EP0197185B1 - Viellagige, hochverschleissfest Hartstoffschutzschicht für metallische, stark beanspruchte Oberflächen oder Substrate - Google Patents

Viellagige, hochverschleissfest Hartstoffschutzschicht für metallische, stark beanspruchte Oberflächen oder Substrate Download PDF

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Publication number
EP0197185B1
EP0197185B1 EP85109800A EP85109800A EP0197185B1 EP 0197185 B1 EP0197185 B1 EP 0197185B1 EP 85109800 A EP85109800 A EP 85109800A EP 85109800 A EP85109800 A EP 85109800A EP 0197185 B1 EP0197185 B1 EP 0197185B1
Authority
EP
European Patent Office
Prior art keywords
tib
layers
layer
cathode
hard material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP85109800A
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German (de)
English (en)
French (fr)
Other versions
EP0197185A2 (de
EP0197185A3 (en
Inventor
Helmut Dr. Holleck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut fuer Technologie KIT
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
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Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to AT85109800T priority Critical patent/ATE52815T1/de
Publication of EP0197185A2 publication Critical patent/EP0197185A2/de
Publication of EP0197185A3 publication Critical patent/EP0197185A3/de
Application granted granted Critical
Publication of EP0197185B1 publication Critical patent/EP0197185B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications

Definitions

  • the invention relates to a process for the production of multilayer, highly wear-resistant hard material protective layers consisting of different hard material phases for metallic, highly stressed surfaces or other substrates, the thickness of the total protective layer being in the range from 0.1 to 10 ⁇ m.
  • the hard material layer gives the tough substrate wear protection by increasing the abrasion resistance of the surface, by lowering the friction and thus the temperature, and by reducing the diffusion and adhesion between the material and the workpiece (or chip).
  • the problem of the composite material lies in the often insufficient adhesion between the base material and the layer, the lack of toughness of the layer and the lack of alternating strength. Attempts have been made to solve this problem by means of multiple layers, and substantial improvements have been achieved compared to single layers, but the weak points in the substrate-layer system cannot be completely eliminated.
  • a process for sputtering a layer is known from US Pat. No. 4,060,471, in which the composition of the materials changes over the thickness of the layer, using at least two sources.
  • the first partial target consists of a disc made of two different materials, the materials being used alternately in segments.
  • the second target which is attached axially above the first target, there are segment-shaped openings which just release one of the two materials.
  • the partial targets can be rotated against each other.
  • Multi-layer hard material coatings of hard metals have been described, for example, in Zeitschrift für Metallischen, Volume 75, Issue 11 (November 1984), pages 874 to 880.
  • a ten-layer protective layer was mentioned in which a TiC layer, a Ti (C, N) layer above and a layer sequence consisting of four intermediate layers and four ceramic layers based on Al 2 O 3 were used adjacent to the hard metal.
  • approximately 10 ⁇ m thick multilayer layers based on titanium carbide, titanium carbonitride and titanium nitride were mentioned.
  • PVD physical vapor deposition
  • the invention has for its object to provide a method for producing wear protection layers with improved adhesion, toughness and wear resistance. It should be possible to coat surfaces or substrates of substances with very different coefficients of expansion, such as molybdenum with a very low coefficient of expansion, or a hard metal with a medium coefficient of expansion or high-speed jet with a high coefficient of expansion without significantly restricting the desired protective layer properties.
  • Cathodes made of TiC and TiB 2 or TiN and TiB 2 or TiC and TiN and TiB 2 can be used for both versions of the method according to the invention.
  • cathode combinations of TiB 2 -WC or TiB 2 -Ti (C, N) or TiB 2 - (Ti, V) C or TiB 2 - (Ti, W) C or (Ti, V) B 2 - ( Ti, V) C or (Ti, Nb) B 2 - (Ti, Nb) C or VB 2- TiN or VB 2- WC or HfB 2 -TaC or ZrB 2 -TaC or ZrB 2 -NbC can be used.
  • the successive layers or the very finely divided mixture for example the phases with partially coherent TiC (111) -TiB 2 (0001) - phase boundaries are largely free of tension, tougher, better adhering to the substrate due to the extremely high proportion of inner phase boundaries with a defined dislocation density the entire system is more wear-resistant than with conventional protective layers.
  • the samples 5, 6, 7 to be coated are rotated continuously on a turntable 1 with or without heating under two cathodes, one with TiC 3 , the other with TiB 2 4, during the entire coating process.
  • the composition and microstructure of the layer can be specifically adjusted by changing the plate rotation speed and the sputtering capacity. It is preferred to choose conditions in which the phase proportions of TiC and TiB 2 are similar and the total layer thickness achieved is 3 to 5 ⁇ m.
  • the calculated particle size (single layer thickness) is between 0.5 and 40 nm, depending on the application. The smaller "particle sizes", as X-rays show, the individual phases can no longer be separated.
  • the service life of the cutting tip which is provided with a finely dispersed TilTiB 2 layer 14, is approximately twice that of the simply coated 12 or 13.
  • A, D, E mean densely packed Ti planes, in D and E the atomic centers are not in the paper plane, B are the boron planes, C the carbon planes or N the nitrogen planes in the case of TiN.
  • the filled and unfilled circles are the Ti atoms.
  • the dashed line represents a phase boundary

