EP0111483A1 - Ajustage de composants piezoelectriques - Google Patents

Ajustage de composants piezoelectriques

Info

Publication number
EP0111483A1
EP0111483A1 EP82902310A EP82902310A EP0111483A1 EP 0111483 A1 EP0111483 A1 EP 0111483A1 EP 82902310 A EP82902310 A EP 82902310A EP 82902310 A EP82902310 A EP 82902310A EP 0111483 A1 EP0111483 A1 EP 0111483A1
Authority
EP
European Patent Office
Prior art keywords
frequency
housing
optical energy
trimming
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP82902310A
Other languages
German (de)
English (en)
Other versions
EP0111483A4 (fr
Inventor
Roger Claes
Jean Vannoppen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram Sylvania Inc
Original Assignee
GTE Products Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GTE Products Corp filed Critical GTE Products Corp
Publication of EP0111483A1 publication Critical patent/EP0111483A1/fr
Publication of EP0111483A4 publication Critical patent/EP0111483A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient

Definitions

  • the subject invention relates to the fabrication of piezoelectric components and, more particularly, to the frequency trimming of same.
  • piezoelectric materials that is materials characterized by an ability to transform elec ⁇ trical energy to mechanical energy, and vice versa, have widespread application in electronic equipment.
  • such materials are extensively used, for example, as resonators and filters and as such are required to exhi ⁇ bit stringent frequency response (accuracy and stability) characteristics.
  • both bulk and surface wave filters and resonators typically demand some degree of "trimming" to compensate for finite tolerances attribut ⁇ able to material and production variances.
  • quartz filters are typically comprised of two or more resonators arranged in various configurations.
  • composite frequency response can be trimmed by adjusting the resonant frequency of the component resonators irrespective of whether the resonator are arranged as discrete blanks, stacked arrays or multi-resonator structures deposited on a single wafer.
  • trimming had been effected by vacuum deposition of controlled amounts of a precious metal onto the electrode or by exposure of the electrodes to a reac- tive atmosphere such as iodine (for silver electrodes). More recently a laserbea has been used to evaporate material deposited on the pieozelectric material. The resonant frequency of the resonator increases as the attendant massloading decreases. A plurality of methods for trimming surface wave components have also been disclosed. Here to lasers have been utilized to cut portions of predeposited conductive structures, thereby disconnecting those structures form the piezoelectric substrate.
  • Figure 2 depicts a repre- sentative surface acoustic wave (SAW) filter including a number of interdigitated fingers (21), some of which (22), have been disconnected so as to achieve frequency trimming.
  • SAW surface acoustic wave
  • Such effects are posited to to have their origin in the therminal or mechanical stresses induced by a moisture, changes in air pressure, and stray capacitance introduced by the encapsulation process. Because such phenomena are effectively inamen- able to amelioration once the component has been sealed, it is necessary that they be anticipated and, to the extent predictable, accomodated during the trimming pro ⁇ cedure. That is, the resonant frequency of the device is trimmed to a frequency offset by a predetermined amount from the desired frequency with the expectation that the final frequency, after encapulation, will be accurate.
  • a method of trimming frequency-selective devices of the type characterized by a piezoelectric substrate upon which is deposited a conductive material.
  • the device is enclosed in a housing at least a portion of which is transparent to optical energy at a predetermined wave ⁇ length, for example, at 1.06 micrometer.
  • Optical energy typically derived from a laser, at the predetermined wavelength and appropriate intensity is directed at the device so that it impinges on the conductive material, thereby causing evaporation of that material.
  • the rele ⁇ vant frequency-dependent characteristics of the device are monitored and the direction and intensity of the optical energy controlled in a manner that allows thse characteristics to be brought within desired tolerances.
  • a storage time is introduced between the encapsulation of the device and subsequent final frequency trimming, thereby obviating the effects of the short-term aging phenomena.
  • Figure 1 depicts a typical quartz crystal filter including the quartz blank, frequency plating, and conductive electrodes.
