DK1032023T3 - Fremgangsmåde samt anordning til kontinuerlig behandling af genstande - Google Patents

Fremgangsmåde samt anordning til kontinuerlig behandling af genstande

Info

Publication number
DK1032023T3
DK1032023T3 DK00102733T DK00102733T DK1032023T3 DK 1032023 T3 DK1032023 T3 DK 1032023T3 DK 00102733 T DK00102733 T DK 00102733T DK 00102733 T DK00102733 T DK 00102733T DK 1032023 T3 DK1032023 T3 DK 1032023T3
Authority
DK
Denmark
Prior art keywords
transport path
objects
articles
continuous processing
processing device
Prior art date
Application number
DK00102733T
Other languages
Danish (da)
English (en)
Inventor
Thomas Lauinger
Armin Aberle
Richard Auer
Guido Halbach
Manuel Kanne
Hanno Paschke
Jens Moschner
Original Assignee
Schott Solar Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Solar Gmbh filed Critical Schott Solar Gmbh
Application granted granted Critical
Publication of DK1032023T3 publication Critical patent/DK1032023T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical Vapour Deposition (AREA)
  • Container Filling Or Packaging Operations (AREA)
  • Reciprocating Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Threshing Machine Elements (AREA)
  • Physical Vapour Deposition (AREA)
  • Control And Other Processes For Unpacking Of Materials (AREA)
DK00102733T 1999-02-22 2000-02-10 Fremgangsmåde samt anordning til kontinuerlig behandling af genstande DK1032023T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19907601A DE19907601A1 (de) 1999-02-22 1999-02-22 Verfahren sowie Anordnung zum kontinuierlichen Behandeln von Gegenständen

Publications (1)

Publication Number Publication Date
DK1032023T3 true DK1032023T3 (da) 2008-01-07

Family

ID=7898457

Family Applications (1)

Application Number Title Priority Date Filing Date
DK00102733T DK1032023T3 (da) 1999-02-22 2000-02-10 Fremgangsmåde samt anordning til kontinuerlig behandling af genstande

Country Status (8)

Country Link
US (1) US6422798B1 (es)
EP (1) EP1032023B1 (es)
JP (1) JP4502443B2 (es)
AT (1) ATE372589T1 (es)
DE (2) DE19907601A1 (es)
DK (1) DK1032023T3 (es)
ES (1) ES2292385T3 (es)
PT (1) PT1032023E (es)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1354830B1 (de) 2002-04-15 2004-04-28 Rena Sondermaschinen GmbH Transportrollen, Niederhalter und Transportsystem für flaches Transportgut
US7507087B2 (en) * 2005-12-07 2009-03-24 Ajax Tocco Manethermic Corporation Method and apparatus to provide continuous movement through a furnace
US7789660B2 (en) * 2005-12-07 2010-09-07 Ajax Tocco Magnethermic Corporation Furnace alignment system
DE102006034492B4 (de) * 2006-07-21 2014-06-26 Teamtechnik Maschinen Und Anlagen Gmbh Solarzellen-Verbindungsanlage
ATE466118T1 (de) 2007-02-02 2010-05-15 Applied Materials Inc Prozesskammer, inline-beschichtungsanlage und verfahren zur behandlung eines substrats
TWI333930B (en) * 2007-06-15 2010-12-01 King Yuan Electronics Co Ltd Tray transportation device
DE102009003393A1 (de) * 2009-01-27 2010-07-29 Schott Solar Ag Verfahren zur Temperaturbehandlung von Halbleiterbauelementen
DE102009008371A1 (de) * 2009-02-11 2010-08-12 Schott Solar Ag Integraler Prozeß von Waferherstellung bis Modulfertigung zur Herstellung von Wafern, Solarzellen und Solarmodulen
CN117443852B (zh) * 2023-12-22 2024-03-12 山东欧创电气有限公司 一种纤维墙板的吸尘装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3973665A (en) * 1975-03-07 1976-08-10 Gca Corporation Article delivery and transport apparatus for evacuated processing equipment
JPS6026662A (ja) * 1983-07-21 1985-02-09 バルツエルス・アクチエンゲゼルシヤフト 材料担体を使用する真空スライド装置
JPS6322422A (ja) * 1986-07-15 1988-01-29 Tsubakimoto Chain Co 複数連接台枠の連続押送装置
KR0133676B1 (ko) * 1987-12-07 1998-04-23 후세 노보루 웨이퍼 이동 교체 장치 및 방법
US5382126A (en) 1992-03-30 1995-01-17 Leybold Ag Multichamber coating apparatus
DE4303462C2 (de) * 1992-03-30 1994-03-31 Leybold Ag Mehrkammerbeschichtungsanlage
JPH1067429A (ja) * 1996-08-27 1998-03-10 Dainippon Screen Mfg Co Ltd 基板搬送装置
JP3689215B2 (ja) * 1997-02-20 2005-08-31 株式会社ルネサステクノロジ 半導体デバイスのテスト用搬送装置
US6235634B1 (en) * 1997-10-08 2001-05-22 Applied Komatsu Technology, Inc. Modular substrate processing system
US6213704B1 (en) * 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Method and apparatus for substrate transfer and processing
US6206176B1 (en) * 1998-05-20 2001-03-27 Applied Komatsu Technology, Inc. Substrate transfer shuttle having a magnetic drive

