EP0140003B1 - Dispositif de guidage - Google Patents

Dispositif de guidage Download PDF

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Publication number
EP0140003B1
EP0140003B1 EP84110200A EP84110200A EP0140003B1 EP 0140003 B1 EP0140003 B1 EP 0140003B1 EP 84110200 A EP84110200 A EP 84110200A EP 84110200 A EP84110200 A EP 84110200A EP 0140003 B1 EP0140003 B1 EP 0140003B1
Authority
EP
European Patent Office
Prior art keywords
guide
base
elements
air cushion
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP84110200A
Other languages
German (de)
English (en)
Other versions
EP0140003A3 (en
EP0140003A2 (fr
Inventor
Hans-Rudolf Dipl.-Ing. Kober
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to AT84110200T priority Critical patent/ATE33291T1/de
Publication of EP0140003A2 publication Critical patent/EP0140003A2/fr
Publication of EP0140003A3 publication Critical patent/EP0140003A3/de
Application granted granted Critical
Publication of EP0140003B1 publication Critical patent/EP0140003B1/fr
Expired legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/44Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/58Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/44Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/02Sliding-contact bearings
    • F16C29/025Hydrostatic or aerostatic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00Apparatus used in shaping articles
    • F16C2322/39General build up of machine tools, e.g. spindles, slides, actuators

Definitions

  • the invention relates to a guide device according to the preamble of claim 1.
  • DE-C-1 258671 describes a guide device in which the air bearings of the rigid guide surfaces are preloaded by magnets, and in which the guide elements and the guided elements engage with one another via gas bearings.
  • a machine guide is known in which a guide surface is provided with a separately manufactured component for supplying the air bearing, this component being secured against longitudinal displacements.
  • DE-A-3 023 837 shows an air-bearing machine guide, the storage of which should have better operating properties, in particular higher resilience and better stability.
  • Measuring machines should therefore be as versatile as possible.
  • the known guide devices which are preferably used in these types of construction for measuring machines, contradict the required versatility, since - as mentioned at the beginning - they severely restrict directions of movement and measuring range. In general, movements take place in different coordinate directions at different distances from the base of the measuring plane, which damages the measuring accuracy or has to be eliminated by compensation calculations.
  • the invention has for its object to avoid the known disadvantages in guide devices, and to provide a guide device that is more versatile, highly accurate and inexpensive to manufacture, and has a small size.
  • the particular advantages of the guide device according to the invention are the versatility with regard to the intended use, the robust construction, the low construction height and the mobility in every coordinate direction of a plane.
  • the device is free of rigid outer guide elements.
  • the guide device shown in FIG. 1 is shown in a highly simplified manner so that the invention can be explained clearly and easily.
  • a flat surface of a machine bed forms the base 1 of a guide device, on which elements 2 and 3 are supported by known air bearings 2a, 2b, 3a, 3b - which are symbolized by arrows. If the air bearings 2a, 2b, 3a, 3b are in operation, the elements 2 and 3 can be freely moved and rotated on the flat base 1. In the interior of the element 3 there is a recess 4 open to the base, which receives the element 2, which is also supported in the recess 4 of the element 3 via air bearings 2e, 2f, 2g, 2h. Instead of the air bearings 2e, 2f, 2g, 2h in element 2, air bearings 3e, 3f, 3g, 3h can of course also be provided in element 3, which support element 2. The number and dimensions of the air bearing depend on the technical requirements.
  • the element 2 Due to the very precise air bearing in the recess 4, the element 2 can therefore be moved in the X direction, but not in another direction unless the element 3 itself is moved in a direction other than the X direction. Within element 3, element 2 is therefore guided very precisely in one direction.
  • the air bearings 2a, 2b, 2c, 2d and / or 3a, 3b, 3c, 3d can be switched off separately and even switched to negative pressure.
  • the air bearings 2a to 3d are in operation at the beginning of an operation, for example a measurement.
  • element 2 is stopped by switching off or switching to negative pressure in its air bearings 2a to 2d and adheres firmly to base 1.
  • the measurement object is located on element 3 - which now forms the slide - and is along a very long path precise guidance - which is formed by the element 2 - displaceable, since the air bearings of the carriage 3 and those within the recess 4 are not switched off.
  • a guide and a slide are thus formed by stopping one of the elements 2 or 3. Is that compared to the above Element 3 stopped on base 1, element 2 can be precisely displaced inside recess 4 and displaced exactly in the X direction. The element 2 can then be stopped again on the base 1 and the element 3 can be moved further. In this way, the guide through the element 2 can be lengthened in the X direction step by step.
  • the measuring range is therefore only limited by the size of the base 1.
  • FIGS. 3 and 4 An embodiment for a guide in two mutually perpendicular directions of movement is shown schematically in FIGS. 3 and 4.
  • Elements 6, 7, 8, 9 are arranged on a flat base 5, of which the element 7 on the base 5 is stopped in the manner described above and thus forms the guide.
  • the element 6, which now acts as a slide can be displaced precisely in the Y direction, and the elements 8 and 9 for the X direction, which have been deactivated, are also displaced in the Y direction.
  • one of the elements 8 or 9 or both is lowered and thus stopped.
  • the latter is raised and can be moved precisely in the X direction with the slide element 6.
  • the two elements 8 and 9 are provided if a gradual movement of the slide element 6 in one direction is to be achieved without a respective lowering of the slide element 6.
  • the two elements 8 and 9 can - as shown here - be arranged side by side, but also one behind the other. Of course, multiple execution is also possible in the other coordinate direction and may be useful.
  • the relative movements between the elements 2, 3, 6, 7, 8, 9 can be recorded using known length measuring systems (photoelectric, inductive, magnetic, interferometric, incremental, absolute etc.) and by known drives, e.g. Electric motor, pneumatic drive, friction wheel, spindle, traction gear can be controlled. Appropriate evaluation of the measurement data makes it possible to determine the distances traveled per step or based on a starting point.
  • the elements serving as guidance can also be stopped with the aid of electromagnets.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Threshing Machine Elements (AREA)
  • Machine Tool Units (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Claims (3)

