EA201890993A1 - Оптический датчик давления - Google Patents

Оптический датчик давления

Info

Publication number
EA201890993A1
EA201890993A1 EA201890993A EA201890993A EA201890993A1 EA 201890993 A1 EA201890993 A1 EA 201890993A1 EA 201890993 A EA201890993 A EA 201890993A EA 201890993 A EA201890993 A EA 201890993A EA 201890993 A1 EA201890993 A1 EA 201890993A1
Authority
EA
Eurasian Patent Office
Prior art keywords
membranes
fabry
membrane
pressure sensor
optical pressure
Prior art date
Application number
EA201890993A
Other languages
English (en)
Other versions
EA034405B1 (ru
Inventor
Иб-Руне Йохансен
Original Assignee
Тьюнабл Инфрарэд Текнолоджиз Ас
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Тьюнабл Инфрарэд Текнолоджиз Ас filed Critical Тьюнабл Инфрарэд Текнолоджиз Ас
Publication of EA201890993A1 publication Critical patent/EA201890993A1/ru
Publication of EA034405B1 publication Critical patent/EA034405B1/ru

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/04—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by acoustic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases

Abstract

Изобретение относится к оптическому датчику давления, такому как микрофон, состоящему из двух мембран, в котором звук входит не перпендикулярно мембране, а сбоку. Мембраны могут располагаться параллельно, как в интерферометре Фабри-Перо, или немного под углом, как в интерферометре с воздушным клином. В датчике давления используется интерферометрическое считывание, и он содержит две мембраны, по существу, с одинаковыми характеристиками, при этом по меньшей мере одна из мембран частично пропускает и частично отражает свет, а другая мембрана, по меньшей мере частично, отражает свет, мембраны разделены полостью, определяемой распорной деталью, расстояние между мембранами является переменным, и они образуют резонатор Фабри-Перо, чувствительный к смещению, при этом две мембраны имеют общий тыльный герметичный или, по существу, герметичный объем на частоте измерения, причем увеличение давления приводит к тому, что мембраны двигаются в противоположных направлениях.
EA201890993A 2015-11-29 2016-11-29 Оптический датчик давления EA034405B1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NO20151618A NO343314B1 (no) 2015-11-29 2015-11-29 Optisk trykksensor
PCT/EP2016/079145 WO2017089624A1 (en) 2015-11-29 2016-11-29 Optical pressure sensor

Publications (2)

Publication Number Publication Date
EA201890993A1 true EA201890993A1 (ru) 2018-11-30
EA034405B1 EA034405B1 (ru) 2020-02-05

Family

ID=57406270

Family Applications (1)

Application Number Title Priority Date Filing Date
EA201890993A EA034405B1 (ru) 2015-11-29 2016-11-29 Оптический датчик давления

Country Status (10)

Country Link
US (1) US10739220B2 (ru)
EP (1) EP3380822B1 (ru)
JP (1) JP6783869B2 (ru)
CN (1) CN108291849B (ru)
BR (1) BR112018010157B1 (ru)
CA (1) CA3004523A1 (ru)
DK (1) DK3380822T3 (ru)
EA (1) EA034405B1 (ru)
NO (1) NO343314B1 (ru)
WO (1) WO2017089624A1 (ru)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102519055B1 (ko) * 2015-11-03 2023-04-07 삼성전자주식회사 탄산수 제조 장치, 이를 포함하는 냉장고 및 그 제어 방법
NO20161086A1 (no) 2016-06-29 2018-01-01 Tunable As Modulerbar Fabry-Perot
GB2565376B (en) * 2017-08-11 2020-03-25 Cirrus Logic Int Semiconductor Ltd MEMS devices and processes
KR101985896B1 (ko) * 2017-10-18 2019-06-04 국방과학연구소 광 신호 처리 장치, 그 방법 및 기록매체에 저장된 컴퓨터 프로그램.
CN109870449B (zh) * 2019-02-25 2021-11-26 京东方科技集团股份有限公司 一种气体监控装置、系统和方法，以及橱柜
EP3754325B1 (en) * 2019-06-19 2022-02-16 Infineon Technologies AG Photoacoustic gas sensor
CN110441242A (zh) * 2019-08-14 2019-11-12 郑州大学 基于金刚石微悬臂梁的气体检测系统和方法
CN112087698B (zh) * 2020-10-15 2021-07-23 潍坊歌尔微电子有限公司 Mems麦克风
CN112576636B (zh) * 2020-11-18 2021-11-19 潍柴动力股份有限公司 弹性联轴器及具有其的发动机
US11666313B1 (en) * 2020-12-04 2023-06-06 Fonar Corporation Calibration technique, apparatus and system for pulsed phase-lock loop ultrasound intracranial pressure measurement systems
CN112630298B (zh) * 2020-12-15 2023-05-09 合肥科博慧科技管理有限责任公司 一种基于声表面波的土壤VOCs检测装置

