EP0167277A2 - Mikroverschiebungsmessapparat - Google Patents

Mikroverschiebungsmessapparat Download PDF

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Publication number
EP0167277A2
EP0167277A2 EP85303845A EP85303845A EP0167277A2 EP 0167277 A2 EP0167277 A2 EP 0167277A2 EP 85303845 A EP85303845 A EP 85303845A EP 85303845 A EP85303845 A EP 85303845A EP 0167277 A2 EP0167277 A2 EP 0167277A2
Authority
EP
European Patent Office
Prior art keywords
semiconductor laser
light
micro
displacement
measuring apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85303845A
Other languages
English (en)
French (fr)
Other versions
EP0167277B1 (de
EP0167277A3 (en
Inventor
Osamu Yamamoto
Sadoyoshi Matsui
Haruhisa Takiguchi
Hiroshi Hayashi
Nobuyuki Miyauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of EP0167277A2 publication Critical patent/EP0167277A2/de
Publication of EP0167277A3 publication Critical patent/EP0167277A3/en
Application granted granted Critical
Publication of EP0167277B1 publication Critical patent/EP0167277B1/de
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers

Definitions

  • This invention relates to a micro-displacement measuring apparatus which can attain accurate and ready measurement of micro-amounts and the direction of displacement of objects.
  • the micro-displacement measuring apparatus of this invention which overcomes the above-discussed disadvantages and other numerous drawbacks and deficiencies of the prior art, comprises a compound resonator system containing a semiconductor laser, and a light detector for receiving liqht from said semiconductor laser, said compound resonator system being constructed such that light from said laser irradiates the object to be measured and the reflected light therefrom returns to said semiconductor laser.
  • the compound resonator system comprises, in a preferred embodiment, a semiconductor laser, a collimator lens for producing a beam of parallel rays of light from said semiconductor laser, and a beam splitter for dividing the parallel rays of light into two elements at right angles to each other, one of which is directed to said object and the other of which is directed to said light detector.
  • An alternative compound resonator system comprises, in a preferred embodiment, a semiconductor laser, a collimator lens for producing a beam of parallel rays of light from said semiconductor laser, and a condensing lens for condensing the parallel rays of light on the object.
  • the invention described herein makes possible the objects of (1) providing a micro-displacement measuring apparatus which can readily and accurately measure the micro-displacement of an object in a non-contact manner, and (2) providing a micro-displacement measuring apparatus which can readily and accurately detect the direction of displacement of the object in a non-contact manner.
  • Figure 1 shows an apparatus of this invention which comprises a compound resonator system 10 and a light detector 11.
  • the compound resonator system 10 comprises a semiconductor laser 1, a collimator lens 2 for producing a beam of parallel rays of light from the semiconductor laser 1, and a beam splitter 3 for dividing the parallel rays of light into two elements at right angles to each other, one of which is directed to an object 4 to be measured and the other of which is directed to the light detector 11.
  • the semiconductor laser 1, the collimator lens 2, the beam splitter 3 and the object are successively disposed on an optical axis A.
  • the face 4a of the object 4 to be measured is at a right angle to the optical axis A and the light detector 11 is at a right angle to the axis A to receive the light from the beam splitter 3.
  • a light from the semiconductor laser 1 passes through the collimator lens 2 to produce a beam of parallel rays of light which is then divided into two elements at right angles to each other by means of the beam splitter 3.
  • One of the two elements irradiates the face 4a of the object 4 at a right angle, reflects from the object 4 and returns by the same path to the semiconductor laser 1.
  • the other element of the parallel rays of light from the beam splitter 3 goes to the light detector 11, whereby the optical output of the semiconductor laser 1 is measured.
  • the optical output of the semiconductor laser 1 varies for each X/2 (X: oscillation wavelength) variation in the amount of displacement X based on the phase relationship between the oscillated light from the semiconductor laser 1 and the reflected light from the object 4, resulting in a "swing" of the optical output.
  • X/2 oscillation wavelength
  • the optical output of the semiconductor laser 1 i.e., the optical input to the light detector 11
  • the amount of displacement for every ⁇ /2 of the object 4 corresponds to the number of swingings of the optical input to the light detector 11 in the proportion of 1 to 1
  • the level of the optical output of the semiconductor laser 1 i.e., the level of the input to the light detector 11
  • the level of the optical output of the semiconductor laser 1 decreases or increases as the displacement of the object 4 is directed toward the semiconductor laser 1 or is in the opposite direction therefrom.
  • the amount of displacement and the direction of displacement of the object 4 correspond to the variation of the optical output of the semiconductor laser 1.
  • the amount and the direction of displacement of the object 4 can be realized, respectively.
  • the amplitude, the number of vibrations or the like thereof can be realized.
  • a reflecting mirror can be attached to the object 4 to effect the above-mentioned measurements.
  • Figure 3 shows another apparatus of this invention which comprises a compound resonator system 10 and a light detector 11, as well.
  • the compound resonator system 10 is different from that in Figure 1 in that a condensing lens 6 instead of the beam splitter 3 is disposed on the optical axis A to condense the parallel rays of light from the collimater lens 2 on the object 4.
  • the light detector 11 1 is disposed behind the semiconductor laser 1 in a manner to directly receive the laser light therefrom.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
EP85303845A 1984-06-01 1985-05-31 Mikroverschiebungsmessapparat Expired EP0167277B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59113619A JPH0697261B2 (ja) 1984-06-01 1984-06-01 半導体レ−ザを用いた微小変位測定装置
JP113619/84 1984-06-01

