EP0083784A2 - Verfahren zur Herstellung von integrierten Schaltungsanordnungen mit Zonen mit submikrometrischen Dimensionen und nach diesem Verfahren hergestellte Struktur - Google Patents

Verfahren zur Herstellung von integrierten Schaltungsanordnungen mit Zonen mit submikrometrischen Dimensionen und nach diesem Verfahren hergestellte Struktur Download PDF

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EP0083784A2
EP0083784A2 EP82111972A EP82111972A EP0083784A2 EP 0083784 A2 EP0083784 A2 EP 0083784A2 EP 82111972 A EP82111972 A EP 82111972A EP 82111972 A EP82111972 A EP 82111972A EP 0083784 A2 EP0083784 A2 EP 0083784A2
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Prior art keywords
layer
field effect
sub
devices
regions
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EP82111972A
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French (fr)
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EP0083784A3 (en
EP0083784B1 (de
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Robert Charles Dockerty
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International Business Machines Corp
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International Business Machines Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H01L21/76213—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO introducing electrical inactive or active impurities in the local oxidation region, e.g. to alter LOCOS oxide growth characteristics or for additional isolation purpose
    • H01L21/76216—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO introducing electrical inactive or active impurities in the local oxidation region, e.g. to alter LOCOS oxide growth characteristics or for additional isolation purpose introducing electrical active impurities in the local oxidation region for the sole purpose of creating channel stoppers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/28008—Making conductor-insulator-semiconductor electrodes
    • H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H01L21/28123—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects
    • H01L21/28132—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects conducting part of electrode is difined by a sidewall spacer or a similar technique, e.g. oxidation under mask, plating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/947—Subphotolithographic processing

