DK120483B - Method and apparatus for crucible zone melting of a crystalline rod, in particular semiconductor rod. - Google Patents

Method and apparatus for crucible zone melting of a crystalline rod, in particular semiconductor rod.

Info

Publication number
DK120483B
DK120483B DK61468AA DK61468A DK120483B DK 120483 B DK120483 B DK 120483B DK 61468A A DK61468A A DK 61468AA DK 61468 A DK61468 A DK 61468A DK 120483 B DK120483 B DK 120483B
Authority
DK
Denmark
Prior art keywords
rod
zone melting
particular semiconductor
crystalline
crucible zone
Prior art date
Application number
DK61468AA
Other languages
Danish (da)
Inventor
W Keller
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of DK120483B publication Critical patent/DK120483B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/32—Mechanisms for moving either the charge or the heater
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DK61468AA 1967-04-29 1968-02-16 Method and apparatus for crucible zone melting of a crystalline rod, in particular semiconductor rod. DK120483B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0109660 1967-04-29

Publications (1)

Publication Number Publication Date
DK120483B true DK120483B (en) 1971-06-07

Family

ID=7529699

Family Applications (1)

Application Number Title Priority Date Filing Date
DK61468AA DK120483B (en) 1967-04-29 1968-02-16 Method and apparatus for crucible zone melting of a crystalline rod, in particular semiconductor rod.

Country Status (4)

Country Link
US (1) US3622280A (en)
DE (1) DE1644006A1 (en)
DK (1) DK120483B (en)
GB (1) GB1152300A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE791284A (en) * 1972-11-13 1973-05-14 Elphiac Sa SYSTEM FOR ADJUSTING THE POSITION OF AN INDUCTOR.
DE2533858C2 (en) * 1975-07-29 1983-11-17 Siemens AG, 1000 Berlin und 8000 München Device for crucible-free zone melting of a semiconductor material rod with an induction heating coil fixed in the axial direction
US5052997A (en) * 1987-04-10 1991-10-01 The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services Diathermy coil
JPS63291888A (en) * 1987-05-25 1988-11-29 Shin Etsu Handotai Co Ltd Production device for semiconductor single crystal

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE857837C (en) * 1940-04-19 1952-12-01 Deutsche Edelstahlwerke Ag Device for inductive heating of metallic workpieces
US2905798A (en) * 1958-09-15 1959-09-22 Lindberg Eng Co Induction heating apparatus
NL250835A (en) * 1959-04-30
NL253184A (en) * 1960-06-28

Also Published As

Publication number Publication date
DE1644006A1 (en) 1970-04-02
US3622280A (en) 1971-11-23
GB1152300A (en) 1969-05-14

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