Publications (3)

Publication Number Publication Date
EP0167277A2 true EP0167277A2 (de) 1986-01-08
EP0167277A3 EP0167277A3 (en) 1987-09-30
EP0167277B1 EP0167277B1 (de) 1990-12-27

Family

ID=14616800

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85303845A Expired EP0167277B1 (de) 1984-06-01 1985-05-31 Mikroverschiebungsmessapparat

Country Status (4)

Country Link
US (1) US4655597A (de)
EP (1) EP0167277B1 (de)
JP (1) JPH0697261B2 (de)
DE (1) DE3581119D1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0260420A2 (de) * 1986-09-19 1988-03-23 International Business Machines Corporation Präzisionsmess- und -positionierungssystem für ein Plattenspeichersystem
DE3730543C1 (en) * 1987-09-11 1989-04-06 Danfoss As Test method and instrument for determining the magnitude and direction of a movement parameter
EP0402691A1 (de) * 1989-05-29 1990-12-19 Rainer Dipl.-Ing. Thiessen Laser-Sensor mit externem Resonator

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0690009B2 (ja) * 1985-02-28 1994-11-14 シャープ株式会社 半導体レーザを用いた微小変位測定方法
JPH0769426B2 (ja) * 1988-05-23 1995-07-31 スズキ株式会社 移動物体の移動方向判別装置
US4983035A (en) * 1988-06-24 1991-01-08 Reiton Ltd. Laser measuring devices
DE3920716C1 (de) * 1989-06-24 1990-11-29 Wild Leitz Gmbh, 6330 Wetzlar, De
US5029023A (en) * 1989-09-29 1991-07-02 Regents Of The University Of California Laser-amplified motion detector and method
JP2647543B2 (ja) * 1990-09-07 1997-08-27 日本電信電話株式会社 形状測定法
DE4125485C2 (de) * 1991-08-01 1994-05-19 Deutsche Aerospace Verfahren und Anordnung zur Messung kleinster Auslenkungen
US5619318A (en) * 1993-08-10 1997-04-08 Olympus Optical Co., Ltd. Optical displacement sensor
GB0603817D0 (en) * 2006-02-24 2006-04-05 Proton Products Ltd Remote sensing of movement and direction of objects
TWI401410B (zh) * 2010-04-26 2013-07-11 Nat Univ Chung Hsing Micro - shift optical measurement system
CN109916307A (zh) * 2018-12-27 2019-06-21 河南中原光电测控技术有限公司 可变功率激光测量方法及装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0084871A2 (de) * 1982-01-22 1983-08-03 Hitachi, Ltd. Verfahren und Vorrichtung zur Reduzierung von optischen Rauschen in Halbleiterlasern
JPS60147602A (ja) * 1984-01-13 1985-08-03 Yamatake Honeywell Co Ltd マ−クセンサ
JPS60203801A (ja) * 1984-03-28 1985-10-15 Canon Inc 能動型干渉計

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6511751A (de) * 1965-09-09 1967-03-10
US3476483A (en) * 1966-08-16 1969-11-04 Carson Lab Inc Motion measuring apparatus
JPS54109863A (en) * 1978-02-17 1979-08-28 Toshiba Corp Range measuring device
JPS5553776A (en) * 1978-10-13 1980-04-19 Nec Corp Optical information reading method
JPS6064284A (ja) * 1983-09-19 1985-04-12 Matsushita Electric Ind Co Ltd レ−ザ測距装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0084871A2 (de) * 1982-01-22 1983-08-03 Hitachi, Ltd. Verfahren und Vorrichtung zur Reduzierung von optischen Rauschen in Halbleiterlasern
JPS60147602A (ja) * 1984-01-13 1985-08-03 Yamatake Honeywell Co Ltd マ−クセンサ
JPS60203801A (ja) * 1984-03-28 1985-10-15 Canon Inc 能動型干渉計

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, vol. 10, no. 60 (P-435)[2117], 11th March 1986; & JP-A-60 203 801 (CANON K.K.) 15-10-1985 *
PATENT ABSTRACTS OF JAPAN, vol. 9, no. 320 (P-413)[2043], 14th December 1985; & JP-A-60 147 602 (YAMATAKE HONEYWELL K.K.) 03-08-1985 *
TECHNISCHES MESSEN T.M., vol. 52, no. 9, 1985, pages 321-326, Munich, DE; H.J. BOEHNEL et al.: "Miniaturisiertes Halbleiterlaser-Interferometer f}r die industrielle Wegmessung" *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0260420A2 (de) * 1986-09-19 1988-03-23 International Business Machines Corporation Präzisionsmess- und -positionierungssystem für ein Plattenspeichersystem
EP0260420A3 (en) * 1986-09-19 1988-11-30 International Business Machines Corporation Precision measurement and positioning system for disk storage system
DE3730543C1 (en) * 1987-09-11 1989-04-06 Danfoss As Test method and instrument for determining the magnitude and direction of a movement parameter
EP0402691A1 (de) * 1989-05-29 1990-12-19 Rainer Dipl.-Ing. Thiessen Laser-Sensor mit externem Resonator

Also Published As

Publication number Publication date
US4655597A (en) 1987-04-07
JPS60256079A (ja) 1985-12-17
EP0167277B1 (de) 1990-12-27
EP0167277A3 (en) 1987-09-30
JPH0697261B2 (ja) 1994-11-30
DE3581119D1 (de) 1991-02-07

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