Definitions

  • This invention relates to the production of integrated circuit structures, and in particular to procedures for manufacturing such structures which have device elements of very small dimension less than a micrometer.
  • the integrated circuit technology has a need to obtain narrow line widths in the range of 1 micrometer or less by extending standard photolithography techniques and avoiding the need to use the more expensive and complex techniques such as electron beam or X-ray lithography.
  • One such technique is described by H.B. Pogge in IBM Technical Disclosure Bulletin, November 1976, Vol. 19, No. 6, pp. 2057-2058, entitled “Narrow Line Widths Masking Method”. This method involves the use of a porous silicon followed by the oxidation of the porous silicon.
  • Another technique is described by S. A. Abbas et al. in the IBM Technical Disclosure Bulletin, Vol. 20, No. 4, September 1977, pp. 1376-1378.
  • This method describes the use of polycrystalline silicon masking layers which are made into a mask by first using an intermediate mask of oxidation blocking material, such as silicon nitride in the formation of polycrystalline silicon. Line dimensions below about 2 micrometers may be obtained by this technique.
  • U.S. Patents 4,209,349, 4,209,350, as well as 4,234,362 and 4,256,514 disclose and describe methods for forming narrow dimensioned, for example, sub-micrometer regions on a silicon body. These patents all involve the formation of substantially horizontal surfaces and substantially vertical surfaces on a silicon body and then forming a layer of a very narrow dimension on both the substantially horizontal and substantially vertical surfaces. This layer is then subjected to an anisotropic etching process such as by reactive ion etching, to substantially remove the horizontal layer while leaving the vertical layer substantially intact. The vertical layer dimension is adjusted depending upon the original thickness of the layer applied. In this way such a narrow dimension region as 1 micrometer or less is obtained.
  • the first paper relies on the reactive ion etching technique to form a sidewall silicon dioxide.
  • the second paper utilizes a technique involving lateral diffusion of boron.
  • the third method uses the plating of a metal on the edge of a conventionally patterned metal layer.
  • Other short channel field effect transistor devices are illustrated in U.S. Patents 4, 062,699, 4,145,459, and 4,201,603.
  • U.S. Patent 4,062,699 utilizes an ion implantation and diffusion process to narrow the channel length of his MOSFET.
  • Patent 4,145,459 utilizes a process sequence that involves the use of a recess formed in the portion of the semiconductor body and further involves the plating of metal films on each side of the recess until the spacing between the metal films across the recess is equal to desired length of the gate.
  • U.S. Patent 4,201,603 controlably dopes an edge of a polysilicon layer and then is able to remove the undoped polysilicon by etching it with a material which does not etch the doped polysilicon region.
  • U.S. Patent 4,182,023 describes a method for manufacturing a silicon gate MOS field effect transistor which provides automatic alignment of the gate structure with the adjacent source/drain regions.
  • the process involves forming on the poly-silicon a masking layer providing a masked region having a first boundary; forming from the silicon layer the silicon electrode having a second boundary spaced along the substrate from the first boundary; and doping the substrate to form the impurity region with an attendant boundary controlled by the first boundary and coincident with the second boundary.
  • This process has poor dimensional control. It over-etches the gate polycrystalline silicon using a photoresist mask which is very difficult to control.
  • Advantages are an improved and flexible manufacturing procedure for obtaining increased density of devices in integrated circuits, and the possibilities to simultaneously establish electrical connections of very small dimensions.
  • Figs. 1 through 8 there is illustrated an embodiment for fabricating a sub-micrometer channel dimension field effect transistor in a high density integrated circuit structure.
  • this embodiment the technique for obtaining in field effect transistors channels of sub-micrometer dimensions as well as of standard dimensions, simultaneously with conducting lines or resistors of sub-micrometer width and of larger, standard width.
  • the process is illustrated to form N channel MOSFET integrated circuits.
  • P channel field effect transistors can alternatively be formed by the present embodiment by simply reversing the polarity of the various elements of the transistors and associated regions.
  • the first series of steps involve the formation of the isolation means for isolating regions of monocrystalline silicon from other regions of monocrystalline silicon in a P- ⁇ 100> crystallographic oriented silicon substrate 10 as thus can be seen with reference to Fig. 1.
