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Application filed by Tdy Ind IncfiledCriticalTdy Ind Inc
Priority to MYPI20005815priorityCriticalpatent/MY127988A/en
Publication of MY127988ApublicationCriticalpatent/MY127988A/en
METHOD FOR REMOVING A PORTION OF THE BINDER PHASE FROM THE SURFACE OF A SUBSTRATE THAT IS COMPOSED OF PARTICLES OF AT LEAST A FIRST PHASE JOINED TOGETHER BY THE BINDER PHASE, AND WHEREIN THE SURFACE IS ETHED BY CONTACTING IT WITH A GAS FLOW OF AN ETCHANT GAS AND A SECOND GAS.THE SECOND GAS IS ONE OR MORE GASES THAT WILL NOT REACT WITH THE SUBSTRATE OR THE REMOVED BINDER PHASE AND WILL NOT ALTER OXIDATION STATE OF THE SUBSTRATE DURING ETCHING.(FIG 1)