EP0140003B1 - Dispositif de guidage - Google Patents
Dispositif de guidage Download PDFInfo
- Publication number
- EP0140003B1 EP0140003B1 EP84110200A EP84110200A EP0140003B1 EP 0140003 B1 EP0140003 B1 EP 0140003B1 EP 84110200 A EP84110200 A EP 84110200A EP 84110200 A EP84110200 A EP 84110200A EP 0140003 B1 EP0140003 B1 EP 0140003B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- guide
- base
- elements
- air cushion
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/58—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators
Definitions
- the invention relates to a guide device according to the preamble of claim 1.
- DE-C-1 258671 describes a guide device in which the air bearings of the rigid guide surfaces are preloaded by magnets, and in which the guide elements and the guided elements engage with one another via gas bearings.
- a machine guide is known in which a guide surface is provided with a separately manufactured component for supplying the air bearing, this component being secured against longitudinal displacements.
- DE-A-3 023 837 shows an air-bearing machine guide, the storage of which should have better operating properties, in particular higher resilience and better stability.
- Measuring machines should therefore be as versatile as possible.
- the known guide devices which are preferably used in these types of construction for measuring machines, contradict the required versatility, since - as mentioned at the beginning - they severely restrict directions of movement and measuring range. In general, movements take place in different coordinate directions at different distances from the base of the measuring plane, which damages the measuring accuracy or has to be eliminated by compensation calculations.
- the invention has for its object to avoid the known disadvantages in guide devices, and to provide a guide device that is more versatile, highly accurate and inexpensive to manufacture, and has a small size.
- the particular advantages of the guide device according to the invention are the versatility with regard to the intended use, the robust construction, the low construction height and the mobility in every coordinate direction of a plane.
- the device is free of rigid outer guide elements.
- the guide device shown in FIG. 1 is shown in a highly simplified manner so that the invention can be explained clearly and easily.
- a flat surface of a machine bed forms the base 1 of a guide device, on which elements 2 and 3 are supported by known air bearings 2a, 2b, 3a, 3b - which are symbolized by arrows. If the air bearings 2a, 2b, 3a, 3b are in operation, the elements 2 and 3 can be freely moved and rotated on the flat base 1. In the interior of the element 3 there is a recess 4 open to the base, which receives the element 2, which is also supported in the recess 4 of the element 3 via air bearings 2e, 2f, 2g, 2h. Instead of the air bearings 2e, 2f, 2g, 2h in element 2, air bearings 3e, 3f, 3g, 3h can of course also be provided in element 3, which support element 2. The number and dimensions of the air bearing depend on the technical requirements.
- the element 2 Due to the very precise air bearing in the recess 4, the element 2 can therefore be moved in the X direction, but not in another direction unless the element 3 itself is moved in a direction other than the X direction. Within element 3, element 2 is therefore guided very precisely in one direction.
- the air bearings 2a, 2b, 2c, 2d and / or 3a, 3b, 3c, 3d can be switched off separately and even switched to negative pressure.
- the air bearings 2a to 3d are in operation at the beginning of an operation, for example a measurement.
- element 2 is stopped by switching off or switching to negative pressure in its air bearings 2a to 2d and adheres firmly to base 1.
- the measurement object is located on element 3 - which now forms the slide - and is along a very long path precise guidance - which is formed by the element 2 - displaceable, since the air bearings of the carriage 3 and those within the recess 4 are not switched off.
- a guide and a slide are thus formed by stopping one of the elements 2 or 3. Is that compared to the above Element 3 stopped on base 1, element 2 can be precisely displaced inside recess 4 and displaced exactly in the X direction. The element 2 can then be stopped again on the base 1 and the element 3 can be moved further. In this way, the guide through the element 2 can be lengthened in the X direction step by step.
- the measuring range is therefore only limited by the size of the base 1.
- FIGS. 3 and 4 An embodiment for a guide in two mutually perpendicular directions of movement is shown schematically in FIGS. 3 and 4.