  • Figure 2 depicts a representative SAW (Surface Acoustic Wave) filter including a number of interdigi- tated conductive fingers, some of which have been severed so as to achieve frequency trimming.
  • Figure 3 illustrates an apparatus for effecting frequency trimming of an encapsualted piezoelectric component, for example, a quartz crystal resonator.
  • SAW Surface Acoustic Wave
  • a quartz resonator including a quartz blank, con ⁇ ductive electrodes and a glass cover, especially amenable to laser trimming is illustrated in Figure 4.
  • FIG. 3 there is illus ⁇ trated in Figure 3 an apparatus for providing a frequency trimming of an encapulated piezoelectric component, be it a quartz crystal resonator, surface acoustic wave filter or similar device.
  • the device to be trimmed, 1, is in ⁇ serted in a test circuit 2 in such a manner that it is directed toward an optical beam 3 generatedby Q-switched Nd-YAG laser 4.
  • the laser is a pulsed Nd-YAG type cap ⁇ able of delivering a focused beam that will produce suf- ficient heat to evaporate metal from the electrodes of, for example, a quartz resonator.
  • the laser beam is appropriately directed by an X-Y deflection system 5 equipped with the necessary optical devices including, by way of illustration, a pair of optical mirrors 6.
  • the direction of the beam is controlled by a test system 7 that delivers control signals to the deflection system and to the laser power control 8.
  • test system, power control and x-y deflection system operate to control the intensity and direction of the laserbeam so as to si ul- taneously scan the surface of the device to be trimmed and to modulate the trimming rate as the resonant fre ⁇ quency (or some other specified characteristic frequency) approaches its final value.
  • a quartz resonator especially amenable to trimming is illustrated in Figure 4.
  • the resonator includes a quartz blank 41, electrodes 42 and a glass cover 43.
  • a salient feature of the resonator is the glass cover 43.
  • the cover is transparent to the optical energy generated by the laser so that the laserbeam is allowed to impinge on the electrodes of the resonator and thereby cause the evaporation of sufficient electrode mass to achieve trim ⁇ ming.
  • Such a quartz resonator may be fabricated according to the following technique.
  • the quartz crystal is conductively bonded to lead-in wires, that is to say, one electrode is electrically and physically connected to one of the lead-in wires and the other electrode is electri ⁇ cally and physically connected to the other lead-in wire.
  • the conductive bond may be.made, for example, by electri- cally conductive bonding material, for example, silver- filled epoxy. Or it may be made by soldering, welding and the like.
  • the quartz crystal is then inserted into an open-ended glass tube of suitable diameter and length. The extremities of the lead-in wires protrude outside the glass tube and are secured in a suitable external holder to properly position the quartz crystal within the glass tube.
  • the end of the glass tube is then heated to its softening point and pressed together to seal the end by forming a press seal, the lead-in wires being embedded in the press seal.
  • the lead-in wires are of a type readily sealable to glass, for example, Du et wire for sealing to soft glass.
  • Dumet comprises a nickel-iron core within a copper sheath.
  • the press seal solidifies and rigidly holds the lead-in wires and quartz crystal.
  • a circumferential section of the glass tube near the other end thereof is heated to its softening point and the end is then drawn apart from the main body of the glass tube to form a necked-down portion in the glass tube.
  • the necked-down portion which is of smaller diameter than the glass tube and is suitable as an exhaust tubulation to exhaust, tipoff and seal the glass tube with the quartz crystal therewithin.
  • the exhaust tubulation may be tipped off under vacuum, to maintain a vacuum within the glass tube.
  • an inert gas for example, dry nitrogen, may be introduced into the glass tube prior to tip-off of the exhaust tube.
  • a cooling gas e.g.
  • the drawing shows one embodiment of an encapsulated quartz crystal in accordance with this invention.
  • the quartz crystal comprises a flat circular disk about 8mm in diameter by 0.5mm thick.
  • the metallized portion of each surface is about 6mm in diameter.
  • Lead-in wires are made of Dumet, 0.35mm thick, and are fastened to the electrodes.
  • a glass tube is 11mm outside diameter by 20mm long (internal length).
  • a press seal about 9mm wide by about 7mm long and is about 2.5mm thick. After exhausting and filling with nitrogen, the glass tube is sealed at tip-off.
