EP0280184A3 - Verfahren zum Aufbringen einer Silicium-Schicht auf Fasern - Google Patents

Verfahren zum Aufbringen einer Silicium-Schicht auf Fasern Download PDF

Info

Publication number
EP0280184A3
EP0280184A3 EP19880102328 EP88102328A EP0280184A3 EP 0280184 A3 EP0280184 A3 EP 0280184A3 EP 19880102328 EP19880102328 EP 19880102328 EP 88102328 A EP88102328 A EP 88102328A EP 0280184 A3 EP0280184 A3 EP 0280184A3
Authority
EP
European Patent Office
Prior art keywords
fibers
silicon
layer
silicium layer
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19880102328
Other languages
English (en)
French (fr)
Other versions
EP0280184A2 (de
Inventor
Werner Prof. Dr. Weisweiler
Gerd Dr. Nagel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BASF SE
Original Assignee
BASF SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BASF SE filed Critical BASF SE
Publication of EP0280184A2 publication Critical patent/EP0280184A2/de
Publication of EP0280184A3 publication Critical patent/EP0280184A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F11/00—Chemical after-treatment of artificial filaments or the like during manufacture
    • D01F11/10—Chemical after-treatment of artificial filaments or the like during manufacture of carbon
    • D01F11/16—Chemical after-treatment of artificial filaments or the like during manufacture of carbon by physicochemical methods
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F11/00—Chemical after-treatment of artificial filaments or the like during manufacture
    • D01F11/10—Chemical after-treatment of artificial filaments or the like during manufacture of carbon
    • D01F11/12—Chemical after-treatment of artificial filaments or the like during manufacture of carbon with inorganic substances ; Intercalation
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F11/00—Chemical after-treatment of artificial filaments or the like during manufacture
    • D01F11/10—Chemical after-treatment of artificial filaments or the like during manufacture of carbon
    • D01F11/12—Chemical after-treatment of artificial filaments or the like during manufacture of carbon with inorganic substances ; Intercalation
    • D01F11/125—Carbon
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F11/00—Chemical after-treatment of artificial filaments or the like during manufacture
    • D01F11/10—Chemical after-treatment of artificial filaments or the like during manufacture of carbon
    • D01F11/12—Chemical after-treatment of artificial filaments or the like during manufacture of carbon with inorganic substances ; Intercalation
    • D01F11/126—Carbides
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/04—Physical treatment combined with treatment with chemical compounds or elements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Inorganic Fibers (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Die Erfindung betrifft ein kontinuierliches Verfahren zum Beschichten von Faserbündeln, insbesondere von Kohlenstoff-Fasern, mit einer Schicht aus Silicium, welches als Carbid, Oxid, Nitrid, Silicium-Kohlenstoff-­ Wasserstoff-Plasmapolymere oder in elementarer Form vorliegt, durch Hochfrequenz-Kathodenzerstäubung. Die beschichteten Fasern sind insbesondere zur Herstellung von Kunststoff-Verbundwerkstoffen geeignet.
EP19880102328 1987-02-26 1988-02-18 Verfahren zum Aufbringen einer Silicium-Schicht auf Fasern Withdrawn EP0280184A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873706218 DE3706218A1 (de) 1987-02-26 1987-02-26 Vorrichtung und verfahren zur kontinuierlichen beschichtung der einzelnen fasern eines faserbuendels mit oberflaechenschuetzenden und haftvermittelnden carbid- oder plasmapolymer-filmen
DE3706218 1987-02-26

Publications (2)

Publication Number Publication Date
EP0280184A2 EP0280184A2 (de) 1988-08-31
EP0280184A3 true EP0280184A3 (de) 1991-07-03

Family

ID=6321837

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19880102328 Withdrawn EP0280184A3 (de) 1987-02-26 1988-02-18 Verfahren zum Aufbringen einer Silicium-Schicht auf Fasern

Country Status (4)

