EP0033945B1 - Lecksuchvorrichtung mit Helium - Google Patents

Lecksuchvorrichtung mit Helium Download PDF

Info

Publication number
EP0033945B1
EP0033945B1 EP81100778A EP81100778A EP0033945B1 EP 0033945 B1 EP0033945 B1 EP 0033945B1 EP 81100778 A EP81100778 A EP 81100778A EP 81100778 A EP81100778 A EP 81100778A EP 0033945 B1 EP0033945 B1 EP 0033945B1
Authority
EP
European Patent Office
Prior art keywords
inlet
pump
diffusion pump
detector
helium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP81100778A
Other languages
English (en)
French (fr)
Other versions
EP0033945A2 (de
EP0033945A3 (en
EP0033945B2 (de
Inventor
Jacques Tallon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Compagnie Industrielle de Telecommunication CIT Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9238433&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0033945(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Compagnie Industrielle de Telecommunication CIT Alcatel SA filed Critical Compagnie Industrielle de Telecommunication CIT Alcatel SA
Priority to AT81100778T priority Critical patent/ATE7629T1/de
Publication of EP0033945A2 publication Critical patent/EP0033945A2/de
Publication of EP0033945A3 publication Critical patent/EP0033945A3/fr
Publication of EP0033945B1 publication Critical patent/EP0033945B1/de
Application granted granted Critical
Publication of EP0033945B2 publication Critical patent/EP0033945B2/de
Expired legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Definitions

  • the invention relates to a helium leak detector comprising a molecular diffusion pump comprising an inlet and an outlet, and a spectrometric measurement cell arranged in bypass on said pump, said outlet being connected, by an outlet pipe, to an inlet flange for connection to an installation to be tested.
  • Document US-A-3 968 675 discloses a helium leak detector, in which the tracer gas passes through either by counter-current to the helium pump (fig. 1), or a cold trap, before being analyzed. in the cell (fig. 3).
  • a primary pump is used before the measurement to degass the system and during the measurement to maintain a determined pressure at the delivery outlet of the diffusion pump. It has been found that a detector of the countercurrent type delivers a detection signal which is not very stable, due to the operation of the diffusion pump in the underheating regime. However, without such a regime, helium would not pass through the diffusion pump in countercurrent.
  • the helium atoms are detected before their aspiration by the diffusion pump, as is the case in the detector according to FIG. 3 of this document, access to the enclosure to be monitored and the delivery outlet of the diffusion pump no longer communicate directly. It is therefore impossible to take advantage of a vane pump which possibly exists in connection with said enclosure.
  • the detector must have its own primary pump.
  • the object of the invention is to propose a detector which does not need a clean vane pump when one already exists in connection with the enclosure to be monitored.
  • a detector as specified above which is characterized in that to avoid the use of a vane pump in the detector the input of the diffusion pump is connected to a point of the outlet pipe via a throttle.
  • the detector can advantageously include an isolation valve at the inlet, a sampling valve on the inlet of the diffusion pump and a measurement valve on the short-circuit pipe.
  • the detector may further include a trap between the diffusion pump and the spectrometric cell.
  • Another trap can be interposed between the sampling valve and the inlet of the diffusion pump.
  • the single figure is a schematic representation of a helium leak detector according to the invention.
  • a set 1 of a leak detector comprises an inlet pipe 2, an inlet flange 3 and an isolation valve 4.
  • the inlet pipe 2 leads to the inlet 5 of a diffusion pump via a diaphragm or throttle which can be constituted by an adjustable sampling valve 11.
  • a spectrometric measurement cell 8 is connected to the diffusion pump 6 via a pipe 9.
  • the outlet 7 of the diffusion pump 6 is connected by a pipe 10 and a measurement valve 12 at a connection point on the pipe 2 between the valves 4 and 11.
  • the inlet flange 3 of the detector 1 is, when in use, connected by a pipe 13 to an auxiliary pumping unit 14 comprising a vane pump 15 with an isolation valve 16 and a connection flange 17 to an installation to test not shown.
  • the ratio n is linked to the pumping speeds at the input of the spectrometer 8 and at the input of the auxiliary pump of this group. We are therefore in the presence of a flow amplifier assembly.
  • Another advantage of this arrangement is that it makes it possible to produce a detector without a vane pump, and having no additional connection flange for this vane pump.
  • any trap which may be, for example, of the liquid nitrogen, ionic type, or still zeolites.

