DK120125B - Method and apparatus for crucible zone melting of a crystalline rod, in particular semiconductor rod. - Google Patents

Method and apparatus for crucible zone melting of a crystalline rod, in particular semiconductor rod.

Info

Publication number
DK120125B
DK120125B DK59468AA DK59468A DK120125B DK 120125 B DK120125 B DK 120125B DK 59468A A DK59468A A DK 59468AA DK 59468 A DK59468 A DK 59468A DK 120125 B DK120125 B DK 120125B
Authority
DK
Denmark
Prior art keywords
rod
zone melting
particular semiconductor
crystalline
crucible zone
Prior art date
Application number
DK59468AA
Other languages
Danish (da)
Inventor
W Keller
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of DK120125B publication Critical patent/DK120125B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details
DK59468AA 1967-04-21 1968-02-15 Method and apparatus for crucible zone melting of a crystalline rod, in particular semiconductor rod. DK120125B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0109450 1967-04-21

Publications (1)

Publication Number Publication Date
DK120125B true DK120125B (en) 1971-04-13

Family

ID=7529524

Family Applications (1)

Application Number Title Priority Date Filing Date
DK59468AA DK120125B (en) 1967-04-21 1968-02-15 Method and apparatus for crucible zone melting of a crystalline rod, in particular semiconductor rod.

Country Status (6)

Country Link
US (1) US3607138A (en)
BE (1) BE713935A (en)
DE (1) DE1644004A1 (en)
DK (1) DK120125B (en)
GB (1) GB1150697A (en)
NL (1) NL6805560A (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE791284A (en) * 1972-11-13 1973-05-14 Elphiac Sa SYSTEM FOR ADJUSTING THE POSITION OF AN INDUCTOR.
GB1522955A (en) * 1974-12-03 1978-08-31 Rolls Royce Induction heating apparatus
DE2538854B2 (en) * 1975-09-01 1979-02-15 Wacker-Chemitronic Gesellschaft Fuer Elektronik-Grundstoffe Mbh, 8263 Burghausen Single-turn induction heating coil for crucible-free zone melting
US4561489A (en) * 1982-03-25 1985-12-31 Olin Corporation Flux concentrator
US4522790A (en) * 1982-03-25 1985-06-11 Olin Corporation Flux concentrator
JPS6448391A (en) * 1987-04-27 1989-02-22 Shinetsu Handotai Kk Single winding induction heating coil used in floating zone melting method
JPS63291888A (en) * 1987-05-25 1988-11-29 Shin Etsu Handotai Co Ltd Production device for semiconductor single crystal
DE3873173T2 (en) * 1987-05-25 1993-03-04 Shinetsu Handotai Kk DEVICE FOR HF INDUCTION HEATING.
DE69112463T2 (en) * 1990-03-30 1996-02-15 Shinetsu Handotai Kk Device for the production of monocrystals according to the Czochralski process.
US9924567B2 (en) 2013-05-14 2018-03-20 Thermatool Corp. Induction coil with dynamically variable coil geometry

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB650184A (en) * 1948-05-24 1951-02-14 Gen Electric Co Ltd Improvements in or relating to electric inductor constructions for use in high frequency electric induction heating
US2905798A (en) * 1958-09-15 1959-09-22 Lindberg Eng Co Induction heating apparatus
US3101165A (en) * 1960-05-13 1963-08-20 Atlas Crankshaft Corp Method and apparatus for heat-treating
US3331938A (en) * 1965-03-02 1967-07-18 Ohio Crankshaft Co Conductor with an adjustable workpiece centering arrangement

Also Published As

Publication number Publication date
US3607138A (en) 1971-09-21
GB1150697A (en) 1969-04-30
BE713935A (en) 1968-10-21
NL6805560A (en) 1968-10-22
DE1644004A1 (en) 1970-04-02

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