EP0138642A1 - Mittels Dauermagneten und Solenoiden erzeugte ferromagnetische Struktur einer Ionenquelle - Google Patents

Mittels Dauermagneten und Solenoiden erzeugte ferromagnetische Struktur einer Ionenquelle Download PDF

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Publication number
EP0138642A1
EP0138642A1 EP84401688A EP84401688A EP0138642A1 EP 0138642 A1 EP0138642 A1 EP 0138642A1 EP 84401688 A EP84401688 A EP 84401688A EP 84401688 A EP84401688 A EP 84401688A EP 0138642 A1 EP0138642 A1 EP 0138642A1
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EP
European Patent Office
Prior art keywords
ferromagnetic
permanent magnets
magnetic
solenoids
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP84401688A
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English (en)
French (fr)
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EP0138642B1 (de
Inventor
Bernard Jacquot
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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Publication of EP0138642A1 publication Critical patent/EP0138642A1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Definitions

  • the present invention relates to a ferromagnetic structure of an ion source created by permanent magnets and solenoids. It applies to ion sources of the electronic cyclotron resonance type where it confines the plasma of a gas or vapor in which ions are created by impacts of ionizing electrons.
  • the useful volume to be magnetized is of the order of a liter;
  • the power consumption of the solenoids is of the order of 100 KW, therefore high enough to ensure a maximum induction of 0.5 tesla in this useful volume.
  • FIG. 1 represents the configuration of the permanent magnets according to the prior art in La source Micromafios.
  • the magnets 1 have a length L of 7 cm to obtain 90X of the maximum induction in the useful volume 2. It would theoretically require a rod of infinite length L to obtain 100% of this maximum induction.
  • the invention aims to remedy these drawbacks and in particular. Reduce the consumption of electrical energy and the amount of magnetic material used to provide the magnetic field in the useful volume of the ion source. For this, it is proposed to close the magnetic flux outside the useful volume of an ion source in a ferromagnetic structure so that the magnetic field flourishes only in the useful volume.
  • the invention relates to a magnetic structure for confining a plasma in an ion source with electronic cyclotron resonance created by the superposition of an axial magnetic induction provided by solenoids and a radial induction.
  • supplied by permanent magnets characterized in that all of the solenoids are shielded outside the useful volume of the source by a first ferromagnetic carcass, the permanent magnets being mounted on the internal walls of a second carcass having the form of a cylinder of ferromagnetic material in order to channel the magnetic fluxes outside the useful volume in a ferromagnetic structure, the two carcasses being separated from each other by a material ensuring sufficient reluctance between the two ferromagnetic circuits.
  • the permanent magnets are fixed to the internal wall of the ferromagnetic cylinder only by their magnetic adhesion.
  • the carcasses are made of soft iron.
  • FIG 2 there is shown in section The configuration of the permanent magnets according to the invention, providing the radial magnetic field.
  • the permanent magnets preferably made of samarium-cobalt, are fixed only by their magnetic adhesion to the internal wall 3 of a cylinder 4 of a ferromagnetic material.
  • the radial magnetic structure can be quadrupolar, hexapolar, octopolar, etc. at will. Closing the external flux in a circuit of iron or another ferromagnetic material eliminates the contribution of the antagonist pole, therefore to reduce the length of the magnetic bar 1, i.e. 100% of the induction produced by the magnets is available in the useful volume.
  • the length L could be very small, but in practice, a length of Order 1 cm remains necessary due to the intrinsic imperfections of the magnets (leakage field). A saving of a factor of 5 on the magnetic material is therefore possible compared to the prior art.
  • FIG. 3 there is shown in section, along the central axis 5, The complete magnetic structure according to the invention, that is to say that The configuration of the multipolar radial magnetic field 6 constituted by The permanent magnets 1 mounted on the inner wall 3 of the cylindrical carcass 4. At the two ends of this cylinder are two coils 7, providing the axial magnetic field 8. Outside the useful volume 2 of the ion source, the assembly of the two solenoid coils is shielded by a ferromagnetic carcass 9.
  • the two carcasses 4 and 9 are separated by a material 10 having sufficient reluctance. It is possible, for example, to use as material a layer of air with a thickness of the order of 1 cm, or better, a layer of plastic material such as polyvinyl chloride (PVC) with a thickness of 1 cm. , this material also providing electrical insulation between the two ferromagnetic circuits.
  • a material 10 having sufficient reluctance It is possible, for example, to use as material a layer of air with a thickness of the order of 1 cm, or better, a layer of plastic material such as polyvinyl chloride (PVC) with a thickness of 1 cm. , this material also providing electrical insulation between the two ferromagnetic circuits.
  • PVC polyvinyl chloride
  • the magnetic insulation 10 between the two carcasses 4 and 9 is important because the ferromagnetic carcass 4 must not be saturated by the axial induction 8, nor disturbed.
  • the ampere-turns of the solenoid coils 7 practically only serve to magnetize the useful volume 2, which makes it possible to reduce the electrical consumption by a factor 3 to 4 compared to the configurations according to the art. which makes it easier to install the ion source on a platform brought to very high voltage.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Magnetic Treatment Devices (AREA)
  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electromagnets (AREA)
EP84401688A 1983-08-30 1984-08-17 Mittels Dauermagneten und Solenoiden erzeugte ferromagnetische Struktur einer Ionenquelle Expired EP0138642B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8313886A FR2551302B1 (fr) 1983-08-30 1983-08-30 Structure ferromagnetique d'une source d'ions creee par des aimants permanents et des solenoides
FR8313886 1983-08-30

Publications (2)

