DE911878C - Magnetische Elektronenlinse, insbesondere fuer Elektronenmikroskope - Google Patents
Magnetische Elektronenlinse, insbesondere fuer ElektronenmikroskopeInfo
- Publication number
- DE911878C DE911878C DEN5053A DEN0005053A DE911878C DE 911878 C DE911878 C DE 911878C DE N5053 A DEN5053 A DE N5053A DE N0005053 A DEN0005053 A DE N0005053A DE 911878 C DE911878 C DE 911878C
- Authority
- DE
- Germany
- Prior art keywords
- lens
- electron
- axis
- angle
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/58—Arrangements for focusing or reflecting ray or beam
- H01J29/64—Magnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL302299X | 1951-02-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE911878C true DE911878C (de) | 1954-05-20 |
Family
ID=19783341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DEN5053A Expired DE911878C (de) | 1951-02-10 | 1952-02-06 | Magnetische Elektronenlinse, insbesondere fuer Elektronenmikroskope |
Country Status (6)
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2872574A (en) * | 1956-04-12 | 1959-02-03 | Edwin M Mcmillan | Cloverleaf cyclotron |
GB846898A (en) * | 1956-10-25 | 1960-08-31 | Nat Res Dev | Improvements in or relating to electrion lenses |
BE564870A (US06534493-20030318-C00166.png) * | 1957-02-16 | 1900-01-01 | ||
NL225017A (US06534493-20030318-C00166.png) * | 1957-02-19 | |||
US2931903A (en) * | 1957-06-17 | 1960-04-05 | High Voltage Engineering Corp | Acceleration and application of high intensity electron beams for radiation processing |
US3360647A (en) * | 1964-09-14 | 1967-12-26 | Varian Associates | Electron accelerator with specific deflecting magnet structure and x-ray target |
CH393535A (de) * | 1961-09-26 | 1965-06-15 | Trueb Taeuber & Co Ag | Magnetanordnung zur Erzeugung von Magnetfeldern veränderbarer Feldstärke mit konstanter geometrischer Konfiguration |
US3243667A (en) * | 1962-04-09 | 1966-03-29 | High Voltage Engineering Corp | Non dispersive magnetic deflection apparatus and method |
GB1074625A (en) * | 1963-04-24 | 1967-07-05 | Ass Elect Ind | Improvements relating to magnetic spectrometers |
US3379911A (en) * | 1965-06-11 | 1968-04-23 | High Voltage Engineering Corp | Particle accelerator provided with an adjustable 270deg. non-dispersive magnetic charged-particle beam bender |
US3516037A (en) * | 1967-12-05 | 1970-06-02 | High Voltage Engineering Corp | Nondispersive magnetic deflection method |
FR2036373A5 (US06534493-20030318-C00166.png) * | 1969-03-12 | 1970-12-24 | Thomson Csf | |
FR2043973A5 (US06534493-20030318-C00166.png) * | 1969-05-05 | 1971-02-19 | Thomson Csf | |
US3659236A (en) * | 1970-08-05 | 1972-04-25 | Us Air Force | Inhomogeneity variable magnetic field magnet |
NL7012758A (US06534493-20030318-C00166.png) * | 1970-08-28 | 1972-03-01 | ||
US3655902A (en) * | 1970-10-19 | 1972-04-11 | Air Reduction | Heating system for electron beam furnace |
US3673528A (en) * | 1971-03-01 | 1972-06-27 | Gen Electric | Wide frequency response line scan magnetic deflector |
US4281251A (en) * | 1979-08-06 | 1981-07-28 | Radiation Dynamics, Inc. | Scanning beam deflection system and method |
JPS62295347A (ja) * | 1986-04-09 | 1987-12-22 | イクリプス・イオン・テクノロジ−・インコ−ポレイテツド | イオンビ−ム高速平行走査装置 |
US4980562A (en) * | 1986-04-09 | 1990-12-25 | Varian Associates, Inc. | Method and apparatus for high efficiency scanning in an ion implanter |
US4745281A (en) * | 1986-08-25 | 1988-05-17 | Eclipse Ion Technology, Inc. | Ion beam fast parallel scanning having dipole magnetic lens with nonuniform field |
US5053627A (en) * | 1990-03-01 | 1991-10-01 | Ibis Technology Corporation | Apparatus for ion implantation |
US5279723A (en) * | 1992-07-30 | 1994-01-18 | As Represented By The United States Department Of Energy | Filtered cathodic arc source |
US5319339A (en) * | 1993-03-08 | 1994-06-07 | The United States Of America As Represented By The Secretary Of The Army | Tubular structure having transverse magnetic field with gradient |
AU1067799A (en) * | 1997-10-07 | 1999-04-27 | Sti Optronics Inc. | Magnetic separator for linear dispersion and method for producing the same |
US6677599B2 (en) * | 2000-03-27 | 2004-01-13 | Applied Materials, Inc. | System and method for uniformly implanting a wafer with an ion beam |
AU2001270133A1 (en) | 2000-06-22 | 2002-01-02 | Proteros, Llc | Ion implantation uniformity correction using beam current control |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2636999A (en) * | 1953-04-28 | x x x x i | ||
DE639469C (de) * | 1934-12-20 | 1936-12-10 | Fernseh Akt Ges | Magnetisch-elektrisches Ablenksystem fuer Braunsche Roehren, insbesondere fuer Fernsehzwecke |
US2272165A (en) * | 1938-03-01 | 1942-02-03 | Univ Leland Stanford Junior | High frequency electrical apparatus |
US2260041A (en) * | 1939-03-22 | 1941-10-21 | Gen Electric | Electron microscope |
US2469964A (en) * | 1941-05-03 | 1949-05-10 | Bell Telephone Labor Inc | Electron discharge apparatus |
US2551544A (en) * | 1944-09-20 | 1951-05-01 | Alfred O C Nicr | Mass spectrometer |
US2457495A (en) * | 1944-12-18 | 1948-12-28 | Sylvania Electric Prod | Ultra high frequency tube |
US2447260A (en) * | 1945-06-21 | 1948-08-17 | Research Corp | Electron microspectroscope |
US2429558A (en) * | 1945-08-24 | 1947-10-21 | Research Corp | Electron beam monochromator |
US2435386A (en) * | 1946-07-27 | 1948-02-03 | Rca Corp | Electron diffraction camera |
US2533687A (en) * | 1949-05-27 | 1950-12-12 | Quam Nichols Company | Magnetic focusing device |
-
0
- BE BE509097D patent/BE509097A/xx unknown
-
1952
- 1952-01-14 US US266298A patent/US2777958A/en not_active Expired - Lifetime
- 1952-02-06 DE DEN5053A patent/DE911878C/de not_active Expired
- 1952-02-07 GB GB3254/52A patent/GB753562A/en not_active Expired
- 1952-02-08 FR FR1058851D patent/FR1058851A/fr not_active Expired
- 1952-02-08 CH CH302299D patent/CH302299A/de unknown
Also Published As
Publication number | Publication date |
---|---|
US2777958A (en) | 1957-01-15 |
CH302299A (de) | 1954-10-15 |
FR1058851A (fr) | 1954-03-19 |
GB753562A (en) | 1956-07-25 |
BE509097A (US06534493-20030318-C00166.png) |
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