Also Published As

Publication number Publication date
EP1032023A3 (de) 2004-05-19
DE19907601A1 (de) 2000-08-31
US6422798B1 (en) 2002-07-23
ES2292385T3 (es) 2008-03-16
ATE372589T1 (de) 2007-09-15
PT1032023E (pt) 2007-12-11
EP1032023A2 (de) 2000-08-30
EP1032023B1 (de) 2007-09-05
JP2000243810A (ja) 2000-09-08
JP4502443B2 (ja) 2010-07-14
DE50014616D1 (de) 2007-10-18

Similar Documents

Publication Publication Date Title
DK1112933T3 (da) System til transport af genstande
ATE527665T1 (de) Bestrahlungssystem mit fördereinrichtung für artikelträgerelemente
ATE298308T1 (de) Zwischenspeichervorrichtung und ein verfahren zum transport von gegenständen
DK0811567T3 (da) Tværbåndssorteringssystem
IS1789B (is) Búnaður til að flytja hluti af einu færibandi á annað
DE60116901D1 (de) Fördereinrichtung und verfahren zur beförderung von produkten
DK1246767T3 (da) Apparat til omstilling af produkter mens fremadgående transporthastighed opretholdes
DK1321410T3 (da) Fremgangsmåde og anordning til transport af flade produkter
DK1032023T3 (da) Fremgangsmåde samt anordning til kontinuerlig behandling af genstande
DE60115446D1 (de) Vorrichtung zum vorübergehend Zwischenspeichern von Gegenständen in einer Verarbeitungslinie
ATE163170T1 (de) Vorrichtung zum fördern von gegenständen
DE50008473D1 (de) Vorrichtung zum Ab-und/oder Weitertransportieren von flexiblen, flächigen Erzeugnissen
ATE302154T1 (de) Verfahren und vorrichtung zum zusammenbringen und gemeinsamen weitertransportieren von flächigen gegenständen
DK0930137T3 (da) Fremgangsmåde og anordning til transport af en genstand
DE3583769D1 (de) Verfahren zum befoerdern und ausrichten von flachen gegenstaenden wie z.b. von halbleiterplaettchen und eine vorrichtung zum transportieren solcher gegenstaende.
DE3862516D1 (de) Vorrichtung zum positionstreuen transport von behaeltnissen.
DK1236660T3 (da) Apparat til ind- og/eller udslusning af transportgods
ATE149029T1 (de) Vorrichtung zum verbringen von fördergut, insbesondere von paketen, von einer ersten auf eine zweite förderbahn
ATE155434T1 (de) Fördervorrichtung
ATE271507T1 (de) Vorrichtung zum transport von gegenständen, insbesondere zigarettengruppen
ATE310691T1 (de) Vorrichtung zum fördern, heben uns sortieren von gegenständen
ATE86217T1 (de) Vorrichtung zum foerdern und vereinzeln von gegenstaenden.
ATE309164T1 (de) Einrichtung zum transportieren von gegenständen
DE29718929U1 (de) Vorrichtung zum Transportieren von Gegenständen zwischen zwei Transportriemen
DE60107562D1 (de) Vorrichtung und verfahren zum fördern von flaschen