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
EP85109800A 1985-04-11 1985-08-05 Viellagige, hochverschleissfest Hartstoffschutzschicht für metallische, stark beanspruchte Oberflächen oder Substrate Expired - Lifetime EP0197185B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT85109800T ATE52815T1 (de) 1985-04-11 1985-08-05 Viellagige, hochverschleissfest hartstoffschutzschicht fuer metallische, stark beanspruchte oberflaechen oder substrate.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19853512986 DE3512986A1 (de) 1985-04-11 1985-04-11 Viellagige, hochverschleissfeste hartstoffschutzschicht fuer metallische, stark beanspruchte oberflaechen oder substrate
DE3512986 1985-04-11

Publications (3)

Publication Number Publication Date
EP0197185A2 EP0197185A2 (de) 1986-10-15
EP0197185A3 EP0197185A3 (en) 1988-03-30
EP0197185B1 true EP0197185B1 (de) 1990-05-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP85109800A Expired - Lifetime EP0197185B1 (de) 1985-04-11 1985-08-05 Viellagige, hochverschleissfest Hartstoffschutzschicht für metallische, stark beanspruchte Oberflächen oder Substrate

Country Status (5)

Country Link
US (1) US4835062A (cs)
EP (1) EP0197185B1 (cs)
JP (1) JPS61235555A (cs)
AT (1) ATE52815T1 (cs)
DE (1) DE3512986A1 (cs)