  • the isolation may preferably be partial dielectric isolation using materials such as silicon dioxide, glass, polyimide, etc., alone or in combinations.
  • the preferred pattern of partial dielectric isolation 12 defines monocrystalline silicon surface regions wherein field effect devices will ultimately be formed.
  • dielectric isolation regions of this type It is preferred to use the process described in UK Patent 1,323,850 or in U.S. Patent 3,648,129. Alternately, the process described in U.S. Patent 4,104,086 can be used. In these patents, processes for forming partial dielectric isolation region 12 are described in detail.
  • a P+ region 14 is typically formed under the dielectric isolation layer region 12 to prevent a formation of an inversion layer and the resulting electrical leakage between isolated monocrystalline regions under the isolation region 12.
  • the recessed dielectric isolation region 12 and 14 may be formed by first thermally oxidizing the surface of the silicon substrate 10 to form a silicon dioxide layer (not shown) thereon.
  • a silicon nitride layer (not shown) is then deposited by chemical vapor deposition thereover.
  • the silicon nitride layer has openings formed therein at the desired location of the isolation regions by conventional lithography and etching techniques.
  • the P+ region 14 is formed by the ion implantation of boron through the silicon dioxide layer in the opening in the silicon nitride layer.
  • the silicon nitride layer forms an effective mask to the penetration of the boron ions in the remaining areas covering the surface of the wafer.
  • the recessed oxide isolation region 12 is then grown by placing the wafer in a oxidation ambient for time sufficient to form the recessed oxidation regions 12.
  • the silicon nitride and silicon dioxide layers are now removed from the surface of the silicon wafer.
  • the surface isolation pattern in the semiconductor silicon substrate which isolates regions of the semiconductor within the substrate from one another is now formed.
  • a first insulating layer 16 is formed on the surface of the silicon body 10.
  • This layer is preferably thermally grown silicon dioxide which is designated to be in part the gate dielectric layer upon the surface of the silicon substrate.
  • the layer may alternatively be composed of silicon dioxide, silicon nitride, aluminum trioxide or the like or combinations of the foregoing.
  • the layer is preferably thermally grown in oxygen or oxygen-water vapor ambient at a temperature of about 970 0 C to form a thermal silicon dioxide layer.
  • the preferred thickness of this layer is about 25 nanometers.
  • a second method for growing silicon dioxide involves the use of chemical vapor deposition process wherein SiH 4 and 0 2 at about 450°C or SiH 2 , 0 2 and N 2 0 at a temperature of about 800°C under atmospheric or low pressure conditions.
  • the deposition of silicon nitride is usually formed by chemical vapor deposition using the following process conditions: SiH 4 , NH 3 and N 2 carrier gas at a temperature of about 800°C under atmospheric or low pressure conditions as described, for example, in U.S. Patent 4,089,992.
  • the insulating layer is formed of a combination of silicon dioxide and silicon nitride the thickness of these layers are, for example, of 10 to 20 nanometers silicon nitride and 10 to 40 nanometers silicon dioxide.
  • the surface conductivity of the P- substrate 10 is adjusted where the field effect transistors are to be formed.
  • the threshold, Vt is adjusted by using for example a boron ion implantation of about 1 x 10 12 /cm 2 dosage at approximately 7 KeV to produce surface P region 18.
  • first polycrystalline silicon layer 20 over the entire surface having the surface isolation pattern and over the silicon dioxide layer 16.
  • Polycrystalline silicon layer is deposited by using, for example, silane in a hydrogen ambient in the temperature range of about 500°C to 1,000°C and preferably about 600°C.
  • the operative thickness of the polycrystalline silicon is between about 100 to 1000 nanometers with 250 nanometers preferred.
  • the polycrystalline silicon layer in this embodiment makes no electrical contact to the silicon body 10 since it is formed upon the first insulating layer 16.
  • the polycrystalline silicon layer may alternatively be doped as deposited or may be deposited substantially undoped and then doped by a subsequent POC1 3 diffusion or ion implantation and heating process. It is preferred to use the POC1 3 diffusion doping of the first polycrystalline silicon layer 20.
  • a silicon nitride layer 22 which may be, for example, about 50 to 100 nanometers in thickness is deposited by chemical vapor deposition by decomposing silane in ammonia at 800°C. Other insulating layers or combination of layers can be substituted for the silicon nitride. Also other silicon nitride deposition processes can be utilized.
