IL244088B - A microelectromechanical device to create a physical effect - Google Patents

A microelectromechanical device to create a physical effect

Info

Publication number
IL244088B
IL244088B IL244088A IL24408816A IL244088B IL 244088 B IL244088 B IL 244088B IL 244088 A IL244088 A IL 244088A IL 24408816 A IL24408816 A IL 24408816A IL 244088 B IL244088 B IL 244088B
Authority
IL
Israel
Prior art keywords
generating
physical effect
microelectromechanical apparatus
microelectromechanical
physical
Prior art date
Application number
IL244088A
Other languages
English (en)
Hebrew (he)
Other versions
IL244088A0 (en
Original Assignee
Audio Pixels Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Audio Pixels Ltd filed Critical Audio Pixels Ltd
Priority to IL244088A priority Critical patent/IL244088B/en
Publication of IL244088A0 publication Critical patent/IL244088A0/en
Publication of IL244088B publication Critical patent/IL244088B/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
IL244088A 2013-09-09 2016-02-11 A microelectromechanical device to create a physical effect IL244088B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL244088A IL244088B (en) 2013-09-09 2016-02-11 A microelectromechanical device to create a physical effect

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/021,152 US9510103B2 (en) 2013-09-09 2013-09-09 Microelectromechanical apparatus for generating a physical effect
PCT/IL2014/050798 WO2015033346A1 (en) 2013-09-09 2014-09-08 Microelectromechanical apparatus for generating a physical effect
IL244088A IL244088B (en) 2013-09-09 2016-02-11 A microelectromechanical device to create a physical effect

Publications (2)

Publication Number Publication Date
IL244088A0 IL244088A0 (en) 2016-04-21
IL244088B true IL244088B (en) 2020-06-30

Family

ID=51659977

Family Applications (1)

Application Number Title Priority Date Filing Date
IL244088A IL244088B (en) 2013-09-09 2016-02-11 A microelectromechanical device to create a physical effect

Country Status (8)

Country Link
US (2) US9510103B2 (enExample)
EP (1) EP3044970B1 (enExample)
JP (1) JP6472804B2 (enExample)
KR (1) KR102180850B1 (enExample)
CN (1) CN105612764B (enExample)
DK (1) DK3044970T3 (enExample)
IL (1) IL244088B (enExample)
WO (1) WO2015033346A1 (enExample)

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US9510103B2 (en) * 2013-09-09 2016-11-29 Audio Pixels Ltd. Microelectromechanical apparatus for generating a physical effect
DE102013224718A1 (de) * 2013-12-03 2015-06-03 Robert Bosch Gmbh MEMS-Mikrofonbauelement und Vorrichtung mit einem solchen MEMS-Mikrofonbauelement
DE102014108984B4 (de) * 2014-06-26 2017-04-06 Tdk Corporation Wandlerelement
KR20180031744A (ko) 2015-07-22 2018-03-28 오디오 픽셀즈 리미티드 Dsr 스피커 요소 및 그 제조 방법
US10567883B2 (en) 2015-07-22 2020-02-18 Audio Pixels Ltd. Piezo-electric actuators
DE102015114242A1 (de) 2015-08-27 2017-03-02 USound GmbH MEMS-Lautsprecher mit Positionssensor
DE102015116707A1 (de) * 2015-10-01 2017-04-06 USound GmbH Flexible MEMS-Leiterplatteneinheit sowie Schallwandleranordnung
US10516943B2 (en) * 2016-05-04 2019-12-24 Infineon Technologies Ag Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
US10636936B2 (en) * 2018-03-05 2020-04-28 Sharp Kabushiki Kaisha MEMS array system and method of manipulating objects
EP3432594A1 (en) 2018-03-09 2019-01-23 Oticon A/s Audio device with mems speaker
US11697135B2 (en) * 2018-11-09 2023-07-11 Texas Instruments Incorporated Multi-frequency hybrid piezo actuation and capactive transducer
WO2020136994A1 (ja) 2018-12-27 2020-07-02 株式会社村田製作所 圧電トランスデューサ
IT201900001017A1 (it) * 2019-01-23 2020-07-23 St Microelectronics Srl Trasduttore elettroacustico microelettromeccanico ad attuazione piezoelettrica e relativo procedimento di fabbricazione
TWI803124B (zh) 2021-12-29 2023-05-21 財團法人工業技術研究院 具多重振動部的微機電裝置
IL299527A (en) 2022-12-26 2024-07-01 Audio Pixels Ltd An electro-mechanical device that includes an array of electrically separated moving elements and methods for controlling this device
CN116317694B (zh) * 2023-05-18 2023-08-04 南京航空航天大学 一种利用挠曲电效应调控压电器件频率及电势分布的方法
KR102808604B1 (ko) * 2023-09-11 2025-05-20 연세대학교 산학협력단 보호층이 형성된 2차원 압전 물질 기반의 마이크로폰 및 이의 제조 방법

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KR100512960B1 (ko) 2002-09-26 2005-09-07 삼성전자주식회사 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰
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KR101423321B1 (ko) 2005-07-22 2014-07-30 퀄컴 엠이엠에스 테크놀로지스, 인크. 지지 구조물들을 가지는 전자기계 장치들 및 그 제조방법들
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DE202010000890U1 (de) 2010-01-14 2010-04-08 Chen, Hui San Leitungsanordnung für eine LED-Lampe
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KR20120036631A (ko) 2010-10-08 2012-04-18 삼성전자주식회사 압전형 마이크로 스피커 및 그 제조방법
KR101831013B1 (ko) 2010-11-26 2018-02-21 오디오 픽셀즈 리미티드 액츄에이터 어레이에서의 개별 어드레싱 및 잡음 감소를 위한 장치 및 방법
US8811636B2 (en) * 2011-11-29 2014-08-19 Qualcomm Mems Technologies, Inc. Microspeaker with piezoelectric, metal and dielectric membrane
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US9510103B2 (en) * 2013-09-09 2016-11-29 Audio Pixels Ltd. Microelectromechanical apparatus for generating a physical effect
US10327052B2 (en) 2015-04-08 2019-06-18 King Abdullah University Of Science And Technology Piezoelectric array elements for sound reconstruction with a digital input

Also Published As

Publication number Publication date
JP6472804B2 (ja) 2019-02-20
US20150071467A1 (en) 2015-03-12
CN105612764A (zh) 2016-05-25
US9510103B2 (en) 2016-11-29
IL244088A0 (en) 2016-04-21
EP3044970B1 (en) 2018-11-07
DK3044970T3 (en) 2019-03-04
KR20160069517A (ko) 2016-06-16
JP2016536155A (ja) 2016-11-24
CN105612764B (zh) 2018-10-09
US20170033274A1 (en) 2017-02-02
WO2015033346A1 (en) 2015-03-12
KR102180850B1 (ko) 2020-11-20
US10522733B2 (en) 2019-12-31
EP3044970A1 (en) 2016-07-20

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