1. Dispositif de guidage avec base, élément de guidage, élément guidés et un montage hydraulique ou pneumatique comportant des dispositifs pour l'arrêt ou le déplacement des éléments mobiles, dans lequel les éléments de guidage (2, 7, 8, 9) sont en prise avec les éléments guidés (3, 6) par l'intermédiaire de paliers hydrauliques ou pneumatiques (2a à 3h), caractérisé par le fait qu'aussi bien les éléments de guidage (2, 7, 8, 9) que les éléments guidés (3, 6) sont montés mobiles dans un plan au moyen de paliers hydrauliques ou pneumatiques (2a à 3h) directement sur la base commune (1, 5) mais peuvent être arrêtés alternativement ou en même temps.
2. Dispositif de guidage selon la revendication 1, caractérisé par le fait qu'il comporte des éléments de guidage (2, 7, 8, 9) pour différents sens de déplacement.
3. Dispositif de guidage selon la revendication 1, caractérisé par le fait que plusieurs éléments de guidage (8, 9) sont prévus pour chaque sens de déplacement.
EP84110200A 1983-10-04 1984-08-28 Dispositif de guidage Expired EP0140003B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT84110200T ATE33291T1 (de) 1983-10-04 1984-08-28 Fuehrungsvorrichtung.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3336002A DE3336002C2 (de) 1983-10-04 1983-10-04 Führungsvorrichtung
DE3336002 1983-10-04

Publications (3)

Publication Number Publication Date
EP0140003A2 EP0140003A2 (fr) 1985-05-08
EP0140003A3 EP0140003A3 (en) 1986-02-19
EP0140003B1 true EP0140003B1 (fr) 1988-03-30

Family

ID=6210912

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84110200A Expired EP0140003B1 (fr) 1983-10-04 1984-08-28 Dispositif de guidage

Country Status (5)

Country Link
US (1) US4615568A (fr)
EP (1) EP0140003B1 (fr)
JP (1) JPS6097290A (fr)
AT (1) ATE33291T1 (fr)
DE (2) DE3336002C2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011085339A1 (de) * 2011-10-27 2013-05-02 Eitzenberger Luftlagertechnik Gmbh Positioniervorrichtung, Kreuztisch und Hubeinheit

