EP0197185A2 - Revêtement protecteur multicouche et très résistant à l'usure en matériaux durs pour des surfaces ou objets métalliques soumis à des contraintes élevées - Google Patents

Revêtement protecteur multicouche et très résistant à l'usure en matériaux durs pour des surfaces ou objets métalliques soumis à des contraintes élevées Download PDF

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Publication number
EP0197185A2
EP0197185A2 EP85109800A EP85109800A EP0197185A2 EP 0197185 A2 EP0197185 A2 EP 0197185A2 EP 85109800 A EP85109800 A EP 85109800A EP 85109800 A EP85109800 A EP 85109800A EP 0197185 A2 EP0197185 A2 EP 0197185A2
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EP
European Patent Office
Prior art keywords
tib
layers
layer
hard material
tic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85109800A
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German (de)
English (en)
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EP0197185B1 (fr
EP0197185A3 (en
Inventor
Helmut Dr. Holleck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
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Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to AT85109800T priority Critical patent/ATE52815T1/de
Publication of EP0197185A2 publication Critical patent/EP0197185A2/fr
Publication of EP0197185A3 publication Critical patent/EP0197185A3/de
Application granted granted Critical
Publication of EP0197185B1 publication Critical patent/EP0197185B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications

Definitions

  • the invention relates to multi-layer, highly wear-resistant hard material protective layer consisting of different hard material phases for metallic, highly stressed surfaces or other substrates, in which the thickness of the overall protective layer is in the range from 0.1 to 10 ⁇ m.
  • Hard material layers in the form of single or multiple layers, produced in CVD (Chemical Vapor Deposition) or PVD (Physical Vapor Deposition) processes on steels or hard metals are one of the major advances in terms of increasing wear resistance and thus the service life of Cutting materials or wearing parts.
  • the hard material layer provides the tough substrate with wear protection by increasing the abrasion resistance of the surface, by lowering the friction and thus the temperature, and by reducing the diffusion and adhesion between the material and the workpiece (or chip).
  • the problem of the composite material lies in the often inadequate adhesion between the base material and the layer, the lack of toughness of the layer and the lack of alternating strength. Attempts have been made to solve this problem through multiple layers, but there have been major improvements achieved compared to single layers, but cannot completely eliminate the weak points of the substrate-layer system.
  • Multi-layer hard material coatings of hard metals have been described, for example, in the Zeitschrift für Metallischen, Volume 75, Issue 11 (November 1984), pages 874 to 88 0 .
  • a ten-layer protective layer was mentioned in which a TiC layer, a Ti (C, N) layer above and a layer sequence of four intermediate layers and four ceramic layers based on Al 2 O 3 were used adjacent to the hard metal.
  • approximately 10 ⁇ m thick, multilayer layers based on titanium carbide, titanium carbonitride and titanium nitride were mentioned.
  • PVD physical vapor deposition
  • the invention has for its object to present Weartikscnichten with improved adhesion, toughness and wear resistance and to create a method for their production. It should be surfaces or substrates of substances with very different expansion coefficients, such as molybdenum with a very low expansion coefficient, or a hard metal with a medium expansion coefficient or high-speed steel with a high expansion Coefficients can be coated without significantly reducing the desired protective layer properties.
  • the individual layers or layers or the hard material particles by sputtering or another physical vapor deposition method on the metallic surface or applied to the substrate is characterized in that the surfaces to be coated are moved during the entire coating process relative to at least two sputtering cathodes of different hard material.
  • Another version of the method according to the invention is that the coating of the surface or of the substrate is carried out with the aid of a cathode consisting of at least two hard materials which form coherent or partially coherent phase boundaries.
