DK1249509T3 - Silicium-aluminiumlegering af forlegeret pulver og fremgangsmåde til fremstilling deraf - Google Patents

Silicium-aluminiumlegering af forlegeret pulver og fremgangsmåde til fremstilling deraf

Info

Publication number
DK1249509T3
DK1249509T3 DK01310961T DK01310961T DK1249509T3 DK 1249509 T3 DK1249509 T3 DK 1249509T3 DK 01310961 T DK01310961 T DK 01310961T DK 01310961 T DK01310961 T DK 01310961T DK 1249509 T3 DK1249509 T3 DK 1249509T3
Authority
DK
Denmark
Prior art keywords
silicon
preparation
aluminum alloy
alloyed powder
binary alloy
Prior art date
Application number
DK01310961T
Other languages
English (en)
Inventor
Jocelyne O Mcgeever
Michael W Peretti
Brian J Mctiernan
Original Assignee
Crucible Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Crucible Materials Corp filed Critical Crucible Materials Corp
Application granted granted Critical
Publication of DK1249509T3 publication Critical patent/DK1249509T3/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
    • C22C29/18—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on silicides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Laminated Bodies (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Coating By Spraying Or Casting (AREA)
DK01310961T 2001-04-11 2001-12-31 Silicium-aluminiumlegering af forlegeret pulver og fremgangsmåde til fremstilling deraf DK1249509T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/832,128 US6475263B1 (en) 2001-04-11 2001-04-11 Silicon aluminum alloy of prealloyed powder and method of manufacture

Publications (1)

Publication Number Publication Date
DK1249509T3 true DK1249509T3 (da) 2006-09-11

Family

ID=25260766

Family Applications (1)

Application Number Title Priority Date Filing Date
DK01310961T DK1249509T3 (da) 2001-04-11 2001-12-31 Silicium-aluminiumlegering af forlegeret pulver og fremgangsmåde til fremstilling deraf

Country Status (9)

Country Link
US (1) US6475263B1 (da)
EP (1) EP1249509B1 (da)
JP (1) JP2002339032A (da)
AT (1) ATE325900T1 (da)
CY (1) CY1105259T1 (da)
DE (1) DE60119488T2 (da)
DK (1) DK1249509T3 (da)
ES (1) ES2267689T3 (da)
PT (1) PT1249509E (da)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1685078A (zh) * 2002-06-07 2005-10-19 黑罗伊斯有限公司 可延展的金属间溅射靶的制造方法
JP2005303196A (ja) * 2004-04-15 2005-10-27 Canon Inc 位置決め装置、露光装置、半導体デバイスの製造方法
US20070289869A1 (en) * 2006-06-15 2007-12-20 Zhifei Ye Large Area Sputtering Target
JP5215192B2 (ja) * 2007-01-05 2013-06-19 株式会社東芝 スパッタリングターゲット
EP2096189A1 (en) * 2008-02-28 2009-09-02 Applied Materials, Inc. Sprayed Si- or Si:Al-target with low iron content
KR102134781B1 (ko) 2014-03-31 2020-07-16 가부시끼가이샤 도시바 스퍼터링 타깃의 제조 방법 및 스퍼터링 타깃

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4402905A (en) * 1982-03-05 1983-09-06 Westinghouse Electric Corp. Production of a polycrystalline silicon aluminum alloy by a hot pressing technique
US5120352A (en) * 1983-06-23 1992-06-09 General Electric Company Method and apparatus for making alloy powder
DE3573137D1 (en) * 1984-10-03 1989-10-26 Sumitomo Electric Industries Material for a semiconductor device and process for its manufacture
US5084109A (en) * 1990-07-02 1992-01-28 Martin Marietta Energy Systems, Inc. Ordered iron aluminide alloys having an improved room-temperature ductility and method thereof
US5094288A (en) * 1990-11-21 1992-03-10 Silicon Casting, Inc. Method of making an essentially void-free, cast silicon and aluminum product
FR2721231B1 (fr) * 1994-06-21 1996-09-06 Wheelabrator Allevard Procédé d'atomisation d'un matériau liquide dispersable.
GB9514777D0 (en) * 1995-07-19 1995-09-20 Osprey Metals Ltd Silicon alloys for electronic packaging
DE69940854D1 (de) * 1998-12-28 2009-06-18 Ultraclad Corp Verfahren zur herstellung eines silizium/aluminiumsputtertargets

Also Published As

Publication number Publication date
US6475263B1 (en) 2002-11-05
EP1249509A2 (en) 2002-10-16
DE60119488D1 (de) 2006-06-14
EP1249509B1 (en) 2006-05-10
US20020170389A1 (en) 2002-11-21
EP1249509A3 (en) 2005-06-01
JP2002339032A (ja) 2002-11-27
ES2267689T3 (es) 2007-03-16
PT1249509E (pt) 2006-09-29
CY1105259T1 (el) 2010-03-03
ATE325900T1 (de) 2006-06-15
DE60119488T2 (de) 2006-12-14

Similar Documents

Publication Publication Date Title
WO2003027003A3 (en) Methods of nanotube films and articles
MXPA03010909A (es) Derivados de epotilona.
WO2004052899A3 (en) Process for the production of 2'-branched nucleosides
AU2003233010A1 (en) Process for the preparation of 3,3,4,4-tetrafluoropyrrolidine and derivatives thereof
AU2002256132A1 (en) System, method, and article of manufacture for filtering mail items based upon recipient preference
TW200506070A (en) Processing of titanium-aluminum-vanadium alloys and products made thereby
AU2003202159A1 (en) Extract of processed panax genus plant, the preparation method thereof, and compositions containing the same
IL140419A0 (en) Novel form of irbesartan, methods for obtaining said form and pharmaceutical compositions containing same
EP1411032A4 (en) HIGH PURITY QUARTZ POWDER, METHOD OF MANUFACTURE, AND ARTICLE OBTAINED FROM THE POWDER
MXPA05010562A (es) Composicion en polvo de proteinas.
WO2003039459A3 (en) Viral vector production methods and compositions
WO2004069900A3 (en) Bisaminophenyl-based curatives and amidine-based curatives and cure accelerators for perfluoroelastomeric compositions
DK1249509T3 (da) Silicium-aluminiumlegering af forlegeret pulver og fremgangsmåde til fremstilling deraf
EP1288931A3 (en) Optical recording article
NO20040944D0 (no) Fremgangsmate for fremstilling av silisiummetallpartikler med redusert gjennomsnittlig storrelse.
MXPA02011490A (es) Composicion de revestimiento en polvo, metodo de su uso y los articulos formados de la misma.
PL336640A1 (en) Substituted 3,3-diamino-2- propenonitriles, their production and application
EP1477577A4 (en) ALUMINUM ALLOY, CASTING BODY FROM AN ALUMINUM ALLOY AND METHOD FOR PRODUCING A CASTING BODY FROM AN ALUMINUM ALLOY
EP1469098A3 (en) A coating material and a method of manufacturing the same
PL367429A1 (en) Protected 3,5-dihydroxy-2,2-dimethyl-valeronitriles for the synthesis of epothilones and derivatives and method for the production and use thereof
AU2003264016A8 (en) High density composition of matter, articles made therefrom, and processes for the preparation thereof
AU2003266115A1 (en) Method for the conveyance of postal items and package mailbox
MXPA04004526A (es) N-metil-homocisteinas, su uso y metodo para su produccion.
EP1444247A4 (en) NEW TIBOLON FORMULATIONS
AU2002335911A1 (en) Novel symmetrical substituted benzaldehyde alditol derivatives and compositions and articles containing same