EP0268119B1 - Ponceuse à bande - Google Patents
Ponceuse à bande Download PDFInfo
- Publication number
- EP0268119B1 EP0268119B1 EP87115945A EP87115945A EP0268119B1 EP 0268119 B1 EP0268119 B1 EP 0268119B1 EP 87115945 A EP87115945 A EP 87115945A EP 87115945 A EP87115945 A EP 87115945A EP 0268119 B1 EP0268119 B1 EP 0268119B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- workpiece
- light
- grinding method
- travel
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
Definitions
- the invention relates to a grinding method for processing the surface of a substantially flat workpiece with a belt grinding machine with a pressure bar, which has a plurality of pressure shoes arranged next to one another transversely to a conveying direction of the workpiece, the pressure force of which is adjusted with its own pressure device, in which the outline and a thickness value of the workpieces is detected with a light source arranged in the conveying direction of the workpieces in front of the pressure beam and in front of or behind a point of impact of the light and with a light sensor which detects the light reflected from the surface of the workpiece.
- Such a grinding method is known from DE-B-34 02 104. It offers the advantage of being able to regulate the pressure force of the individual pressure shoes individually depending on the shape of the workpiece.
- a flat workpiece is assumed, so that the workpiece shape is determined by the outer boundary of the flat workpiece.
- the purpose of regulating the pressure force is to avoid excessive grinding of the edges of the workpiece.
- the corresponding pressure shoes which are located in the area of the edge, become from the center of the workpiece Edge pressed against the workpiece with decreasing pressure force, so that the undesired cylindrical grinding of the edges is effectively avoided.
- the known belt grinding machine is also able to take into account differences in thickness of different workpieces with the same machine setting.
- the scanning rollers for workpiece shape recognition are preceded by a thickness measuring device which measures the thickness of the workpiece at one point, so that the thickness of the workpiece can be taken into account by controlling the pressing force.
- the measuring device for the thickness of the workpiece consists of a light source, which generates a light line across the width of the conveyor belt, which evaluates with the aid of a light detector 20 to determine the current width and thickness of the workpiece.
- a similar measuring device for determining the contour of a workpiece according to the triangulation method is known from US Pat. No. 4,188,544.
- the triangulation method determines the width of the piece of wood and its height.
- US-A-3 590 258 discloses the use of the triangulation method at the exit of a rolling mill. If irregularities in the light line shown occur, this is used as a control signal for the rolling device to increase the rolling pressure in order to produce perfectly rolled products again.
- the invention has for its object to provide a grinding method of the type mentioned in such a way that parameters of the workpiece that go beyond a thickness of the workpiece and its contour can be taken into account during the grinding process with a simple device.
- This object is achieved with a grinding method of the type mentioned at the outset in that the scanning with the light source is carried out linearly across the width of the workpiece and with the light sensor by scanning a region comprising a section in the conveying direction and the entire width of the workpiece In addition to the outline shape and the thickness value of the workpiece, height differences and / or brightness differences over the width of the workpiece are recorded and that the pressure force of the pressure shoes is also controlled according to the determined height differences and / or brightness differences over the width of the workpiece.
- the grinding method according to the invention not only allows consideration of the outline shape and the thickness of the workpiece, but also a recognition of the surface shape of the surface to be ground over the entire width of the workpiece.
- the surface of the workpiece has a bowl-shaped distortion
- a line of light is created that is bent from the higher edges of the workpiece to the lowest recess from the back to the front.
- a joint paper glued to the surface or another step-like change in height leads to a corresponding, rearward-pointing step of the light line.
- the position of the light line in the conveying direction is measured and assigned to a local height of the workpiece by the signal processing unit. In this way, distortions of the workpiece, surface irregularities, etc. can be easily recognized and taken into account in the grinding process.
- the light from the light source can be linear, so that the linear light strip is continuously generated on the workpiece or in the conveying plane.
- the light sensor is preferably formed by a semiconductor camera which images the area to be scanned using an optical system.
- the semiconductor camera can be a so-called line camera in which the light-sensitive elements are arranged in a line.
- a movement of the image is effected essentially perpendicular to the extension of the photosensitive elements by means of a mechanism.