- Elements 6, 7, 8, 9 are arranged on a flat base 5, of which the element 7 on the base 5 is stopped in the manner described above and thus forms the guide.
- the element 6, which now acts as a slide can be displaced precisely in the Y direction, and the elements 8 and 9 for the X direction, which have been deactivated, are also displaced in the Y direction.
- one of the elements 8 or 9 or both is lowered and thus stopped.
- the latter is raised and can be moved precisely in the X direction with the slide element 6.
- the two elements 8 and 9 are provided if a gradual movement of the slide element 6 in one direction is to be achieved without a respective lowering of the slide element 6.
- the two elements 8 and 9 can - as shown here - be arranged side by side, but also one behind the other. Of course, multiple execution is also possible in the other coordinate direction and may be useful.
- the relative movements between the elements 2, 3, 6, 7, 8, 9 can be recorded using known length measuring systems (photoelectric, inductive, magnetic, interferometric, incremental, absolute etc.) and by known drives, e.g. Electric motor, pneumatic drive, friction wheel, spindle, traction gear can be controlled. Appropriate evaluation of the measurement data makes it possible to determine the distances traveled per step or based on a starting point.
- the elements serving as guidance can also be stopped with the aid of electromagnets.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Threshing Machine Elements (AREA)
- Machine Tool Units (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT84110200T ATE33291T1 (de) | 1983-10-04 | 1984-08-28 | Fuehrungsvorrichtung. |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3336002A DE3336002C2 (de) | 1983-10-04 | 1983-10-04 | Führungsvorrichtung |
DE3336002 | 1983-10-04 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0140003A2 EP0140003A2 (fr) | 1985-05-08 |
EP0140003A3 EP0140003A3 (en) | 1986-02-19 |
EP0140003B1 true EP0140003B1 (fr) | 1988-03-30 |
Family
ID=6210912
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP84110200A Expired EP0140003B1 (fr) | 1983-10-04 | 1984-08-28 | Dispositif de guidage |
Country Status (5)
Country | Link |
---|---|
US (1) | US4615568A (fr) |
EP (1) | EP0140003B1 (fr) |
JP (1) | JPS6097290A (fr) |
AT (1) | ATE33291T1 (fr) |
DE (2) | DE3336002C2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011085339A1 (de) * | 2011-10-27 | 2013-05-02 | Eitzenberger Luftlagertechnik Gmbh | Positioniervorrichtung, Kreuztisch und Hubeinheit |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2160975B (en) * | 1984-05-14 | 1988-11-09 | Mitutoyo Mfg Co Ltd | Coordinate measuring instrument |
FR2582557A1 (fr) * | 1985-05-31 | 1986-12-05 | Primat Didier | Dispositif de guidage et d'entrainement monodirectionnel d'une platine vis-a-vis d'un banc de machine, selon un axe de mouvement parallele |
US5160883A (en) * | 1989-11-03 | 1992-11-03 | John H. Blanz Company, Inc. | Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support |
US5077523A (en) * | 1989-11-03 | 1991-12-31 | John H. Blanz Company, Inc. | Cryogenic probe station having movable chuck accomodating variable thickness probe cards |
US5166606A (en) * | 1989-11-03 | 1992-11-24 | John H. Blanz Company, Inc. | High efficiency cryogenic test station |
US5241183A (en) * | 1991-03-22 | 1993-08-31 | Nippon Telegraph And Telephone Corporation | Vertical xy stage |