Publication Number Publication Date
EP0138642A1 true EP0138642A1 (de) 1985-04-24
EP0138642B1 EP0138642B1 (de) 1988-06-29

Family

ID=9291878

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84401688A Expired EP0138642B1 (de) 1983-08-30 1984-08-17 Mittels Dauermagneten und Solenoiden erzeugte ferromagnetische Struktur einer Ionenquelle

Country Status (5)

Country Link
US (1) US4580120A (de)
EP (1) EP0138642B1 (de)
JP (1) JPS6091600A (de)
DE (1) DE3472495D1 (de)
FR (1) FR2551302B1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0611084A1 (de) * 1993-02-10 1994-08-17 The BOC Group plc Magnetische Strukturen
FR2749703A1 (fr) * 1996-06-11 1997-12-12 Commissariat Energie Atomique Dispositif pour engendrer un champ magnetique et source ecr comportant ce dispositif
DE19933762A1 (de) * 1999-07-19 2001-02-01 Andrae Juergen Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4646045A (en) * 1985-03-25 1987-02-24 General Electric Company Aperture sized disc shaped end caps of a ferromagnetic shield for magnetic resonance magnets
FR2583250B1 (fr) * 1985-06-07 1989-06-30 France Etat Procede et dispositif d'excitation d'un plasma par micro-ondes a la resonance cyclotronique electronique
FR2595868B1 (fr) * 1986-03-13 1988-05-13 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique a injection coaxiale d'ondes electromagnetiques
US4658228A (en) * 1986-05-01 1987-04-14 The United States Of America As Represented By The Secreatry Of The Army Confinement of longitudinal, axially symmetric, magnetic fields to annular regions with permanent magnets
US4654618A (en) * 1986-05-01 1987-03-31 The United States Of America As Represented By The Secretary Of The Army Confinement of kOe magnetic fields to very small areas in miniature devices
FR2601498B1 (fr) * 1986-07-10 1988-10-07 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique
JP2804024B2 (ja) * 1986-10-31 1998-09-24 株式会社日立製作所 マイクロ波イオン源
US4698611A (en) * 1986-12-03 1987-10-06 General Electric Company Passive shimming assembly for MR magnet
GB8701363D0 (en) * 1987-01-22 1987-02-25 Oxford Instr Ltd Magnetic field generating assembly
US4778561A (en) * 1987-10-30 1988-10-18 Veeco Instruments, Inc. Electron cyclotron resonance plasma source
US5136273A (en) * 1988-10-17 1992-08-04 Kabushiki Kaisha Toshiba Magnet apparatus for use in a magnetic resonance imaging system
ES2078735T3 (es) * 1991-05-21 1995-12-16 Materials Research Corp Modulo de grabado suave mediante util de agrupacion y generador de plasma ecr para el mismo.
US5389879A (en) * 1992-12-18 1995-02-14 Pulyer; Yuly M. MRI device having high field strength cylindrical magnet with two axially spaced electromagnets
US5396207A (en) * 1994-08-05 1995-03-07 General Electric Company On-shoulder MRI magnet for human brain imaging
FR2757310B1 (fr) * 1996-12-18 2006-06-02 Commissariat Energie Atomique Systeme magnetique, en particulier pour les sources ecr, permettant la creation de surfaces fermees d'equimodule b de forme et de dimensions quelconques
ATE460071T1 (de) * 2006-01-19 2010-03-15 Massachusetts Inst Technology Magnetstruktur für partikelbeschleunigung
WO2010132069A1 (en) * 2009-05-15 2010-11-18 Alpha Source Llc Particle beam isotope generator apparatus, system, and method
JP2014082150A (ja) * 2012-10-18 2014-05-08 Nissin Ion Equipment Co Ltd プラズマ源

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
HELVETIA PHYSICA ACTA, vol.47, no. 4, 1974, pages 473-477, Bale, CH; P.J. HIRT et al.: "Etude d'une boîte à plasma avec un confinement magnétique multipolaire" *
IEEE TRANSACTIONS ON PLASMA SCIENCE, vol. PS-6, no. 4, décembre 1978, pages 535-538, IEEE, New York, USA; J.T. CROW et al.: "High performance, low energy ion source" *
NUCLEAR INSTRUMENTS AND METHODS, vol. 92, no. 2, 15 mars 1971, pages 215-220, North-Holland Publishing Co., Amsterdam, NL; A. ISOYA et al.: "A beam injection system for the terminal ion source of the electrostatic generator" *
REVUE DE PHYSIQUE APPLIQUEE, vol. 15, no. 5, mai 1980, pages 995-1005, Paris, FR; R. GELLER et al.: "Micromafios source d'ions multichargés basée sur la résonance cyclotronique des électrons" *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0611084A1 (de) * 1993-02-10 1994-08-17 The BOC Group plc Magnetische Strukturen
FR2749703A1 (fr) * 1996-06-11 1997-12-12 Commissariat Energie Atomique Dispositif pour engendrer un champ magnetique et source ecr comportant ce dispositif
EP0813223A1 (de) * 1996-06-11 1997-12-17 Commissariat A L'energie Atomique Magnetfelderzeugungsvorrichtung und ECR Ionenquelle dafür
DE19933762A1 (de) * 1999-07-19 2001-02-01 Andrae Juergen Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen
DE19933762C2 (de) * 1999-07-19 2002-10-17 Juergen Andrae Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen

Also Published As

Publication number Publication date
US4580120A (en) 1986-04-01
EP0138642B1 (de) 1988-06-29
FR2551302A1 (fr) 1985-03-01
JPS6091600A (ja) 1985-05-22
DE3472495D1 (en) 1988-08-04
FR2551302B1 (fr) 1986-03-14

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