  • the lead-in wires can be embedded in glass bead prior to press sealing in order to bend and hold the wires in the correct position for fast ⁇ ening the crystal.
  • the glass tube be flattened into, say a flat sub- stantially rectangular, as opposed to circular shape, in order to reduce the size of the glass tube or in order to accommodate a rectangular quartz crystal.
  • the open-ended round glass tube would be heated and flattened prior to mounting of the quartz crystal/lead-in wire assembly therein. After embedment of said assembly in a press seal at one end of the flatened glass tube, the other end could also be sealed by a press seal with ⁇ out the need of an exhaust tubulation.
  • nitrogen for example, could be introduced into the interior of the flattened glass tube by means of a small diameter hollow metal needle inserted therein while the glass was heated to its softened point. At the proper time, the needle would be removed and the press seal made immediately, thereby providing the desired nitrogen fill within the glass tube.
  • the reso ⁇ nator may be enclosed by a standard metal cover which has been provided with a glass window as shown in Figure 5.
  • the window 51 may be comprised of any otherwise suitable material transparent to energy at the laserbeam wave ⁇ length. (In a particular embodiment this wavelength was 1.06 micrometers.)
  • the window may be preferrably disc ⁇ shaped and susceptible to attachment to the metal cover 52 by, for example, glue or a glass-to-metal seal. The diameter of the disc-shaped window should be large enough so that the laserbeam is allowed to impinge on substan ⁇ tially the entire electrode surface.
  • a SAW structure such as the one illustrated in Figure 6 is amenable to the laser trimming technique described herein.
  • the trimming technique and implementing apparatus have been found to offer numerous significant advantages in the area fabrication and trimming of piezoelectric components. To wit: The post-encapsulation trimming of those devices permits less stringent handling procedures resulting in fewer rejected parts. Avoidance of the pre- encapsulation offset trimming technique provides more precise trimming and a closer approach to the desired ultimate frequency characteristics of the device.
  • the post-encapsulation trim- ming technique allows the encapsulated device to be stored for a period of time before the final trimming procedure is performed.
  • This is decidedly an advantage because of the "aging" effect characteristics of such device. That is to say, a large portion of the total frequency shift of the device is found to occur within a relative short period after fabrication.
  • the effects of this "short term" aging can be accordingly circumvented.
  • the total long-term frequency drift i.e., the total drift after a period on the order of one year
  • the total long-term frequency drift can be expeced to be reduced from approximate 10 ppm (parts per million) when trimmed before encapsulation to about 3 ppm when trimmed subsequent encapsulation.
  • the subject invention is useful in the fabrication of frequency selective piezoelectric devices.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Procédé d'ajustage de la fréquence de dispositifs piézoélectriques (1) tels que des résonnateurs à cristaux de quartz et des filtres d'ondes acoustiques de surfaces. Le dispositif peut être entièrement enfermé dans une capsule de verre (43) ou peut être logé dans un boîtier (52) pourvu d'une fenêtre (51) transparente à l'énergie optique à une longueur d'onde prédéterminée, par exemple de 1,06 micromètre. Un laser Nd-YAG (4) à configuration en Q est dirigé par un système de déviation optique x-y (5) de manière à pénétrer dans le boîtier (52) ou par la fenêtre (51) et tomber sur les motifs conducteurs ou électrodes (42) déposés sur le substrat piézoélectrique (41) du dispositif. Les caractéristiques de fréquence du dispositif varient au fur et à mesure que l'on provoque l'évaporation du matériau conducteur. L'intensité et la direction du rayon laser sont commandées de manière à obtenir des caractéristiques de fréquence, c'est-à-dire la fréquence de résonnace, la réponse en fréquence, etc., conformes aux spécifications. Le dispositif peut être stocké pendant une période de temps entre les processus d'encapsulation et d'ajustage final de manière à éliminer sensiblement tout phénomène important de vieillissement à court terme.
EP19820902310 1982-06-14 1982-06-14 Ajustage de composants piezoelectriques. Withdrawn EP0111483A4 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1982/000823 WO1984000082A1 (fr) 1982-06-14 1982-06-14 Ajustage de composants piezoelectriques

