MY127988A - Substrate treatment method - Google Patents

Substrate treatment method

Info

Publication number
MY127988A
MY127988A MYPI20005815A MY127988A MY 127988 A MY127988 A MY 127988A MY PI20005815 A MYPI20005815 A MY PI20005815A MY 127988 A MY127988 A MY 127988A
Authority
MY
Malaysia
Prior art keywords
gas
substrate
treatment method
substrate treatment
binder phase
Prior art date
Application number
Inventor
Roy V Leverenz
Bost John
Original Assignee
Tdy Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tdy Ind Inc filed Critical Tdy Ind Inc
Priority to MYPI20005815 priority Critical patent/MY127988A/en
Publication of MY127988A publication Critical patent/MY127988A/en

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

METHOD FOR REMOVING A PORTION OF THE BINDER PHASE FROM THE SURFACE OF A SUBSTRATE THAT IS COMPOSED OF PARTICLES OF AT LEAST A FIRST PHASE JOINED TOGETHER BY THE BINDER PHASE, AND WHEREIN THE SURFACE IS ETHED BY CONTACTING IT WITH A GAS FLOW OF AN ETCHANT GAS AND A SECOND GAS.THE SECOND GAS IS ONE OR MORE GASES THAT WILL NOT REACT WITH THE SUBSTRATE OR THE REMOVED BINDER PHASE AND WILL NOT ALTER OXIDATION STATE OF THE SUBSTRATE DURING ETCHING.(FIG 1)
MYPI20005815 2000-12-11 2000-12-11 Substrate treatment method MY127988A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI20005815 MY127988A (en) 2000-12-11 2000-12-11 Substrate treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI20005815 MY127988A (en) 2000-12-11 2000-12-11 Substrate treatment method

Publications (1)

Publication Number Publication Date
MY127988A true MY127988A (en) 2007-01-31

Family

ID=47278564

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20005815 MY127988A (en) 2000-12-11 2000-12-11 Substrate treatment method

Country Status (1)

Country Link
MY (1) MY127988A (en)

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