder Spülgaseintritt bezeichnet. Der außerhalb der Pumpe befindliche Gasballast- oder Spülgaseinlass ist mit 16 bezeichnet. Er um- fasst das Ventil 17 und die Drossel 18.10 connected. Inlet stages 7, 9 and outlet stages 8, 10 are connected to one another via the bore 14. The bore 15 opens into this bore 14. It is connected to the pump chamber 3 and is hereinafter referred to as gas ballast or purge gas inlet close to the pump chamber. The gas ballast or purge gas inlet located outside the pump is designated 16. It comprises the valve 17 and the throttle 18.
Bei dem in Figur 1 dargestellten Ausführungsbeispiel ist der Gaseinlass 16 in einem vom Pumpengehäuse 4 entfernt liegenden Bereich am Motorgehäuse 6 angebracht. Bei geöffnetem Ventil 17, also bei einem Gasballast- bzw. Spülbetrieb, strömt das Gas durch den Motorraum 5 und durch den Pumpenraum 3 zum Eintritt der Bohrung 15, dem unmittelbar am Schöpfraumgehäuse gelegenen Gaseintritt. Durch undichte Wellendichtungen in den Pumpen- oder Motorraum gelangende Gase werden in die Auslassstufe 8, 10 zurückgespült. Bei Bedarf können Schikanen und/oder mehrere Einlassstutzen 16 vorhanden sein, um eine vollständige Spülung der den Schöpfräumen 7, 8 benachbarten Räume sicherzustellen. An den Einlassstutzen 16 kann außerdem ein Inertgas-Vorratsbehälter angeschlossen sein, wenn mit einem Inertgas, z.B. N2 gespült oder Gasballast erzeugt werden soll.In the exemplary embodiment shown in FIG. 1, the gas inlet 16 is attached to the motor housing 6 in an area remote from the pump housing 4. With the valve 17 open, that is to say with a gas ballast or Flushing operation, the gas flows through the engine compartment 5 and through the pump compartment 3 to the entrance of the bore 15, the gas inlet located directly on the pump chamber. Gases entering the pump or engine compartment through leaky shaft seals are flushed back into outlet stage 8, 10. If necessary, baffles and / or a plurality of inlet connections 16 can be present in order to ensure complete flushing of the spaces adjacent to the scooping spaces 7, 8. An inert gas storage container can also be connected to the inlet connection 16 if an inert gas, for example N2, is to be flushed or gas ballast is to be generated.
Der schöpfraumnahe Ballastgas- oder Spülgaseintritt 15 ist zum Pumpenraum 3 ständig offen. Ist das Ventil 17 geschlossen, stellt sich im Pumpenraum 3 und im Motorraum 5 ein Vakuum ein. In den Pumpenraum 3 und den Motorraum 5 gelangende Gase können deshalb durch Lecks in den Gehäusen 4, 6 nicht nach außen dringen. Bei offenem Ventil 16 sorgt die Drossel 18 für die Aufrechterhaltung eines Unterdruckes in den Gehäusen 4 und 6.The ballast gas or purge gas inlet 15 close to the pumping chamber is constantly open to the pump chamber 3. If the valve 17 is closed, a vacuum is established in the pump chamber 3 and in the motor chamber 5. Gases entering the pump chamber 3 and the motor chamber 5 can therefore not escape to the outside due to leaks in the housings 4, 6. When the valve 16 is open, the throttle 18 ensures that a negative pressure is maintained in the housings 4 and 6.
Figur 2 zeigt eine vierstufige trockene Kolbenvakuumpumpe mit ihren Schöpfraumgehäuseteilen 21 und 22, in denen sich die zylindrischen Schöpfräume 23 bis 26 befinden. Zwischen den Gehäuseteilen 21, 22 befindet sich der Kurbelwellenraum 27, dessen Gehäuse mit 28 bezeichnet ist. Die Kolben 31 bis 34 sind jeweils gestuft und bilden acht Pumpenkammern, die zum Teil parallel geschaltet sind, so dass die dargestellte Pumpe vier Pumpstufen hat. Ihr Einlass ist mit 35, ihr Auslass mit 36 bezeichnet. In der älteren deutschen Patentanmeldung 196 34 519.7 ist eine Vakuumpumpe dieser Art im einzelnen beschrieben. Die letzte ringförmige Pumpkammer bildet die letzte Stufe der dargestellten Vakuumpumpe. Ihr Einlass ist mit 37, ihr Auslass mit 38 bezeichnet. Der Einlass 37 der letzten Stufe der Pumpe steht über die Leitung 39 mit dem Kurbelwellenraum 27 in Verbindung. Ihre Mündung bildet den schöpfraumnahen Gaseintritt 41. Sie liegt in der Nähe der einen Stirnseite des Kurbelwellengehäuses 28. Im Bereich der gegenüberliegenden Seite des Kurbelwellengehäuses 28 befindet sich der Gasballast- oder Spülgaseinlass 16 mit Ventil 17 und Drossel 18. In der bereits zu Figur 1 beschriebenen Weise kann durch über den Gaseinlass 16 einströmendes Gas der Kurbelwellenraum 27 gespült und darin ein Unterdruck aufrechterhalten werden. FIG. 2 shows a four-stage dry piston vacuum pump with its pump chamber parts 21 and 22, in which the cylindrical pump chambers 23 to 26 are located. The crankshaft chamber 27, the housing of which is designated 28, is located between the housing parts 21, 22. The pistons 31 to 34 are each stepped and form eight pump chambers, some of which are connected in parallel, so that the pump shown has four pump stages. Its inlet is designated 35, its outlet 36. In the older German patent application 196 34 519.7, a vacuum pump of this type is described in detail. The last annular pump chamber forms the last stage of the vacuum pump shown. Their inlet is 37 and their outlet is 38. The inlet 37 of the last stage of the pump is connected to the crankshaft chamber 27 via the line 39. Its mouth forms the gas inlet 41 close to the suction chamber. It is located in the vicinity of one end face of the crankshaft housing 28. In the region of the opposite side of the crankshaft housing 28 there is the gas ballast or purge gas inlet 16 with valve 17 and throttle 18. In the one already described for FIG In this way, the crankshaft space 27 can be flushed through gas flowing in via the gas inlet 16 and a negative pressure can be maintained therein.