Country Link
US (1) US4971673A (de)
EP (1) EP0280184A3 (de)
JP (1) JPS63309672A (de)
DE (1) DE3706218A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3837306C2 (de) * 1988-09-27 2002-05-16 Knut Enke Kolben und Kolbenstange für einen Schwingungsdämpfer in Kraftfahrzeugen
DE3832692A1 (de) * 1988-09-27 1990-03-29 Leybold Ag Dichtungselement mit einem absperrkoerper aus einem metallischen oder nichtmetallischen werkstoff und verfahren zum auftragen von hartstoffschichten auf den absperrkoerper
US4981071A (en) * 1988-11-03 1991-01-01 Leybold Aktiengesellschaft Machine element with coating
US5413851A (en) * 1990-03-02 1995-05-09 Minnesota Mining And Manufacturing Company Coated fibers
JP2588985B2 (ja) * 1990-03-09 1997-03-12 財団法人国際超電導産業技術研究センター 酸化物薄膜の成膜方法
US5021258A (en) * 1990-08-08 1991-06-04 The Dow Chemical Company Method of coating fibers with metal or ceramic material
CA2049916C (en) * 1990-08-29 1997-11-18 Takafumi Uemiya Method of forming thin film on fiber end surface
US5190631A (en) * 1991-01-09 1993-03-02 The Carborundum Company Process for forming transparent silicon carbide films
JPH04300327A (ja) * 1991-03-22 1992-10-23 Ibiden Co Ltd 複合炭素繊維及びｃ／ｃ複合体
FR2729659B1 (fr) * 1991-05-17 1997-04-04 Minnesota Mining & Mfg Fibres revetues
WO1995020060A1 (en) * 1994-01-21 1995-07-27 The Carborundum Company Silicon carbide sputtering target
CA2265968C (en) * 1996-09-17 2006-03-07 Hyperion Catalysis International, Inc. Plasma-treated carbon fibrils and method of making same
DE19828843B4 (de) * 1998-06-27 2007-02-22 Daimlerchrysler Ag Verfahren zur Herstellung von beschichteten Kurzfasern
US7294391B2 (en) * 2003-01-09 2007-11-13 Kabushiki Kaisha Suzutora Contamination resistant fiber sheet
US7282261B2 (en) * 2003-02-13 2007-10-16 National University Of Singapore Method of enhancing the stability of electroactive polymers and redox active materials
ITMI20042323A1 (it) * 2004-12-03 2005-03-03 M & H S R L Procedimento di finitura e coloraziione superficiale di un articolo
US10954167B1 (en) 2010-10-08 2021-03-23 Advanced Ceramic Fibers, Llc Methods for producing metal carbide materials
US10208238B2 (en) 2010-10-08 2019-02-19 Advanced Ceramic Fibers, Llc Boron carbide fiber reinforced articles
US9803296B2 (en) 2014-02-18 2017-10-31 Advanced Ceramic Fibers, Llc Metal carbide fibers and methods for their manufacture
US8940391B2 (en) * 2010-10-08 2015-01-27 Advanced Ceramic Fibers, Llc Silicon carbide fibers and articles including same
US9199227B2 (en) 2011-08-23 2015-12-01 Advanced Ceramic Fibers, Llc Methods of producing continuous boron carbide fibers
US9275762B2 (en) 2010-10-08 2016-03-01 Advanced Ceramic Fibers, Llc Cladding material, tube including such cladding material and methods of forming the same
DE102014212241A1 (de) * 2014-06-25 2015-12-31 Siemens Aktiengesellschaft Carbonfasern mit modifizierter Oberfläche sowie Verfahren zur Modifizierung einer Carbonfaseroberfläche und Verwendung der Carbonfaser
DE102015014170A1 (de) * 2015-11-03 2017-05-04 Ernst-Moritz-Arndt-Universität Greifswald Vorrichtung zur Behandlung eines faserstrangartigen Objekts mit Schmelzphasenelementen und unter Plasmaeinwirkung
US10793478B2 (en) 2017-09-11 2020-10-06 Advanced Ceramic Fibers, Llc. Single phase fiber reinforced ceramic matrix composites
CN109053205B (zh) * 2018-08-13 2021-01-22 陕西科技大学 一种可控正交排布Si-CF增强HA复合材料及其制备方法和用途

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE878585C (de) * 1951-03-02 1953-06-05 Heraeus Gmbh W C Verfahren zur Herstellung duenner Schichten von Verbindungen durch Kathodenzerstaeubung
FR1594182A (de) * 1968-12-06 1970-06-01
US4596741A (en) * 1982-12-06 1986-06-24 Shin-Etsu Chemical Co., Ltd. Carbon fibers having improved surface properties and a method for the preparation thereof

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3627663A (en) * 1968-03-25 1971-12-14 Ibm Method and apparatus for coating a substrate by utilizing the hollow cathode effect with rf sputtering
US4209375A (en) * 1979-08-02 1980-06-24 The United States Of America As Represented By The United States Department Of Energy Sputter target
US4309261A (en) * 1980-07-03 1982-01-05 University Of Sydney Method of and apparatus for reactively sputtering a graded surface coating onto a substrate
DE3107914A1 (de) * 1981-03-02 1982-09-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zum beschichten von formteilen durch katodenzerstaeubung
US4414085A (en) * 1981-10-08 1983-11-08 Wickersham Charles E Method of depositing a high-emissivity layer
DE3246361A1 (de) * 1982-02-27 1983-09-08 Philips Patentverwaltung Gmbh, 2000 Hamburg Kohlenstoff enthaltende gleitschicht
DE3369772D1 (en) * 1982-07-31 1987-03-12 Bbc Brown Boveri & Cie Multifilament superconductor and method of making the same
JPS60119222A (ja) * 1983-12-01 1985-06-26 Mitsubishi Rayon Co Ltd セラミツクス・コ−テイング炭素繊維
US4619865A (en) * 1984-07-02 1986-10-28 Energy Conversion Devices, Inc. Multilayer coating and method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE878585C (de) * 1951-03-02 1953-06-05 Heraeus Gmbh W C Verfahren zur Herstellung duenner Schichten von Verbindungen durch Kathodenzerstaeubung
FR1594182A (de) * 1968-12-06 1970-06-01
US4596741A (en) * 1982-12-06 1986-06-24 Shin-Etsu Chemical Co., Ltd. Carbon fibers having improved surface properties and a method for the preparation thereof

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
CHEMICAL ABSTRACTS, Band 103, Nr. 22, 2. Dezember 1985, Seite 273, Zusammenfassung Nr. 182409r, Columbus, Ohio, US; & JP-A³60 119 222 (MITSUBISHI RAYON CO., LTD) 26-06-1985 *
THIN SOLID FILMS, Band 148, Nr. 1, 30. M{rz 1987, Seiten 93-108, Lausanne, CH; W. WEISWEILER et al.: "R.F-sputterd SiC coatings on carbon fibres" *
THIN SOLID FILMS, Band 63, Nr. 2, November 1979, Seiten 237-242, Lausanne, CH; Y. HIROHATA et al.: "SiC coatings for first-wall candidate materials by R.F. sputtering" *

Also Published As

Publication number Publication date
US4971673A (en) 1990-11-20
DE3706218A1 (de) 1988-09-08
EP0280184A2 (de) 1988-08-31
JPS63309672A (ja) 1988-12-16

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