- Electronic scanning is carried out along the light-sensitive elements arranged in a line and the image is moved by a certain amount in the perpendicular direction Pieces newly scanned along the photosensitive elements. It is advantageous if the electronic scanning occurs via the light-sensitive elements in the conveying direction and the mechanical movement leads to a scanning transverse to the conveying direction.
- the mechanical movement is preferably implemented by the movement of a deflecting mirror.
- the mechanical movement can be dispensed with completely if the light-sensitive elements of the semiconductor camera are arranged in a flat manner, that is to say as in the case of a conventional television camera.
- the expansion of the area to be scanned in the conveying direction leads to an increased resolution in this direction. Since the height detection for the surface takes place in this direction, the expansion in this direction is of particular advantage for the workpiece detection according to the invention.
- the method according to the invention can advantageously be used to readily recognize a marking of the type of material, for example the type of wood, applied to the workpiece.
- a detection device for signal patterns is provided, which is created by the image sensor scanning a bar code applied to the workpiece and extending transversely to the conveying direction. If a bar code is stamped on the workpiece, preferably at the leading end, its light-dark distribution is recognized in the linear illumination and scanning and can be used accordingly to regulate the pressure bar. This allows for the fact that different surface materials require different grinding pressures.
- brightness signals which are very different from the surroundings are detected.
- This makes it possible, for example, to recognize joint paper when scanning the linear illumination. This applies at least when the joint paper has a strong contrast to the surface of the veneer. If necessary, this effect can be brought about by using special joint paper, such as reflective joint paper, colored joint paper or joint paper soaked with a fluorescent substance. In this way it can be achieved that the joint paper, which is very difficult to grind in the conventional technique, is processed with increased pressure, so that the joint paper can be removed safely.
- a conveyor belt 1 for workpieces 2 is shown.
- the conveyor belt 1 runs between two deflection rollers 3, 4, one of which is driven.
- the workpiece 2 runs on the conveyor belt 1 under an abrasive belt 5, which is designed as an endless belt and by at least three pulleys 6 out.
- the upper deflection roller is not shown in the drawing.
- Two of the deflection rollers 6 are aligned parallel to the upper run of the conveyor belt 1, so that the grinding belt 5 runs parallel to the upper run of the conveyor belt 1 between the two rollers 6 (grinding zone).
- the grinding belt 5 is pressed against the workpiece 2 between the two mentioned deflection rollers 6 with the aid of a pressure beam 13 formed from a plurality of pressure shoes 7.
- each pressure shoe 7 is adjusted by a pressure device 8 formed from an electromagnet, the excitation current of the electromagnet being adjusted via a voltage supply 9 with the aid of a computer 10 forming a signal processing unit.
- the computer 10 is connected to a workpiece detection device 11, which detects the presence of a workpiece part in the area of the respective pressure shoe 7 and further parameters of the workpiece 2 and forwards this information to the computer 10.
- An input keypad 12a is also connected to the computer 10.
- B. the amount of grinding pressure can be entered for full surface grinding for the specific workpiece 2.
- the data entered into the computer 10 can be made visible on a screen 12 which is also connected to the computer 10.
- the deflecting roller 4 is provided with a pulse generator 15, the pulses of which are fed into the computer 10, which in turn only has to wait for a predetermined number of pulses to be received in order to be able to detect the pulse generated by the workpiece detection device 11 caused control.
- a pulse generator 15 the pulses of which are fed into the computer 10
- FIG. 2 shows an exemplary embodiment of a workpiece detection device 11 according to the invention. It consists of a light source 16, the light of which is linear in shape and causes a light line 17 perpendicular to the conveying direction F on the transport plane formed by the upper run 1.
- a curved light line 17 is generated on the surface of the workpiece 2 by the workpiece, which is shaped somewhat cylindrically upward, which is directed towards the rear of the longitudinal edges of the workpiece 2 and has a curvature directed forward in the conveying direction F. This curvature arises from the fact that the light source 16 is arranged behind the workpiece in the conveying direction F, that is to say it radiates obliquely onto the workpiece 2.