  • Cathodes made of TiC and TiB 2 or TiN and TiB 2 or TiC and TiN and TiB 2 can be used for both versions of the method according to the invention.
  • cathode combinations of TiB 2 -WC or TiB 2 -Ti (C, N) or TiB2- (Ti, V) C or TiB2- (Ti, W) C or (Ti, V) B 2 - (Ti, V) C or (Ti, Nb) B 2- (Ti, Nb) C or JB 2 -TiN or VB 2 -WC or HfB 2 -TaC or ZrB 2 -TaC or ZrB 2 -NbC can be used.
  • the successive layers or the very finely divided mixture for example the phases with partially coherent TiC (111) - TiB 2 (0001) - phase boundaries are largely stress-free, tougher, better adhering to the substrate and due to the extremely high proportion of inner phase boundaries with a defined dislocation density make the entire system more wear-resistant than with conventional protective layers. It is important here to coordinate the phases that build up the layer in such a way that coherence relationships between network levels of the respective connection are possible and these are realized during the coating process. With the combination TiC / TiB 2 , these are the most densely packed levels (111) for TiC and (0001) for TiB 2 . In the sputtering process, these phase boundaries can easily be maintained due to the favorable interfacial energy.
  • the samples 5, 6, 7 to be coated are rotated continuously on a turntable 1 with or without heating under two cathodes, one with TiC 3, the other with TiB 2 4, during the entire coating process.
  • the composition and microstructure of the layer can be specifically adjusted by changing the plate rotation speed and the sputtering capacity. It is preferred to choose conditions in which the phase proportions of TiC and TiB 2 are similar and the total layer thickness achieved is 3 to 5 ⁇ m.
  • the calculated particle size (individual layer thickness) is between 0.5 and 40 nm, depending on the application. The smaller "particle sizes", as shown by X-ray images, can no longer separate the individual phases.
  • the service life of the cutting tip which is provided with a finely dispersed TiC / TiB 2 layer14, is approximately twice that of the simply coated12 and 13 respectively.
  • A, D, E mean densely packed Ti planes, with D and E the atomic centers are not in the paper plane.
  • B are the boron planes, C the carbon planes and N the nitrogen planes in the case of TiN.
  • the filled and unfilled circles are the Ti atoms.
  • the dashed line represents a phase boundary.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
EP85109800A 1985-04-11 1985-08-05 Revêtement protecteur multicouche et très résistant à l'usure en matériaux durs pour des surfaces ou objets métalliques soumis à des contraintes élevées Expired - Lifetime EP0197185B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT85109800T ATE52815T1 (de) 1985-04-11 1985-08-05 Viellagige, hochverschleissfest hartstoffschutzschicht fuer metallische, stark beanspruchte oberflaechen oder substrate.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19853512986 DE3512986A1 (de) 1985-04-11 1985-04-11 Viellagige, hochverschleissfeste hartstoffschutzschicht fuer metallische, stark beanspruchte oberflaechen oder substrate
DE3512986 1985-04-11

Publications (3)

Publication Number Publication Date
EP0197185A2 true EP0197185A2 (fr) 1986-10-15
EP0197185A3 EP0197185A3 (en) 1988-03-30
EP0197185B1 EP0197185B1 (fr) 1990-05-16

Family

ID=6267732

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85109800A Expired - Lifetime EP0197185B1 (fr) 1985-04-11 1985-08-05 Revêtement protecteur multicouche et très résistant à l'usure en matériaux durs pour des surfaces ou objets métalliques soumis à des contraintes élevées

Country Status (5)

Country Link
US (1) US4835062A (fr)
EP (1) EP0197185B1 (fr)
JP (1) JPS61235555A (fr)
AT (1) ATE52815T1 (fr)
DE (1) DE3512986A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993022746A1 (fr) * 1992-05-01 1993-11-11 National Research Council Of Canada Monnaies, medailles, jetons et autres articles non fibreux a caracteristiques optiques variables et procede de fabrication
EP0701982A1 (fr) * 1994-09-16 1996-03-20 Sumitomo Electric Industries, Limited Film stratifié à particules ultrafines et matériau composite dur pour outils ayant ce film
WO1998010120A1 (fr) * 1996-09-03 1998-03-12 Balzers Aktiengesellschaft Piece avec couche de protection contre l'usure
AT16481U1 (de) * 2018-04-20 2019-10-15 Plansee Composite Mat Gmbh Target und Verfahren zur Herstellung eines Targets