Publications (2)

Publication Number Publication Date
EP0111483A1 true EP0111483A1 (fr) 1984-06-27
EP0111483A4 EP0111483A4 (fr) 1985-12-19

Family

ID=22168045

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19820902310 Withdrawn EP0111483A4 (fr) 1982-06-14 1982-06-14 Ajustage de composants piezoelectriques.

Country Status (2)

Country Link
EP (1) EP0111483A4 (fr)
WO (1) WO1984000082A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101244633B1 (ko) * 2007-08-09 2013-03-18 아크조노벨코팅스인터내셔널비.브이. 고형분 함량이 높은 에폭시 코팅 조성물

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GB2199985B (en) * 1986-12-22 1991-09-11 Raytheon Co Surface acoustic wave device
US5138214A (en) * 1989-12-27 1992-08-11 Matsushita Electric Industrial Co., Ltd. Piezoelectric transducer and method of adjusting oscillation frequency thereof
DE19649332C1 (de) * 1996-11-28 1998-01-22 Tele Quarz Gmbh Resonator mit Kristall
JP3998948B2 (ja) * 2001-10-31 2007-10-31 セイコーインスツル株式会社 圧電振動子及びその製造方法
US7994877B1 (en) 2008-11-10 2011-08-09 Hrl Laboratories, Llc MEMS-based quartz hybrid filters and a method of making the same
US7830074B2 (en) * 2006-08-08 2010-11-09 Hrl Laboratories, Llc Integrated quartz oscillator on an active electronic substrate
US8766745B1 (en) 2007-07-25 2014-07-01 Hrl Laboratories, Llc Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
FR2857785B1 (fr) * 2003-07-17 2005-10-21 Commissariat Energie Atomique Resonateur acoustique de volume a frequence de resonance ajustee et procede de realisation
US7569977B2 (en) * 2006-08-02 2009-08-04 Cts Corporation Laser capacitance trimmed piezoelectric element and method of making the same
US10266398B1 (en) 2007-07-25 2019-04-23 Hrl Laboratories, Llc ALD metal coatings for high Q MEMS structures
US7802356B1 (en) 2008-02-21 2010-09-28 Hrl Laboratories, Llc Method of fabricating an ultra thin quartz resonator component
US8912711B1 (en) 2010-06-22 2014-12-16 Hrl Laboratories, Llc Thermal stress resistant resonator, and a method for fabricating same
US9599470B1 (en) 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
US9991863B1 (en) 2014-04-08 2018-06-05 Hrl Laboratories, Llc Rounded and curved integrated tethers for quartz resonators
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer

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US3969640A (en) * 1972-03-22 1976-07-13 Statek Corporation Microresonator packaging and tuning
GB2040074A (en) * 1978-12-27 1980-08-20 Halle Feinmech Werke Veb Laser beam machining

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US3827142A (en) * 1972-12-11 1974-08-06 Gti Corp Tuning of encapsulated precision resistor
US3913195A (en) * 1974-05-28 1975-10-21 William D Beaver Method of making piezoelectric devices
JPS6051283B2 (ja) * 1975-09-10 1985-11-13 株式会社精工舎 Ｇｔカツト水晶振動子の周波数温度特性調整法
US4021898A (en) * 1976-05-20 1977-05-10 Timex Corporation Method of adjusting the frequency of vibration of piezoelectric resonators
US4131484A (en) * 1978-02-13 1978-12-26 Western Electric Company, Inc. Frequency adjusting a piezoelectric device by lasering
US4217570A (en) * 1978-05-30 1980-08-12 Tektronix, Inc. Thin-film microcircuits adapted for laser trimming
US4179310A (en) * 1978-07-03 1979-12-18 National Semiconductor Corporation Laser trim protection process
JP3130373B2 (ja) * 1992-06-09 2001-01-31 川研ファインケミカル株式会社 洗浄剤組成物

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969640A (en) * 1972-03-22 1976-07-13 Statek Corporation Microresonator packaging and tuning
GB2040074A (en) * 1978-12-27 1980-08-20 Halle Feinmech Werke Veb Laser beam machining

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, vol. 17, no. 5 II, 9th October 1974, pages 1397-1398, New York, US; A.G. SMAGIN: "Frequency correction to 10-8 by ruby laser for precision quartz crystals" *
LASER FOCUS, March 1970, pages 38-47, Newton, US; J.F. READY: "Selecting a laser for material working" *
See also references of WO8400082A1 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101244633B1 (ko) * 2007-08-09 2013-03-18 아크조노벨코팅스인터내셔널비.브이. 고형분 함량이 높은 에폭시 코팅 조성물

Also Published As

Publication number Publication date
WO1984000082A1 (fr) 1984-01-05
EP0111483A4 (fr) 1985-12-19

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