Claims

VakuumpumpePATENTANSPRÜCHE Vacuum pump PATENT REQUIREMENTS
1. Vakuumpumpe mit mindestens einem Schöpfräum (7, 8, 23 bis 26) und mindestens einem dem Schöpfraum benachbarten Raum (3, 5, 27) , dadurch gekennzeichnet, dass sie mit einer Gasballasteinrichtung ausgerüstet ist und dass die Zufuhr des Ballastgases über den dem Schöpfräum benachbarten Raum erfolgt.1. Vacuum pump with at least one pumping chamber (7, 8, 23 to 26) and at least one chamber (3, 5, 27) adjacent to the pumping chamber, characterized in that it is equipped with a gas ballast device and that the supply of the ballast gas via the Creation space adjacent room takes place.
2. Vakuumpumpe mit mindestens einem Schöpfräum (7, 8, 23 bis 26) und mindestens einem dem Schöpfraum benachbarten Raum (3, 5, 27) , dadurch gekennzeichnet, dass sie einen äußeren Gasballast- oder Spülgasein- lass (16) und einen unmittelbar am Gehäuse (3, 22) gelegenen Gaseintritt (15, 41) aufweist und dass sich der dem Schöpfraum benachbarte Raum zumindest teilweise zwischen Gaseinlass (16) und Gaseintritt2. Vacuum pump with at least one pumping chamber (7, 8, 23 to 26) and at least one chamber (3, 5, 27) adjacent to the pumping chamber, characterized in that it has an external gas ballast or purge gas inlet (16) and one directly Has gas inlet (15, 41) located on the housing (3, 22) and that the space adjacent to the pumping chamber is at least partially between the gas inlet (16) and the gas inlet
(15, 41) befindet.(15, 41).
3. Pumpe nach Anspruch 2, dadurch gekennzeichnet, dass der Gaseinlass (16) ein Ventil (17) und eine Drossel (18) umfasst.3. Pump according to claim 2, characterized in that the gas inlet (16) comprises a valve (17) and a throttle (18).
4. Pumpe nach Anspruch 2 oder 3, dadurch gekennzeichnet, dass mehrere Gaseinlässe (16) an verschiedenen Stellen der Pumpe vorgesehen sind. 4. Pump according to claim 2 or 3, characterized in that a plurality of gas inlets (16) are provided at different points of the pump.
5. Pumpe nach Anspruch 2, 3 oder 4, dadurch gekennzeichnet, dass der oder die Gaseinlässe (16) mit einem Inertgas-Vorratsbehälter in Verbindung stehen.5. Pump according to claim 2, 3 or 4, characterized in that the gas inlet (s) (16) are connected to an inert gas reservoir.
6. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie als Drehschiebervakuumpumpe ausgebildet ist.6. Pump according to one of the preceding claims, characterized in that it is designed as a rotary vane vacuum pump.
7. Pumpe nach Anspruch 6, dadurch gekennzeichnet, dass sie zweistufig ausgebildet ist, dass sie einen Pumpenraum (3) und einen Motorraum (5) aufweist, und dass eine Bohrung (15) vorhanden ist, welche eine Verbindungsbohrung (14) zwischen den beiden Stufen7. Pump according to claim 6, characterized in that it is designed in two stages, that it has a pump chamber (3) and an engine compartment (5), and that a bore (15) is present which has a connecting bore (14) between the two stages