- a semiconductor camera 18 acting as a light sensor recognizes the shape of the curved light line 17 ⁇ by scanning the surface of the workpiece 2 essentially perpendicular to the transport plane. By recognizing the spatial position of the light line 17 ⁇ , the computer 10 determines the local heights of the surface of the workpiece 2 and controls the belt grinding machine accordingly.
- Figure 3 illustrates in a top view from above the formation of the light line 17 in the transport plane of the upper run 1 and the curved light line 17 ⁇ on the surface of the workpiece 2.
- the dashed lines 19 on both sides of the curved light line 17 ⁇ illustrate the limits of the area 20, which by the Semiconductor camera 18 is scanned.
- the semiconductor camera 18 can be provided with surface-mounted image sensors which simultaneously scan the entire area 20 with their pixels and can be read out serially.
- the distance a between the light line 17 and the foremost end of the curved light line 17 ⁇ gives a measure of the thickness of the workpiece 2 which is discarded with its ends pointing upwards, while the dimension b characterizes the height of the lateral distortions.
- FIG. 4 schematically shows the same situation as FIG. 3, but with an image in which the image of the region 20 to be scanned is expanded in the conveying direction F with the aid of a cylindrical lens or a cylindrical deflecting mirror. Obviously, the resolution in the region of interest 20 is thereby significantly increased, so that a more precise workpiece identification is possible.
- Figure 5 shows schematically the scanning with a semiconductor camera 18 ⁇ , which has only linearly aligned photosensitive elements.
- the alignment of these linearly arranged photosensitive elements is such that they scan the workpiece 2 in the conveying direction F, while the scanning is carried out perpendicular to the conveying direction F by a rotating deflection mirror 21.
- the electronic scanning with the aid of the linearly arranged photosensitive elements of the semiconductor camera 18 ⁇ takes place much faster than the scanning perpendicular to the conveying direction F caused by the mechanical movement of the deflection mirror 21.
- FIG. 6 shows an extraordinarily advantageous utilization of the workpiece detection 10 according to the invention.
- the front end of a workpiece 2 is shown, on which the curved light line 17 ⁇ is created, offset from the light line 17 in the transport plane, due to the shape of the surface of the workpiece 2.
- the front end of the workpiece 2 is provided with a bar code formed from three bars 22 of different widths, which does not change the shape of the curved light line 17 ⁇ when scanned in the light sensor 18, 18 ⁇ however, produces a brightness curve, which is also shown in FIG. 6.
- This brightness curve can be recognized by a detection device as an identifier for a specific surface material and used to control the belt grinding machine.
- other parameters relevant to the grinding process can also be coded and automatically recognized when scanned with the light sensor 18, 18 '.
- FIG. 7 A similar utilization of the workpiece detection device is shown in FIG. 7.
- joint papers 23 are used to fix the veneer strips, which are glued to the veneer layers as adhesive strips. These must be removed completely during the grinding process. In addition, the area underneath should also be carefully sanded.
- the veneer papers 23 have a toughness which differs from the toughness of the surface material, so that their removal is often not completely successful during the grinding process.
- a particularly strong grinding pressure for the joint papers 23 can be set if the joint papers 23 are recognized as such. This is readily possible if the joint papers 23 generate a particularly high-contrast signal when illuminated with the light line 17 '. In the case of dark-colored veneer wood, this is easily achieved by using white joint papers 23. In the case of lighter woods, either black joint paper 23 or reflective joint paper 23 can be used. If only a single-layer joint paper 23 is used, there is practically no displacement of the light line 17 'due to a change in height due to the only small thickness of the joint paper 23. However, the light sensor 18, 18 'can have a large difference in brightness detect. Such contrasts, that is to say differences in brightness, with respect to the surroundings, detection device therefore enables the presence of joint paper 23 to be detected, so that the belt grinder can be automatically controlled in a suitable manner for removing the joint paper 23.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Claims (11)
- Procédé de ponçage pour l'usinage de la surface d'une pièce (2) sensiblement plane au moyen d'une ponçeuse à bande comportant une barre de pression (13) qui présente une pluralité de sabots de pression (7) disposés côte à côte transversalement à un sens d'avance de la pièce et dont la force de pression peut être réglée au moyen d'un dispositif (8) individuel de pression, dans lequel on détecte les contours et une épaisseur des pièces (2) par une source lumineuse (16) disposée en amont de la barre de pression (13) dans le sens d'avance des pièces (2) et en amont ou en aval d'un point d'incidence de la lumière, et par un détecteur de lumière (18, 18') recevant la lumière réfléchie par la surface de ladite pièce (2), caractérisé en ce que la détection réalisée par la source lumineuse (16) s'effectue selon une ligne transversalement au sens d'avance sur la largeur de la pièce, et en ce que, au moyen du détecteur de lumière (18, 18'), par palpage d'une zone comprenant un tronçon dans le sens d'avance (20) et la largeur totale de la pièce (2), on détecte outre la forme du contour et l'épaisseur de la pièce, des différences de niveaux et/ou des différences de luminosité sur la largeur de la pièce, et en ce qu'on commande la force de pression des patins (7) de pression également compte tenu des différences de niveaux et/ou de luminosité constatées sur la largeur de la pièce (2).