Claims (6)

1. Helium-Lecksucher, der eine Molekulardiffusionspumpe (6) mit einem Eingang (5) und einem Ausgang (7) und eine spektrometrische Meßzelle (8) aufweist, die in Ableitung an der Pumpe angeordnet ist, wobei der Ausgang (7) über eine Ausgangsleitung (10) mit einem Flansch (3) zum Anschluß an eine zu testende Anlage verbunden ist, dadurch gekennzeichnet, daß, um die Verwendung einer Vorvakuumpumpe im Lecksucher zu vermeiden, der Eingang (5) der Diffusionspumpe mit einem Punkt der Ausgangsleitung (10) über eine Drosselstelle (11) verbunden ist.
2. Lecksucher nach Anspruch 1, dadurch gekennzeichnet, daß die Drosselstelle aus einem Regelventil (11) besteht.
3. Lecksucher nach Anspruch 1, dadurch gekennzeichnet, daß er ein Isolierventil (4) aufweist, das in der Eingangskanalisation (2) angeordnet ist.
4. Lecksucher nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß er ein Meßventil (12) in der Ausgangsleitung (10) aufweist.
5. Lecksucher nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß eine Fall zwischen die Diffusionspumpe (6) und die spektrometrische Zelle (8) eingefügt ist.
6. Lecksucher nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, daß eine Falle zwischen dem Regelventil (11) und dem Eingang (5) der Diffusionspumpe angeordnet ist.
EP81100778A 1980-02-11 1981-02-04 Lecksuchvorrichtung mit Helium Expired EP0033945B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT81100778T ATE7629T1 (de) 1980-02-11 1981-02-04 Lecksuchvorrichtung mit helium.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8002923 1980-02-11
FR8002923A FR2475728A1 (fr) 1980-02-11 1980-02-11 Detecteur de fuites a helium

Publications (4)

Publication Number Publication Date
EP0033945A2 EP0033945A2 (de) 1981-08-19
EP0033945A3 EP0033945A3 (en) 1981-08-26
EP0033945B1 true EP0033945B1 (de) 1984-05-23
EP0033945B2 EP0033945B2 (de) 1989-01-11

Family

ID=9238433

Family Applications (1)

Application Number Title Priority Date Filing Date
EP81100778A Expired EP0033945B2 (de) 1980-02-11 1981-02-04 Lecksuchvorrichtung mit Helium

Country Status (5)

Country Link
US (2) US4365158A (de)
EP (1) EP0033945B2 (de)
AT (1) ATE7629T1 (de)
DE (1) DE3163699D1 (de)
FR (1) FR2475728A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2532424A1 (fr) * 1982-08-27 1984-03-02 Cit Alcatel Dispositif de mesure et d'affichage du taux q de fuite pour un detecteur de fuites a gaz traceur
FR2561771B1 (fr) * 1984-03-23 1986-06-27 Cit Alcatel Procede pour depolluer un detecteur de fuite a helium et dispositif pour la mise en oeuvre du procede
JPS6197918A (ja) * 1984-10-19 1986-05-16 Hitachi Ltd Ｘ線露光装置
FR2604522B1 (fr) * 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
US4785666A (en) * 1986-12-19 1988-11-22 Martin Marietta Corporation Method of increasing the sensitivity of a leak detector in the probe mode
DE3865012D1 (de) * 1988-06-01 1991-10-24 Leybold Ag Pumpsystem fuer ein lecksuchgeraet.
DE69016198T2 (de) * 1990-07-06 1995-05-18 Cit Alcatel Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit.
JPH0674855A (ja) * 1992-07-08 1994-03-18 Hitachi Bill Shisetsu Eng Kk 真空漏洩検出方法、および同装置
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
US5347845A (en) * 1993-02-19 1994-09-20 Whirlpool Corporation Appliance shipping container air sampling system
US5551285A (en) * 1994-05-18 1996-09-03 The United States Of America As Represented By The United States Department Of Energy Leak checker data logging system
FR2728072B1 (fr) * 1994-12-07 1997-01-10 Cit Alcatel Detecteur de fuite
DE19504278A1 (de) * 1995-02-09 1996-08-14 Leybold Ag Testgas-Lecksuchgerät
DE19506123C2 (de) * 1995-02-22 1997-01-09 Cerdec Ag Bleifreie Glasfritte, Verfahren zu ihrer Herstellung und deren Verwendung
FR2761776B1 (fr) * 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1047204A (de) * 1964-05-26 1900-01-01
FR1474137A (fr) * 1966-02-08 1967-03-24 Alcatel Sa Détecteur de fuites à l'hélium aisément transportable
US3842266A (en) * 1973-04-11 1974-10-15 Us Air Force Atmospheric sampling probe for a mass spectrometer
US3968675A (en) * 1974-06-07 1976-07-13 Varian Associates Method and apparatus for preparing a mass spectrometer leak detector system for operation

Also Published As

Publication number Publication date
EP0033945A2 (de) 1981-08-19
EP0033945A3 (en) 1981-08-26
DE3163699D1 (en) 1984-06-28
FR2475728A1 (fr) 1981-08-14
US4436998A (en) 1984-03-13
FR2475728B1 (de) 1981-12-31
US4365158A (en) 1982-12-21
ATE7629T1 (de) 1984-06-15
EP0033945B2 (de) 1989-01-11