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US5310603A (en) * 1986-10-01 1994-05-10 Canon Kabushiki Kaisha Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray
US5433988A (en) * 1986-10-01 1995-07-18 Canon Kabushiki Kaisha Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray
JPS63125602A (ja) * 1986-11-12 1988-05-28 Sumitomo Electric Ind Ltd 工具用硬質合金
DE3811907C1 (fr) * 1988-04-09 1989-08-03 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe, De
DE3830525A1 (de) * 1988-09-08 1990-03-22 Beck August Gmbh Co Mit hartstoff beschichtete hartmetallschneidplatte und verfahren zu ihrer herstellung
JP2793696B2 (ja) * 1990-05-17 1998-09-03 神鋼コベルコツール株式会社 耐摩耗性皮膜
JPH05198575A (ja) * 1991-05-01 1993-08-06 Kobe Steel Ltd 耐食性ＡｌまたはＡｌ合金材
DE69319531T2 (de) * 1992-10-12 1999-04-15 Sumitomo Electric Industries, Ltd., Osaka Ultradünnes Filmlaminat
JP2638406B2 (ja) * 1992-10-26 1997-08-06 神鋼コベルコツール株式会社 耐摩耗性多層型硬質皮膜構造
US5789071A (en) * 1992-11-09 1998-08-04 Northwestern University Multilayer oxide coatings
US5783295A (en) * 1992-11-09 1998-07-21 Northwestern University Polycrystalline supperlattice coated substrate and method/apparatus for making same
GB9405744D0 (en) * 1994-03-23 1994-05-11 Rolls Royce Plc A multilayer erosion resistant coating and a method for its production
US5952085A (en) * 1994-03-23 1999-09-14 Rolls-Royce Plc Multiple layer erosion resistant coating and a method for its production
EP0695731B1 (fr) * 1994-08-01 2000-11-08 Sumitomo Electric Industries, Limited Matériau composite extra dur pour outils
DE69526301T2 (de) 1994-10-28 2002-12-05 Sumitomo Electric Industries, Ltd. Mehrschichtiges Material
DE19503070C1 (de) 1995-02-01 1996-08-14 Karlsruhe Forschzent Verschleißschutzschicht
US5750207A (en) * 1995-02-17 1998-05-12 Si Diamond Technology, Inc. System and method for depositing coating of modulated composition
US5681653A (en) * 1995-05-11 1997-10-28 Si Diamond Technology, Inc. Diamond cutting tools
US5593234A (en) * 1995-05-16 1997-01-14 Ntn Corporation Bearing assembly with polycrystalline superlattice coating
US5588975A (en) * 1995-05-25 1996-12-31 Si Diamond Technology, Inc. Coated grinding tool
SE518145C2 (sv) * 1997-04-18 2002-09-03 Sandvik Ab Multiskiktbelagt skärverktyg
JP4185172B2 (ja) * 1997-06-19 2008-11-26 住友電工ハードメタル株式会社 被覆硬質工具
DE10016958A1 (de) * 2000-04-06 2001-10-18 Widia Gmbh Verfahren zur Herstellung von Multilagenschichten auf Substratkörpern und Verbundwerkstoff, bestehend aus einem beschichteten Substratkörper
US6634781B2 (en) 2001-01-10 2003-10-21 Saint Gobain Industrial Ceramics, Inc. Wear resistant extruder screw
SE522722C2 (sv) * 2001-03-28 2004-03-02 Seco Tools Ab Skärverktyg belagt med titandiborid
US6660133B2 (en) 2002-03-14 2003-12-09 Kennametal Inc. Nanolayered coated cutting tool and method for making the same
DE102006046917C5 (de) * 2006-10-04 2014-03-20 Federal-Mogul Burscheid Gmbh Kolbenring für Verbrennungskraftmaschinen
DE102006046915C5 (de) * 2006-10-04 2015-09-03 Federal-Mogul Burscheid Gmbh Kolbenring für Verbrennungskraftmaschinen
JP4916021B2 (ja) * 2007-09-26 2012-04-11 日立ツール株式会社 皮膜
DE102007058564A1 (de) * 2007-11-30 2009-06-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verschleißschutzbeschichtung für Bauteile oder Werkzeuge
KR101494039B1 (ko) * 2007-12-06 2015-02-16 세라티지트 오스트리아 게젤샤프트 엠.베.하 절삭 공구 및 그 제조방법
CN101643889B (zh) * 2008-08-07 2012-10-10 三菱重工业株式会社 旋转机械用部件及其制造方法
DE102009002868A1 (de) 2009-05-06 2010-11-18 Inncoa Gmbh Verfahren zum Aufbringen einer viellagigen Schichtstruktur auf ein Substrat sowie Substrat mit einer viellagigen Schichtstruktur
US8267805B2 (en) * 2009-10-01 2012-09-18 Lyle Dean Johnson Three in one-HBC(hand, belly, chest) putter
US9670575B2 (en) * 2013-03-25 2017-06-06 Kobe Steel, Ltd. Laminated coating film having superior wear resistance
JP6155204B2 (ja) * 2014-02-21 2017-06-28 株式会社神戸製鋼所 硬質皮膜およびその形成方法
WO2017159030A1 (fr) * 2016-03-14 2017-09-21 株式会社神戸製鋼所 Revêtement dur et élément recouvert de revêtement dur
CN112063983B (zh) * 2020-07-31 2021-11-05 广东工业大学 一种带HfB2涂层的刀具及其制备方法
CN116837346B (zh) * 2023-08-31 2023-10-31 赣州澳克泰工具技术有限公司 一种带TiBN涂层的刀具及其制备方法