- Procédé de ponçage selon la revendication 1, caractérisé en ce que la lumière de la source lumineuse (16) s'étend suivant une ligne.
- Procédé de ponçage selon la revendication 1, caractérisé par l'utilisation d'une source lumineuse (16) qui produit un rayon lumineux se déplaçant rapidement suivant une ligne.
- Procédé de ponçage selon l'une des revendications 1 à 3, caractérisé par l'utilisation comme détecteur de lumière (18, 18') d'une caméra à semi-conducteurs qui reproduit au moyen d'une optique la zone à palper.
- Procédé de ponçage selon la revendication 4, caractérisé en ce que l'on utilise une caméra à semi-conducteurs (18') dont les éléments photosensibles sont disposés suivant une ligne, et en ce qu'au moyen d'un mécanisme (21) on produit un mouvement de l'image dans une direction sensiblement perpendiculaire à celle selon laquelle s'étendent les éléments photosensibles.
- Procédé de ponçage selon la revendication 5, caractérisé en ce que l'alignement des éléments photosensibles disposés suivant une ligne correspond à une image sur la surface de la pièce (2) dans le sens de son avance, et en ce que le mouvement mécanique conduit à un palpage transversal au sens d'avance.
- Procédé de ponçage selon la revendication 5 ou 6, caractérisé en ce que le mouvement mécanique est réalisé par le mouvement d'un miroir de renvoi (21).
- Procédé de ponçage selon la revendication 4, caractérisé par une disposition plane des éléments photosensibles de la caméra à semi-conducteurs (18).
- Procédé de ponçage selon l'une des revendications 4 à 8, caractérisé en ce que l'image de la zone à palper sur la surface de la caméra à semi-conducteurs s'étend en direction du transport de la pièce.
- Procédé de ponçage selon l'une des revendications 1 à 9, caractérisé en ce qu'au moyen du détecteur de lumière (18, 18') on détecte un code-barres (22) placé sur la pièce (2) et s'étendant transversalement au sens d'avance.