Similar Documents

Publication Publication Date Title
EP0033945B1 (de) Lecksuchvorrichtung mit Helium
EP0268777A1 (de) Vorrichtung und Verfahren zur Auffindung von Lecks mittels eines Spürgases
JPH0478936B2 (de)
JP2635587B2 (ja) リーク検査装置のディテクタを較正する装置
JPH03195935A (ja) 漏洩を検出する装置および方法
EP2466287A1 (de) Vorrichtung und Verfahren zum Erkennen von Lecks mit Hilfe von Wasserstoff als Spürgas
FR2681688A1 (fr) Installation de detection de fuites de gaz utilisant la technique de reniflage.
EP0869344B1 (de) Spürgas-Leckdetektor
US5821404A (en) Test gas leak indicator
FR2532424A1 (fr) Dispositif de mesure et d'affichage du taux q de fuite pour un detecteur de fuites a gaz traceur
US5107697A (en) Tracer gas leak detection system
FR2461249A1 (fr) Procede de mesure de debits de fuite
US5681983A (en) Tracer gas leak detector
US3787122A (en) Light scattering particle analyzer
US20050066708A1 (en) Test gas leakage detector
EP0070341B1 (de) Heliumleckdetektor
FR2921488A1 (fr) Dispositif et procede pour la detection de fuites a haute pression pr gaz traceur dans une piece a tester.
FR2616226A1 (fr) Dispositif de compensation d'humidite pour un detecteur de type photo-ionisation, et appareil pour sa mise en oeuvre
FR2666410A1 (fr) Detecteur de fuite haut flux a trois filtres moleculaires.
EP1008841B1 (de) Primäres Pumpen mit variabler Geschwindigkeit für einen Gastracer-Leckdetektor
JPH11153508A (ja) 真空装置用ヘリウムリークディテクター装置
JP2726646B2 (ja) 漏れ検出器
EP1942327B1 (de) Vorrichtung und Verfahren zur Schnellerkennung von Leckagen
JPS57169647A (en) He reverse diffusion type leakage detector using turbo molecular pump
EP3795972B1 (de) Leckerkennungsmodul und verfahren zur kontrolle der dichtheit eines objekts mit tracergas

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Designated state(s): AT BE CH DE FR GB IT LU NL SE

AK Designated contracting states

Designated state(s): AT BE CH DE FR GB IT LU NL SE

17P Request for examination filed

Effective date: 19811026

ITF It: translation for a ep patent filed

Owner name: JACOBACCI & PERANI S.P.A.

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Designated state(s): AT BE CH DE FR GB IT LI LU NL SE

REF Corresponds to:

Ref document number: 7629

Country of ref document: AT

Date of ref document: 19840615

Kind code of ref document: T

REF Corresponds to:

Ref document number: 3163699

Country of ref document: DE

Date of ref document: 19840628

PLBI Opposition filed

Free format text: ORIGINAL CODE: 0009260

26 Opposition filed

Opponent name: LEYBOLD - HERAEUS GMBH

Effective date: 19850221

NLR1 Nl: opposition has been filed with the epo

Opponent name: LEYBOLD - HERAEUS GMBH.

PLAB Opposition data, opponent's data or that of the opponent's representative modified

Free format text: ORIGINAL CODE: 0009299OPPO

R26 Opposition filed (corrected)

Opponent name: LEYBOLD - HERAEUS GMBH

Effective date: 19850221

PUAH Patent maintained in amended form

Free format text: ORIGINAL CODE: 0009272

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: PATENT MAINTAINED AS AMENDED

27A Patent maintained in amended form

Effective date: 19890111

AK Designated contracting states

Kind code of ref document: B2

Designated state(s): AT BE CH DE FR GB IT LU NL SE

NLR2 Nl: decision of opposition
ITF It: translation for a ep patent filed

Owner name: JACOBACCI & PERANI S.P.A.

NLR3 Nl: receipt of modified translations in the netherlands language after an opposition procedure
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 19911230

Year of fee payment: 12

Ref country code: FR

Payment date: 19911230

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19920102

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 19920122

Year of fee payment: 12

Ref country code: SE

Payment date: 19920122

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: BE

Payment date: 19920129

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19920218

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: LU

Payment date: 19920221

Year of fee payment: 12

ITTA It: last paid annual fee
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 19920229

Year of fee payment: 12

EPTA Lu: last paid annual fee
PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Effective date: 19930204

Ref country code: AT

Effective date: 19930204

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19930204

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Effective date: 19930205

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Effective date: 19930228

Ref country code: BE

Effective date: 19930228

Ref country code: LI

Effective date: 19930228

BERE Be: lapsed

Owner name: CIE INDUSTRIELLE DES TELECOMMUNICATIONS CIT-ALCAT

Effective date: 19930228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Effective date: 19930901

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 19930204

NLV4 Nl: lapsed or anulled due to non-payment of the annual fee
PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Effective date: 19931029

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Effective date: 19931103

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

EUG Se: european patent has lapsed

Ref document number: 81100778.0

Effective date: 19930912