DK3044970T3 - MICROELECTROMECHANICAL DEVICE FOR GENERATION OF PHYSICAL POWER - Google Patents

MICROELECTROMECHANICAL DEVICE FOR GENERATION OF PHYSICAL POWER Download PDF

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Publication number
DK3044970T3
DK3044970T3 DK14780629.3T DK14780629T DK3044970T3 DK 3044970 T3 DK3044970 T3 DK 3044970T3 DK 14780629 T DK14780629 T DK 14780629T DK 3044970 T3 DK3044970 T3 DK 3044970T3
Authority
DK
Denmark
Prior art keywords
piezoelectric
elements
bending
movable
microelectromechanical device
Prior art date
Application number
DK14780629.3T
Other languages
Danish (da)
English (en)
Inventor
Shay Kaplan
Yuval Cohen
Simon Meir Ben
Original Assignee
Audio Pixels Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Audio Pixels Ltd filed Critical Audio Pixels Ltd
Application granted granted Critical
Publication of DK3044970T3 publication Critical patent/DK3044970T3/en

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
DK14780629.3T 2013-09-09 2014-09-08 MICROELECTROMECHANICAL DEVICE FOR GENERATION OF PHYSICAL POWER DK3044970T3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/021,152 US9510103B2 (en) 2013-09-09 2013-09-09 Microelectromechanical apparatus for generating a physical effect
PCT/IL2014/050798 WO2015033346A1 (en) 2013-09-09 2014-09-08 Microelectromechanical apparatus for generating a physical effect

Publications (1)

Publication Number Publication Date
DK3044970T3 true DK3044970T3 (en) 2019-03-04

Family

ID=51659977

Family Applications (1)

Application Number Title Priority Date Filing Date
DK14780629.3T DK3044970T3 (en) 2013-09-09 2014-09-08 MICROELECTROMECHANICAL DEVICE FOR GENERATION OF PHYSICAL POWER

Country Status (8)

Country Link
US (2) US9510103B2 (enExample)
EP (1) EP3044970B1 (enExample)
JP (1) JP6472804B2 (enExample)
KR (1) KR102180850B1 (enExample)
CN (1) CN105612764B (enExample)
DK (1) DK3044970T3 (enExample)
IL (1) IL244088B (enExample)
WO (1) WO2015033346A1 (enExample)

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DE102013224718A1 (de) * 2013-12-03 2015-06-03 Robert Bosch Gmbh MEMS-Mikrofonbauelement und Vorrichtung mit einem solchen MEMS-Mikrofonbauelement
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US10567883B2 (en) 2015-07-22 2020-02-18 Audio Pixels Ltd. Piezo-electric actuators
US10433067B2 (en) 2015-07-22 2019-10-01 Audio Pixels Ltd. DSR speaker elements and methods of manufacturing thereof
DE102015114242A1 (de) 2015-08-27 2017-03-02 USound GmbH MEMS-Lautsprecher mit Positionssensor
DE102015116707A1 (de) * 2015-10-01 2017-04-06 USound GmbH Flexible MEMS-Leiterplatteneinheit sowie Schallwandleranordnung
US10516943B2 (en) * 2016-05-04 2019-12-24 Infineon Technologies Ag Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
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US11697135B2 (en) * 2018-11-09 2023-07-11 Texas Instruments Incorporated Multi-frequency hybrid piezo actuation and capactive transducer
WO2020136994A1 (ja) 2018-12-27 2020-07-02 株式会社村田製作所 圧電トランスデューサ
IT201900001017A1 (it) * 2019-01-23 2020-07-23 St Microelectronics Srl Trasduttore elettroacustico microelettromeccanico ad attuazione piezoelettrica e relativo procedimento di fabbricazione
TWI803124B (zh) 2021-12-29 2023-05-21 財團法人工業技術研究院 具多重振動部的微機電裝置
IL299527A (en) 2022-12-26 2024-07-01 Audio Pixels Ltd Electro-Mechanical Device Comprising An Electrically Split Array Of Moving Elements, And Methods Of Controlling Thereof
CN116317694B (zh) * 2023-05-18 2023-08-04 南京航空航天大学 一种利用挠曲电效应调控压电器件频率及电势分布的方法
KR102808604B1 (ko) * 2023-09-11 2025-05-20 연세대학교 산학협력단 보호층이 형성된 2차원 압전 물질 기반의 마이크로폰 및 이의 제조 방법

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Also Published As

Publication number Publication date
US10522733B2 (en) 2019-12-31
WO2015033346A1 (en) 2015-03-12
US20170033274A1 (en) 2017-02-02
JP6472804B2 (ja) 2019-02-20
CN105612764B (zh) 2018-10-09
KR20160069517A (ko) 2016-06-16
US9510103B2 (en) 2016-11-29
EP3044970A1 (en) 2016-07-20
JP2016536155A (ja) 2016-11-24
KR102180850B1 (ko) 2020-11-20
CN105612764A (zh) 2016-05-25
US20150071467A1 (en) 2015-03-12
IL244088B (en) 2020-06-30
IL244088A0 (en) 2016-04-21
EP3044970B1 (en) 2018-11-07

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