  • a second layer 24 of polycrystalline silicon is now deposited by use of the process utilized for forming the first layer 20 of polycrystalline silicon. The thickness of the second polycrystalline silicon layer is between about 200 to 1000 nanometers.
  • the process for forming a controlled sub-micrometer thickness layer on vertical sidewalls of the second polycrystalline silicon layer 24 may be better understood with reference to Fig. 2.
  • Standard lithography and etching techniques are used to produce remaining portions 24' of the second polycrystalline silicon layer 24 having substantially vertical sidewalls which extend across certain of the designated device regions and continue onto the surrounding isolation pattern.
  • One such region 24' is shown in cross-section in Fig. 2.
  • the etching step is preferably an anisotropic etching process such as reactive ion etching, RIE, in SF 6/ C1 2 .
  • RIE reactive ion etching
  • a thermal silicon dioxide (not shown) is grown on polycrystalline layer 24 and photoresist is applied.
  • the thermal silicon dioxide is etched in a CF 4 plasma..
  • the photoresist is removed and layer 24 is etched in SF 6 /C1 2 .
  • the remaining thermal oxide layer is then removed.
  • the next step is to form a controlled sub-micrometer thickness layer on the sidewalls of the polycrystalline silicon pattern 24'.
  • This is preferably accomplished by depositing a conformal insulating layer 26 over the remaining portions 24' of the polycrystalline silicon layer 24.
  • This layer is preferably silicon dioxide but could alternatively be any other material which would have different etching characteristics than the polycyrstal- line silicon layer 24.
  • the deposition process can be very effectively controlled in thickness and it will uniformly deposit upon all substantial horizontal and the vertical surfaces to the identical thickness.
  • the layer 26 is now subjected to anisotropic etching to substantially remove the layer 26 from the horizontal surfaces and leave the sidewall layer on the substantially vertical surfaces of the second polycrystalline silicon layer.
  • This etching process is a reactive ion etch, RIE, in CF 4 /H 2 or CHF 3 plasma.
  • Fig. 4 shows the plane view of the structure.
  • Cross-section 3-3 of Fig. 4 is the Fig. 3 cross-section.
  • the surface isolation pattern which isolates certain semiconductor regions 18 from one another by the recessed oxide isolation 12 is clearly seen in Fig. 4.
  • the conformal layer 26 which is utilized to form the sidewall sub-micrometer layer can alternatively be composed of other materials than silicon dioxide. Other materials which are useful are silicon nitride, aluminum.trioxide and in combinations of these materials with silicon dioxide.
  • the controlled thickness of the sidewall layer 26' is typically between 200 to 1000 nanometers and preferably about 500 nanometers.
  • the undesired portions of the sidewall layer 26' may be removed using conventional lithography and etching techniques which result in the Fig. 5 structure.
  • the small dimension channel is shown in the left hand device region in Fig. 5 by the width of line 26' which crosses that region.
  • the line 26 in the middle of the Fig. 5 illustration forms a narrow width polycrystalline line which can be used for a variety of purposes such as a high value resistor.
  • the process can continue on with exclusively the sub-micrometer channel dimension field effect transistors in the integrated circuit.
  • This process continues by using the conformal sidewall layer 26' as a mask.
  • the silicon nitride layer 22 and the first polycrystalline silicon layer 20 are etched to form the gate electrode of the field effect transistor devices in the first polycrystalline layer.
  • the result of this is that the polycrystalline silicon gate electrode has the dimension of the sidewall layer thickness.
  • the self-aligned silicon gate process would continue with an ion implantation step of conductivity imparting impurities adjacent to the gate electrode to form the desired PN junction source/drain elements for the field effect transistor devices into the regions designated to contain devices.
  • An insulator layer is then formed over the surface of the structure with openings therein having electrical contacts to the various elements of the semiconductor devices.
  • normal channel dimension devices in the order of 1000 to 10000 nanometers may be formed in addition to the sub-micrometer dimension channel devices.
  • the process illustrated by the Figs. 6, 7 and 8 illustrate the additional formation of the normal channel dimension field effect transistors together with the sub-micrometer channel dimension transistors.
  • the exposed silicon nitride layer 22 is removed by etching.
  • the process continues with depositing a second gate resist layer 30 which is then exposed, developed and removed in areas where it is not desired to have resist coverage to leave the pattern shown in Fig. 6.
  • Photoresist layer 30 acts as an etch mask when polycrystalline silicon layer 20 is etched in structures 36, 38 and 39.