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US5433988A (en) * 1986-10-01 1995-07-18 Canon Kabushiki Kaisha Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray
JPS63125602A (ja) * 1986-11-12 1988-05-28 Sumitomo Electric Ind Ltd 工具用硬質合金
DE3811907C1 (cs) * 1988-04-09 1989-08-03 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe, De
DE3830525A1 (de) * 1988-09-08 1990-03-22 Beck August Gmbh Co Mit hartstoff beschichtete hartmetallschneidplatte und verfahren zu ihrer herstellung
JP2793696B2 (ja) * 1990-05-17 1998-09-03 神鋼コベルコツール株式会社 耐摩耗性皮膜
JPH05198575A (ja) * 1991-05-01 1993-08-06 Kobe Steel Ltd 耐食性ＡｌまたはＡｌ合金材
WO1993022746A1 (en) * 1992-05-01 1993-11-11 National Research Council Of Canada Optically variable coins, medals, tokens and other non-fibrous articles and method for making same
DE69319531T2 (de) * 1992-10-12 1999-04-15 Sumitomo Electric Industries, Ltd., Osaka Ultradünnes Filmlaminat
JP2638406B2 (ja) * 1992-10-26 1997-08-06 神鋼コベルコツール株式会社 耐摩耗性多層型硬質皮膜構造
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US5789071A (en) * 1992-11-09 1998-08-04 Northwestern University Multilayer oxide coatings
US5952085A (en) * 1994-03-23 1999-09-14 Rolls-Royce Plc Multiple layer erosion resistant coating and a method for its production
GB9405744D0 (en) * 1994-03-23 1994-05-11 Rolls Royce Plc A multilayer erosion resistant coating and a method for its production
CA2155164C (en) * 1994-08-01 2001-07-10 Satoru Kukino Super hard composite material for tools
DE69527236T2 (de) * 1994-09-16 2003-03-20 Sumitomo Electric Industries, Ltd. Mehrschichtfilm aus ultrafeinen Partikeln und harter Verbundwerkstoff für Werkzeuge, die diesen Film enthalten
DE69526301T2 (de) 1994-10-28 2002-12-05 Sumitomo Electric Industries, Ltd. Mehrschichtiges Material
DE19503070C1 (de) * 1995-02-01 1996-08-14 Karlsruhe Forschzent Verschleißschutzschicht
US5750207A (en) * 1995-02-17 1998-05-12 Si Diamond Technology, Inc. System and method for depositing coating of modulated composition
US5681653A (en) * 1995-05-11 1997-10-28 Si Diamond Technology, Inc. Diamond cutting tools
US5593234A (en) * 1995-05-16 1997-01-14 Ntn Corporation Bearing assembly with polycrystalline superlattice coating
US5588975A (en) * 1995-05-25 1996-12-31 Si Diamond Technology, Inc. Coated grinding tool
DE59709451D1 (de) 1996-09-03 2003-04-10 Unaxis Balzers Ag Verschleissschutz-beschichtetes werkstück
SE518145C2 (sv) * 1997-04-18 2002-09-03 Sandvik Ab Multiskiktbelagt skärverktyg
JP4185172B2 (ja) * 1997-06-19 2008-11-26 住友電工ハードメタル株式会社 被覆硬質工具
DE10016958A1 (de) * 2000-04-06 2001-10-18 Widia Gmbh Verfahren zur Herstellung von Multilagenschichten auf Substratkörpern und Verbundwerkstoff, bestehend aus einem beschichteten Substratkörper
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SE522722C2 (sv) * 2001-03-28 2004-03-02 Seco Tools Ab Skärverktyg belagt med titandiborid
US6660133B2 (en) 2002-03-14 2003-12-09 Kennametal Inc. Nanolayered coated cutting tool and method for making the same
DE102006046917C5 (de) 2006-10-04 2014-03-20 Federal-Mogul Burscheid Gmbh Kolbenring für Verbrennungskraftmaschinen
DE102006046915C5 (de) 2006-10-04 2015-09-03 Federal-Mogul Burscheid Gmbh Kolbenring für Verbrennungskraftmaschinen
JP4916021B2 (ja) * 2007-09-26 2012-04-11 日立ツール株式会社 皮膜
DE102007058564A1 (de) * 2007-11-30 2009-06-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verschleißschutzbeschichtung für Bauteile oder Werkzeuge
WO2009070820A1 (de) * 2007-12-06 2009-06-11 Ceratizit Austria Gmbh Beschichteter gegenstand
CN101643889B (zh) * 2008-08-07 2012-10-10 三菱重工业株式会社 旋转机械用部件及其制造方法
DE102009002868A1 (de) 2009-05-06 2010-11-18 Inncoa Gmbh Verfahren zum Aufbringen einer viellagigen Schichtstruktur auf ein Substrat sowie Substrat mit einer viellagigen Schichtstruktur
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WO2014156739A1 (ja) * 2013-03-25 2014-10-02 株式会社神戸製鋼所 耐摩耗性に優れた積層皮膜
JP6155204B2 (ja) * 2014-02-21 2017-06-28 株式会社神戸製鋼所 硬質皮膜およびその形成方法
WO2017159030A1 (ja) * 2016-03-14 2017-09-21 株式会社神戸製鋼所 硬質皮膜及び硬質皮膜被覆部材
AT16481U1 (de) * 2018-04-20 2019-10-15 Plansee Composite Mat Gmbh Target und Verfahren zur Herstellung eines Targets
CN112063983B (zh) * 2020-07-31 2021-11-05 广东工业大学 一种带HfB2涂层的刀具及其制备方法
CN116837346B (zh) * 2023-08-31 2023-10-31 赣州澳克泰工具技术有限公司 一种带TiBN涂层的刀具及其制备方法

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Also Published As

Publication number Publication date
DE3512986A1 (de) 1986-10-16
EP0197185A2 (de) 1986-10-15
JPS61235555A (ja) 1986-10-20
EP0197185A3 (en) 1988-03-30
JPH0580547B2 (cs) 1993-11-09
ATE52815T1 (de) 1990-06-15
US4835062A (en) 1989-05-30
DE3512986C2 (cs) 1988-02-04

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