- Procédé de ponçage selon l'une des revendications 1 à 10, caractérisé en ce qu'on détecte des luminosités fortement différentes de l'environnement.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT87115945T ATE89211T1 (de) | 1986-11-18 | 1987-10-30 | Bandschleifmaschine. |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3639329 | 1986-11-18 | ||
DE3639329A DE3639329C1 (de) | 1986-11-18 | 1986-11-18 | Bandschleifmaschine |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0268119A2 EP0268119A2 (fr) | 1988-05-25 |
EP0268119A3 EP0268119A3 (en) | 1990-03-21 |
EP0268119B1 true EP0268119B1 (fr) | 1993-05-12 |
Family
ID=6314180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP87115945A Expired - Lifetime EP0268119B1 (fr) | 1986-11-18 | 1987-10-30 | Ponceuse à bande |
Country Status (6)
Country | Link |
---|---|
US (1) | US4839994A (fr) |
EP (1) | EP0268119B1 (fr) |
JP (1) | JP2655654B2 (fr) |
AT (1) | ATE89211T1 (fr) |
DE (2) | DE3639329C1 (fr) |
ES (1) | ES2003317T3 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022187057A1 (fr) * | 2021-03-05 | 2022-09-09 | Applied Materials, Inc. | Détection d'une excursion d'un composant de cmp à l'aide d'une séquence d'images basée sur le temps |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5083867A (en) * | 1988-11-28 | 1992-01-28 | Allegheny Ludlum Corporation | Slab surface contour monitor |
CA1319513C (fr) * | 1989-01-11 | 1993-06-29 | Darwin H. Isdahl | Methode et dispositif servant a mesurer et a rectifier le profil de rails de voies ferrees |
US5140776A (en) * | 1989-01-11 | 1992-08-25 | Loram Maintenance Of Way, Inc. | Apparatus and method for measuring and maintaining the profile of a railroad track rail |
JPH02135154U (fr) * | 1989-04-15 | 1990-11-09 | ||
US5245409A (en) * | 1991-11-27 | 1993-09-14 | Arvin Industries, Inc. | Tube seam weld inspection device |
US5501629A (en) * | 1992-09-10 | 1996-03-26 | Fujitsu Limited | Buffing apparatus suitable to buff thin plate work and controlling method for the apparatus |
DE4232830C5 (de) * | 1992-09-30 | 2004-08-19 | Georg Weber | Vorrichtung zum Entfernen von Schleifstaub von Werkstücken in Bandschleifmaschinen |
JP3761673B2 (ja) * | 1997-06-17 | 2006-03-29 | 株式会社荏原製作所 | ポリッシング装置 |
IT1294167B1 (it) * | 1997-08-08 | 1999-03-22 | Scm Group Autec Division Spa | Macchina levigatrice di pannelli con cambio automatico e rigenerazione del nastro abrasivo utensile. |
US6155914A (en) * | 1997-09-22 | 2000-12-05 | Seagate Technologies, Llc | Apparatus for the application of an advanced texture process |
DE19833881C1 (de) * | 1998-07-28 | 1999-10-21 | Juergen Heesemann | Bandschleifmaschine |
US6234871B1 (en) * | 1999-10-26 | 2001-05-22 | Seaman Corporation | Method and apparatus for removing a thin coating from a fabric |
DE20003656U1 (de) * | 2000-02-28 | 2000-07-06 | Weber, Georg, 96317 Kronach | Bandschleifmaschine |
DE502004004754D1 (de) * | 2003-08-22 | 2007-10-04 | Kuendig Ag | Steuerung einer schleifvorrichtung mit schleifmittelrollen auf wickelwellen |
US7734081B2 (en) * | 2006-12-05 | 2010-06-08 | Feng Chia University | Grinding method and system with non-contact real-time detection of workpiece thinkness |
DE102011050681A1 (de) * | 2011-05-27 | 2012-11-29 | Hans Weber Maschinenfabrik Gmbh | Durchlaufschleifmaschine |
US9718210B1 (en) * | 2013-04-08 | 2017-08-01 | Parrot Wizard Inc | Method of fabricating a wooden perch |
KR101558548B1 (ko) * | 2014-04-22 | 2015-10-13 | 한국지질자원연구원 | 자동 박편 연마 장치 |
DE102016211723A1 (de) * | 2016-06-29 | 2018-01-04 | Weeke Bohrsysteme Gmbh | Bearbeitungsvorrichtung mit einer Lichtsignalanzeigevorrichtung und Verfahren |
DE102016214568A1 (de) * | 2016-08-05 | 2018-02-08 | Weeke Bohrsysteme Gmbh | Bearbeitungsvorrichtung und Bearbeitungsverfahren |