(7, 9 und 8, 10) mit dem Pumpenraum (3) verbindet.(7, 9 and 8, 10) connects to the pump chamber (3).
8. Pumpe nach Anspruch 7, dadurch gekennzeichnet, dass der Gaseinlass (16) am Motorgehäuse (6) angeordnet ist .8. Pump according to claim 7, characterized in that the gas inlet (16) is arranged on the motor housing (6).
9. Pumpe nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass sie als mehrstufige Kolbenvakuumpumpe ausgebildet ist.9. Pump according to one of claims 1 to 5, characterized in that it is designed as a multi-stage piston vacuum pump.
10. Pumpe nach Anspruch 9, dadurch gekennzeichnet, dass der Einlass (37) der letzten Pumpenstufe mit einem Kurbelwellenraum (27) in Verbindung steht.10. Pump according to claim 9, characterized in that the inlet (37) of the last pump stage is connected to a crankshaft chamber (27).
11. Pumpe nach Anspruch 10, dadurch gekennzeichnet, dass die Mündung (41) der Leitung (39) in den Kurbelwellenraum (27) und der Gaseinlass (16) in den Bereichen einander gegenüberliegender Stirnseiten des Kurbelwellengehäuses (28) angeordnet sind.11. Pump according to claim 10, characterized in that the mouth (41) of the line (39) in the crankshaft chamber (27) and the gas inlet (16) are arranged in the areas of opposite end faces of the crankshaft housing (28).
12. Pumpe nach einem der Ansprüche 1 bis 11, dadurch gekennzeichnet, dass sie eine trockene Vakuumpumpe ist . 12. Pump according to one of claims 1 to 11, characterized in that it is a dry vacuum pump.
EP98907961A 1997-03-06 1998-01-20 Vacuum pump Expired - Lifetime EP0964999B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19709206A DE19709206A1 (en) 1997-03-06 1997-03-06 Vacuum pump
DE19709206 1997-03-06
PCT/EP1998/000288 WO1998039570A1 (en) 1997-03-06 1998-01-20 Vacuum pump

Publications (2)

Publication Number Publication Date
EP0964999A1 true EP0964999A1 (en) 1999-12-22
EP0964999B1 EP0964999B1 (en) 2002-09-25

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EP98907961A Expired - Lifetime EP0964999B1 (en) 1997-03-06 1998-01-20 Vacuum pump

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US (1) US6123516A (en)
EP (1) EP0964999B1 (en)
JP (1) JP4067572B2 (en)
KR (1) KR100592161B1 (en)
CN (1) CN1133813C (en)
DE (2) DE19709206A1 (en)
WO (1) WO1998039570A1 (en)

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Also Published As

Publication number Publication date
CN1133813C (en) 2004-01-07
CN1243563A (en) 2000-02-02
WO1998039570A1 (en) 1998-09-11
DE59805694D1 (en) 2002-10-31
KR20000075898A (en) 2000-12-26
US6123516A (en) 2000-09-26
DE19709206A1 (en) 1998-09-10
KR100592161B1 (en) 2006-06-23
JP2001513862A (en) 2001-09-04
EP0964999B1 (en) 2002-09-25
JP4067572B2 (en) 2008-03-26

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