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2160975B (en) * 1984-05-14 1988-11-09 Mitutoyo Mfg Co Ltd Coordinate measuring instrument
FR2582557A1 (fr) * 1985-05-31 1986-12-05 Primat Didier Dispositif de guidage et d'entrainement monodirectionnel d'une platine vis-a-vis d'un banc de machine, selon un axe de mouvement parallele
US5160883A (en) * 1989-11-03 1992-11-03 John H. Blanz Company, Inc. Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support
US5077523A (en) * 1989-11-03 1991-12-31 John H. Blanz Company, Inc. Cryogenic probe station having movable chuck accomodating variable thickness probe cards
US5166606A (en) * 1989-11-03 1992-11-24 John H. Blanz Company, Inc. High efficiency cryogenic test station
US5241183A (en) * 1991-03-22 1993-08-31 Nippon Telegraph And Telephone Corporation Vertical xy stage
SE515181C2 (sv) * 1998-09-23 2001-06-25 Jan Staffan Aasander Ett, utefter en stödyta, förskjutbart anordnat arrangemang samt ett sådant arrangemang utnyttjande förfarande
SE515357C2 (sv) * 1998-10-05 2001-07-23 Jan Staffan Aasander System för att låta bearbeta ett material längs en produktionslinje
DE102004005515B3 (de) * 2004-02-03 2005-06-16 Diamant-Metallplastic Gmbh Auf einer Unterlage mittels eines Druckpolsters abstützbares und darauf verschiebbares Gleitlager
DE102011085336B4 (de) * 2011-10-27 2013-06-06 Eitzenberger Luftlagertechnik Gmbh Positioniervorrichtung, Kreuztisch und Hubeinheit
DE102017202762B4 (de) * 2017-02-21 2018-12-20 Schott Ag Verfahren zur Herstellung eines Glasrohres mit einem von einer Kreisform abweichenden Querschnitt durch Umformen sowie Verwendung des Verfahrens

Family Cites Families (13)

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Publication number Priority date Publication date Assignee Title
US3253665A (en) * 1961-01-06 1966-05-31 Gen Motors Corp Fluid actuated workpiece positioning device
BE630212A (fr) * 1962-03-28
US3155383A (en) * 1962-10-11 1964-11-03 Link Division Of General Prec Precision positioning apparatus
US3376764A (en) * 1962-10-15 1968-04-09 Schardt Rudolf Pneumatic positioning table
DE1920063A1 (de) * 1969-04-19 1970-11-05 Daimler Benz Ag Vorrichtung zum Vermessen der Form eines Gegenstandes
CH519661A (de) * 1969-08-21 1972-02-29 Oerlikon Buehrle Ag Hydrostatisches Gleitlager
GB1393035A (en) * 1971-07-09 1975-05-07 Olivetti & Co Spa Precision measuring apparatus with aerostatic bearings
FR2207845B3 (fr) * 1972-11-30 1976-01-09 Auriol Et Cie Hte Garonn Fr
DE2346693A1 (de) * 1973-09-17 1975-04-24 Wotan Werke Gmbh Fuehrung fuer relativ zueinander bewegbare maschinenteile
DE2346633A1 (de) * 1973-09-17 1975-04-24 Wotan Werke Gmbh Fuehrung fuer relativ zueinander bewegbare maschinenteile
JPS5343158A (en) * 1976-09-30 1978-04-19 Hiroshi Teramachi Crossed linear bearing
JPS5567694A (en) * 1978-11-16 1980-05-21 Tokyo Shibaura Electric Co Automatic parallel table
JPS566919A (en) * 1979-06-26 1981-01-24 Canon Inc Fluid bearing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011085339A1 (de) * 2011-10-27 2013-05-02 Eitzenberger Luftlagertechnik Gmbh Positioniervorrichtung, Kreuztisch und Hubeinheit
DE102011085339B4 (de) * 2011-10-27 2013-06-06 Eitzenberger Luftlagertechnik Gmbh Positioniervorrichtung, Kreuztisch und Hubeinheit

Also Published As

Publication number Publication date
DE3336002C2 (de) 1985-11-07
ATE33291T1 (de) 1988-04-15
DE3336002A1 (de) 1985-04-18
EP0140003A3 (en) 1986-02-19
DE3470197D1 (en) 1988-05-05
JPS6097290A (ja) 1985-05-31
EP0140003A2 (fr) 1985-05-08
JPH0420152B2 (fr) 1992-03-31
US4615568A (en) 1986-10-07

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