DE102016120330A1 (de) * | 2016-10-25 | 2018-04-26 | Karl Heesemann Maschinenfabrik Gmbh & Co. Kg | Schleifmaschine |
DE102017003757B4 (de) * | 2017-04-18 | 2023-06-29 | Grenzebach Maschinenbau Gmbh | Vorrichtunq, Verfahren und Computerproqramm zur kontrollierten Steuerunq des Bearbeitunqsprozesses von, die Oberfläche eines Werkstücks bearbeitenden Anlagen, insbesondere Breitbandschleifmaschinen, unter Berücksichtiqung sicherheitsrelevanter Lanqzeitaspekte. |
DE102018105134A1 (de) * | 2018-03-06 | 2019-09-12 | Karl Heesemann Maschinenfabrik Gmbh & Co. Kg | Verfahren zum Betreiben einer Schleifvorrichtung und Schleifvorrichtung |
CR20200621A (es) | 2018-06-21 | 2021-02-03 | Hoffmann La Roche | Formas sólidas de 3-((1r,3r)-1-(2,6-difluoro-4-((1-(3 fluoropropil)azetidin-3-il)amino)fenil)-3-(metil-1,3,4,9-tetrahidro-2h-pirido[3,4-b]indol-2-il)-2,2-difluoropropan-1-ol y procesos para preparar compuestos tricíclicos fusionados que comprenden un resto fenilo o piridinilo sustituido, incluidos métodos para su uso |
CN109048580A (zh) * | 2018-11-02 | 2018-12-21 | 江西英硕智能科技有限公司 | 一种自动侧面砂光机 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3187185A (en) * | 1960-12-22 | 1965-06-01 | United States Steel Corp | Apparatus for determining surface contour |
US3590258A (en) * | 1969-11-05 | 1971-06-29 | Ishikawajima Harima Heavy Ind | Apparatus for controlling the shape of rolled product |
GB1491241A (en) * | 1975-01-15 | 1977-11-09 | Plessey Co Ltd | Methods and apparatus for profile monitoring |
US4158507A (en) * | 1977-07-27 | 1979-06-19 | Recognition Equipment Incorporated | Laser measuring system for inspection |
US4188544A (en) * | 1977-08-22 | 1980-02-12 | Weyerhaeuser Company | Method and apparatus for automatically processing a workpiece employing calibrated scanning |
JPS5483853A (en) * | 1977-12-16 | 1979-07-04 | Canon Inc | Measuring device |
US4498778A (en) * | 1981-03-30 | 1985-02-12 | Technical Arts Corporation | High speed scanning method and apparatus |
FR2558250B1 (fr) * | 1984-01-17 | 1988-05-20 | Commissariat Energie Atomique | Procede et dispositif de visualisation de discontinuites de surface et application de ce procede au soudage automatique de deux pieces |
DE3402104C2 (de) * | 1984-01-21 | 1986-07-17 | Karl Heesemann Maschinenfabrik GmbH & Co KG, 4970 Bad Oeynhausen | Bandschleifmaschine |
US4741621A (en) * | 1986-08-18 | 1988-05-03 | Westinghouse Electric Corp. | Geometric surface inspection system with dual overlap light stripe generator |
-
1986
- 1986-11-18 DE DE3639329A patent/DE3639329C1/de not_active Expired
-
1987
- 1987-10-30 ES ES198787115945T patent/ES2003317T3/es not_active Expired - Lifetime
- 1987-10-30 DE DE8787115945T patent/DE3785828D1/de not_active Expired - Fee Related
- 1987-10-30 AT AT87115945T patent/ATE89211T1/de not_active IP Right Cessation
- 1987-10-30 EP EP87115945A patent/EP0268119B1/fr not_active Expired - Lifetime
- 1987-11-17 US US07/121,852 patent/US4839994A/en not_active Expired - Lifetime
- 1987-11-18 JP JP62291670A patent/JP2655654B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022187057A1 (fr) * | 2021-03-05 | 2022-09-09 | Applied Materials, Inc. | Détection d'une excursion d'un composant de cmp à l'aide d'une séquence d'images basée sur le temps |
Also Published As
Publication number | Publication date |
---|---|
ES2003317A4 (es) | 1988-11-01 |
ATE89211T1 (de) | 1993-05-15 |
ES2003317T3 (es) | 1993-10-16 |
EP0268119A3 (en) | 1990-03-21 |
DE3639329C1 (de) | 1988-02-25 |
JPS63180460A (ja) | 1988-07-25 |
DE3785828D1 (de) | 1993-06-17 |
EP0268119A2 (fr) | 1988-05-25 |
US4839994A (en) | 1989-06-20 |
JP2655654B2 (ja) | 1997-09-24 |
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