DE69943094D1 - Verfahren zur behandlung eines substrats - Google Patents
Verfahren zur behandlung eines substratsInfo
- Publication number
- DE69943094D1 DE69943094D1 DE69943094T DE69943094T DE69943094D1 DE 69943094 D1 DE69943094 D1 DE 69943094D1 DE 69943094 T DE69943094 T DE 69943094T DE 69943094 T DE69943094 T DE 69943094T DE 69943094 D1 DE69943094 D1 DE 69943094D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- gas
- binder phase
- treating
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0236—Pretreatment of the material to be coated by cleaning or etching by etching with a reactive gas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/12—Gaseous compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Drying Of Semiconductors (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US1999/013569 WO2000076783A1 (en) | 1999-06-16 | 1999-06-16 | Substrate treatment method |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69943094D1 true DE69943094D1 (de) | 2011-02-10 |
Family
ID=22272982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69943094T Expired - Lifetime DE69943094D1 (de) | 1999-06-16 | 1999-06-16 | Verfahren zur behandlung eines substrats |
Country Status (12)
Country | Link |
---|---|
EP (1) | EP1192050B1 (de) |
JP (1) | JP4824232B2 (de) |
KR (1) | KR100627934B1 (de) |
CN (1) | CN1186213C (de) |
AT (1) | ATE493279T1 (de) |
AU (1) | AU761003B2 (de) |
DE (1) | DE69943094D1 (de) |
DK (1) | DK1192050T3 (de) |
ES (1) | ES2385998T3 (de) |
PT (1) | PT1192050E (de) |
TW (1) | TW567234B (de) |
WO (1) | WO2000076783A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6635340B2 (ja) * | 2016-08-24 | 2020-01-22 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
CN108677195B (zh) * | 2018-05-09 | 2020-07-24 | 深圳市长盈精密技术股份有限公司 | 粘胶金属的脱胶方法 |
CN109518139B (zh) * | 2018-12-13 | 2021-02-26 | 北京金轮坤天特种机械有限公司 | 一种钛火阻燃涂层及其制备方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4615763A (en) * | 1985-01-02 | 1986-10-07 | International Business Machines Corporation | Roughening surface of a substrate |
US5419927A (en) * | 1988-09-26 | 1995-05-30 | Chromalloy Gas Turbine Corporation | Process for coating fiber reinforced ceramic composites |
JPH0288782A (ja) * | 1988-09-27 | 1990-03-28 | Hitachi Ltd | ダイヤモンドコーテイング部材の製造法 |
SE9101865D0 (sv) * | 1991-06-17 | 1991-06-17 | Sandvik Ab | Titanbaserad karbonitridlegering med slitstarkt ytskikt |
AT400041B (de) * | 1993-03-26 | 1995-09-25 | Plansee Tizit Gmbh | Hartmetall-substrat mit diamantschicht hoher haftfestigkeit |
JP3417986B2 (ja) * | 1993-10-07 | 2003-06-16 | 東芝タンガロイ株式会社 | 付着性に優れた被覆物体の製造方法 |
JPH07243064A (ja) * | 1994-01-03 | 1995-09-19 | Xerox Corp | 基板清掃方法 |
US5560839A (en) * | 1994-06-27 | 1996-10-01 | Valenite Inc. | Methods of preparing cemented metal carbide substrates for deposition of adherent diamond coatings and products made therefrom |
US5635256A (en) * | 1994-08-11 | 1997-06-03 | St. Gobain/Norton Industrial Ceramics Corporation | Method of making a diamond-coated composite body |
US5891522A (en) * | 1995-05-24 | 1999-04-06 | Saint-Gobain Industrial Ceramics, Inc. | Composite article with adherent CVD diamond coating and method of making |
US5700518A (en) * | 1996-04-26 | 1997-12-23 | Korea Institute Of Science And Technology | Fabrication method for diamond-coated cemented carbide cutting tool |
JPH11140623A (ja) * | 1997-11-12 | 1999-05-25 | Hitachi Tool Eng Ltd | 被覆硬質合金の製造方法 |
-
1999
- 1999-06-16 PT PT99928707T patent/PT1192050E/pt unknown
- 1999-06-16 ES ES99928707T patent/ES2385998T3/es not_active Expired - Lifetime
- 1999-06-16 WO PCT/US1999/013569 patent/WO2000076783A1/en active IP Right Grant
- 1999-06-16 CN CNB998072613A patent/CN1186213C/zh not_active Expired - Fee Related
- 1999-06-16 AU AU45708/99A patent/AU761003B2/en not_active Ceased
- 1999-06-16 AT AT99928707T patent/ATE493279T1/de active
- 1999-06-16 EP EP99928707A patent/EP1192050B1/de not_active Expired - Lifetime
- 1999-06-16 JP JP2001503268A patent/JP4824232B2/ja not_active Expired - Fee Related
- 1999-06-16 KR KR1020017007247A patent/KR100627934B1/ko not_active IP Right Cessation
- 1999-06-16 DE DE69943094T patent/DE69943094D1/de not_active Expired - Lifetime
- 1999-06-16 DK DK99928707.1T patent/DK1192050T3/da active
-
2000
- 2000-12-27 TW TW089128084A patent/TW567234B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20010108012A (ko) | 2001-12-07 |
JP4824232B2 (ja) | 2011-11-30 |
DK1192050T3 (da) | 2011-03-14 |
EP1192050B1 (de) | 2010-12-29 |
CN1186213C (zh) | 2005-01-26 |
TW567234B (en) | 2003-12-21 |
PT1192050E (pt) | 2011-02-11 |
WO2000076783A1 (en) | 2000-12-21 |
ATE493279T1 (de) | 2011-01-15 |
EP1192050A1 (de) | 2002-04-03 |
EP1192050A4 (de) | 2006-12-06 |
AU761003B2 (en) | 2003-05-29 |
CN1318015A (zh) | 2001-10-17 |
JP2003522290A (ja) | 2003-07-22 |
KR100627934B1 (ko) | 2006-09-22 |
ES2385998T3 (es) | 2012-08-07 |
AU4570899A (en) | 2001-01-02 |
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