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EP0006534A1 (fr) * 1978-06-22 1980-01-09 Stellram S.A. Pièce d'usure en métal dur
GB2045810A (en) * 1979-03-22 1980-11-05 Nl Vintage Preheating substrates prior to coating to remove hydrogen
DE3112460A1 (de) * 1981-03-28 1982-09-30 Fried. Krupp Gmbh, 4300 Essen "verfahren zur herstellung eines verbundkoerpers sowie nach diesem verfahren hergestellter verbundkoerper"
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993022746A1 (fr) * 1992-05-01 1993-11-11 National Research Council Of Canada Monnaies, medailles, jetons et autres articles non fibreux a caracteristiques optiques variables et procede de fabrication
EP0701982A1 (fr) * 1994-09-16 1996-03-20 Sumitomo Electric Industries, Limited Film stratifié à particules ultrafines et matériau composite dur pour outils ayant ce film
US5700551A (en) * 1994-09-16 1997-12-23 Sumitomo Electric Industries, Ltd. Layered film made of ultrafine particles and a hard composite material for tools possessing the film
WO1998010120A1 (fr) * 1996-09-03 1998-03-12 Balzers Aktiengesellschaft Piece avec couche de protection contre l'usure
US6395379B1 (en) 1996-09-03 2002-05-28 Balzers Aktiengesellschaft Workpiece with wear-protective coating
AT16481U1 (de) * 2018-04-20 2019-10-15 Plansee Composite Mat Gmbh Target und Verfahren zur Herstellung eines Targets

Also Published As

Publication number Publication date
US4835062A (en) 1989-05-30
EP0197185B1 (fr) 1990-05-16
DE3512986A1 (de) 1986-10-16
ATE52815T1 (de) 1990-06-15
EP0197185A3 (en) 1988-03-30
JPH0580547B2 (fr) 1993-11-09
DE3512986C2 (fr) 1988-02-04
JPS61235555A (ja) 1986-10-20

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