DE8902607U1 - Vorrichtung an einer Oxidations- oder Diffusions-Ofenanlage - Google Patents
Vorrichtung an einer Oxidations- oder Diffusions-OfenanlageInfo
- Publication number
- DE8902607U1 DE8902607U1 DE8902607U DE8902607U DE8902607U1 DE 8902607 U1 DE8902607 U1 DE 8902607U1 DE 8902607 U DE8902607 U DE 8902607U DE 8902607 U DE8902607 U DE 8902607U DE 8902607 U1 DE8902607 U1 DE 8902607U1
- Authority
- DE
- Germany
- Prior art keywords
- axis
- paddle
- igr
- holder
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003647 oxidation Effects 0.000 title claims description 6
- 238000007254 oxidation reaction Methods 0.000 title claims description 6
- 238000009792 diffusion process Methods 0.000 title claims description 5
- 235000012431 wafers Nutrition 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 7
- 244000309464 bull Species 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 230000000284 resting effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
- C30B31/103—Mechanisms for moving either the charge or heater
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/14—Substrate holders or susceptors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Solid Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE8902607U DE8902607U1 (de) | 1989-03-04 | 1989-03-04 | Vorrichtung an einer Oxidations- oder Diffusions-Ofenanlage |
PCT/DE1990/000156 WO1990010305A1 (de) | 1989-03-04 | 1990-03-05 | Vorrichtung an einer oxydations- oder diffusions-ofenanlage |
EP19900904235 EP0480931A1 (de) | 1989-03-04 | 1990-03-05 | Vorrichtung an einer oxydations- oder diffusions-ofenanlage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE8902607U DE8902607U1 (de) | 1989-03-04 | 1989-03-04 | Vorrichtung an einer Oxidations- oder Diffusions-Ofenanlage |
Publications (1)
Publication Number | Publication Date |
---|---|
DE8902607U1 true DE8902607U1 (de) | 1989-06-22 |
Family
ID=6836681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8902607U Expired DE8902607U1 (de) | 1989-03-04 | 1989-03-04 | Vorrichtung an einer Oxidations- oder Diffusions-Ofenanlage |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0480931A1 (no) |
DE (1) | DE8902607U1 (no) |
WO (1) | WO1990010305A1 (no) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110164805B (zh) * | 2019-06-27 | 2024-07-30 | 通威太阳能(安徽)有限公司 | 一种扩散炉设备保护隔板 |
CN116331797B (zh) * | 2023-05-25 | 2023-08-01 | 山东恒信基塑业股份有限公司 | 一种载物塑料托盘上下翻转机构 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3744650A (en) * | 1971-10-26 | 1973-07-10 | Semiconductor Elect Memories | Boat mover for semiconductor fusion process |
DE8302957U1 (de) * | 1983-08-04 | Helmut Seier GmbH, 7760 Radolfszell | Vorrichtung zur Hitzebehandlung von Halbleitersubstraten und dergleichen | |
EP0158900A2 (de) * | 1984-04-19 | 1985-10-23 | Heraeus Quarzglas GmbH | Anlage zum automatischen Beschicken einer Ofenanordnung mit Halbleiterscheiben |
US4624638A (en) * | 1984-11-29 | 1986-11-25 | Btu Engineering Corporation | CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly |
DE3539981C1 (de) * | 1985-11-11 | 1987-06-11 | Telog Systems Gmbh | Verfahren und Vorrichtung zur Behandlung von Halbleitermaterialien |
GB2184175A (en) * | 1985-09-03 | 1987-06-17 | Cleon R Yates | Total encapsulated low pressure door closure apparatus for a silicon chip process tube |
US4692115A (en) * | 1985-04-03 | 1987-09-08 | Thermco Systems, Inc. | Semiconductor wafer furnace door |
US4695706A (en) * | 1983-12-28 | 1987-09-22 | Denkoh Co. Ltd. | Vertical furnace for heat-treating semiconductor |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS587820A (ja) * | 1981-07-07 | 1983-01-17 | Toshiba Corp | 拡散炉におけるチユ−ブ入口開閉装置 |
EP0093504B1 (en) * | 1982-04-29 | 1986-10-15 | Heraeus Quarzschmelze Gmbh | Apparatus for introducing silicon wafers in magazines into a furnace |
US4630379A (en) * | 1983-09-02 | 1986-12-23 | Chart Industries Limited | Laser gauging system and component parts therefor |
US4671726A (en) * | 1984-11-07 | 1987-06-09 | Breed Corporation | Cantilevered soft landing boat loader for semiconductor processing furnaces |
US4767251A (en) * | 1986-05-06 | 1988-08-30 | Amtech Systems, Inc. | Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes |
-
1989
- 1989-03-04 DE DE8902607U patent/DE8902607U1/de not_active Expired
-
1990
- 1990-03-05 WO PCT/DE1990/000156 patent/WO1990010305A1/de not_active Application Discontinuation
- 1990-03-05 EP EP19900904235 patent/EP0480931A1/de not_active Withdrawn
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE8302957U1 (de) * | 1983-08-04 | Helmut Seier GmbH, 7760 Radolfszell | Vorrichtung zur Hitzebehandlung von Halbleitersubstraten und dergleichen | |
US3744650A (en) * | 1971-10-26 | 1973-07-10 | Semiconductor Elect Memories | Boat mover for semiconductor fusion process |
US4695706A (en) * | 1983-12-28 | 1987-09-22 | Denkoh Co. Ltd. | Vertical furnace for heat-treating semiconductor |
EP0158900A2 (de) * | 1984-04-19 | 1985-10-23 | Heraeus Quarzglas GmbH | Anlage zum automatischen Beschicken einer Ofenanordnung mit Halbleiterscheiben |
US4624638A (en) * | 1984-11-29 | 1986-11-25 | Btu Engineering Corporation | CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly |
US4692115A (en) * | 1985-04-03 | 1987-09-08 | Thermco Systems, Inc. | Semiconductor wafer furnace door |
GB2184175A (en) * | 1985-09-03 | 1987-06-17 | Cleon R Yates | Total encapsulated low pressure door closure apparatus for a silicon chip process tube |
DE3539981C1 (de) * | 1985-11-11 | 1987-06-11 | Telog Systems Gmbh | Verfahren und Vorrichtung zur Behandlung von Halbleitermaterialien |
Non-Patent Citations (1)
Title |
---|
US-Z: Oven Loading and unloading device. In: IBM Technical Disclosure Bulletin, Vol.31, No.2, July 1988, S.449 * |
Also Published As
Publication number | Publication date |
---|---|
WO1990010305A1 (de) | 1990-09-07 |
EP0480931A1 (de) | 1992-04-22 |
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