SE515181C2 (sv) * | 1998-09-23 | 2001-06-25 | Jan Staffan Aasander | Ett, utefter en stödyta, förskjutbart anordnat arrangemang samt ett sådant arrangemang utnyttjande förfarande |
SE515357C2 (sv) * | 1998-10-05 | 2001-07-23 | Jan Staffan Aasander | System för att låta bearbeta ett material längs en produktionslinje |
DE102004005515B3 (de) * | 2004-02-03 | 2005-06-16 | Diamant-Metallplastic Gmbh | Auf einer Unterlage mittels eines Druckpolsters abstützbares und darauf verschiebbares Gleitlager |
DE102011085336B4 (de) * | 2011-10-27 | 2013-06-06 | Eitzenberger Luftlagertechnik Gmbh | Positioniervorrichtung, Kreuztisch und Hubeinheit |
DE102017202762B4 (de) * | 2017-02-21 | 2018-12-20 | Schott Ag | Verfahren zur Herstellung eines Glasrohres mit einem von einer Kreisform abweichenden Querschnitt durch Umformen sowie Verwendung des Verfahrens |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3253665A (en) * | 1961-01-06 | 1966-05-31 | Gen Motors Corp | Fluid actuated workpiece positioning device |
BE630212A (fr) * | 1962-03-28 | |||
US3155383A (en) * | 1962-10-11 | 1964-11-03 | Link Division Of General Prec | Precision positioning apparatus |
US3376764A (en) * | 1962-10-15 | 1968-04-09 | Schardt Rudolf | Pneumatic positioning table |
DE1920063A1 (de) * | 1969-04-19 | 1970-11-05 | Daimler Benz Ag | Vorrichtung zum Vermessen der Form eines Gegenstandes |
CH519661A (de) * | 1969-08-21 | 1972-02-29 | Oerlikon Buehrle Ag | Hydrostatisches Gleitlager |
GB1393035A (en) * | 1971-07-09 | 1975-05-07 | Olivetti & Co Spa | Precision measuring apparatus with aerostatic bearings |
FR2207845B3 (fr) * | 1972-11-30 | 1976-01-09 | Auriol Et Cie Hte Garonn Fr | |
DE2346693A1 (de) * | 1973-09-17 | 1975-04-24 | Wotan Werke Gmbh | Fuehrung fuer relativ zueinander bewegbare maschinenteile |
DE2346633A1 (de) * | 1973-09-17 | 1975-04-24 | Wotan Werke Gmbh | Fuehrung fuer relativ zueinander bewegbare maschinenteile |
JPS5343158A (en) * | 1976-09-30 | 1978-04-19 | Hiroshi Teramachi | Crossed linear bearing |
JPS5567694A (en) * | 1978-11-16 | 1980-05-21 | Tokyo Shibaura Electric Co | Automatic parallel table |
JPS566919A (en) * | 1979-06-26 | 1981-01-24 | Canon Inc | Fluid bearing |
-
1983
- 1983-10-04 DE DE3336002A patent/DE3336002C2/de not_active Expired
-
1984
- 1984-08-28 AT AT84110200T patent/ATE33291T1/de active
- 1984-08-28 DE DE8484110200T patent/DE3470197D1/de not_active Expired
- 1984-08-28 EP EP84110200A patent/EP0140003B1/fr not_active Expired
- 1984-09-07 US US06/648,787 patent/US4615568A/en not_active Expired - Fee Related
- 1984-10-02 JP JP59205705A patent/JPS6097290A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011085339A1 (de) * | 2011-10-27 | 2013-05-02 | Eitzenberger Luftlagertechnik Gmbh | Positioniervorrichtung, Kreuztisch und Hubeinheit |
DE102011085339B4 (de) * | 2011-10-27 | 2013-06-06 | Eitzenberger Luftlagertechnik Gmbh | Positioniervorrichtung, Kreuztisch und Hubeinheit |
Also Published As
Publication number | Publication date |
---|---|
DE3336002C2 (de) | 1985-11-07 |
ATE33291T1 (de) | 1988-04-15 |
DE3336002A1 (de) | 1985-04-18 |
EP0140003A3 (en) | 1986-02-19 |
DE3470197D1 (en) | 1988-05-05 |
JPS6097290A (ja) | 1985-05-31 |
EP0140003A2 (fr) | 1985-05-08 |
JPH0420152B2 (fr) | 1992-03-31 |
US4615568A (en) | 1986-10-07 |
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Legal Events
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