  • Four different types of structures are schematically illustrated as being formed in the Figs. 6 through 8.
  • the first structure 32 is the short channel length field effect transistor.
  • the second structure 34 is a narrow conductive line pattern 34.
  • the third structure is the normal-channel length FET device 36.
  • the fourth structure is a wide conductive line device 38.
  • the structures shown in Fig. 6 are useful in integrated circuits. Structures 32 and 36 are short and long channel length devices respectively. Various channel length devices are required to optimize integrated circuit designs. Structure 34 forms a high value resistor and structure 38 can be used as a low value resistor or an interconnection line.
  • the cross-section 7-7 of the Fig. 6 is shown in Fig. 7.
  • the first polysilicon layer 20 is now etched using the resist layer 30 and the sidewall layer 26' as the etch masks. This structure defines the small and large channel gate dimensions for devices 32 and 36 and the polycrystalline silicon interconnections or resistors of devices 34 and 38.
  • the photoresist layer 30 is now removed.
  • the exposed gate dielectric silicon dioxide layer 16 can either be removed by etching followed by the im- plation or diffusion of phosphorus or arsenic dopants, or the silicon dioxide layer can be allowed to remain and ion implantation used to penetrate the silicon dioxide layer to form the N+ source/drain regions in the device areas. Where the first alternative is utilized it is necessary to reoxidize the exposed. silicon surface to form a silicon dioxide layer thereon.
  • a chemical vapor deposited layer 40 of phosphosilicate glass It is now preferred to deposit a chemical vapor deposited layer 40 of phosphosilicate glass. Conventional lithography and etching techniques are utilized to open contacts to the various elements of the field effect transistor devices. Blanket metallization and delineation is then made by conventional lithography and etching or lift-off techniques to form the electrical contacts 46 to the various elements of the field effect transistor devices and conductors as shown in Fig. 8.
  • FIG. 9 A modification of the Figs. 1 through 8 process is illustrated in Figs. 9 and 10.
  • the Figs. 1 through 8 process continues in this embodiment up to the point of formation of the PN source/drain regions. Before forming such regions a conformal chemical vapor deposited silicon dioxide or the like insulator layer is formed over the entire device structure. Anisotropic etching is utilized'to remove the horizontal conformal chemical vapor deposition layer and leave the spacer sidewall silicon dioxide layer 50 on the sides of the first polycrystalline silicon layer. The spacer 50 is shown in Fig. 9.
  • the ion implantation of conductivity imparting impurities typically phosphorus or arsenic are indicated by the arrows 52 and the dashed lines in the substrate 54.
  • Fig. 10 also illustrates the result of the formation of the phosphosilicate glass insulating layer 40 and the metal electrical contacts 46 to the various elements of the devices.
  • polycide layer on top of the first polycrystalline silicon layer to lower its sheet resistance without disturbing the essential feature of the invention.
  • anisotropic etching For instance, details of reactive ion etching of tungsten polycide are described in an article by L. Epraph, published in the IEEE Transactions on Electron Devices, Vol. ED-28, No. ll, Nov. 1981, pp. 1315-1319.
  • the first polycrystalline silicon layer can be wholely replaced with a metal silicide.
  • the metal silicides which are useful are WSi 2 , TaSi 2 , PdSi 2 , PtSi 2 or the like.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Weting (AREA)
EP82111972A 1981-12-30 1982-12-27 Verfahren zur Herstellung von integrierten Schaltungsanordnungen mit Zonen mit submikrometrischen Dimensionen und nach diesem Verfahren hergestellte Struktur Expired EP0083784B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US335891 1981-12-30
US06/335,891 US4430791A (en) 1981-12-30 1981-12-30 Sub-micrometer channel length field effect transistor process

Publications (3)

Publication Number Publication Date
EP0083784A2 true EP0083784A2 (de) 1983-07-20
EP0083784A3 EP0083784A3 (en) 1985-01-23
EP0083784B1 EP0083784B1 (de) 1987-09-09

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EP82111972A Expired EP0083784B1 (de) 1981-12-30 1982-12-27 Verfahren zur Herstellung von integrierten Schaltungsanordnungen mit Zonen mit submikrometrischen Dimensionen und nach diesem Verfahren hergestellte Struktur

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US (1) US4430791A (de)
EP (1) EP0083784B1 (de)
JP (1) JPS58118157A (de)
DE (1) DE3277265D1 (de)

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DE3277265D1 (en) 1987-10-15
EP0083784A3 (en) 1985-01-23
EP0083784B1 (de) 1987-09-09
JPS6249750B2 (de) 1987-10-21
JPS58118157A (ja) 1983-07-14

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