DK1856303T3 - Enkelt, retvinklet endeblok - Google Patents
Enkelt, retvinklet endeblokInfo
- Publication number
- DK1856303T3 DK1856303T3 DK06708475T DK06708475T DK1856303T3 DK 1856303 T3 DK1856303 T3 DK 1856303T3 DK 06708475 T DK06708475 T DK 06708475T DK 06708475 T DK06708475 T DK 06708475T DK 1856303 T3 DK1856303 T3 DK 1856303T3
- Authority
- DK
- Denmark
- Prior art keywords
- target
- block
- angled end
- end block
- right angled
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
- H01J37/3497—Temperature of target
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Joining Of Building Structures In Genera (AREA)
- Ladders (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
- Forklifts And Lifting Vehicles (AREA)
- Cartons (AREA)
- Fittings On The Vehicle Exterior For Carrying Loads, And Devices For Holding Or Mounting Articles (AREA)
- Coating By Spraying Or Casting (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05101906 | 2005-03-11 | ||
PCT/EP2006/060216 WO2006094905A1 (en) | 2005-03-11 | 2006-02-23 | Single, right-angled end-block |
Publications (1)
Publication Number | Publication Date |
---|---|
DK1856303T3 true DK1856303T3 (da) | 2009-03-30 |
Family
ID=34938950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK06708475T DK1856303T3 (da) | 2005-03-11 | 2006-02-23 | Enkelt, retvinklet endeblok |
Country Status (13)
Country | Link |
---|---|
US (1) | US20080202925A1 (ja) |
EP (1) | EP1856303B1 (ja) |
JP (1) | JP5004942B2 (ja) |
KR (1) | KR20070108907A (ja) |
CN (1) | CN101137764B (ja) |
AT (1) | ATE420220T1 (ja) |
DE (1) | DE602006004712D1 (ja) |
DK (1) | DK1856303T3 (ja) |
ES (1) | ES2319569T3 (ja) |
PL (1) | PL1856303T3 (ja) |
PT (1) | PT1856303E (ja) |
SI (1) | SI1856303T1 (ja) |
WO (1) | WO2006094905A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1799876B1 (en) * | 2004-10-18 | 2009-02-18 | Bekaert Advanced Coatings | Flat end-block for carrying a rotatable sputtering target |
US8182662B2 (en) | 2009-03-27 | 2012-05-22 | Sputtering Components, Inc. | Rotary cathode for magnetron sputtering apparatus |
EP2372744B1 (en) * | 2010-04-01 | 2016-01-13 | Applied Materials, Inc. | Device for supporting a rotatable target and sputtering installation |
EP2371992B1 (en) * | 2010-04-01 | 2013-06-05 | Applied Materials, Inc. | End-block and sputtering installation |
EP2709138B1 (en) * | 2010-05-11 | 2016-11-30 | Applied Materials, Inc. | Chamber for physical vapor deposition |
KR101988391B1 (ko) | 2011-06-27 | 2019-06-12 | 솔레라스 리미티드 | 스퍼터링 타겟 |
GB201200574D0 (en) | 2012-01-13 | 2012-02-29 | Gencoa Ltd | In-vacuum rotational device |
BE1024754B9 (nl) * | 2016-11-29 | 2018-07-24 | Soleras Advanced Coatings Bvba | Een universeel monteerbaar eindblok |
CN108893719B (zh) * | 2018-09-14 | 2024-05-07 | 苏州浩联光电科技有限公司 | 一种靶材悬挂机构及离子溅射镀膜设备 |
CN115466930B (zh) * | 2022-09-13 | 2023-05-23 | 安徽其芒光电科技有限公司 | 镀膜设备及其靶材承载装置 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3878085A (en) * | 1973-07-05 | 1975-04-15 | Sloan Technology Corp | Cathode sputtering apparatus |
US4356073A (en) * | 1981-02-12 | 1982-10-26 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
US4422916A (en) * | 1981-02-12 | 1983-12-27 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
US4443318A (en) * | 1983-08-17 | 1984-04-17 | Shatterproof Glass Corporation | Cathodic sputtering apparatus |
US4445997A (en) * | 1983-08-17 | 1984-05-01 | Shatterproof Glass Corporation | Rotatable sputtering apparatus |
US4519885A (en) * | 1983-12-27 | 1985-05-28 | Shatterproof Glass Corp. | Method and apparatus for changing sputtering targets in a magnetron sputtering system |
US4575102A (en) * | 1984-11-20 | 1986-03-11 | Ferrofluidics Corporation | Coaxial, multiple-shaft ferrofluid seal apparatus |
US4995958A (en) * | 1989-05-22 | 1991-02-26 | Varian Associates, Inc. | Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile |
US5096562A (en) * | 1989-11-08 | 1992-03-17 | The Boc Group, Inc. | Rotating cylindrical magnetron structure for large area coating |
US5200049A (en) * | 1990-08-10 | 1993-04-06 | Viratec Thin Films, Inc. | Cantilever mount for rotating cylindrical magnetrons |
WO1992002659A1 (en) * | 1990-08-10 | 1992-02-20 | Viratec Thin Films, Inc. | Shielding for arc suppression in rotating magnetron sputtering systems |
DE4336994C1 (de) * | 1993-10-29 | 1995-03-30 | Heinrich Fabschitz | Fadenliefervorrichtung mit stufenlos einstellbarer Fadenabzugspannung |
US5620577A (en) * | 1993-12-30 | 1997-04-15 | Viratec Thin Films, Inc. | Spring-loaded mount for a rotatable sputtering cathode |
US5445721A (en) * | 1994-08-25 | 1995-08-29 | The Boc Group, Inc. | Rotatable magnetron including a replacement target structure |
US5591314A (en) * | 1995-10-27 | 1997-01-07 | Morgan; Steven V. | Apparatus for affixing a rotating cylindrical magnetron target to a spindle |
EP0918351A1 (en) * | 1997-11-19 | 1999-05-26 | Sinvaco N.V. | Improved planar magnetron with moving magnet assembly |
US6488824B1 (en) * | 1998-11-06 | 2002-12-03 | Raycom Technologies, Inc. | Sputtering apparatus and process for high rate coatings |
WO2000028104A1 (en) * | 1998-11-06 | 2000-05-18 | Scivac | Sputtering apparatus and process for high rate coatings |
US6263542B1 (en) * | 1999-06-22 | 2001-07-24 | Lam Research Corporation | Tolerance resistant and vacuum compliant door hinge with open-assist feature |
US6375815B1 (en) * | 2001-02-17 | 2002-04-23 | David Mark Lynn | Cylindrical magnetron target and apparatus for affixing the target to a rotatable spindle assembly |
US6736948B2 (en) * | 2002-01-18 | 2004-05-18 | Von Ardenne Anlagentechnik Gmbh | Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation |
US20030173217A1 (en) * | 2002-03-14 | 2003-09-18 | Sputtering Components, Inc. | High-power ion sputtering magnetron |
DE10213049A1 (de) * | 2002-03-22 | 2003-10-02 | Dieter Wurczinger | Drehbare Rohrkatode |
EP1641956B1 (en) * | 2003-07-04 | 2009-03-25 | Bekaert Advanced Coatings | Rotating tubular sputter target assembly |
EP1799876B1 (en) * | 2004-10-18 | 2009-02-18 | Bekaert Advanced Coatings | Flat end-block for carrying a rotatable sputtering target |
-
2006
- 2006-02-23 WO PCT/EP2006/060216 patent/WO2006094905A1/en not_active Application Discontinuation
- 2006-02-23 PL PL06708475T patent/PL1856303T3/pl unknown
- 2006-02-23 PT PT06708475T patent/PT1856303E/pt unknown
- 2006-02-23 US US11/908,017 patent/US20080202925A1/en not_active Abandoned
- 2006-02-23 SI SI200630240T patent/SI1856303T1/sl unknown
- 2006-02-23 CN CN2006800079638A patent/CN101137764B/zh not_active Expired - Fee Related
- 2006-02-23 DE DE602006004712T patent/DE602006004712D1/de active Active
- 2006-02-23 EP EP06708475A patent/EP1856303B1/en active Active
- 2006-02-23 AT AT06708475T patent/ATE420220T1/de not_active IP Right Cessation
- 2006-02-23 ES ES06708475T patent/ES2319569T3/es active Active
- 2006-02-23 KR KR1020077020758A patent/KR20070108907A/ko not_active Application Discontinuation
- 2006-02-23 DK DK06708475T patent/DK1856303T3/da active
- 2006-02-23 JP JP2008500164A patent/JP5004942B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20070108907A (ko) | 2007-11-13 |
EP1856303B1 (en) | 2009-01-07 |
JP2008533297A (ja) | 2008-08-21 |
CN101137764B (zh) | 2010-12-01 |
JP5004942B2 (ja) | 2012-08-22 |
CN101137764A (zh) | 2008-03-05 |
ES2319569T3 (es) | 2009-05-08 |
PL1856303T3 (pl) | 2009-06-30 |
ATE420220T1 (de) | 2009-01-15 |
WO2006094905A1 (en) | 2006-09-14 |
US20080202925A1 (en) | 2008-08-28 |
EP1856303A1 (en) | 2007-11-21 |
PT1856303E (pt) | 2009-02-27 |
SI1856303T1 (sl) | 2009-06-30 |
DE602006004712D1 (de) | 2009-02-26 |
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