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2043416A (en) 1933-01-27 1936-06-09 Lueg Paul Process of silencing sound oscillations
DK247786D0 (da) 1986-05-27 1986-05-27 Brueel & Kjaer As Fotoakustisk gasanalysator
EP0460357A3 (en) * 1990-06-08 1992-07-29 Landis & Gyr Betriebs Ag Device for optical measurement of pressure differences
DE4023154A1 (de) * 1990-07-20 1992-01-30 Karl F Prof Dr Renk Fabry-perot-resonator
CH680534A5 (en) * 1991-09-16 1992-09-15 Landis & Gyr Betriebs Ag Fabry=perot sensor for optical parameter measurement - uses two opposing mirrors respectively attached to deflected measuring membrane and transparent plate
CH689925A5 (de) 1995-02-23 2000-01-31 Aritron Instr Ag Verfahren und Vorrichtung zur photoakustischen Detektion von Gasen und Dämpfen
US5832157A (en) 1996-07-12 1998-11-03 Mcdermott Technology, Inc. Fiber optic acoustic emission sensor
FR2768813B1 (fr) * 1997-09-19 1999-10-22 Commissariat Energie Atomique Spectrometre photoacoustique miniaturise
NO315397B1 (no) 2001-11-13 2003-08-25 Sinvent As Optisk forskyvnings-sensor
NO315177B1 (no) 2001-11-29 2003-07-21 Sinvent As Optisk forskyvnings-sensor
US7116430B2 (en) 2002-03-29 2006-10-03 Georgia Technology Research Corporation Highly-sensitive displacement-measuring optical device
FI116859B (fi) * 2002-09-30 2006-03-15 Noveltech Solutions Ltd Fotoakustinen detektori
US7359067B2 (en) 2006-04-07 2008-04-15 Symphony Acoustics, Inc. Optical displacement sensor comprising a wavelength-tunable optical source
US20080075404A1 (en) * 2006-05-19 2008-03-27 New Jersey Institute Of Technology Aligned embossed diaphragm based fiber optic sensor
US7554666B2 (en) * 2006-05-25 2009-06-30 Ric Investments, Llc. Sensor with optical pressure transducer and method of manufacturing a sensor component
AU2009269103B2 (en) * 2008-07-10 2011-10-06 Northrop Grumman Guidance And Electronics Company, Inc. Fiber optical acoustic sensor system and method using push-pull two wavelength Fabry Perot sensors
US8689607B2 (en) 2011-05-04 2014-04-08 Honeywell International Inc. Apparatus and method of photoacoustic sensor signal acquisition
EP2525194A1 (en) * 2011-05-16 2012-11-21 Knowles Electronics Asia PTE. Ltd. Optical sensor
JP6260076B2 (ja) * 2012-09-19 2018-01-17 セイコーエプソン株式会社 分光装置
NO20130884A1 (no) 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
CN103528735B (zh) * 2013-10-31 2015-11-18 南京信息工程大学 一种微型光纤法布里-珀罗压力传感器及其制作方法
CN204101218U (zh) * 2014-09-15 2015-01-14 江苏昂德光电科技有限公司 一种f-p腔光纤压力传感装置
CN204807443U (zh) * 2015-06-24 2015-11-25 中国计量学院 一种基于光纤光栅微腔的fpi氢气传感器
CN204788749U (zh) * 2015-07-10 2015-11-18 成都凯天电子股份有限公司 带有复合介质薄膜的f-p压力传感器
US9933546B2 (en) * 2015-09-24 2018-04-03 Baker Hughes, A Ge Company, Llc Displacement measurements using a multi-cavity sensor
NO344002B1 (en) * 2015-09-29 2019-08-12 Sintef Tto As Optical gas detector

Also Published As

Publication number Publication date
BR112018010157B1 (pt) 2023-05-09
EP3380822A1 (en) 2018-10-03
US20180321103A1 (en) 2018-11-08
CN108291849B (zh) 2020-05-22
JP6783869B2 (ja) 2020-11-11
BR112018010157A2 (pt) 2018-11-21
JP2019500625A (ja) 2019-01-10
WO2017089624A1 (en) 2017-06-01
NO343314B1 (no) 2019-01-28
DK3380822T3 (da) 2019-10-14
EP3380822B1 (en) 2019-08-14
US10739220B2 (en) 2020-08-11
NO20151618A1 (no) 2017-05-30
CN108291849A (zh) 2018-07-17
EA034405B1 (ru) 2020-02-05
CA3004523A1 (en) 2017-06-01

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MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): AM AZ BY KG TJ TM