EA201991242A1 - Газовый датчик для детектирования газового компонента - Google Patents

Газовый датчик для детектирования газового компонента

Info

Publication number
EA201991242A1
EA201991242A1 EA201991242A EA201991242A EA201991242A1 EA 201991242 A1 EA201991242 A1 EA 201991242A1 EA 201991242 A EA201991242 A EA 201991242A EA 201991242 A EA201991242 A EA 201991242A EA 201991242 A1 EA201991242 A1 EA 201991242A1
Authority
EA
Eurasian Patent Office
Prior art keywords
gas
gas sensor
component detection
sensitive layer
sensor
Prior art date
Application number
EA201991242A
Other languages
English (en)
Other versions
EA037632B1 (ru
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of EA201991242A1 publication Critical patent/EA201991242A1/ru
Publication of EA037632B1 publication Critical patent/EA037632B1/ru

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Изобретение относится к газовому датчику для детектирования газового компонента. Газовый датчик содержит чувствительный слой, первый и второй электроды и нагревательный элемент. Чувствительный слой содержит 20-95 мас.% оксида вольфрама и 5-80 мас.% элементарного вольфрама. Комбинация из оксида вольфрама и элементарного вольфрама образует по меньшей мере 60 мас.% чувствительного слоя. Изобретение относится также к способу изготовления газового датчика, включающему стадию осаждения чувствительного слоя с использованием метода физического осаждения из паровой фазы.
EA201991242A 2016-11-21 2017-11-06 Газовый датчик для детектирования газового компонента EA037632B1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP16199816 2016-11-21
PCT/EP2017/078295 WO2018091293A1 (en) 2016-11-21 2017-11-06 A gas sensor for detecting a gas component

Publications (2)

Publication Number Publication Date
EA201991242A1 true EA201991242A1 (ru) 2019-11-29
EA037632B1 EA037632B1 (ru) 2021-04-23

Family

ID=57389268

Family Applications (1)

Application Number Title Priority Date Filing Date
EA201991242A EA037632B1 (ru) 2016-11-21 2017-11-06 Газовый датчик для детектирования газового компонента

Country Status (7)

Country Link
EP (1) EP3542152B1 (ru)
CN (1) CN110088607B (ru)
BR (1) BR112019010202B1 (ru)
CL (1) CL2019001361A1 (ru)
EA (1) EA037632B1 (ru)
PH (1) PH12019500691A1 (ru)
WO (1) WO2018091293A1 (ru)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110398521A (zh) * 2019-08-26 2019-11-01 广西玉柴机器集团有限公司 一种高灵敏凹陷槽NOx传感器结构

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2192459B (en) * 1986-07-07 1990-12-19 English Electric Valve Co Ltd Hydrogen sulphide sensor
US5321146A (en) 1991-03-29 1994-06-14 Eastman Kodak Company Hydrogen sulfide gas sensor and precursor compounds for manufacture of same
JPH06148113A (ja) * 1992-11-04 1994-05-27 Kurabe Ind Co Ltd 窒素酸化物ガス検知素子
KR960029785A (ko) 1995-01-24 1996-08-17 구자홍 가스센서
TWI220455B (en) * 2001-11-29 2004-08-21 Ind Tech Res Inst Method for preparing tungsten trioxide precursor and hydrogen sulfide gas sensor fabricated using the same
CN100412227C (zh) * 2006-07-25 2008-08-20 天津大学 对向靶磁控溅射制备三氧化钨薄膜气敏传感器的方法
CN100427939C (zh) * 2006-12-21 2008-10-22 天津大学 三氧化钨薄膜气敏传感器的表面改性方法
US7827852B2 (en) 2007-12-20 2010-11-09 General Electric Company Gas sensor and method of making
CN101799443A (zh) * 2010-03-16 2010-08-11 天津大学 制备多孔硅基底氧化钨纳米薄膜气敏传感器的方法
US9791403B2 (en) 2012-10-05 2017-10-17 The Regents Of The University Of California Nanoparticle-based gas sensors and methods of using the same
CN203069539U (zh) * 2012-12-26 2013-07-17 天津大学 用于室温检测超低浓度氮氧化物气体的气敏元件
CN103389334A (zh) * 2013-07-24 2013-11-13 天津大学 铜掺杂多孔硅基氧化钨室温气敏元件的制备方法
CN103512924A (zh) * 2013-10-21 2014-01-15 天津大学 一种低温检测氮氧化物气敏元件的制备方法
CN103626233A (zh) * 2013-12-02 2014-03-12 江西师范大学 一种三氧化钨纳米片及掺杂三氧化钨纳米片气体传感器
CN104237314A (zh) * 2014-08-12 2014-12-24 天津大学 一种高灵敏度室温二氧化氮气敏材料的制备方法
CN105987935B (zh) * 2015-02-16 2019-08-23 郑州炜盛电子科技有限公司 Mems气体传感器及其制作方法

Also Published As

Publication number Publication date
WO2018091293A1 (en) 2018-05-24
CL2019001361A1 (es) 2019-09-06
EP3542152B1 (en) 2020-04-29
PH12019500691B1 (en) 2019-11-04
EA037632B1 (ru) 2021-04-23
BR112019010202B1 (pt) 2023-01-24
CN110088607B (zh) 2022-12-27
PH12019500691A1 (en) 2019-11-04
CN110088607A (zh) 2019-08-02
BR112019010202A2 (pt) 2019-09-03
EP3542152A1 (en) 2019-09-25

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